Pedestal for a substrate processing system

Description

[0001] FIG. 1 is a perspective view of a pedestal for a substrate processing system;

[0002] FIG. 2 shows the perspective view with cross-sectional indicators indicating cross-sections taken from a specific depth;

[0003] FIG. 3 is a top plan view thereof;

[0004] FIG. 4 is a cross-sectional view taken along line 4-4 in FIGS. 2 and 3;

[0005] FIG. 5 is a cross-sectional view taken along line 5-5 in FIGS. 2 and 3;

[0006] FIG. 6 is a cross-sectional view along line 6-6 in FIGS. 2 and 3; and,

[0007] FIG. 7 is an enlarged fragment of area “7” in FIG. 3.

[0008] The dash-dash broken lines in the drawings illustrate portions of the article that form no part of the claimed design.

[0009] The dash-dot broken lines in the drawings indicate the cross-sections and form no part of the claimed design.

[0010] The dot-dot-dash broken lines in the drawings indicate an enlarged view and form no part of the claimed design.

[0011] The characteristic feature of the design resides in one of the shorter radial grooves being not centered between longer radial grooves on either side.

Claims

The ornamental design for a pedestal for a substrate processing system as shown and described.

Images