Patterned heater pedestal with groove extensions

USD1066620SActive Publication Date: 2025-03-11APPLIED MATERIALS INC

Patent Information

Application Number
US29/770566
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Filing Date
2021-02-12
Publication Date
2025-03-11
Estimated Expiration
2040-03-11

Smart Images

  • Figure USD1066620-D00000_ABST
    Figure USD1066620-D00000_ABST
Patent Text Reader
Need to check novelty before this filing date? Find Prior Art

Description

[0001] FIG. 1 is a top perspective view of a patterned heater pedestal with groove extensions showing my new design;

[0002] FIG. 2 is a bottom view thereof;

[0003] FIG. 3 is a front view thereof, the back view being the mirror image thereof;

[0004] FIG. 4 is a side view thereof, the opposite side view being the mirror image thereof;

[0005] FIG. 5 is a top plan view thereof;

[0006] FIG. 6 is a bottom plan view thereof;

[0007] FIG. 7 is an enlarged detail view of area 7 circumscribed in FIG. 1;

[0008] FIG. 8 is an enlarged detail view of area 8 circumscribed in FIG. 1; and,

[0009] FIG. 9 is an enlarged detail view of area 9 circumscribed in FIG. 8.

[0010] The broken lines depict portions of the patterned heater pedestal with groove extensions that form no part of the claim. The dash-dot-dash broken lines denote the boundaries of the detail areas and form no part of the claimed design.

Claims

The ornamental design for a patterned heater pedestal with groove extensions as shown and described.

Citation Information

Patent Citations

  • Shaft portion or an apparatus for holding and heating semiconductor eafers or the like

    TWD134731S

  • Patterned heater pedestal

    TWD184695S

  • Heater block

    TWD193238S

  • Pedestal covers

    US8851463B2

  • Electrostatic chuck

    USD708651S

Cited By

  • Radome extension bulkhead assembly

    USD1148752S