Susceptor

USD1067204SActive Publication Date: 2025-03-18ASM IP HLDG BV

Patent Information

Application Number
US29/840695
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Filing Date
2022-05-31
Publication Date
2025-03-18
Estimated Expiration
2040-03-18

Smart Images

  • Figure USD1067204-D00000_ABST
    Figure USD1067204-D00000_ABST
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Description

[0001] FIG. 1 is a front perspective view of a susceptor, showing our new design;

[0002] FIG. 2 is a bottom perspective view thereof;

[0003] FIG. 3 is right side view thereof;

[0004] FIG. 4 is a left side view thereof;

[0005] FIG. 5 is front view thereof;

[0006] FIG. 6 is back view thereof;

[0007] FIG. 7 is a top view thereof; and,

[0008] FIG. 8 is a bottom view thereof.

Claims

The ornamental design for a susceptor, as shown and described.

Citation Information

Patent Citations

  • Gas distribution plate for a semiconductor processing chamber

    TWD217767S

  • Wafer susceptor for forming a semiconductor device and method therefor

    US10068791B2

  • Substrate processing system having susceptorless substrate support with enhanced substrate heating control

    US10376916B2

  • Susceptor plate for high temperature heat treatment

    US20040040632A1

  • Susceptor ring

    US20100031884A1

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