Susceptor
USD1067204SActive Publication Date: 2025-03-18ASM IP HLDG BV
Patent Information
- Application Number
- US29/840695
- Authority / Receiving Office
- US · United States
- Patent Type
- Designs(United States)
- Current Assignee / Owner
- Filing Date
- 2022-05-31
- Publication Date
- 2025-03-18
- Estimated Expiration
- 2040-03-18
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Figure USD1067204-D00000_ABST
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Description
[0001] FIG. 1 is a front perspective view of a susceptor, showing our new design;
[0002] FIG. 2 is a bottom perspective view thereof;
[0003] FIG. 3 is right side view thereof;
[0004] FIG. 4 is a left side view thereof;
[0005] FIG. 5 is front view thereof;
[0006] FIG. 6 is back view thereof;
[0007] FIG. 7 is a top view thereof; and,
[0008] FIG. 8 is a bottom view thereof.
Claims
The ornamental design for a susceptor, as shown and described.
Citation Information
Patent Citations
Gas distribution plate for a semiconductor processing chamber
TWD217767S
Wafer susceptor for forming a semiconductor device and method therefor
US10068791B2
Substrate processing system having susceptorless substrate support with enhanced substrate heating control
US10376916B2
Susceptor plate for high temperature heat treatment
US20040040632A1
Susceptor ring
US20100031884A1
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