Gas distribution plate

USD1071103SActive Publication Date: 2025-04-15APPLIED MATERIALS INC
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Patent Information

Application Number
US29/834288
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Filing Date
2022-04-11
Publication Date
2025-04-15
Estimated Expiration
2040-04-15

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Description

[0001] FIG. 1 is a top-front isometric view of a gas distribution plate according to a first embodiment;

[0002] FIG. 2 is a top-rear isometric view of the gas distribution plate of FIG. 1;

[0003] FIG. 3 is a front view of the gas distribution plate of FIG. 1;

[0004] FIG. 4 is a rear view of the gas distribution plate of FIG. 1;

[0005] FIG. 5 is a left side view of the gas distribution plate of FIG. 1;

[0006] FIG. 6 is a right side view of the gas distribution plate of FIG. 1;

[0007] FIG. 7 is a top view of the gas distribution plate of FIG. 1;

[0008] FIG. 8 is a bottom view of the gas distribution plate of FIG. 1;

[0009] FIG. 9 is a top-rear isometric view of a gas distribution plate according to a second embodiment, the front, left, right, top and bottom views are the same as the first embodiment; and,

[0010] FIG. 10 is a rear view of the gas distribution plate of FIG. 9.

[0011] Portions of the article shown in FIGS. 9 and 10 with stippled shading have a different surface texture or appearance.

Claims

The ornamental design for a gas distribution plate, substantially as shown and described.

Citation Information

Patent Citations

  • Films for semiconductor device manufacturing

    CN306659495S

  • circuit board holding chuck

    JP1436076S

  • Electrostatic Chuck for Semiconductor Manufacturing Device

    KR301083296S

  • Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate

    TW201610220A

  • Two zone flow cooling plate design with concentric or spiral channel for efficient gas distribution assembly cooling

    TW201834111A

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