Separator of substrate processing apparatus

USD1086086SActive Publication Date: 2025-07-29KOKUSAI DENKI KK
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Patent Information

Application Number
US29/832777
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Priority Date
2021-10-01
Filing Date
2022-03-30
Publication Date
2025-07-29
Estimated Expiration
2040-07-29

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Description

[0001] FIG. 1 is a front, top and right side perspective view of a separator of substrate processing apparatus showing our new design;

[0002] FIG. 2 is a front elevational view thereof;

[0003] FIG. 3 is a right side elevational view thereof;

[0004] FIG. 4 is a left side elevational view thereof;

[0005] FIG. 5 is a rear elevational view thereof;

[0006] FIG. 6 is a top plan view thereof;

[0007] FIG. 7 is a bottom plan view thereof;

[0008] FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2 thereof; and,

[0009] FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 2.

Claims

The ornamental design for a separator of substrate processing apparatus, as shown and described.

Citation Information

Patent Citations

  • Substrate processing apparatus and method for assembling tube assembly

    US10840118B2

  • Substrate processing apparatus and method for manufacturing semiconductor device

    US20090197424A1

  • Substrate processing apparatus

    US20170073813A1

  • Heating element, substrate processing apparatus, and method of manufacturing semiconductor device

    US20200152490A1

  • Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

    US20210207268A1

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