CMP (chemical mechanical planarization) retaining ring

Description

[0001] FIG. 1 is a front perspective view of a CMP (chemical mechanical planarization) retaining ring showing our new design;

[0002] FIG. 2 is a front view thereof;

[0003] FIG. 3 is a rear view thereof;

[0004] FIG. 4 is a left-side view thereof;

[0005] FIG. 5 is a right-side view thereof;

[0006] FIG. 6 is a top plan view thereof;

[0007] FIG. 7 is a bottom plan view thereof;

[0008] FIG. 8 is a bottom rear perspective view thereof;

[0009] FIG. 9 is an enlarged view of the delineated portion 9 in FIG. 1;

[0010] FIG. 10 is an enlarged view of the delineated portion 10 in FIG. 2;

[0011] FIG. 11 is an enlarged view of the delineated portion 11 in FIG. 8;

[0012] FIG. 12 is a cross sectional view taken through the line 12-12′ of FIG. 6; and,

[0013] FIG. 13 is an enlarged view of the delineated portion 13 in FIG. 12.

[0014] The evenly dashed broken lines on the CMP (chemical mechanical planarization) retaining ring depict portions of the retainer ring that form no part of the claimed design. The dot-dash broken lines illustrate boundaries of enlarged views that form no part of the claimed design.

Claims

The ornamental design for a CMP (chemical mechanical planarization) retaining ring as shown and described.

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