Manifold for supplying coolant to components of substrate processing systems

Description

[0001] FIG. 1 is a perspective view of a manifold for supplying coolant to components of substrate processing systems;

[0002] FIG. 2 is a front view of the manifold shown in FIG. 1;

[0003] FIG. 3 is a back view of the manifold shown in FIG. 1;

[0004] FIG. 4 is a top view of the manifold shown in FIG. 1;

[0005] FIG. 5 is a bottom view of the manifold shown in FIG. 1;

[0006] FIG. 6 is a left side view of the manifold shown in FIG. 1; and,

[0007] FIG. 7 is a right side view of the manifold shown in FIG. 1.

[0008] The dash-dash broken lines in the drawings illustrate portions of the article that form no part of the claimed design.

Claims

The ornamental design for a manifold for supplying coolant to components of substrate processing systems as shown and described.

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