Susceptor cover

USD1095472SActive Publication Date: 2025-09-30NUFLARE TECH INC
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Patent Information

Application Number
US29/888131
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Priority Date
2022-10-20
Filing Date
2023-03-28
Publication Date
2025-09-30
Estimated Expiration
2040-09-30

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Description

[0001] FIG. 1 is a perspective view of a susceptor showing our new design;

[0002] FIG. 2 is a front elevational view thereof;

[0003] FIG. 3 is a rear elevational view thereof;

[0004] FIG. 4 is a left side elevational view thereof;

[0005] FIG. 5 is a right side elevational view thereof;

[0006] FIG. 6 is a top plan view thereof;

[0007] FIG. 7 is a bottom plan view thereof; and,

[0008] FIG. 8 is a cross sectional view taken along lines 8-8 in FIG. 2.

Claims

The ornamental design for a susceptor cover as shown and described.

Citation Information

Patent Citations

  • Susceptor Ring

    JP1711119S

  • Susceptor Cover

    JP1711120S

  • Chamber component having grooved surface with depressions

    US20050284372A1

  • System and method for suppression of wafer temperature drift in cold-wall cvd systems

    US20060057826A1

  • Minimal contact edge ring for rapid thermal processing

    US20140113458A1