Cover base for susceptors

USD1096676SActive Publication Date: 2025-10-07NUFLARE TECH INC
View PDF 109 Cites 3 Cited by

Patent Information

Application Number
US29/888151
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Priority Date
2022-10-20
Filing Date
2023-03-28
Publication Date
2025-10-07
Estimated Expiration
2040-10-07

Smart Images

  • Figure USD1096676-D00000_ABST
    Figure USD1096676-D00000_ABST
Patent Text Reader
Need to check novelty before this filing date? Find Prior Art

Description

[0001] FIG. 1 is a perspective view of a cover base for susceptors showing our new design

[0002] FIG. 2 is a front elevational view thereof,

[0003] FIG. 3 is a rear elevational view thereof,

[0004] FIG. 4 is a left side elevational view thereof,

[0005] FIG. 5 is a right side elevational view thereof,

[0006] FIG. 6 is a top plan view thereof,

[0007] FIG. 7 is a bottom plan view thereof; and,

[0008] FIG. 8 is an enlarged partial cross-sectional view taken along line 8-8 in FIG. 2.

Claims

The ornamental design for a cover base for susceptors as shown and described.

Citation Information

Patent Citations

  • Susceptor Ring

    JP1711119S

  • Susceptor Cover

    JP1711120S

  • Support ring

    CN307522213S

  • Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer

    US11380621B2

  • Member for semiconductor manufacturing apparatus

    US11469118B2

Cited By

  • Hydraulic cylinder buffer back-up ring

    USD1139859S

  • Sterilizer gasket

    USD1143082S

  • Cover ring for use in a semiconductor processing chamber

    USD1145726S