Substrate processing apparatus

Description

[0001] FIG. 1 is a top, front, and left side perspective view of a substrate processing apparatus, showing our new design;

[0002] FIG. 2 is a front view thereof;

[0003] FIG. 3 is a rear view thereof;

[0004] FIG. 4 is a top view thereof;

[0005] FIG. 5 is a bottom view thereof;

[0006] FIG. 6 is a right side view thereof;

[0007] FIG. 7 is a left side view thereof;

[0008] FIG. 8 is a cross-sectional perspective view taken along line I-I of FIG. 2, line II-II of FIG. 4, and lines III-III and IV-IV of FIG. 7, with an internal mechanism being omitted;

[0009] FIG. 9 is a cross-sectional perspective view taken along line I-I of FIG. 2, line II-II of FIG. 4, and lines III-III and IV-IV of FIG. 7, with a lid closed, and with the internal mechanism being omitted; and,

[0010] FIG. 10 is a cross-sectional view taken along line III-III of FIG. 7, with the internal mechanism being omitted.

[0011] The dashed broken lines in the figures show portions of the substrate processing apparatus that form no part of the claimed design. The dot-dashed broken lines in the figures represent boundaries and form no part of the claimed design.

Claims

The ornamental design for a substrate processing apparatus, as shown and described.

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