Substrate calibration fixture

USD1100698SActive Publication Date: 2025-11-04ASM IP HLDG BV
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Patent Information

Application Number
US29/927453
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Filing Date
2024-02-05
Publication Date
2025-11-04
Estimated Expiration
2040-11-04

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Description

[0001] FIG. 1 is a top perspective view of a substrate calibration fixture, showing our new design;

[0002] FIG. 2 is a bottom perspective view thereof;

[0003] FIG. 3 is a front view thereof;

[0004] FIG. 4 is a back view thereof;

[0005] FIG. 5 is a right side view thereof;

[0006] FIG. 6 is a left side view thereof;

[0007] FIG. 7 is a top view thereof;

[0008] FIG. 8 is a bottom view thereof;

[0009] FIG. 9 is a detailed view taken from FIG. 2; and,

[0010] FIG. 10 is a cross-sectional view taken from FIG. 9.

[0011] The dash-dot-dash broken lines illustrate the bounds of the portions shown enlarged in the drawings and form no part of the claimed design.

Claims

The ornamental design of a substrate calibration fixture as shown and described.

Citation Information

Patent Citations

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    US12074400B1

  • Semiconductor processing equipment

    US12374579B1

  • Wafer aligner

    US20040005212A1

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    US20040047720A1

  • Wafer support pedestal with wafer Anti-slip and Anti-rotation features

    US20170170051A1