Process chamber shower head
Patent Information
- Application Number
- US29/937228
- Authority / Receiving Office
- US · United States
- Patent Type
- Designs(United States)
- Current Assignee / Owner
- Filing Date
- 2024-04-12
- Publication Date
- 2025-11-11
- Estimated Expiration
- 2040-11-11
Smart Images
Figure USD1101709-D00000_ABST
Description
[0001] FIG. 1 is a top, front, left side isometric view of a process chamber shower head, showing our new design.
[0002] FIG. 2 is a bottom, rear, right side isometric view thereof.
[0003] FIG. 3 is a left side elevation view thereof.
[0004] FIG. 4 is a right side elevation view thereof.
[0005] FIG. 5 is a front elevation view thereof.
[0006] FIG. 6 is a rear elevation view thereof.
[0007] FIG. 7 is a top plan view thereof.
[0008] FIG. 8 is a bottom plan view thereof.
[0009] FIG. 9 is an enlarged portion view taken from encircled portion, “FIG. 9,” in FIG. 8.
[0010] FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 7; and,
[0011] FIG. 11 is an enlarged portion view taken from encircled portion, “FIG. 11,” in FIG. 7.
[0012] The even dashed broken lines represent unclaimed environment and form no part of the claimed design. The dash-dot lines represent the boundary lines of the enlarged portion views of FIGS. 9 and 11 shown in FIGS. 7, 8, 9 and 11 and form no part of the claimed design.
Claims
The ornamental design for a process chamber shower head, as shown and described.
Citation Information
Patent Citations
Multiple-channel showerhead design and methods in manufacturing
US20220010431A1
Shower head of a wafer treatment apparatus having a gap controller
US20030010452A1
Shower plate for plasma processing apparatus and plasma processing apparatus
US20050258280A1
Plasma Reaction Apparatus Having Pre-Seasoned Showerheads and Methods for Manufacturing the Same
US20080216958A1
Multi-plenum showerhead with temperature control
US20140235069A1
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