Seal for chemical mechanical polishing device

Description

[0001] 1. Seal for chemical mechanical polishing device

[0002] 1.1 : Perspective

[0003] 1.2 : Front

[0004] 1.3 : Back

[0005] 1.4 : Top

[0006] 1.5 : Bottom

[0007] 1.6 : Right

[0008] 1.7 : Left

[0009] 1.8 : Cross sectional

[0010] 1.9 : Enlarged

[0011] 1.10 : Reference view

[0012] 1.11 : Enlarged

[0013] The article is a seal for a top ring of a chemical mechanical polishing device. The feature of the design resides in the shape and configuration of the article as shown in the reproductions. Reproduction 1.8 is an enlarged cross-sectional view taken along the line 1.8-1.8 in Reproduction 1.4. Reproduction 1.9 is an enlarged view of a portion 1.9 of the article in Reproduction 1.8. Reproduction 1.11 is an enlarged view of the encircled portion in Reproduction 1.1. The dashed broken lines shown in the reproductions illustrate environmental subject matter and form no part of the claimed design. The dot-dash broken lines shown in the reproductions represent boundaries that form no part of the claimed design. The two-dot-dash broken lines shown in the reproductions are for the purpose of encircling enlarged portions and form no part of the claimed design.

Claims

The ornamental design for a seal for chemical mechanical polishing device as shown and described.

Images