Processing chamber purge plate

USD1107669SActive Publication Date: 2025-12-30LAM RES CORP
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Patent Information

Application Number
US29/792965
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Filing Date
2022-05-02
Publication Date
2025-12-30
Estimated Expiration
2040-12-30

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Description

[0001] FIG. 1 is a top perspective view of a processing chamber purge plate, showing my new design;

[0002] FIG. 2 is a bottom perspective view thereof;

[0003] FIG. 3 is a right side view thereof;

[0004] FIG. 4 is a left side view thereof;

[0005] FIG. 5 is a back view thereof;

[0006] FIG. 6 is a front view of thereof;

[0007] FIG. 7 is a top view thereof; and,

[0008] FIG. 8 is a bottom view thereof.

[0009] The even dashed broken lines shown in the drawings represent portions of the processing chamber purge plate that form no part of the claimed design.

Claims

The ornamental design for a processing chamber purge plate, as shown and described.

Citation Information

Patent Citations

  • Wafer Holder Part

    TWD211239S

  • Ceramic gas distribution plate with embedded electrode

    US10217614B2

  • Baffle plate and showerhead assemblies and corresponding manufacturing method

    US10483092B2

  • Blocker plate for use in a substrate process chamber

    US10508339B2

  • Gas diffusion device and film-forming apparatus

    US10619240B2

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