Showerhead for a substrate processing system

Description

[0001] FIG. 1 is a top perspective view of a showerhead for a substrate processing system;

[0002] FIG. 2 illustrates left, right, front, and rear side views of the showerhead for the substrate processing system shown in FIG. 1;

[0003] FIG. 3 is a top view of the showerhead for the substrate processing system shown in FIG. 1;

[0004] FIG. 4 is a bottom view of the showerhead for the substrate processing system shown in FIG. 1; and,

[0005] FIG. 5 is an enlarged portion view of FIG. 4 showing gas through holes in dotted lines.

[0006] The dashed broken lines depict portions of the showerhead for a substrate processing system that form no part thereof.

Claims

The ornamental design for a showerhead for a substrate processing system as shown and described.

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