Filler block for substrate processing apparatus
USD1108381SActive Publication Date: 2026-01-06KOKUSAI DENKI KK
Patent Information
- Application Number
- US29/961389
- Authority / Receiving Office
- US · United States
- Patent Type
- Designs(United States)
- Current Assignee / Owner
- Priority Date
- 2024-03-08
- Filing Date
- 2024-09-05
- Publication Date
- 2026-01-06
- Estimated Expiration
- 2041-01-06
Smart Images
Figure USD1108381-D00000_ABST
Need to check novelty before this filing date? Find Prior Art
Description
[0001] FIG. 1 is a front, top and right side perspective view of a filler block for substrate processing apparatus showing my new design;
[0002] FIG. 2 is a front elevational view thereof;
[0003] FIG. 3 is a left side elevational view thereof;
[0004] FIG. 4 is a right side elevational view thereof;
[0005] FIG. 5 is a top plan view thereof;
[0006] FIG. 6 is a bottom plan view thereof;
[0007] FIG. 7 is a rear elevational view thereof; and,
[0008] FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.
Claims
The ornamental design for a filler block for substrate processing apparatus as shown and described.
Citation Information
Patent Citations
Substrate processing apparatus
US11646184B2
Substrate processing method
US12020934B2
Recess filling method and substrate processing apparatus
US12374543B2
Chamber filler kit for plasma etch chamber useful for fast gas switching
US20130244440A1
Chamber filler kit for dielectric etch chamber
US20180005851A1