Process chamber mixer

USD1112376SActive Publication Date: 2026-02-10APPLIED MATERIALS INC
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Patent Information

Application Number
US29/924594
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Filing Date
2024-01-19
Publication Date
2026-02-10
Estimated Expiration
2041-02-10

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Description

[0001] FIG. 1 is a top isometric view of a process chamber mixer, showing our new design.

[0002] FIG. 2 is a bottom isometric view thereof.

[0003] FIG. 3 is a left side elevation view thereof.

[0004] FIG. 4 is a right side elevation view thereof.

[0005] FIG. 5 is a front elevation view thereof.

[0006] FIG. 6 is a rear elevation view thereof.

[0007] FIG. 7 is a top plan view thereof.

[0008] FIG. 8 is a bottom plan view thereof.

[0009] FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 7.

[0010] FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 7.

[0011] FIG. 11 is a cross-sectional view taken along line 11-11 in FIG. 3.

[0012] FIG. 12 is a cross-sectional view taken along line 12-12 in FIG. 3; and,

[0013] FIG. 13 is a cross-sectional view taken along line 13-13 in FIG. 3.

[0014] The broken lines shown in FIGS. 3 and 7 are included for the purpose of illustrating the boundary and direction of section views and forms no part of the claimed design.

Claims

The ornamental design for a process chamber mixer, as shown and described.

Citation Information

Patent Citations

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  • Atomic layer deposition chamber with multi inject

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  • Lids and lid assembly kits for atomic layer deposition chambers

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