Seal for chemical mechanical polishing device

USD1119829SActive Publication Date: 2026-03-24EBARA CORP
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Filing Date
2023-09-26
Publication Date
2026-03-24

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Description

[0001] 1. Seal for chemical mechanical polishing device

[0002] 1.1 : Perspective

[0003] 1.2 : Front

[0004] 1.3 : Back

[0005] 1.4 : Top

[0006] 1.5 : Bottom

[0007] 1.6 : Right

[0008] 1.7 : Left

[0009] 1.8 : Cross sectional

[0010] 1.9 : Enlarged

[0011] 1.10 : Reference view

[0012] The article is a seal for a top ring of a chemical mechanical polishing device. The feature of the design resides in the shape and configuration of the article as shown in the reproductions. Reproduction 1.8 is an enlarged cross-sectional view taken along the line 1.8-1.8 in Reproduction 1.4. Reproduction 1.9 is an enlarged view of a portion 1.9 of the article in Reproduction 1.8. The broken lines shown in Reproduction 1.10 illustrate environmental subject matter and form no part of the claimed design. Additionally, the dash-dot broken lines are for the purpose of illustrating the enlarged views and form no part of the claimed design.

Claims

The ornamental design for a seal for chemical mechanical polishing device as shown and described.

Citation Information

Patent Citations

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