Pedestal for a substrate processing system

Description

[0001] FIG. 1 is a top perspective view of a pedestal for a substrate processing system;

[0002] FIG. 2 is a bottom perspective view;

[0003] FIG. 3 is another top perspective view;

[0004] FIG. 4 is another bottom perspective view;

[0005] FIG. 5 is a top view;

[0006] FIG. 6 is a bottom view;

[0007] FIG. 7 is a front side view;

[0008] FIG. 8 is a back side view;

[0009] FIG. 9 is a left side view;

[0010] FIG. 10 is a right side view;

[0011] FIG. 11 is an enlarged view of area 11 shown in FIG. 3;

[0012] FIG. 12 is an enlarged view of area 12 shown in FIG. 5;

[0013] FIG. 13 is a perspective view of area 11 shown in FIG. 3;

[0014] FIG. 14 is an enlarged view of area 14 shown in FIG. 5; and,

[0015] FIG. 15 is a cross-sectional view taken along line 15 in FIG. 5.

[0016] The dash-dash broken lines in the drawings are for the purpose of illustrating portions of the article that form no part of the claimed design. The dash-dot broken lines define the enlarged views and form no part of the claimed design.

Claims

The ornamental design for a pedestal for a substrate processing system as shown and described.

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