Coating and developing apparatus

USD1154736SActive Publication Date: 2026-10-20TOKYO ELECTRON LTD
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Patent Information

Application Number
US29/984288
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Priority Date
2024-07-22
Filing Date
2025-01-14
Publication Date
2026-10-20
Estimated Expiration
2041-10-20

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Description

[0001] FIG. 1 is a front view of a coating and developing apparatus of the present invention;

[0002] FIG. 2 is a rear view thereof;

[0003] FIG. 3 is a top plan view thereof;

[0004] FIG. 4 is a right side view thereof;

[0005] FIG. 5 is a left side view thereof;

[0006] FIG. 6 is a rear, top and right perspective view thereof;

[0007] FIG. 7 is a rear, top and left perspective view thereof;

[0008] FIG. 8 is an enlarged view thereof defined by the lines 8-8 and 8′-8′ in FIG. 2; and,

[0009] FIG. 9 is an enlarged view thereof defined by the lines 9-9 and 9′-9′ in FIG. 7.

[0010] The bottom view forms no part of the claimed invention.

[0011] Broken lines show portions of a coating and developing apparatus that form no part of the claimed design.

Claims

The ornamental design for a coating and developing apparatus as shown and described.

Citation Information

Patent Citations

  • Coating and developing machine

    CN302279798S

  • Wafer glue developing machine

    CN304869517S

  • Coating and developing equipment

    CN307349878S

  • Coating machine (PE033-520)

    CN308298305S

  • Glue coating and developing equipment

    CN309021873S