Adjustable filters and methods for manufacturing adjustable filters

Abstract

The invention relates to a tunable filter and a method for constructing a tunable filter. The filter under the invention is a tunable filter on a gallium arsenide (GaAs) substrate for use in, for example, a 6 GHz RF Wi-Fi uplink, with a high-performance variable capacitor, a metal-insulator-metal (MIM) capacitor, and an integrated 3D magnetic inductor. The tunable filter comprises a super-sudden variable capacitor (variable capacitor) with a high capacitance adjustment ratio. The calibrated filter also includes a GaAs substrate in which a through-GaAs-via (TGV) is formed. A capacitive diode, along with a 3D capacitor and inductor, is formed in the conductive structure on the upper surface of the GaAs substrate. The lower conductive structure consists of the lower conductive part formed on the lower surface of the GaAs substrate. The TGVs provide electrical coupling between the lower and upper conductive structures. Adjustable filters can be integrated with radio frequency iron-end RFFE equipment.