SUCTION UNIT, SUCTION UNIT CONTROL METHOD, AND DISPLAY EQUIPMENT MANUFACTURING SYSTEM
Patent Information
- Authority / Receiving Office
- VN · VN
- Patent Type
- Applications
- Current Assignee / Owner
- SAMSUNG DISPLAY CO LTD
- Filing Date
- 2024-09-10
- Publication Date
- 2026-06-15
Smart Images
Figure VN1202602190_0
Abstract
Description
Suction unit, its control method, manufacturing system and manufacturing method of display device
[0001] The present invention relates to a suction unit, a control method thereof, a manufacturing system and a manufacturing method for a display device, and more particularly, to a suction unit including a suction unit capable of controlling fumes generated when a stage unit of a laser cutting equipment moves and laser cutting is performed, a control method thereof, a manufacturing system and a manufacturing method for a display device.
[0002] The importance of display devices is increasing with the development of multimedia. In response, various types of display devices are being used, such as organic light-emitting displays (OLEDs) and liquid crystal displays (LCDs).
[0003] The display panel that constitutes the display device is formed by cutting a cell-unit substrate formed from a mother substrate. During the cutting process, fine particles or fumes may be generated. These fine particles or fumes may be adsorbed to the pad portion and cause poor contact with the pad portion.
[0004] Recently, a manufacturing system and method for a display device that can effectively remove fumes that may be generated during the substrate cutting process have been developed.
[0005] For example, in Korean Patent Application No. 2020-0048601, a suction cup is formed around the panel to match the panel cutting shape of the display device, and the positions of the panel and the suction cup are fixed, and during laser cutting, fumes are removed through a suction port formed on the outside of the suction cup to match the cutting shape.
[0006] However, in such cases, when the stage on which the panel is installed moves, the distance between the laser cutting position and the suction port increases, resulting in a decrease in suction power and a problem in which the upper optical system becomes contaminated when the suction power decreases.
[0007] In addition, since the panel of the display device contains adhesive components, there was a problem that the fumes generated when cutting the panel also contained adhesive components, blocking the suction port and reducing suction performance.
[0008] Accordingly, the present invention has been devised to solve these problems, and the purpose of the present invention is to provide a manufacturing system and method for a display device that can effectively remove fumes that may be generated during a substrate cutting process.
[0009] The tasks of the present invention are not limited to the tasks mentioned above, and other technical tasks not mentioned will be clearly understood by those skilled in the art from the description below.
[0010] According to one embodiment of the present invention, a manufacturing system for a display device comprises: a main body having an upper and lower opening and an empty inner space so that a laser beam emitted through an optical system is irradiated onto a target substrate; an exhaust path formed between an upper surface of a lower plate of the main body, an inner surface of an external box forming the main body, and an outer surface of an inner cup surrounding a cutting line of the target substrate; a stage unit on which the target substrate is placed and which moves the cutting line of the target substrate with respect to the laser beam; a suction unit which moves the stage unit and suctions and removes fumes generated when the target substrate is irradiated with a laser beam; and a control unit which controls a setting value of the suction unit according to a moving speed of the stage unit and a moving direction of the fumes to prevent the fumes from leaking into the optical system or external equipment.
[0011] A method for manufacturing a display device according to one embodiment of the present invention is characterized in that the on-off operation time of the improved air blower is controlled in conjunction with the movement of the stage unit by interlocking an improved suction port having an expanded expansion hole to prevent accumulation of fumes generated from a target substrate to be processed by laser beam irradiation and a vortex forming portion to cause the fumes to circulate inside, and an improved air blower disposed between the suction port and an internal space where laser beam irradiation is performed to form an airflow toward the suction port.
[0012] According to another aspect of the present invention, a suction unit is characterized by including an improved suction port connected to an exhaust path, an improved air blower disposed between the improved suction port and the internal space at a lower part of a main body close to the improved suction port but having an internal space where a laser beam is irradiated, and forming an air current so that the fume generated when the target substrate is cut by the laser beam irradiation moves toward the improved suction port, and a control unit that controls the improved air blower so that the fume is sucked into the improved suction port according to the moving speed of the stage unit and the moving direction of the fume.
[0013] The above improved suction port may include an expansion hole formed openly across the inner cup and the outer box forming the main body, a guide portion inclined upwardly outward from the edge of the expansion hole, and a vortex forming portion extended from the guide portion to form a vortex for the fume sucked through the expansion hole by the negative pressure formed when the dust collecting unit connected to the exhaust path operates.
[0014] A suction unit control method according to another aspect of the present invention may include a step of simulating an airflow for an improved suction port so as to block fume from moving outside the suction unit when a stage unit on which a target substrate to be cut is placed by being irradiated with a laser beam is moved, a step of installing an improved air blower on three or four sides around a laser cutting end at a height close to the improved suction port, and a step of controlling on / off of the first to fourth solenoid valves of the improved air blower in conjunction with the movement of the stage unit while performing laser cutting on the target substrate by moving the stage unit.
[0015] In addition, a step of selectively controlling the on / off of the first to fourth solenoid valves of the improved air blower, and adjusting the spray position and spray angle of the nozzle of the improved air blower, and a step of controlling the pipe pressure of the first and second connecting pipes by controlling the pipe control valves of the first and second connecting pipes connected to the connecting pipe of the dust collection unit,
[0016] The method may include a step of storing data on the on / off operation and operation time of the first to fourth solenoid valves according to the movement speed and movement direction of the stage unit, a step of checking airflow simulation while adjusting the on / off, injection angle, air pressure, and pipe pressure of the improved air blower for the movement of the fume by the stage unit, a step of optimizing the on / off and on / off operation time setting values of the first to fourth solenoid valves of the improved air blower, and a step of formulating the optimized setting values of the improved air blower for the target substrate.
[0017]
[0018] According to a manufacturing system and a manufacturing method of a display device according to one embodiment of the present invention, a manufacturing system and a manufacturing method of a display device are provided that can secure the quality and improvement of a display device by securing a technology for controlling fume generated when a stage on which a panel of a display device is placed is moved in a laser cutting device of the display device.
[0019] According to a manufacturing system and manufacturing method of a display device according to one embodiment of the present invention, when confirming airflow simulation, it is possible to prevent contamination of equipment, for example, contamination of the exterior or optical system due to fume movement caused by stage movement.
[0020] According to a manufacturing system and manufacturing method of a display device according to one embodiment of the invention, the maintenance period of the suction unit can be increased by minimizing clogging of the suction port by fumes containing adhesive components through optimal design of the suction port.
[0021] According to a manufacturing system and manufacturing method of a display device according to one embodiment of the present invention, the operation of a plurality of air blowers arranged on all sides of a suction unit can be controlled to turn on and off, and a time on / off setting value according to the length of a laser cutting line for each target substrate model can be fed back in conjunction with the movement of a stage unit to be made into a recipe.
[0022] Figure 1 is a plan view of a manufacturing system for a display device according to one embodiment of the present invention;
[0023] Fig. 2 is a cross-sectional view taken along line II' of Fig. 1;
[0024] Fig. 3 is a cross-sectional view taken along line II-II' of Fig. 1.
[0025] FIG. 4 is a drawing showing a manufacturing system of a display device according to a first modified embodiment of the present invention;
[0026] Figure 5 is a partially enlarged view of Figure 4;
[0027] Figure 6 is a drawing showing the expected direction of fume according to the movement of the stage unit during laser cutting.
[0028] Figure 7 is a cross-sectional view of a suction unit according to another embodiment of the present invention;
[0029] Figure 8 is a cross-sectional view of a suction unit according to a first modified example of another embodiment of the present invention;
[0030] FIG. 9 is a conceptual diagram illustrating a control device of an improved air blower linked with an improved suction port of a suction unit according to another embodiment of the present invention;
[0031] Fig. 10 is a graph explaining the control logic of the control device of the improved air blower of Fig. 9.
[0032] Figure 11 is a plan view of a suction unit according to a first modified example of another embodiment of the present invention;
[0033] Figure 12 is a perspective view of Figure 11;
[0034] FIG. 13 is a plan view showing a control method according to the movement of the stage unit of the suction unit according to a first modified example of an embodiment of another aspect of the present invention;
[0035] Figure 14 is an airflow simulation drawing of a suction unit of a manufacturing system for a display device according to one embodiment of the present invention.
[0036] Figure 15 is a conceptual diagram of a control unit of a manufacturing system for a display device according to one embodiment of the present invention.
[0037] Fig. 16 is a drawing showing the improved air blower operation recipe configuration of Fig. 15;
[0038] Figure 17 is a flowchart showing a method for manufacturing a display device according to one embodiment of the present invention, and
[0039] Figure 18 is a drawing showing the effects of a conventional example and an experimental example of the present invention.
[0040] The advantages and features of the present invention, and the methods for achieving them, will become clearer with reference to the embodiments described in detail below together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms. These embodiments are provided solely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined solely by the scope of the claims.
[0041] When elements or layers are referred to as being "on" another element or layer, this includes both directly over the other element or layer and intervening layers or elements. Like reference numerals refer to like elements throughout the specification.
[0042] Although terms like "first" and "second" are used to describe various components, these components are not limited by these terms. These terms are used merely to distinguish one component from another. Therefore, it should be understood that a "first" component referred to below may also be a "second" component within the technical scope of the present invention.
[0043] Hereinafter, preferred embodiments of the present invention will be described with reference to the attached drawings.
[0044] FIG. 1 is a plan view of a manufacturing system for a display device according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line II' of FIG. 1, FIG. 3 is a cross-sectional view taken along line II-II' of FIG. 1, and FIG. 1 is a perspective view of a manufacturing system for a display device according to an embodiment of the present invention.
[0045] Referring to FIG. 1, the target substrate (PS) cut by the manufacturing system (1) of the display device may be a display panel or substrate of a display device such as an organic light emitting display device.
[0046] The manufacturing system (1) of the display device can be used to cut an inspection pad for inspecting an organic light-emitting display panel or to cut a protective film attached to protect an organic light-emitting display panel.
[0047] The shape of the target substrate (PS) before cutting, as shown by the dotted line in Fig. 1, may be a rectangular shape. The four corners may be rounded, and the display device may be cut using a laser beam along a cutting line (CL) having a closed curve shape. The cutting line (CL) may be a virtual cutting line along which the laser beam (LB) is irradiated on the target substrate (PS). However, the present invention is not limited thereto, and an actual cutting line (CL) may be formed. The cutting line (CL) may be an edge of the display panel after cutting. The target substrate (PS) before cutting may include a central portion that is disposed inside the cutting line (CL) and becomes the display panel (DP) after cutting, and an edge portion that is disposed outside the cutting line (CL) and becomes a dummy portion after cutting.
[0048] A manufacturing system (1) for a display device according to one embodiment of the present invention may be a device capable of cutting a target substrate (PS) by irradiating a laser beam (LB) onto the target substrate (PS). The manufacturing system (1) for a display device may include a laser module (10), an optical system (20), a stage unit (100), and a suction unit (200).
[0049] The laser module (10) can emit a laser beam (LB). The laser beam (LB) can be irradiated along a cutting line (CL) of a target substrate (PS). The laser module (10) can include a gas laser such as a carbon dioxide laser, an excimer laser, a helium-neon laser, or a solid-state laser such as a ruby laser, a glass laser, a YAG laser, or a YLF laser.
[0050] The optical system (20) can adjust the path of the laser beam (LB) emitted from the laser module (10) so that the laser beam (LB) can reach the target substrate (PS). The optical system (20) can include a homogenizer that homogenizes the shape of the laser beam (LB) and / or a focusing lens that focuses the laser beam (LB). The laser beam (LB) passing through the optical system (20) can form a line beam. Depending on the relative arrangement of the laser module (10) and the optical system (20), the optical system (20) may further include a mirror that changes the direction of the laser beam (LB). For example, the optical system (20) can include a galvanometer scanner or a polygon mirror.
[0051] The stage unit (100) provides a space where a target substrate (PS) is mounted and can support the target substrate (PS). That is, the target substrate (PS) can be mounted on the stage unit (100). The stage unit (100) is disposed on the upper surface and can include a suction hole (not shown) that is opened upward. The stage unit (100) can fix the target substrate (PS) by providing negative pressure through the suction hole (not shown). The target substrate (PS) can generally be disposed at the center of the stage unit (100), but is not limited thereto.
[0052] The suction unit (200) may be positioned above the stage unit (100). When a laser beam (LB) is irradiated along a cutting line (CL) of a target substrate (PS), fume may be generated, and the suction unit (200) may suck in the fume and discharge it to the outside. More detailed information regarding the suction unit (200) will be described later.
[0053] A manufacturing system (1) for a display device according to one embodiment of the present invention may further include a dust collection unit (300) and a control unit (400). The dust collection unit (300) may be connected to a suction unit (200) by a connection pipe (C). The dust collection unit (300) may collect fume suctioned by the suction unit (200). The dust collection unit (300) may include a motor, a pump, a fan, or the like for adjusting the negative pressure provided through the suction unit (200). However, the present invention is not limited thereto, and the motor, pump, fan, or the like may be provided as a separate component from the dust collection unit (300). The dust collection unit (300) may include a filter for filtering out fume. The control unit (400) can control the characteristics of the laser beam (LB) generated by the laser module (10), the negative pressure provided by the dust collection unit (300), etc.
[0054] Referring to FIGS. 2 and 3, the suction unit (200) may include a main body (210, 220), pipes (P1, P2), a connecting pipe (C), and an air blower (250, 260). The pipes (P1, P2) may be arranged on both sides of the main body (210, 220), the connecting pipe (C) may connect the pipes (P1, P2) and the dust collection unit (300), and the air blower (250, 260) may be arranged on the upper side of the main body (210, 220).
[0055] The main body (210, 220) may include an outer box (210) having upper and lower openings and an inner cup (220) placed within the outer box (210). The inner cup (220) may include upper and lower openings corresponding to the upper and lower openings of the outer box (210), respectively. The main body (210, 220) may confine fumes generated during the cutting process within the body and prevent them from escaping to the outside.
[0056] The main body (210, 220) may have a structure having an empty internal space (200a) and openings at the upper and lower sides so that a laser beam (LB) emitted through the optical system (20) is irradiated onto the target substrate (PS). In addition, the main body (210, 220) may have a structure capable of effectively absorbing fumes generated during the cutting process. Hereinafter, the specific structures of the outer box (210) and the inner cup (220) will be described.
[0057] The outer box (210) may generally have a square prism shape, but is not limited thereto and may also have other polygonal prism or cylindrical shapes other than a square prism. In an exemplary embodiment, the outer box (210) may have a rectangular prism shape.
[0058] The outer box (210) has a hollow interior and can accommodate an inner cup (220). A pipe (P1, P2) communicating with the interior of the outer box (210) can be combined or formed on at least one side of the outer box (210).
[0059] An inner cup (220) may be placed inside the outer box (210). The inner cup (220) may include an upper side wall (220a) in the shape of a square pillar with an interior hollow, an inclined side wall (220b) in the shape of a truncated pyramid with an interior hollow, and a lower side wall (220c) in the shape of a square pillar with an interior hollow. The inner cup (220) may be separated from the outer box (210). The inner cup (220) may have a three-dimensional structure similar to a square funnel or a hopper. The inner cup (220) may have a shape corresponding to the shape of the outer box (210). For example, when the outer box (210) has a cylindrical shape, the inner cup (220) may have a three-dimensional structure similar to a circular funnel.
[0060] The internal space of the inner cup (220) can provide a passage through which a laser beam (LB) passes. The laser beam (LB) can pass through the main body (210, 220) and be irradiated along the cutting line (CL) of the target substrate (PS). Accordingly, the cutting line (CL) of the target substrate (PS) can be arranged inside the lower opening of the main body (210, 220) on a plan view.
[0061] The upper side wall (220a), the inclined side wall (220b), and the lower side wall (220c) of the inner cup (220) may be formed as a single part or integrally, or at least a portion thereof may be formed separately and then assembled. However, the present invention is not limited thereto, and the inner cup (220) may be formed integrally with the inclined side wall (220b) and the lower side wall (220c), the upper side wall (220a) may be formed separately, and the upper portion of the inclined side wall (220b) may be joined to the lower portion of the upper side wall (220a).
[0062] The upper opening of the main body (210, 220) may be defined by the upper end of the upper side wall (220a) of the inner cup (220), and the lower opening of the main body (210, 220) may be defined by the lower end of the lower side wall (220c) of the inner cup (220). The upper opening of the main body (210, 220) may be larger than the lower opening. Therefore, the inclined side wall (220b) may have a structure in which the internal width decreases from the upper side wall (220a) to the lower side wall (220c). That is, the internal structure of the inclined side wall (220b) may have a structure in which the internal width gradually decreases like a funnel. Therefore, the interior of the inner cup (220) maintains a downflow effect, so that the suction of fume can be performed smoothly. The outer surface of the upper side wall (220a) can be in close contact with the inner surface of the outer box (210).
[0063] The suction unit (200) may further include a bracket for fixing the inner cup (220), and a lower plate (240) defining an inlet (230) together with the inner cup (220), and defining an exhaust path (PL) together with the outer box (210) and the inner cup (220).
[0064] A lower plate (240) may be coupled to the lower end of the outer box (210). The lower plate (240) may be coupled to the lower end of the outer box (210) by means of a coupling means such as a screw or a slide insertion method. The lower plate (240) may include a through hole penetrating the interior.
[0065] The through hole of the lower plate (240) may be larger than the lower opening of the inner cup (220).
[0066] The lower plate (240) may include a suction end (231) that defines a through hole and surrounds the through hole. The suction end (231) may overlap with the lower end of the lower side wall (220c) of the inner cup (220). The suction end (231) and the lower end of the lower side wall (220c) of the inner cup (220) may define a suction port (230). Fume may be suctioned from the outside into the suction unit (200) through the suction port (230). The suction port (230) may be arranged around the lower end of the lower side wall (220c) of the inner cup (220). The suction port (230) may be opened in a vertical direction, but is not limited thereto.
[0067] The upper surface of the lower plate (240), the inner surface of the outer box (210), and the outer surface of the inner cup (220) (in particular, the outer surface of the inclined side wall (220b) and the lower side wall (220c)) can define an exhaust path (PL). The exhaust path (PL) can be a space in which fume sucked in through the suction port (230) flows inside the main body (210, 220). The exhaust path (PL) can be substantially sealed except for the portion communicating with the pipes (P1, P2) and the suction port (230). Therefore, most of the fume sucked in through the suction port (230) can move to the pipes (P1, P2) through the exhaust path (EP). The fume moved to the pipes (P1, P2) can be captured in the dust collection unit (300) through the connecting pipe (C).
[0068] An air blower (250, 260) may be placed on the upper portion of the main body (210, 220). The air blower (250, 260) may spray air toward the target substrate (PS). The air provided by the air blower (250, 260) may form an air current in the internal space of the inner cup (220). The air blower (250, 260) may include a pair of first air blowers (250) placed along the long side of the outer box (210) and a pair of second air blowers (260) placed along the short side.
[0069] The first air blower (250) may be arranged to face each other along the long side of the outer box (210). The first air blower (250) may include a first main pipe (251), a plurality of first nozzles (253) arranged at the lower portion of the first main pipe (251) and arranged along the first direction, and a first auxiliary pipe (252) arranged at the upper portion of the first main pipe (251).
[0070] The first main pipe (251) may be a pipe extending along a first direction and including an internal flow path. The first main pipe (251) may be arranged along a long side of the outer box (210). The first main pipe (251) provides a space in which air is received before being sprayed through the first nozzle (253), and the space in which the air is received may be an internal flow path of the first main pipe (251). The air received in the internal flow path of the first main pipe (251) may be supplied from the first auxiliary pipe (252) arranged at the upper side and sprayed into the internal space of the inner cup (220) through the first nozzle (253) arranged at the lower side. The spraying direction of the air may be substantially the same as the direction indicated by the first nozzle (253). The air sprayed through the first nozzle (253) may form an airflow in the spraying direction.
[0071] The first nozzle (253) may be a passage through which air contained inside the first main pipe (251) is sprayed to the outside. A plurality of first nozzles (253) may be arranged along the extension direction of the first main pipe (251) from the lower portion of the first main pipe (251). The first nozzles (253) may extend in a direction perpendicular to the first main pipe (251). The inclination of the first nozzle (253) may vary. The inclination of the first nozzle (253) may be defined as an angle at which the first nozzle (253) is inclined with respect to a plane parallel to one surface of the target substrate (PS).
[0072] The injection angle of the air injected from the first nozzle (253) may be substantially the same as the inclination of the first nozzle (253). The first nozzle (253) may be configured to have an adjustable inclination, but is not limited thereto and may also have a fixed inclination.
[0073] In an exemplary embodiment, the inclination of the first nozzle (253) may be set so that the air ejected from the first nozzle (253) crosses the inner space of the inner cup (220). The first nozzle (253) may be directed toward the suction port (230) disposed on the lower side of the first air blower (250) opposite the first air blower (250) including the first nozzle (253).
[0074] Accordingly, the airflow formed by the air sprayed from the first nozzle (253) can be sucked into the suction port (230) arranged on the opposite side of the first nozzle (253). In addition, the airflow formed by the air sprayed from the first nozzles (253) arranged opposite each other can intersect in the internal space of the inner cup (220), but is not limited thereto.
[0075] Now, referring to FIGS. 4 to 18, a manufacturing system and manufacturing method of a display device according to a first modified embodiment of the present invention for responding to fume movement due to changes in external airflow when a stage unit (100) moves will be described.
[0076] FIG. 4 is a drawing showing a manufacturing system of a display device according to a first modified embodiment of the present invention, and FIG. 5 is a partial enlarged view of FIG. 4.
[0077] A display device manufacturing system (1') according to a first modified embodiment of the present invention is the same as a display device manufacturing system (1) according to another embodiment of the present invention, except that the stage unit (100) includes a base substrate (110) on which a substrate or panel (PS) of a display device to be laser-cut is placed, and a UVW stage driving unit (130) that positions the base substrate (110) with high precision and high response in the X-axis, Y-axis, and θ directions, fixes a laser module (10) and an optical system (20), and moves the stage unit (100) in the X-axis, Y-axis, and θ directions to perform a laser cutting process of the substrate or panel (PS) of the display device.
[0078] First, as illustrated in FIG. 3, a target substrate (PS) is placed on a stage unit (100), and a laser beam (LB) is irradiated along a closed-curve cutting line (CL) for at least one cycle to cut the target substrate (PS), and when cutting the target substrate (PS) using the laser beam (LB), the fume generated in the area where the laser beam (LB) is irradiated is not blocked by the laser beam, so that the fume can be effectively discharged to the outside by sucking it in through the negative pressure provided by the dust collection unit (300).
[0079] Specifically, fume can be sucked through the suction port (230) of the suction unit (200). The suction port (230) is disposed at the lower portion of the suction unit (200) and may have a shape that is open downward. The suction port (230) may be disposed outside the cutting line (CL). The suction port (230) may not overlap with the cutting line (CL) of the target substrate (PS), but is not limited thereto.
[0080] An air flow that can move fume outside the cutting line (CL) can be formed by spraying air through an air blower (250, 260). However, even if the fume moves outside the cutting line (CL), most of it is sucked in through the suction port (230) of the suction unit (200), so the fume may hardly leak outside the suction unit (200).
[0081] However, as shown in FIGS. 4 and 5, when a target substrate (PS) is placed on a stage unit (100) and the cutting line of the target substrate (PS) is moved by using the UVW stage drive unit (130) while the laser beam (LB) is fixed, a problem may arise where the suction force is reduced because the distance (D) between the position where the laser beam (LB) is irradiated and laser cutting is performed and the suction port (230) is far.
[0082] In addition, when the suction power of the suction unit (200) is reduced in this way, the fume remaining in the internal space (200a) may rise and contaminate the optical system (20).
[0083] In addition, the substrates or panels of the display device have a multilayer structure and include adhesive components between the multilayers, for example, PSA adhesive (Ab). In the case of fume generated during laser cutting of the substrates or panels (PS) of the display device with adhesive components (PSA adhesive), the adhesive components may stick to the area around the suction port (230), causing the suction port (230) to narrow and become blocked.
[0084] In this way, if the suction port (230) becomes narrower or blocked due to the adhesive component of the fume generated during laser cutting of the panel (PS), the suction performance of the suction unit (200) may deteriorate.
[0085] Figure 6 is a drawing showing the expected direction of fume according to the movement of the stage unit during laser cutting.
[0086] As illustrated in FIG. 6, according to the manufacturing system (1') of the display device according to the first modified embodiment of the present invention, when the base substrate (110) of the stage unit (100) is moved in a first direction from a first position (#1 Pos') using the UVW stage driving unit (130), moved in a second direction perpendicular to the first direction from a second position (#2 Pos'), and moved in a third direction opposite to the first direction from a third position (#3 Pos'), it can be seen that the direction in which the laser beam (LB) is irradiated and laser cutting is performed is reverse to the first direction, the second direction, and the third direction, and the fume due to laser cutting is generated in a forward direction with respect to the first direction, the second direction, and the third direction of the stage unit (100).
[0087] According to the manufacturing system (1') of the display device according to the first modified embodiment of the present invention, it can be seen that the removal of the fume is not completely achieved due to the moving speed of the stage unit (100) and the moving direction of the fume, and the fume may rise or leak to the outside, thereby contaminating the optical system (20) or the surroundings of the equipment.
[0088] Figure 7 is a cross-sectional view of a suction unit according to another embodiment of the present invention.
[0089] According to another embodiment of the present invention, a suction unit (200') has an improved configuration that can control fumes generated during laser cutting of a substrate or panel (PS) of a display device while moving a stage unit (100), and can be characterized by a structure that is arranged at the bottom of an outer box (210') and an inner cup (220').
[0090] According to another embodiment of the present invention, a suction unit (200') includes an improved suction port (230') that can prevent fume from accumulating in the suction port (230) or being exposed to the optical system (20) or the outside due to the moving speed of the stage unit (100) and the moving direction of the fume.
[0091] The improved suction port (230') may include an expansion hole (231') formed wide relative to the through hole of the lower plate (240') so that the fume generated during laser cutting can be completely sucked in along the moving speed of the stage unit (100) and the moving direction of the fume, a guide part (233') inclined upward and outward from the edge of the lower plate (240') so that the expansion hole (231') is formed relative to the lower plate (240'), and a vortex forming part (235') extended parallel to the lower plate (240') from the guide part (233') so that when negative pressure is formed during operation of the dust collection unit (300), the fume sucked in through the expansion hole (231') forms a vortex within the improved suction port (230') so that it is not exposed to the outside.
[0092] Figure 8 is a cross-sectional view of a suction unit according to a first modified example of another embodiment of the present invention.
[0093] A first modified example of another embodiment of the present invention, a suction unit (200'), is the same as the improved suction port (230') in that it has an expansion hole (231'), a guide portion (233'), and a vortex-forming portion (235') to prevent fume from accumulating in the suction port (230) or being exposed to the optical system (20) or the outside due to the moving speed of the stage unit (100) and the moving direction of the fume, and is different in that it further has a fume storage cavity (237') that extends from the vortex-forming portion (235') of the improved suction port (230') to temporarily store fume collected by negative pressure and block leakage to the outside.
[0094] In addition, the above fume storage cavity (237') is provided with improved air blowers (250', 260') on all sides of the target substrate (PS) along the laser cutting line (CL) between the internal space (200a) where the laser beam (LB) is irradiated and the improved suction port (230').
[0095] The above fume storage cavity (237') can sufficiently store the fume swirl that is quickly introduced through the expansion hole (231') by the improved air blower (250', 260') and sufficiently block it from being exposed to the optical system (20) or the outside.
[0096] FIG. 9 is a conceptual diagram illustrating a control device of an improved air blower linked with an improved suction port of a suction unit according to an embodiment of another aspect of the present invention, and FIG. 10 is a graph illustrating a control method of the control device of the improved air blower of FIG. 9.
[0097] Again, as illustrated in FIGS. 7 and 8, the improved suction port (230') of the suction unit (200') according to another embodiment of the present invention can be controlled by the control unit (400) to work in conjunction with an improved air blower (250') that blows air directly toward the improved suction port (230') at a height close to the improved suction port (230').
[0098] As illustrated in FIG. 9, the control unit (400) receives the moving speed and direction of the stage unit (100), and can control the on / off times of the first to fourth solenoid valves (255a, 255b, 255c, 255d) of a pair of improved air blowers (250') arranged on the long sides and a pair of improved air blowers (260') arranged on the short sides among the sides surrounding the internal space (200a) where laser cutting is performed so that the distance value (D) from the cutting line (CL) is constant.
[0099] A pair of improved air blowers (250') arranged on the long side are called first improved air blowers (250'), and a pair of improved air blowers (260') arranged on the short side are called second improved air blowers (260'). The first and second air blowers (250', 260') may similarly include a first main pipe (251'), a plurality of first nozzles (253') arranged at the lower portion of the first main pipe (251') and arranged along the first direction, and a first auxiliary pipe (252') arranged at the upper portion of the first main pipe (251'), and first to fourth solenoid valves (255a, 255b, 255c, 255d) are respectively installed in the first main pipe (251') to form a plurality of first Each nozzle (253') can be opened and closed.
[0100] Unlike the first air blower (250') and the second air blower (260'), the first main pipe (251') is installed to penetrate the lower part of the outer box (210'), and the first nozzle (253') can be installed between the improved suction unit (230') and the internal space (200a) where laser cutting is performed.
[0101] As shown in Fig. 10, during the laser cutting process, the improved air blower (250', 260') located far from the operating improved suction port (231') rather than the improved air blower (250', 260') located close to the operating improved suction port (231') where negative pressure is formed by the dust collection unit (300) can be selectively operated.
[0102] In more detail, in the standby state, the pump and the first to fourth solenoid valves (255a, 255b, 255c, 255d) are turned off, and in order to use the improved suction port (231') of the first long side, the first solenoid valve (255a) of the first air blower (250') installed on the second long side is turned on, in order to use the improved suction port (231') of the first short side, the second solenoid valve (255b) of the second air blower (260') installed on the second short side is turned on, and in order to use the improved suction port (231') of the second long side, the third solenoid valve (255c) of the first air blower (250') installed on the first long side is turned on, and the second It can be seen that in order to use the improved suction port (231') of the single side, the fourth solenoid valve (255d) of the second air blower (260') installed on the first single side is controlled to be turned on.
[0103] Now, referring to FIGS. 11 to 13, a suction unit according to a first modified example of another embodiment of the present invention will be described in more detail.
[0104] FIG. 11 is a plan view of a suction unit according to a first modified example of an embodiment of another aspect of the present invention, FIG. 12 is a perspective view of FIG. 11, and FIG. 13 is a plan view showing a control method according to movement of a stage unit of a suction unit according to a first modified example of an embodiment of another aspect of the present invention.
[0105] As illustrated in FIG. 11, the air injection direction of the first improved air blower (250') and the second improved air blower (260') may be substantially the same as the direction indicated by the first nozzle (253'), and the air injected through the first nozzle (253') may form an airflow in the injection direction.
[0106] The first nozzle (253') may be a passage through which air contained within the first main pipe (251') is sprayed to the outside. A plurality of first nozzles (253') may be arranged along the extension direction of the first main pipe (251') from the lower portion of the first main pipe (251'). The first nozzles (253') may extend in a direction perpendicular to the first main pipe (251'). The inclination of the first nozzles (253') may vary.
[0107] As illustrated in FIG. 11, the spray angle of air sprayed from the first nozzle (253') may be substantially the same as the inclination of the first nozzle (253'), and the inclination of the first nozzle (253') may be adjusted by the spray angle adjustment means (260).
[0108] As illustrated in Fig. 12, the spraying position of the first nozzle (253') arranged along the extension direction of the first main pipe (251') can be adjusted, and the position of the first nozzle (253') can be adjusted along the long side or the short side, respectively, by the spraying position adjusting means (270) installed at the lower part of the outer box (210') of the suction unit (200').
[0109] Figure 13 is a drawing showing the on / off of an improved air blower according to the direction of movement of the stage unit.
[0110] In Fig. 13, the dotted line is a laser cutting line, the dotted arrow indicates the stage movement direction, and the arrows inside the laser working hole indicate the air injection direction and the movement direction of the fume when the improved air blower is operated.
[0111] As illustrated in FIG. 13, when the stage unit (110) moves in the +y direction and laser cutting is performed in the long side direction, the first solenoid valve (255a) of the improved suction unit (200') is opened, and air is injected toward the second improved suction port (231a') facing the first solenoid valve (255a), so that the air injected from the first improved air blower (250') can move fume generated in the long side region of the cutting line (CL) of the target substrate (PS) toward the second improved suction port (231a').
[0112] - When the stage unit (110) moves in the x-direction and laser cutting is performed in the short-side direction, the fourth solenoid valve (255d) of the improved suction unit (200') is opened, and air is injected toward the third improved suction port (231a') facing the fourth solenoid valve (255d), so that the air injected from the second improved air blower (260') can move fume generated in the short-side region of the cutting line (CL) of the target substrate (PS) toward the third improved suction port (231b').
[0113] When the stage unit (110) moves in the +y direction and laser cutting is performed in the long side direction, the first solenoid valve (255a) of the improved suction unit (200') is opened, and air is injected toward the second improved suction port (231a') facing the first solenoid valve (255a), so that the air injected from the first improved air blower (250') can move fume generated in the long side region of the cutting line (CL) of the target substrate (PS) toward the second improved suction port (231a').
[0114] Meanwhile, when laser cutting of a corner is performed by moving the stage unit (110) in the -x-axis direction after moving the stage unit (110) in the +y-direction, such as a corner, the direction of the fume generated by moving the stage unit (110) in the -x-axis direction after moving the stage unit (110) in the +y-direction is taken into consideration, and the air sprayed from the first improved air blower (250') and the second improved air blower (260') can move the fume generated in the corner area of the cutting line (CL) of the target substrate (PS) using the third and fourth improved suction ports.
[0115] Now, referring to FIGS. 14 and 15, we will examine how the suction unit of the manufacturing system of the display device according to one embodiment of the present invention completely removes fume by forming a predetermined airflow by linking the improved suction port (230') and the improved air blower (250', 260').
[0116] FIG. 14 is an airflow simulation drawing of an intake unit of a manufacturing system for a display device according to one embodiment of the present invention, and FIG. 15 is a conceptual diagram of a control unit of a manufacturing system for a display device according to one embodiment of the present invention.
[0117] As shown in FIG. 14, when looking at a simulation of airflow generated when performing laser cutting processing in a manufacturing system of a display device according to an embodiment of the present invention, a downflow is generated in the internal space (200a) where a laser beam (LB) is irradiated, and when at least one of the first improved air blower (250') and the second improved air blower (260') arranged in all directions close to the laser cutting cutting part where laser cutting processing is performed is opened, it can be seen that the downflow is deflected and moves toward at least one improved suction port in which negative pressure is formed among the first to fourth suction ports by the dust collection unit (300).
[0118] In addition, it was confirmed that external airflow was introduced as a result of simulating the change in flow rate in at least one improved suction port area where negative pressure was formed among the first to fourth suction ports.
[0119] As illustrated in FIG. 15, in the manufacturing system of a display device according to one embodiment of the present invention, the control unit (400) can control the air injection position by turning on and off the first to fourth solenoid valves (255a, 255b, 255c, 255d) of the first improved air blower (250') and the second improved air blower (260') of the suction unit (200) of the manufacturing system of a display device according to one embodiment of the present invention, and can control the angle of each injection nozzle (253).
[0120] In addition, the control unit (400) can control the negative pressure of the first and second connecting pipes (P1, P2) of the suction unit (200) connected to the connecting pipe (C) of the dust collection unit (300), and can control the pipe pressure of the first and second connecting pipes (P1, P2) connected to the suction unit (200) of the manufacturing system of the display device according to one embodiment of the present invention by the pipe pressure control valve (P1V / V, P2V / V).
[0121] FIG. 16 is a drawing showing an improved air blower operation recipe configuration of a control unit of a manufacturing system for a display device according to one embodiment of the present invention, and FIG. 17 is a flowchart showing a manufacturing method for a display device according to one embodiment of the present invention.
[0122] As illustrated in FIGS. 16 and 17, the control unit (400) of the manufacturing system of a display device according to one embodiment of the present invention designs an improved suction port structure through airflow simulation so as to block fume from moving outside the suction port (230) formed around the four sides of a workpiece, for example, a display panel (PS), when the stage unit (110) moves (S110).
[0123] An improved air blower (250', 260') is installed on three or four sides near a laser cutting end where a laser beam (LB) is introduced and laser cutting is performed (S120), and while moving the stage unit (110) and performing laser cutting (S130), the on / off of the first to fourth solenoid valves (255a, 255b, 255c, 255d) of the improved air blower (250', 260') on three or four sides is controlled in conjunction with the movement of the stage unit (110) (S140).
[0124] The air injection position can be adjusted by turning on and off the first to fourth solenoid valves (255a, 255b, 255c, 255d) of the first improved air blower (250') and the second improved air blower (260'), the angle of each injection nozzle (253) can be adjusted, and the negative pressure of the first and second connecting pipes (P1, P2) of the suction unit (200) connected to the connecting pipe (C) of the dust collection unit (300) can be adjusted, and the pipe pressure of the first and second connecting pipes (P1, P2) connected to the suction unit (200) of the manufacturing system of the display device according to one embodiment of the present invention can be adjusted by the pipe pressure control valves (P1V / V, P2V / V) to control the movement direction data of the stage unit (140) of the improved air blower (250', Controls the on / off time of 260' (S150).
[0125] In order to minimize contamination of the optical system or external equipment due to fume movement by the above stage unit (110), the airflow simulation is confirmed while adjusting the on / off, angle, air pressure, and pipe pressure of the first improved air blower (250') and the second improved air blower (260') (S160).
[0126] Depending on the size or specifications of the workpiece, such as the display panel (PS), the on / off and time setting values of the first to fourth solenoid valves (255a, 255b, 255c, 255d) of the first improved air blower (250') and the second improved air blower (260') are optimized (S170), and stored in the memory of the control unit (400) to formulate the air blower operation and time for each display panel (PS) model (S170).
[0127] As illustrated in FIGS. 16 and 17, according to a method for manufacturing a display device according to an embodiment of the present invention, the first to fourth solenoid valves (255a, 255b, 255c, 255d) of the improved air blowers (250' 260') arranged on all sides around the display panel (PS) so as to face the suction ports formed in a closed curve shape around the display panel (PS) during laser cutting processing according to the model of the workpiece, for example, the display panel (PS), can be changed to optimize the setting values for each model, and the operation time of the improved air blowers (250' 260') can be optimized according to the recipe, for example, according to the model of each workpiece, for example, the display panel (PS).
[0128] Figure 18 is a drawing showing the effects of a conventional example and an experimental example of the present invention.
[0129] As can be seen from Fig. 18, according to the manufacturing method of the display device of the prior art, in the process of cutting the target substrate (PS) using the laser beam (LB) when the air blower (250, 260) is not used or is not controlled to be on or off, it can be seen that the fume generated along the cutting line (CL) obscures the laser beam (LB) and interferes with the processing of the target substrate (PS), resulting in particles remaining on the surface of the target substrate (PS) or threads being formed.
[0130] On the other hand, according to the manufacturing method of the display device according to the experimental example of the present invention, by the on / off control and on / off operation time of the improved air blower (250', 260') controlled in conjunction with the movement of the stage unit (110), the fume generated from the target substrate (PS) is generally generated and descends by the downflow formed in the internal space (LP) of the internal cup (220) at the same time as it is generated, and is suctioned and removed through the improved suction port (230') of the suction unit (200), so that almost no particles remain on the surface of the target substrate (PS) and the thread-like structure is also improved.
[0131]
[0132] According to a manufacturing system and a manufacturing method of a display device according to one embodiment of the present invention, a manufacturing system and a manufacturing method of a display device are provided that can secure the quality and improvement of a display device by securing a technology for controlling fume generated when a stage on which a panel of a display device is placed is moved in a laser cutting device of the display device.
[0133] According to a manufacturing system and manufacturing method of a display device according to one embodiment of the present invention, when confirming airflow simulation, it is possible to prevent contamination of equipment, for example, contamination of the exterior or optical system due to fume movement caused by stage movement.
[0134] According to a manufacturing system and manufacturing method of a display device according to one embodiment of the invention, the maintenance period of the suction unit can be increased by minimizing clogging of the suction port by fumes containing adhesive components through optimal design of the suction port.
[0135] According to a manufacturing system and manufacturing method of a display device according to one embodiment of the present invention, the operation of a plurality of air blowers arranged on all sides of a suction unit can be controlled to turn on and off, and a time on / off setting value according to the length of a laser cutting line for each target substrate model can be fed back in conjunction with the movement of a stage unit to be made into a recipe.
Claims
1. A main body having an upper and lower opening and an empty internal space so that a laser beam coming through an optical system is irradiated onto a target substrate; An exhaust formed between the upper surface of the lower plate of the main body, the inner surface of the outer box forming the main body, and the outer surface of the inner cup surrounding the cutting line of the target substrate; A stage unit on which the target substrate is placed and which moves the cutting line of the target substrate with respect to the laser beam; A suction unit that moves the stage unit and removes fumes generated when the target substrate is irradiated with a laser beam. A manufacturing system for a display device including a control unit that controls the setting value of the suction unit according to the moving speed of the stage unit and the moving direction of the fume to prevent the fume from leaking into the optical system or external equipment.
2. In paragraph 1, The above suction unit comprises an improved suction port connected to the exhaust duct, The above improved suction port is a manufacturing system for a display device including an expansion hole formed openly across the inner cup and the outer box with respect to the lower plate.
3. In paragraph 2, A manufacturing system for a display device, wherein the improved suction port includes a guide portion inclined upwardly outward from the edge of the expansion hole, and a vortex forming portion extended from the guide portion to form a vortex for the fume sucked through the expansion hole by the negative pressure formed when the dust collecting unit connected to the exhaust path operates.
4. In paragraph 3, A manufacturing system for a display device in which the above suction unit extends from the above eddy-forming section and has a box-shaped fume storage cavity at both ends for storing the fume collected through the expansion hole and preventing leakage to the outside.
5. In paragraph 2, A manufacturing system for a display device including an improved air blower, which is arranged between the expansion hole and the internal space at the lower part of the main body close to the improved suction port, and forms a transverse airflow so that the fume moves toward the improved suction port.
6. In paragraph 5, The above control unit receives the moving speed and direction of the stage unit, the improved air blower includes a pair of first improved air blowers arranged on long sides and a pair of second improved air blowers arranged on short sides among sides surrounding the internal space, and the control unit independently controls on / off of the first to fourth solenoid valves installed in the first and second improved air blowers. A manufacturing system for a display device.
7. In paragraph 6, The above first and second improved air blowers include a first main pipe installed through the lower part of the outer box of the main body and a first nozzle attached to the first main pipe, and the first to fourth solenoid valves are a manufacturing system of a display device that controls the first nozzle on and off, respectively.
8. In paragraph 7, A manufacturing system for a display device further comprising a spray angle adjusting means for adjusting the inclination of the first nozzle and a spray position adjusting means for adjusting the spray position of the first nozzle.
9. In paragraph 8, A manufacturing system for a display device, wherein the on-off operation time of the improved air blower is controlled in conjunction with the movement of the stage unit by interlocking the improved suction port having an expanded expansion hole to prevent the accumulation of fume generated from a target substrate to be processed by laser beam irradiation and a vortex forming portion to allow the fume to circulate inside, and the improved air blower is arranged between the suction port and an internal space where laser beam irradiation is performed to form an airflow toward the suction port.
10. An improved intake connected to the exhaust, An improved air blower, which is positioned between the improved suction port and the internal space in the lower part of the main body, which is close to the improved suction port but has an internal space where the laser beam is irradiated, and forms an airflow so that the fume generated when cutting the target substrate by the laser beam irradiation moves toward the improved suction port, A suction unit including a control unit that controls the improved air blower so that the fume is sucked into the improved suction port according to the moving speed of the stage unit and the moving direction of the fume.
11. In Article 10, The above improved suction port is a suction unit including an expansion hole formed openly across the inner cup forming the main body and the outer box.
12. In paragraph 11, The above improved suction port is a suction unit including a guide portion inclined upwardly outwardly from the edge of the expansion hole, and a vortex forming portion extended from the guide portion to form a vortex for the fume sucked through the expansion hole by the negative pressure formed when the dust collecting unit connected to the exhaust path operates.
13. In paragraph 12, A suction unit extending from the above-mentioned eddy-forming section and having box-shaped fume storage cavities at both ends to store the fume collected through the above-mentioned expansion hole and prevent leakage to the outside.
14. In paragraph 13, The control unit receives the moving speed and direction of the stage unit, the improved air blower includes a pair of first improved air blowers arranged on long sides and a pair of second improved air blowers arranged on short sides among sides surrounding the internal space, and the control unit is a suction unit that independently controls on / off of the first to fourth solenoid valves installed in the first and second improved air blowers.
15. In paragraph 14, The above first and second improved air blowers include a first main pipe installed through the lower part of the outer box of the main body and a first nozzle attached to the first main pipe, and the first to fourth solenoid valves are suction units that control the first nozzle on and off, respectively.
16. In paragraph 14, A suction unit further comprising a spray angle adjusting means for adjusting the inclination of the first nozzle and a spray position adjusting means for adjusting the spray position of the first nozzle.
17. A step for simulating the airflow for the improved suction port so that the fume can be prevented from moving outside the suction unit when the stage unit on which the target substrate to be cut is placed is moved by irradiating the laser beam, A step of installing an improved air blower on three or four sides around the laser cutting end at a height close to the improved suction port, A method for controlling a suction unit, comprising the step of controlling on / off of the first to fourth solenoid valves of the improved air blower in conjunction with the movement of the stage unit while performing laser cutting on the target substrate by moving the stage unit.
18. In paragraph 17, A step of selectively controlling the on / off of the first to fourth solenoid valves of the improved air blower and adjusting the spray position and spray angle of the nozzle of the improved air blower, A step for controlling the pipe pressure of the first and second connecting pipes by controlling the pipe control valves of the first and second connecting pipes connected to the connecting pipe of the dust collection unit, A step of storing data on the on / off operation and operation time of the first to fourth solenoid valves according to the movement speed and movement direction of the stage unit, A control method of a suction unit, including a step of checking an airflow simulation while adjusting the on / off, injection angle, air pressure, and pipe pressure of the improved air blower for the movement of the fume by the stage unit.
19. In paragraph 18, A step for optimizing the on / off and on / off operation time setting values of the first to fourth solenoid valves of the above improved air blower, A control method of a suction unit including a step of formulating an optimized setting value of the improved air blower for the target substrate.