FABRICATION PROCESS OF NO2 GAS SENSORS BASED ON In2O3-WO3-Pd NANOFILES

Abstract

This invention proposes a process for fabricating a NO2 gas sensor based on polycrystalline In2O3-WO3-Pd nanofibers using electrostatic spraying directly onto a silicon oxide substrate, including components such as a Cr / Pt electrode. The gas-sensitive material consists of polycrystalline In2O3-WO3-Pd nanofibers sprayed directly onto a comb-shaped electrode. The solution presented in this invention is unique in that the polycrystalline In2O3-WO3-Pd nanofibers fabricated by electrostatic spraying require only one step to successfully create a NO2 gas sensor capable of measuring low concentrations (below ppm) and low detection limits (parts per trillion). The invention has potential applications in warning of NO2 gas levels exceeding thresholds, thereby ensuring a safe environment for humans.

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