Methods and systems for activating seed lasers
VN127215APending Publication Date: 2026-07-15ASML NETHERLANDS BV
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Patent Information
- Application Number
- VN1202604417
- Authority / Receiving Office
- VN · VN
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-11-06
- Filing Date
- 2024-10-09
- Publication Date
- 2026-07-15
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Figure VN1202604417_0
Abstract
The method for activating a seed laser is determined by the resonant cavity located between the first and second reflectors, and includes a Q-switch element positioned in the optical path of the laser beam between the first and second reflectors. This generates laser pulses by cyclically switching the transmittance parameter of the Q-switch element between high and low values. The method involves: setting the transmittance parameter of the Q-switch element to a high value, and gradually reducing the transmittance parameter of the Q-switch element from a high value to a low value over time.
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