Methods and systems for activating seed lasers

VN127215APending Publication Date: 2026-07-15ASML NETHERLANDS BV
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Patent Information

Application Number
VN1202604417
Authority / Receiving Office
VN · VN
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-11-06
Filing Date
2024-10-09
Publication Date
2026-07-15

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Abstract

The method for activating a seed laser is determined by the resonant cavity located between the first and second reflectors, and includes a Q-switch element positioned in the optical path of the laser beam between the first and second reflectors. This generates laser pulses by cyclically switching the transmittance parameter of the Q-switch element between high and low values. The method involves: setting the transmittance parameter of the Q-switch element to a high value, and gradually reducing the transmittance parameter of the Q-switch element from a high value to a low value over time.
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