CHARGEABLE PARTICLES, CHARGEABLE PARTICLE DEVICES, SEAT PADS, METHODS OF ILLUMINATING MULTIPLE BEAMS OF CHARGEABLE PARTICLES

Abstract

The present invention provides a charged particle element and related apparatus and method. In one arrangement, the element comprises a beam modulator configured to operate on multiple charged particle beams in a beam grid. The beam modulator comprises multiple plates. Each plate has two surfaces and multiple apertures. The multiple plates comprise at least one curved surface plate with a curved surface. The curved surface faces the opposite surface of the adjacent plate. Deflections are applied to the beams by controlling the potential difference between the curved surface and the opposite surface.