Self- aligned backside contact
WO2024260916A2PCT designated stage expired Publication Date: 2024-12-26INTERNATIONAL BUSINESS MACHINE CORPORATION +1
Patent Information
- Application Number
- PCT/EP2024/066793
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-06-22
- Filing Date
- 2024-06-17
- Publication Date
- 2024-12-26
Smart Images
Figure EP2024066793_26122024_PF_FP_ABST
Abstract
A semiconductor structure including a first transistor comprising a first placeholder and a first gate pitch and a second transistor comprising a second placeholder and a second gate pitch, where the first gate pitch is less than the second gate pitch, and wherein the first placeholder is smaller than the second placeholder.
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Citation Information
Cited By
Self-aligned backside contact
US12598789B2