Piezoelectric device and method of forming
By developing piezoelectric devices with a high morphological columnar tilting angle and controlled porosity, the piezoelectric response is enhanced, addressing limitations in existing materials and improving the performance of ultrasonic transducers.
WO2025056898A1 Publication Date: 2025-03-20NOVOSOUND LTD
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Patent Information
- Application Number
- PCT/GB2024/052363
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-09-11
- Filing Date
- 2024-09-10
- Publication Date
- 2025-03-20
AI Technical Summary
Technical Problem
Existing piezoelectric materials used in ultrasonic transducers have limitations in terms of piezoelectric coefficient, which affects the quality and sensitivity of ultrasonic imaging and other applications.
Method used
A piezoelectric device with a morphological columnar tilting angle greater than 7 degrees is developed, enhancing the piezoelectric response and coefficient, and a method involving oblique angle deposition and controlled porosity is used to manufacture these devices.
Benefits of technology
The enhanced piezoelectric response results in improved ultrasound displacement, resolution, and energy efficiency, making the devices suitable for applications such as non-destructive testing and portable sensing.
✦ Generated by Eureka AI based on patent content.
Abstract
A piezoelectric device comprising a substrate and a layer of piezoelectric material deposited on a surface of the substrate, wherein the piezoelectric material has a morphological columnar tilting angle greater than 7 degrees, preferably greater than 10 degrees and more preferably greater than 20 degrees. In example methods of manufacturing the piezoelectric device, the layer of piezoelectric material is deposited through an aperture. Further enhancement of the piezoelectric effect may be obtained by optimising the porosity of the deposited piezoelectric layer, decreasing the working pressure of the deposition chamber and / or increasing the temperature of deposition.
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