Actuator unit, drive device and drive system

Abstract

Actuator unit (1), comprising: a first actuator (A1), which has: a first deformation body (30) which is deformable by an electrical voltage, a first excitation electrode assembly having at least one excitation electrode which is situated on a first main face (31) of the first deformation body (30), a common electrode which is situated on a second main face of the first deformation body, a second actuator (A2), which has: a second deformation body (60) which is deformable by an electrical voltage, a second excitation electrode assembly having at least one excitation electrode which is situated on the first main face of the second deformation body, a common electrode (E22) which is situated on the second main face (81) of the second deformation body, wherein the first actuator and the second actuator are situated one on the other in such a way that their thickness directions run along each other and wherein the first excitation electrode assembly and the second excitation electrode assembly are situated facing each other.

Description

[0001] Actuator unit, drive device and drive system

[0002] The invention relates to an actuator unit, a drive device and a drive system.

[0003] WO2017067544A1 discloses a method for controlling at least a portion of an electromechanical element comprising a polycrystalline and ferroelectric or ferroelectric-piezoelectric material with a plurality of domains. In this method, by applying an electrical voltage in the form of at least one voltage pulse between electrodes applied to the material, a portion of the material's domains, which have differing polarization directions, is converted into a state with the same polarization direction.

[0004] The object of the invention is to provide an actuator unit and a drive device with which an element to be driven can be positioned with a predetermined accuracy and which represents an alternative solution to known actuator units or drive devices.

[0005] This object is achieved by the features of the independent claims. Further embodiments are specified in the subclaims that refer back to them.

[0006] The actuator unit and the drive system provided according to the invention comprise in particular: a first actuator comprising: a first deformation body which is deformable by an electrical voltage and which comprises and is preferably formed from an electromechanical material and which has a thickness extending in its thickness direction and is delimited by a first main surface and a second main surface which are oriented opposite to one another with respect to the first thickness direction; a first excitation electrode arrangement having at least one excitation electrode which is located on the first main surface of the first deformation body;and a common electrode located on the second main surface of the first deformation body, a second actuator comprising: a second deformation body deformable by an electrical voltage, which comprises and is preferably formed from electromechanical material and which has a thickness extending in its thickness direction and is delimited by a first main surface and a second main surface which are oriented opposite to one another with respect to the second thickness direction; a second excitation electrode arrangement having at least one excitation electrode located on the first main surface of the second;

[0007] deformation body; and a common electrode located on the second main surface of the second deformation body, wherein the first actuator and the second actuator are located on top of one another such that their thickness directions run along one another, and wherein the first excitation electrode arrangement and the second excitation electrode arrangement are located facing one another.

[0008] In the actuator unit provided herein with at least two actuators, both actuators each have at least one deformation body with an electromechanical material, wherein the electromechanical material is preferably a polycrystalline and a ferroelectric or a ferroelectric-piezoelectric material, and particularly preferably a soft PZT ceramic. PZT material is understood herein to mean an electromechanical ceramic material based on lead zirconate titanate, and in particular mixed crystals based on lead zirconate (PbZrO3) and lead titanate (PbTiO3). An electromechanical material is characterized in particular by the fact that a body consisting of it changes at least one of its geometric dimensions when or as long as electrical energy, in particular an electrical voltage, is applied to it.

[0009] According to the invention, the term “deformation body” is understood as follows, unless an exception is explicitly defined herein:

[0010] In each embodiment of the invention, the deformation body is an electromechanical element comprising at least one change section made of a polycrystalline and ferroelectric or ferroelectric-piezoelectric material with a plurality of domains, i.e., regions with unit cells of uniform dipole direction. Each deformation body is located between two actuation electrodes, the two actuation electrodes being spaced apart from each other in the thickness direction of the respective actuator segment. In particular, in this context, the term "domain" refers to a very small region of a plurality of very small regions in which the polarization directions are identical or substantially identical.A deformation body, and in particular its change section, may not have been subjected to a polarization process, or may have been subjected to it only partially or completely, and is therefore essentially unpolarized, partially polarized, or essentially completely polarized. In the unpolarized regions, the polarization directions of the domains differ chaotically from one another, i.e., irregularly from one another. This essentially unpolarized state is also referred to below as the "original state" of the deformation body, and in particular its change section, since the deformation body or its respective change section has not yet been subjected to a polarization process.

[0011] The change section can be a partial region of the deformation body or be identical to the deformation body. Viewed in the thickness direction, the change section lies within an excitation electrode adjacent to the deformation body or overlaps at least 25% and preferably at least 50% of the area of ​​the excitation electrode. By appropriately controlling the excitation electrode, which is in each case adjacent to a respective first contact surface of the deformation body, and applying a reference voltage to the reference electrode, which is in each case adjacent to a respective second contact surface of the same deformation body, which is oriented opposite to the first contact surface, an electric field is generated that runs along the thickness direction of the deformation body, and a voltage pulse is applied.

[0012] According to the invention, the deformation bodies of an actuator unit are realized according to one of the following two definitions:

[0013] (P1) Each of the at least one change section of the deformation body or of the at least one deformation body is exclusively a change section whose domains, for commissioning the deformation body or the actuator unit or the drive device, are completely or essentially completely polarized from an original polarization state in a polarization direction that runs along the respective thickness direction and has a corresponding polarity. With a deformation body or actuator segment according to definition (P1), only a non-permanent and reversible change in expansion and generally an increase in expansion for the period of application or application of an electrical voltage or an electric field can be realized, which increases when the electrical voltage or field is removed.of the electric field essentially decreases or disappears again, so that the initial length of the deformation body in the direction of extension, in particular with a deviation of 20%, is automatically restored or essentially restored.

[0014] (P2) Each of the at least one change section of the deformation body or of the at least one deformation body is exclusively a change section whose domains, in a starting state for commissioning the deformation body or the actuator unit or the drive device, are polarized by a polarization process from an original polarization state to a proportion of >0% and <100% and preferably to a proportion between 10% and 90% in a polarization direction that runs along the respective thickness direction, whereby a voltage pulse applied to corresponding electrodes in the thickness direction causes an energy-free, permanent or irreversible change in length of the deformation body or actuator segment in the thickness direction, caused by a polarization process or a depolarization process, which continues as long as no voltage is applied to the same actuation electrodes.

[0015] A material according to definition (P1) is also referred to as a "hard PZT material," and a material realized according to definition (P2) is also referred to as a "soft PZT material." A deformation body of an actuator unit according to definition (P1) is also referred to herein as "hard" or "active," and a deformation body of an actuator unit according to definition (P2) is also referred to herein as "soft" or "semi-active."

[0016] In the case of deformation bodies or actuator segments of an actuator unit according to the invention, the direction of extension runs essentially in the longitudinal direction of the respective deformation body both in the case of a deformation body or actuator segment according to (P1) and in the case of a deformation body or actuator segment according to (P2).

[0017] To achieve state (P1), prior to commissioning of the at least one change section of the deformation body or actuator segment, a remanent polarization of the at least one change section of the deformation body is established under the influence of a DC electric field. Herein, the deformation body or actuator segment is also understood as a deformation body made of a fully polarized material according to definition (P1).

[0018] An actuator segment or deformation body according to (P1) thus experiences an expansion in the longitudinal direction of the respective actuator segment or deformation body by applying an electrical voltage or a voltage pulse to the actuation electrodes which are applied to the respective actuator segment or deformation body, wherein this expansion only occurs as long as the voltage or the voltage pulse is applied essentially constantly and when the voltage is removed it disappears completely or essentially completely and is thus reversible.

[0019] In contrast, with a deformation body according to the definition (P2) by appropriate control, ie by applying a single voltage pulse or several electrical voltage pulses to the actuation electrodes applied to the respective deformation body, a change in the expansion of the deformation body to which the same actuation electrodes are applied can be generated, which change remains without the application of a voltage, i.e. even after the removal of the electrical voltage and is thus remanent or irreversible and is therefore also referred to herein as "permanent".Therefore, the electromechanical material of a deformation body according to definition (P2), on which actuation electrodes are arranged opposite one another in the direction of deformation or extension, is capable of inducing a polarization process or a depolarization process and a resulting energy-free, permanent change in length due to at least one voltage pulse applied to the actuation electrodes. "Energy-free, permanent change in length" is understood herein to mean a change in length that persists as long as no voltage or voltage pulse is applied to the same actuation electrodes after the at least one voltage pulse.

[0020] In this context, the term “domain” is understood to mean a very small region of a large number of very small regions in which the polarization directions are the same or essentially the same, whereby in a deformation body that is essentially repolarized, i.e. has not been subjected to a polarization process, the polarization directions of the domains are chaotically different from each other, i.e. irregularly different from each other.

[0021] With regard to the deformation body according to definition (P2), it is also conceivable that the domains of the change section have a degree of polarization of 0% (completely unpolarized) or a degree of polarization of 100% (completely polarized), although in this case, restrictions regarding the expansion directions or the corresponding expansion magnitude must be accepted. Thus, with a degree of polarization of 0% or essentially 0%, at least initially, only a remanent increase in expansion can be achieved by applying corresponding voltage pulses, whereas with a degree of polarization of 100% or essentially 100%, initially only a remanent decrease or reduction in expansion can be achieved by applying corresponding voltage pulses.In particular, a deformation body according to definition (P2) can be realized such that a proportion of greater than 0% and less than 100%, in particular a proportion between 1% and 99%, and particularly preferably a proportion between 10% and 90% of the domains of the actuator segment or its deformation body are polarized from an original polarization state in a polarization direction running along the respective longitudinal direction due to a polarization process for commissioning the deformation body. Generally, a "proportion of greater than 0% and less than 100%" can be understood herein as meaning, in particular, a proportion of greater than 1% and less than 99%, and specifically a proportion of greater than 0.1% and less than 99.9%.

[0022] Herein, the deformation body according to definition (P2) is also understood as a deformation body made of a not fully polarized material that is suitable for performing a permanent or remanent relevant length change only as a result of at least one voltage pulse with a magnitude relevant for the respective individual case. This means that the permanent relevant length change persists even if no voltage is applied to the deformation body after the at least one voltage pulse. In this case, a relevant length change is preferably considered to be a length change in the respective longitudinal direction of the deformation body with an amount of 0.1% of the length of the actuator segment or deformation body in the longitudinal direction at a voltage applied to the deformation body that is, for example, below 200 V.Alternatively or additionally, it can be provided that the change in length in the respective longitudinal direction of the actuator segment or deformation body preferably has an amount greater than 0.1 nanometers. In short, this material is also referred to herein as a polarized material, which is suitable for carrying out a permanent change in length due to a voltage pulse. The deformation bodies according to (P2) are controlled by applying an electrical voltage in the form of at least one voltage pulse with a defined amplitude and a defined duration. This results in a permanent change in the degree of polarization of the change section depending on the amplitude and duration of the voltage pulse for a controlled permanent change in the extension of the change section of the deformation body without the presence of an electrical voltage, i.e., even after the previously applied voltage is reduced to a value of zero.

[0023] It may be advantageous for the amplitude of the voltage pulses to be dimensioned for a defined increase in the extension of the change section of the electromechanical element along the extension direction V such that a resulting electric field strength between adjacent electrodes assumes a positive value and is between >0 and 300% of the coercive field strength, and preferably between 50% and 240% of the coercive field strength. The corresponding amplitude can be smaller the longer the duration and / or the greater the number of applied voltage pulses, and conversely, the corresponding amplitude can be larger the shorter the duration and / or the number of applied voltage pulses. Coercive field strength refers to the field strength sufficient to align a majority or all of the dipole moments of the domains of a ferroelectric material in the direction of the electric field (saturation polarization).There is a positive and a negative coercive field strength, which is equal in magnitude for most soft piezoceramics. If the magnitude of the electric field in a ferroelectric deformation body initially polarized in the positive direction along its thickness is reduced in the direction of the negative coercive field strength (negative voltage along the original polarization direction), the dipole moments of the domains of a ferroelectric material, or at least a large part of them, align along a direction opposite to the original polarization direction and thus opposite to the original orientation of the ferroelectric domains.

[0024] Furthermore, it may be advantageous for the amplitude of the voltage pulses for a defined decrease in the extension of the change section of the electromechanical element along the extension direction V to be dimensioned such that the resulting electric field strength between adjacent electrodes assumes a negative value and is between greater than 0% and less than or equal to 200% or 240% of the coercive field strength, and preferably between greater than 0% and less than or equal to 120% of the coercive field strength. Here, too, the corresponding amplitude can be dimensioned smaller the longer the duration and / or the greater the number of applied voltage pulses, and conversely, the corresponding amplitude can be dimensioned larger the shorter the duration and / or the number of applied voltage pulses.

[0025] The embodiments of the method according to the invention influence the following effects resulting from the application of a voltage pulse to a deformation body according to definition (P2) to achieve a permanent change in length of the actuator segment or deformation body: Applying a voltage pulse to a deformation body according to definition (P2) initially causes the change in length of the deformation body to exceed the length that exists as the permanent or remaining or remanent length of the deformation body after the application of the voltage pulse. The voltage pulse causes two components of the change in length of the deformation body, which add up to a resulting change in length of the deformation body:

[0026] (F1) A first component is a piezoelectric length change component, which is a non-energy-dependent or reversible length change component with a relatively short-term length change of the deformation body and whose magnitude significantly exceeds the length change of the deformation body resulting from (F2). The magnitude of the length change or increase in length of the deformation body depends on the magnitude and duration of the applied voltage pulse. Furthermore, the magnitude of the length change or increase in length of the deformation body depends on the current degree of polarization of the electromechanical material according to (P2). The greater the degree of polarization, i.e., the more domains are already aligned, the greater the excess or overshoot of the length change of the deformation body beyond the stated permanent length according to (F2).

[0027] (F2) A second component, which follows the piezoelectric length change component (F1), is a ferroelectric length change component. This is a non-energy-dependent permanent length change component, thus causing a permanent or remanent length change of the deformed body. The ferroelectric component causes an increase in the length of the deformed body, which is caused by a change in the orientation of domains due to the applied voltage pulse. The length change is essentially proportional to the number of domains that have experienced repolarization and thus reorientation due to the voltage pulse. The length change of component (F2) occurs in the same direction as the length change of component (F1). Component (F1) precedes and exceeds the non-energy-dependent permanent length change component (F2), and is therefore greater in magnitude than the length change component (F2).From the time the length change component (F1) has formed until the desired permanent change in length of the deformation body has been reached, a creep process of the deformation body occurs during or within the formation of the length change component (F2). This creep process, starting from the relatively strong first change in length of the deformation body (here: increase in length) and a shortly thereafter partial, inverse change in length of the deformation body (here: decrease in length), causes a further change in length of the deformation body in the direction of the inverse change in length due to the length change component (F1). This further change in length of the deformation body during the creep process is relatively small compared to the length change component (F1). The creep process orthe formation of the length change component (F2) takes longer than the formation of the length change component (F1), and in particular at least by a factor of 2 and especially at least by a factor of 3. The relatively short-term piezoelectric length change component (F1) can exceed the ferroelectric length change component (F2), in particular by a factor of more than 2.

[0028] Since the total change in length of the deformation body due to the change in length component (F1) is significantly greater than that due to the change in length component (F2) and can, for example, be more than twice as large, the change in length component (F1) is also referred to herein as "overshoot". The change in length caused by the component (F2) is the permanent change in length of the deformation body to be achieved or desired by applying the voltage pulse. The component (F1) is greater the greater the applied voltage and the greater the degree of polarization of the material according to (P2). The actuator unit according to the invention and the drive device according to the invention can be used particularly advantageously for movements of the drive device in the nanometer range.

[0029] In order to bring about a movement or change in shape of the drive device according to the invention or a setting state of the drive device, corresponding target specifications are generated. To generate the target specifications, a higher-level setting function can be provided which generates or determines setting commands for a device higher than the setting device, such as an setting device, and which can be functionally connected to the setting device so that it can transmit the setting commands to the setting device. The setting device determines the control signals for the respective electrode of the drive device or the drive devices of a drive device arrangement from the control commands and feeds the control signals to the respective drive device or drive devices. Alternatively, the setting device can be functionally integrated into the higher-level setting function.

[0030] The term “movement of the drive device” or “setting state of the drive device” is understood here to mean the movement or the setting state resulting from this movement of the uppermost or last actuator with respect to the height direction RH of the respective drive device 1 relative to the lowermost or first actuator. As an example, such a lowermost or first actuator in the drive device 1 shown in Figure 23 is assigned the reference symbol “B1” and in this Figure 23 the uppermost or last actuator is assigned the reference symbol “B2”. The setting state shown as an example in Figure 23 shows a curvature of the drive device 1 about the Y-axis and a region-specific extension along the Z-axis, i.e. only realized by some of the actuator units.

[0031] “Setting commands” are understood here as target specifications with which a desired or required movement of the drive device or a desired or required setting state of the drive device is realized.

[0032] The term “along” here means in the context of a directional indication mentioned herein, which in particular can also relate to the course of a contour line or a surface or a direction of a part or a structural component such as an axis or a shaft or a central axis thereof, in relation to a reference direction or a reference axis, that a section of the course or the tangent to a respective contour line or respective surface or the direction in an explicitly or implicitly specified viewing direction deviates locally or in sections by an angle of a maximum of 45 degrees and in particular of a maximum of 30 degrees from the respective reference direction or reference axis to which the respective directional indication is related.The term "transverse" means herein in the context of a directional indication mentioned herein, which in particular can also relate to the course of a contour line or a surface or a direction of a part or a structural component such as an axis or a shaft or a central axis thereof, in relation to a reference direction or a reference axis, that a section of the course or the tangent to a respective contour line or respective surface or the direction in an explicitly or implicitly predetermined viewing direction deviates locally or in sections by an angle which is between 45 degrees and 135 degrees, and preferably by an angle which is between 67 degrees and 113 degrees, from the respective reference direction or reference axis to which the respective directional indication is related.

[0033] Herein, a “distance”, in particular between two objects or two surfaces or reference points, is understood to mean in particular the shortest distance or the shortest distance between the two objects or surfaces or reference points, whereby the shortest distance or the shortest distance is not equal to zero in terms of amount, unless explicitly stated otherwise in this regard.

[0034] Herein, the term "fixed" with respect to two component parts and in particular with respect to two contact points or contact surfaces or reference sides of each of two component parts is understood to mean that the two component parts and in particular the two contact points or contact surfaces or reference sides maintain predetermined positions relative to one another, even if external forces act on at least one of the component parts or internal stresses act in at least one of the component parts or at least one of the component parts executes a movement.

[0035] A "longitudinal direction" or another reference direction of a reference line, such as, in particular, a central axis or a centrally running line or a center line of at least one structural component or part, and in particular of a guideway, is defined herein in particular as a connecting line of the centroids of the smallest cross-sectional areas of the respective structural component along a determined or predetermined direction or between two determined or predetermined ends. In the event that the reference line can be curved or at least partially curved, the reference direction can generally be understood as a local longitudinal direction.However, the reference direction herein can also be understood as the direction of a straight reference line, whereby a line is used to determine the straight reference line whose position relative to the curved line results in the smallest deviation between these lines or the smallest deviation area. The same applies if a straight reference line is to be derived from a curved line.

[0036] A “curved course of a line or edge or surface” means that the surface, seen along a reference direction, has no corners over the entire width running transversely to the reference direction, ie it has a differentiable course.

[0037] "Orientation" with respect to a surface, and in particular a surface, is understood here to mean the normal to the respective surface. If the surface in question is not a straight surface but, for example, a curved surface, the normal to a straight surface of the same size can be used to determine the surface normal, whose position results in the smallest deviation relative to the curved surface.

[0038] The values ​​stated in the embodiments of the method according to the invention are in each case, unless explicitly defined otherwise, to be understood as a range of values ​​whose limit is defined by the deviation of + / - 10% from the respective stated value.

[0039] The term "substantially" with regard to a characteristic or value is understood herein to mean in particular that the characteristic or value contains a deviation of 20% and especially of 10% from the respective specified characteristic or its geometric property or from the respective specified value.

[0040] The invention is described below with reference to the accompanying figures, which show:

[0041] Figure 1 is a perspective view of an embodiment of the actuator unit according to the invention in assembled state,

[0042] Figure 2 shows the embodiment of the actuator unit according to the invention according to Figure 1 in a perspective view, wherein the two actuators of the actuator unit are unfolded to show the arrangement and orientation of the excitation sub-electrodes,

[0043] Figure 3 different perspective views of the first actuator of the

[0044] Actuator unit according to Figure 1: on the one hand in a viewing direction of its first actuator main side and on the other hand in a viewing direction of its second actuator main side,

[0045] Figure 4 is a perspective view of an embodiment of the drive device according to the invention, which is formed from four actuator units in the embodiment according to Figures 1 and 2,

[0046] Figure 5 is a plan view of the embodiment of the drive device according to Figure 4,

[0047] Figure 6 is a perspective exploded view of the embodiment of the drive device according to Figure 4, ,

[0048] Figure 7 is a perspective view of a further embodiment of an actuator unit according to the invention,

[0049] Figure 8 is a plan view of the embodiment of the actuator unit according to Figure 7,

[0050] Figure 9 is a plan view of both actuators of the actuator unit according to Figures 7 and 8, wherein the side of the actuators is shown with two excitation partial electrodes, which are opposite each other in the assembled state of the actuator unit

[0051] Figure 10 is a plan view of an actuator of the actuator unit according to Figures 7 and 8 on the side of the actuator with the collecting electrode

[0052] Figure 11 is a perspective exploded view of a further embodiment of the drive device according to the invention, which is formed from four actuator units,

[0053] Figure 12 is a plan view of both actuators of one of the actuator units of Figure 11, wherein the sides of the actuator units are shown with two excitation sub-electrodes, which are opposite each other in the assembled state

[0054] Figure 13 is a plan view of both actuators of another of the actuator units of Figure 11, wherein the sides of the actuator units are shown with two excitation sub-electrodes, which are opposite each other in the assembled state

[0055] Figure 14 is a plan view of the drive device according to Figure 11,

[0056] Figure 15 is a perspective view of a further embodiment of the drive device according to the invention, which is a variant of the drive device of

[0057] Figure 11 can be understood, Figure 16 is a perspective view of a further embodiment of the drive device according to the invention,

[0058] Figure 17 is a plan view of the drive device according to Figure 16,

[0059] Figure 18 is a perspective view of a further embodiment of the drive unit according to the invention,

[0060] Figure 19 is a plan view of both actuators of the actuator unit of Figure 18, wherein the sides of the actuator units are shown with four excitation sub-electrodes, which are opposite each other in the assembled state of the actuator unit,

[0061] Figure 20 is a perspective view of a further embodiment of the drive device according to the invention,

[0062] Figure 21 is a perspective view of a further embodiment of the drive device according to the invention, which is formed from two drive devices according to Figure 20,

[0063] Figure 22 is a perspective view of a further embodiment of the drive device according to the invention, which is formed from four drive devices according to Figure 20,

[0064] Figure 23 is a schematic side view of the drive device of Figure 22 in a deformed state,

[0065] Figure 24 is a perspective view of an embodiment of a drive device arrangement according to the invention, which is formed from nine drive devices each according to Figure 22,

[0066] Figure 25 shows an embodiment of a drive system according to the invention with a drive device according to the invention according to Figure 4 and with an electrical control device for controlling the drive device,

[0067] Figure 26 shows an embodiment of a drive system according to the invention with a drive device according to the invention according to Figure 4 and with a further electrical control device for controlling the drive device,

[0068] Figure 27 shows an embodiment of a drive system according to the invention with a drive device according to the invention according to Figure 4 and with a further electrical control device for controlling the drive device,

[0069] Figure 28 shows an embodiment of a drive system according to the invention with a drive device according to the invention according to Figure 4 and with a further electrical control device for controlling the drive device,

[0070] Figure 29 shows an embodiment of a drive system according to the invention with a drive device according to the invention according to Figure 4 and with a further electrical control device for controlling the drive device,

[0071] Figure 30 is a diagram of a command assignment according to the invention for activating actuator units of the drive device according to Figure 4,

[0072] Figure 31 is a diagram of a further command assignment according to the invention for activating actuator units of the drive device according to Figure 4,

[0073] Figure 32 is a diagram of a further command assignment according to the invention for activating actuator units of the drive device according to Figure 4.

[0074] The actuator unit 1 according to the invention is intended for use in a drive device A and has a first actuator A1 and a second actuator A2.

[0075] The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 and variants thereof are described in detail below:

[0076] The first actuator A1 is essentially plate-shaped and, due to its intended extension, defines a first actuator main side S11 and a second actuator main side S12, which define opposite sides with respect to the first actuator A1. The first actuator A1 has a first deformation body 30 that can be deformed by an electrical voltage and is delimited by a first main surface 31 and a second main surface 51 that is oriented opposite to the first main surface 31. The two main surfaces 31, 51 are spaced apart from one another by a thickness T1 that extends in a thickness direction or reference direction RT1 of the first deformation body 30.The main surfaces 31, 51 of the first actuator A1 are oriented along the thickness direction RT1 and are connected to one another by a circumferential surface 34 extending along the thickness direction RT1 and surrounding the outer contour. The direction of the thickness direction or reference direction RT1 is defined herein such that it has the orientation of the first actuator main side S11 or a central plane defined by the first main surface 31 and the second main surface 51, or that it runs along the orientation of such a central plane.

[0077] A first excitation electrode arrangement E11 with a first excitation electrode E111 and a second excitation electrode E112 is arranged on the first actuator main side S11 of the first actuator A1 and on the first main surface 31 of the first deformation body 30. The first main surface 31 has a first support surface 31b, on which the first excitation electrode E111 is located, and a second support surface 31c, on which the second excitation electrode E112 is located. The first excitation electrode E111 and the second electrode E112 are generally arranged laterally and opposite one another with respect to a first axis A11. In general, i.e.Each embodiment of the actuator unit 1 according to the invention or drive device, additionally with any other feature provided according to the invention of a combination of features described herein, can have a first excitation electrode E111 and a second excitation electrode E112, which have different shapes and / or surface sizes from one another. The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 is designed such that the first excitation electrode E111 and the second electrode E112 have an identical geometric shape to one another and the first axis A11 is a first axis of symmetry, so that the excitation electrodes E111, E112 are arranged symmetrically to one another with respect to the first axis of symmetry A11. In Figure 2, the excitation electrodes E111, E112 are each represented by hatching.The excitation electrodes E111, E112 are arranged continuously along the first axis of symmetry A11 at a distance D11 from each other, so that the excitation electrodes E111, E112 are electrically insulated from each other. The arrangement shown in Figures 1 and 2.

[0078] Embodiment of the actuator unit 1 according to the invention is designed such that the first main surface 31 of the first deformation body 30 has a circumferential or substantially circumferential and in particular serving as an insulating surface

[0079] Edge region 33, which is delimited from the peripheral surface 34 by a circumferential edge line 39 and which delimits an inner surface 31i of the first main surface 31. The circumferential edge line 39 can, as in the illustrated embodiment, be shaped as an edge line or can be a fictitious line if the peripheral surface 34 and the circumferential edge region 33 merge into one another by a curve. The circumferential edge region 33 can be realized as part of a first main surface 31 of the first deformation body 30, in particular a straight-surface or a curved shape. Alternatively, it can be provided that the circumferential edge region 33 is offset from the planar extension of a region with the support surfaces 31b, 31c on which the excitation electrodes E111, E112 are located, so that the circumferential edge region 33 is designed as a projection or ledge relative to these support surfaces 31b, 31c.The first main surface 31 and in particular the support surfaces 31b, 31c can be straight-faced or curved, so that the edge region 33 can be provided in the thickness direction RT1 from a mean height of the first main surface 31 or the support surfaces 31b, 31c. Alternatively, the edge region 33 can be realized only in at least one section with respect to the circumference of the first main surface 31.

[0080] In general, the excitation electrodes E111, E112 can be realized as plates or foils or as coatings applied to the respective support surface 31b, 31c.

[0081] The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 shows a first actuator A1 with a first axis of symmetry A11 and with a spacing region 32 of the first main surface 31 defined by this axis and in particular, for example, with an insulating surface defined by this axis, which extends parallel or optionally generally along two surface sections 35, 36 of the circumferential surface 34, which run parallel to one another and generally along one another. The surface sections 35, 36 are connected at their aligned ends by a surface section 37, 38 of the circumferential surface 34, which in the illustrated embodiment run parallel to one another and generally along one another.

[0082] Optionally, each of the excitation electrodes E111, E112 can have: a deformation region 41 or 42, in which, as intended, a deformation of the first deformation body 30, on which the respective excitation electrode E111, E112 is located, can be brought about upon appropriate electrical excitation, and a connection region 43 or 44 for electrically contacting the respective excitation electrode, with which the respective excitation electrodes E111, E112 extend from their deformation region 41 or 42 to the circumferential edge line 39 or up to a distance from the circumferential edge line 39.

[0083] The deformation body 30 of the embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 has two connection regions 43 and 44, which extend parallel to one another from their respective deformation regions 41 and 42, respectively, and end at an edge side of the first deformation body 30 extending transversely to the first axis of symmetry A11, in particular at the edge line 39. Alternatively, the connection regions 43 and 44 can be designed such that they end at a distance from the circumferential edge line 39 or at a distance from the surface section 37.

[0084] In the event that the excitation electrodes E111, E112 of the first actuator main side S11 have the connection regions 43 and 44, as shown in Figures 1 to 3, the edge region 33 serving in particular for electrical insulation can be interrupted only in the small sections of the connection regions 43 and 44, the remaining part of the edge region 33 being realized as a substantially circumferential edge region 33.

[0085] The second actuator main side S12 of the first actuator A1 is provided with a reference electrode E12 or common electrode, which is located on the second main surface 51 of the first deformation body 30 of the first actuator 1.

[0086] The reference electrode E12 of the first actuator A1 is located on a support region of the first deformation body 30 and has a deformation region 52, which, particularly as viewed in the thickness direction RT1, can be a surface extending centrally on the second actuator main side S12. The support region of the reference electrode E12 is bordered or substantially bordered, at least in sections, by an outer circumferential or substantially circumferential edge region 53 of the second main surface 51, which edge region 53 serves, in particular, for electrical insulation. The edge region 53 is delimited from the circumferential surface 34 by a circumferential edge line 59, which, as in the illustrated embodiment, can be shaped as an edge line or can be a fictitious line if the circumferential surface 34 and the circumferential edge region 53 merge into one another via a curvature.The peripheral edge region 53 can be realized as part of a second main surface 51 of the first deformation body 30, which can be in particular straight or curved. Alternatively, the peripheral edge region 53 can be offset from the planar extension of the support surface on which the reference electrode E12 is located, so that the peripheral edge region 33 is formed as a projection or ledge relative to this support surface.

[0087] Optionally, the reference electrode E12 of the first actuator A1 can have: the deformation region 52, in which, as intended, a deformation of the first deformation body 30, on which the reference electrode E12 is located, can be effected upon appropriate electrical excitation, and at least one connection region with which the reference electrode E12 extends from its deformation region 52 to the circumferential edge line 59 or up to a distance from the circumferential edge line 39. The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 has four connection regions 55, 56, 57, and 58. Each of these connection regions 55, 56, 57 and 58 extends from the deformation region 52 to one of the surface sections 35, 36, 37, 38 of the circumferential peripheral surface 34 and / or to the edge line 59 and / or to a distance of the respective surface section 35, 36, 37, 38 and / or beyond the edge line 59.The connection areas 55, 56, 57 and 58 of the embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 extend up to the respective surface section 35 or 36 or 37 or 38 and up to the edge line 59.

[0088] In the case that the reference electrode E12 of the second actuator main side S12 has at least one of the connection regions 55, 56, 57 and 58, as shown in Figures 1 to 3, the edge region 53 can be interrupted only in the region of the respective connection region, so that the edge region 53 is realized as a substantially circumferential edge region 53.

[0089] In general, the reference electrode E12 can be implemented such that it has only one connection area or more than one connection area. Preferably, the number of connection areas of the reference electrode E12 is equal to the total number of all excitation electrodes of the actuator unit 1 or at least equal to the total number of all excitation electrodes of the actuator unit 1.

[0090] The second actuator A2 of the embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 is implemented identically to the first actuator A1 of the embodiment shown in Figures 1 and 2 and is described below in an analogous manner to the description of the first actuator A1:

[0091] The second actuator A2 is essentially plate-shaped and, due to its intended extension, defines a first actuator main side S21 and a second actuator main side S22, which define opposite sides with respect to the second actuator A2. The second actuator A2 has a second deformation body 60 that can be deformed by an electrical voltage and is delimited by a first main surface 61 and a second main surface 81 that is oriented opposite to the first main surface 61. The two main surfaces 61, 81 are spaced apart from one another by a thickness T2 that extends in a second thickness direction or second reference direction RT2 of the second deformation body 60.The main surfaces 61, 81 of the second actuator A2 are oriented along the thickness direction RT2 and are connected to one another by a circumferential surface 64 extending along the thickness direction RT2 and surrounding the outer contour. The direction of the reference direction RT2 is defined herein such that it has the orientation of the second actuator main side S11 or a central plane defined by the first main surface 61 and the second main surface 81, or runs along the orientation of such a central plane.

[0092] A first excitation electrode arrangement E21 with a first excitation electrode E211 and a second excitation electrode E212 is arranged on the second actuator main side S21 of the second actuator A2 and on the first main surface 61 of the second deformation body 60. The first main surface 61 of the second deformation body 60 has a first support surface 61b on which the first excitation electrode E211 is located, and a second support surface 61c on which the second excitation electrode E212 is located. The first excitation electrode E211 and the second electrode E212 are generally arranged laterally and opposite one another with respect to a second axis A21. In general, i.e.Each embodiment of the actuator unit 1 according to the invention or drive device, in addition to any other feature provided according to the invention of a combination of features described herein, can have a first excitation electrode E211 and a second excitation electrode E212 that have different shapes and / or surface areas. The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 is designed such that the first excitation electrode E211 and the second electrode E212 have an identical geometric shape and the second axis A21 is a first axis of symmetry, so that the excitation electrodes E211, E212 are arranged symmetrically to one another with respect to the second axis of symmetry A21. In Figure 2, the excitation electrodes E211, E212 are each represented by hatching.The excitation electrodes E211, E212 are arranged along the first axis of symmetry A21 at a distance D21 from each other, so that the excitation electrodes E211, E212 are electrically insulated from each other.

[0093] The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 is designed such that the first main surface 61 of the second deformation body 60 has a circumferential or substantially circumferential edge region 63, which serves in particular for electrical insulation and is delimited from the circumferential surface 64 by a circumferential edge line 69 and which delimits an inner surface 61i of the second main surface 61. The circumferential edge line 69 can, as in the embodiment shown, be shaped as an edge line or can be a fictitious line if the circumferential surface 64 and the circumferential edge region 63 merge into one another by a curve. The circumferential edge region 63 can be realized as part of a first main surface 61 of the second deformation body 60, which can be shaped in particular as a straight surface or as a curved surface.Alternatively, it can be provided that the circumferential edge region 63 is offset from the planar extension of a region with the support surfaces 61b, 61c on which the excitation electrodes E211, E212 are located, so that the circumferential edge region 63 is offset relative to these.

[0094] Support surfaces 61b, 61c are formed as a projection or ledge. The first main surface 61 and in particular the support surfaces 61b, 61c can be straight-surfaced or curved, so that the edge region 63 can be provided in the thickness direction RT2 from a mean height of the first main surface 61 or the support surfaces 61b, 61c. Alternatively, the edge region 63 can be realized only in at least one section with respect to the circumference of the first main surface 61.

[0095] In general, the excitation electrodes E211, E212 can be realized as plates or foils or as coatings applied to the respective support surface 61b, 61c.

[0096] The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 shows a second actuator A2 with a second axis of symmetry A21 and with a distance region 62 of the first main surface 61 defined by the latter and in particular, for example, with a recess defined by the latter, which extends parallel or optionally generally along two surface sections 65, 66 of the circumferential surface 64, which run parallel to one another and generally along one another. The surface sections 65, 66 are connected at their ends directed in the same direction by a surface section 67, 68 of the circumferential surface 64, which, in the embodiment shown, run parallel to one another and generally along one another. The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 shows actuators A1, A2 with deformation bodies 30, 60 which, viewed in the reference direction RT1, RT2, are rectangular orare cuboid-shaped. Their axes of symmetry A11, A12 run centrally through oppositely arranged surface sections 37, 38 and 67, 68, respectively, i.e., viewed in the height direction RH, centrally through opposite side edges. Each embodiment of the drive device according to the invention can also have deformation bodies 30, 60 that, viewed in the reference direction RT1, RT2, are shaped other than rectangular, i.e., round, oval, or generally polygonal, and for which no axis of symmetry can be defined. Optionally, each of the excitation electrodes E211, E212 can have: a deformation region 71 or 72, in which, as intended, a deformation of the second deformation body 60, on which the respective excitation electrode E211, E212 is located, can be brought about upon appropriate electrical excitation, and a connection region 73 or 74, with which the respective excitation electrode E211, E212 can be separated from its deformation region 71 or72 to the circumferential edge line 69 or to a distance from the circumferential edge line 69.

[0097] The deformation body 60 of the embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 has two connection regions 73 and 74, which extend parallel to one another from their respective deformation regions 71 and 72, respectively, and end at an edge side of the second deformation body 60 extending transversely to the second axis of symmetry A21, in particular at the edge line 69. Alternatively, the connection regions 73 and 74 can be designed such that they end at a distance from the circumferential edge line 69 or at a distance from the surface section 67.

[0098] In the case that the excitation electrodes E211, E212 of the second actuator main side S21 have the connection regions 73 and 74, as shown in Figures 1 to 3, the edge region 63 can be interrupted in the regions of the connection regions 73 and 74, so that the edge region 63 is realized as a substantially circumferential edge region 63.

[0099] On the second actuator main side S22 of the second actuator A2, a reference electrode E22 or common electrode is provided, which is located on the second main surface 81 of the second deformation body 60 of the second actuator A2.

[0100] The reference electrode E22 of the second actuator A1 is located on a support region of the second deformation body 60 and has a deformation region 82, which, in particular as viewed in the thickness direction RT1, can be a surface extending centrally on the second actuator main side S22. The support region of the reference electrode E22 is bordered or substantially bordered, at least in sections, by an outer peripheral or substantially peripheral edge region 83 of the second main surface 81, which edge region 83 serves, in particular, for electrical insulation. The edge region 83 is delimited from the peripheral surface 64 by a peripheral edge line 89, which, as in the illustrated embodiment, can be shaped as an edge line or a fictitious line if the peripheral surface 64 and the peripheral edge region 83 merge into one another by a curve.The peripheral edge region 83 can be realized as part of a second main surface 81 of the second deformation body 60, in particular a straight-surface or curved surface. Alternatively, it can be provided that the peripheral edge region 83 is offset from the planar extension of the support surface on which the reference electrode E22 is located, so that the peripheral edge region 63 is formed as a projection or ledge relative to this support surface.

[0101] Optionally, the reference electrode E22 of the second actuator A2 can have: the deformation region 82, in which, upon appropriate electrical excitation, a deformation of the second deformation body 60, on which the reference electrode E22 is located, can be effected, and at least one connection region with which the reference electrode E22 extends from its deformation region 82 to the circumferential edge line 89 or up to a distance from the circumferential edge line 69. The embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 has four connection regions 85, 86, 87, and 88. Each of these connection regions 85, 86, 87 and 88 extends from the deformation region 82 to one of the surface sections 65, 66, 67, 68 of the circumferential peripheral surface 64 and / or to the edge line 89 and / or to a distance of the respective surface section 65, 66, 67, 68 and / or beyond the edge line 89.The connection areas 85, 86, 87 and 88 of the embodiment of the actuator unit 1 according to the invention shown in Figures 1 and 2 extend up to the respective surface section 65 or 66 or 67 or 68 and up to the edge line 89.

[0102] In the case that the reference electrode E22 of the second actuator main side S22 has at least one of the connection regions 85, 86, 87 and 88, as shown in Figures 1 to 3, the edge region 83 can be interrupted in the region of the respective connection region, so that the edge region 83 is realized as a substantially circumferential edge region 83.

[0103] In general, the reference electrode E22 can be implemented such that it has only one or more than one connection area. Preferably, the number of connection areas of the reference electrode E22 is equal to the total number of all excitation electrodes of the actuator unit 1 or at least equal to the total number of all excitation electrodes of the actuator unit 1.

[0104] According to the invention, the actuator unit 1 can be configured with any of the combinations of features described herein such that the first actuator A1 and the second actuator A2 are arranged one on top of the other such that the first excitation electrode arrangement E11 and the second excitation electrode arrangement E21 are implemented substantially identically and, viewed in the thickness directions RT1, RT2, overlap one another.

[0105] According to the invention, the actuator unit 1 can be configured with any of the combinations of features described herein such that the respective excitation electrodes of the excitation electrode arrangements E11, E21 are each arranged symmetrically to one another with respect to an axis of symmetry A11, A21.

[0106] In this case, 1 with otherwise each of the combinations of features described herein, it can be provided in particular that the first deformation body 30 and the second deformation body 60 are each shaped substantially as a rectangle, wherein the first excitation electrode arrangement E11 and the second excitation electrode arrangement E21 each have at least two excitation electrodes E111, E112, E211, E212, wherein two excitation electrodes E111, E112, E211, E212 are each symmetrical to one another with respect to an axis of symmetry A11, A21 and wherein the axis of symmetry A11, A21 of the respective first main surface 31, 51, 61, 81 is a center line thereof.

[0107] Alternatively, 1 with otherwise each of the combinations of features described herein, it can be provided in particular that the first deformation body 30 and the second deformation body 60 are each shaped substantially as a rectangle, wherein the first excitation electrode arrangement E11 and the second excitation electrode arrangement E21 each have at least two excitation electrodes E111, E112, E211, E212, wherein two excitation electrodes E111, E112, E211, E212 are each symmetrical to one another with respect to an axis of symmetry A11, A21 and wherein the axis of symmetry A11, A21 of the respective first main surface 31, 51, 61, 81 is a diagonal line thereof.

[0108] According to the invention, the actuator unit 1 with otherwise any of the combinations of features described herein can be configured such that the first excitation electrode arrangement E11 and the second excitation electrode arrangement E21 are located symmetrically with respect to a straight plane extending transversely to the thickness direction RT1 of the first deformation body D1 and transversely to the thickness direction RT2 of the second deformation body D2.According to the invention, the actuator unit 1 can be configured with any of the feature combinations described herein such that the first actuator A1 and the second actuator A2 are arranged one on top of the other such that their thickness directions RT1, RT2 run parallel to one another, that the first excitation electrode arrangement E11 and the second excitation electrode arrangement E21 are arranged facing one another, and that at least two respectively opposite excitation electrodes E111, E112, E211, E212 of the first excitation electrode arrangement E11 and the second excitation electrode arrangement E21 touch one another. In this case, sections of the respectively opposite excitation electrodes E111, E112, E211, E212 or the entire surfaces thereof can touch one another.In particular, it can be provided that each of the excitation electrodes E111, E112, E211, E212 of the first excitation electrode arrangement E11 and the second excitation electrode arrangement E21, which are located opposite one another, touch each other.

[0109] Alternatively, according to the invention, the actuator unit 1 with otherwise any of the combinations of features described herein can be configured such that the first excitation electrode arrangement E11 and the second excitation electrode arrangement E21 are arranged at a distance from each other which runs in their thickness directions RT1, RT2.

[0110] The embodiment of the actuator unit 1 shown in Figures 1 and 2 comprises a first deformation body 30 and a second deformation body 60, each of which is cuboid-shaped. Alternatively, however, depending on the intended use, these can also have a different shape, e.g., a shape with a circular or oval base, or the shape of a polyhedron, as seen in the respective reference direction RT1, RT2.

[0111] According to the invention, it can be provided for an actuator unit 1 in particular that (a) the material of the first deformation body 30, (b) the material of the second deformation body 60 is defined in such a way that one of the materials (a), (b) is realized according to one of the following definitions (P1), (P2) or both materials (a), (b) are realized according to one of the following definitions (P1), (P2) or the material (a) is realized according to one of the following definitions (P1), (P2) and the material (b) is realized according to a respective other of the following definitions (P1), (P2).

[0112] According to the invention, it can be provided, in particular, for an actuator unit 1 that all deformation bodies 30, 60 of the actuator unit 1 are both realized according to the definition (P1) mentioned herein or both according to the definition (P2) mentioned herein. However, an actuator unit 1 is preferred in which one deformation body is realized according to the definition (P1) mentioned herein and the correspondingly other deformation body is realized according to the definition (P2) mentioned herein. An actuator unit 1 is also conceivable in which one deformation body is realized according to the definition (P1) mentioned herein and in which the other deformation body is completely or substantially completely unpolarized.

[0113] The actuator unit 1 according to the invention is defined as an arrangement of the first actuator A1 and the second actuator A2. This arrangement is defined such that the first actuator A1 and the second actuator A2 are arranged on top of one another in such a way that

[0114] (K1) that the first axis of symmetry A11 and the second axis of symmetry A21 run along each other and

[0115] (K2) that the first thickness direction or reference direction RT 1 of the first actuator A1 and the second thickness direction or reference direction RT2 of the second actuator A2 are directed opposite to each other and can in particular run parallel to each other and can in turn coincide with each other.

[0116] Preferably, one or more of the following criteria are met:

[0117] (K3) the first excitation electrode arrangement E11 of the first actuator A1 and the second excitation electrode arrangement E21 of the second actuator A2 are identical in size and shape, as seen in the reference direction RT1 or the reference direction RT2,

[0118] (K4) the excitation electrodes of the first actuator 1 and the second actuator 2, i.e. according to the embodiment of Figures 1 to 3, the excitation electrodes E111, E112, E211, E212 are shaped symmetrically to each other,

[0119] (K5) the excitation electrode E111 of the first actuator 1 and the excitation electrode E211 of the second actuator 2 are located one above the other, as seen in the reference direction RT1 or the reference direction RT2, in such a way that they completely overlap each other,

[0120] (K6) the excitation electrode E112 of the first actuator 1 and the excitation electrode E212 of the second actuator 2 are located one above the other, as seen in the reference direction RT1 or the reference direction RT2, in such a way that they completely overlap each other.

[0121] To form a drive device A with at least one actuator unit 1, the actuator unit 1 has: excitation electrode connection parts CE, by means of which the excitation electrodes can be electrically connected to a respective excitation electrode control line (not shown in the figures), and reference electrode connection parts CR, by means of which the reference electrodes can be electrically connected to at least one reference electrode bus line (not shown in the figures).The line connection parts C are arranged such that, viewed in the thickness direction or reference direction, they at least partially overlap the respective electrode and thereby the respective deformation region and / or the respective connection region of the respective electrode or contact in a butt connection and protrude beyond the actuator unit 1, so that they can be electrically connected to a respective control line (not shown in the figures) which runs outside the respective actuator unit.

[0122] For the drive device described herein, a height direction RH is generally defined, which runs along or in the direction of the thickness direction RT1 and along the thickness direction RT2. The orientation of the height direction RH is defined such that it runs in the respective drive device 1, e.g. in the illustrations in Figures 1, 4, 23, 24, from the lowest or first actuator to the uppermost or last actuator, wherein the term "first actuator" refers in particular to an actuator fixed to a bearing device and the term "last actuator" refers to the actuator that is coupled or fastened to a component to be moved by the operation of the respective drive device 1, so that during operation the "last actuator" executes a controlled or required movement, i.e. an output movement. A bearing device is shown schematically as an example in Figure 24, in which it is assigned the reference symbol L.The "first actuator" is therefore also referred to herein as the "base actuator." The "last actuator" is therefore also referred to herein as the output actuator with reference to an actuated movement of the drive device according to the invention or an actuated setting state of the drive device.

[0123] The movement of the component to be moved, which is caused by the output movement of the output actuator of the respective drive device, is also referred to herein as the initial positioning movement of the component to be moved, and its result is referred to as the initial positioning state. The component to be moved can be a rotor or a runner.

[0124] For a drive device A described herein, a coordinate system is defined whose X-axis and Y-axis span the center plane of the drive unit with the base actuator, wherein the center plane is the plane of symmetry for the actuators of this drive unit. The origin of the coordinate system can in particular be a central point of the actuator unit to which the base actuator belongs, wherein the central point lies on the center plane. The Z-axis of the coordinate system of the drive device A runs in the direction RT1 or alternatively in the height direction RH of the respective drive device 1 when this is in its neutral, i.e. non-actuated state. The height direction RH can also be a center line in the actuated state.

[0125] In general, the X-axis can be identical to a center line of the base actuator. If the base actuator has two excitation electrodes arranged symmetrically to each other, the X-axis is preferably identical to the axis of symmetry A11 of the two excitation electrodes. If the base actuator has two pairs of excitation electrodes arranged symmetrically to each other, the X-axis is preferably identical to the axis of symmetry A11 of each pair of excitation electrodes.

[0126] The embodiment of the drive device A according to the invention shown in Figures 1 and 2, which is provided with the reference symbol “200”, has in this regard:

[0127] (L1) an excitation electrode connection part CE1, which is located between the connection area 43 of the first excitation electrode E111 of the first actuator A1 and the connection area 73 of the first excitation electrode E211 of the second actuator A2 and contacts both connection areas,

[0128] (L2) an excitation electrode connection part CE2, which is located between the connection area 44 of the second excitation electrode E112 of the first actuator A1 and the connection area 74 of the second excitation electrode E212 of the second actuator A2 and contacts both connection areas,

[0129] (L3) a reference electrode connection part CR, which contacts a connection area 55, 56, 57, 58 of the reference electrode E12 of the first actuator A1,

[0130] (L4) a reference electrode connection part CR, which contacts a respective connection region 85, 86, 87, 88 of the reference electrode E22 of the second actuator A2. Each of the connection parts can be fastened to at least one deformation body of an actuator unit or between the two deformation bodies of an actuator unit. Alternatively or additionally, each of the connection parts can be fastened to the respective electrode. Each of the connection parts can be implemented as an independent piece or component, in particular separate from the respective excitation electrode or reference electrode, which is arranged on the respective electrode in such a way that the connection part partially covers the connection region of the respective electrode as seen in the height direction RH, or the connection part forms a butt connection with the connection region of the respective electrode.Alternatively, the connecting parts can also be implemented as end sections of the connection area of ​​the respective electrode.

[0131] In particular, it can be provided that an outer end portion of each of the connecting parts of a drive device A extends outward beyond the outer circumferential surface 34, 64 of the deformation bodies 30, 60, as seen in the height direction RH. In this way, different electrodes can be electrically connected by a connecting line running along the height direction RH and can be controlled with the same signal if the connecting parts connected to these electrodes are located one above the other as seen in the height direction RH. In this way, a relatively simple electrical connection is possible even for drive devices with a relatively large number of actuator units.

[0132] Generally according to the invention, a drive device A with an actuator unit 1, which comprises a first actuator A1 and a second actuator A2, can carry out the following movements or changes in shape of the drive device A:

[0133] (D1) a movement or change in shape in the height direction RH, i.e. in the Z-axis of the respective drive device A, i.e. an expansion and a contraction of the actuator unit 1,

[0134] (D2) a tilting of the first actuator A1 and the second actuator A2 relative to each other about a first tilting axis and thus a curving of the drive device A about a first curvature axis, wherein the tilting or curving takes place about the first axis of symmetry A11 and the second axis of symmetry A21, e.g. about the X-axis of the respective drive device A.

[0135] By arranging a second actuator unit 2 in the height direction RH on a first actuator unit 1 to form a drive device A such that the symmetry axes A11, A12 of the first actuator unit 1 run transversely or perpendicularly to the symmetry axes A21, A22 of the second actuator unit 2, the following change in shape of the drive device A can be achieved:

[0136] (D1) a movement or change in shape in the Z-axis of the respective drive device A,

[0137] (D3) tilting the first actuator A1 and the second actuator A2 relative to each other about a second tilting axis and thus curving the drive device A about a second curvature axis, wherein the tilting or curving takes place about the first axis of symmetry A11 and the second axis of symmetry A21 of this second actuator unit 1, wherein these axes of symmetry A11, A12 are transverse or perpendicular to the axes of symmetry A11, A12 of the first actuator unit 1 according to (D2), i.e. for example about the Y-axis of the respective drive device A.

[0138] With the above-mentioned arrangement of two actuator units 1, movements or changes in shape according to (D1), D2), (D3), i.e. in the Z-axis and additional tilting movements, i.e. overall a curvature of the respective drive device A around both the X-axis and the Y-axis, can be realized with appropriate actuation.

[0139] These movements or changes in shape according to (D1), D2), (D3) with corresponding actuation of the drive device A in the aforementioned arrangement can be realized both with deformation bodies 30, 60 according to the definition (P1) mentioned herein, i.e. with deformation bodies 30, 60 each with a polarized change section, and with deformation bodies 30, 60 according to the definition (P2) mentioned herein, i.e. with deformation bodies 30, 60 each with a partially polarized change section.

[0140] In the figures, connection parts CE that are connected to excitation electrodes that are applied to deformation bodies 30, 60 according to the definition (P1) mentioned herein are designated "active," and connection parts CE that are connected to excitation electrodes that are applied to deformation bodies 30, 60 according to the definition (P2) mentioned herein are designated "semi-active." Following these designations, the suffixes "X1," "X2," "Y1," and "Y2" indicate the output movement of the respective actuator unit that occurs when the respective excitation electrode is individually excited. In this regard, the following designations are defined in detail herein:

[0141] The designations “active X1” or “semi-active X1” mean that the excitation of the affected excitation electrode causes a tilting movement of the output actuator around the X-axis, depending on the definition, in a first direction of rotation, e.g. in the direction of a clockwise rotation.

[0142] The designations “active X2” or “semi-active X2” mean that the excitation of the affected excitation electrode causes a tilting movement of the output actuator around the X-axis, in a direction of rotation that is opposite to the direction of rotation of the aforementioned definition of “X1”, i.e. in the example in the direction of a left rotation.

[0143] As an example, Figure 23 shows a drive device A in the form of a stack of 16 drive devices 1 according to Figures 1 to 3 in a setting state in which all drive devices, which are formed from two actuators, form a curvature around the Y-axis, whereby the drive device A as a whole forms a curvature around the Y-axis.

[0144] A further embodiment of the drive device A according to the invention, which is provided with the reference numeral "200," is shown in Figures 4 to 6. Figures 4 and 6 show that the drive device 200 is composed of four drive devices A, each realized according to Figures 1 to 3. The individual actuator units are also specifically provided with the reference numerals 201, 202, 203, 204 in Figures 4 and 6.

[0145] The drive device 200 can in particular be implemented such that one or more of the following definitions is or are fulfilled:

[0146] (M 1 ) at least one actuator unit of the actuator units 201, 202, 203, 204 has only deformation bodies 30, 60 that are realized according to the definition (P1 ), and all further actuator units of the actuator units 201, 202, 203, 204 have only deformation bodies 30, 60 that are realized according to the definition (P2),

[0147] (M2) At least one actuator unit of the actuator units 201, 202, 203, 204 has only deformation bodies 30, 60 that are realized according to definition (P2), and all other actuator units of the actuator units 201, 202, 203, 204 have only deformation bodies 30, 60 that are realized according to definition (P1). Preferably, the drive device 200 according to Figures 4 to 6 is realized according to one of the following definitions:

[0148] (M3) two of the actuator units and, for example, the two outer actuator units 201, 204 have only deformation bodies 30, 60 that are realized according to the definition (P1), and all other actuator units of the actuator units 201, 202, 203, 204 have only deformation bodies 30, 60 that are realized according to the definition (P2),

[0149] (M4) two of the actuator units and, for example, the two outer actuator units 201, 204 have only deformation bodies 30, 60 that are realized according to the definition (P2), and all other actuator units of the actuator units 201, 202, 203, 204 have only deformation bodies 30, 60 that are realized according to the definition (P1),

[0150] (M5) all actuator units 201, 202, 203, 204 have only deformation bodies that are realized according to the definition (P2).

[0151] The embodiments of the drive device 200 according to the invention described herein with a plurality of actuator units, e.g. the actuator units 201, 202, 203, 204 according to Figures 4 to 6, can be realized according to one of the following definitions in addition to each of the definitions (M1), (M2), (M3), (M4):

[0152] (M6) the actuator units 201, 202, 203, 204 are arranged along the height direction RH one after the other by 90 degrees relative to each other about an axis which runs along the height direction RH, relative to an arrangement of two actuator units in each case, in which the excitation electrodes of the first actuators 30 and of the second actuators 60 essentially overlap each other as seen in the height direction RH.

[0153] With the drive device 200 in an arrangement according to the definitions (M3), (M4), (M5) and (M6), movements or changes in shape according to the definitions (D1), D2), (D3) mentioned herein, i.e. in the Z-axis and additional tilting movements, i.e. overall a curvature of the respective drive device A both about the X-axis and about the Y-axis, can be realized with appropriate actuation.

[0154] In this case, the actuator units of the drive device 200 can be actuated with corresponding actuation of the drive device A in such a way (E1) that the deformation bodies 30, 60, which are realized according to the definition (P1), i.e. with deformation bodies 30, 60 each with a polarized change section, carry out the main deformation of the drive device 200, which is intended to be transmitted to a component to be moved as a controlled or required movement, i.e. movements or changes in shape such as changes in length or curvatures according to (D1), D2), (D3), and

[0155] (E2) that the excitation electrodes on the deformation bodies 30, 60 according to the definition (P2), i.e. with a partially polarized change section, are excited in such a way that the deformation bodies 30, 60 according to (P2) carry out movements or changes in shape such as changes in length or curvatures according to (D1), D2), (D3), for example to suppress vibrations and thus reduce noise from initial actuating movements of a component to be moved or to correct errors in an initial actuating movement or an initial actuating state of the component to be moved with respect to actuating commands.

[0156] In the process according to (E2), it should be noted that such an error correction of an initial actuating movement or an initial actuating state can also be carried out by appropriately controlling deformation bodies 30, 60, which are realized according to the definition (P1), i.e. with a polarized change section.

[0157] According to the invention, a plurality of drive devices according to the invention, for example the embodiments of the drive devices 200, each of which is described with reference to Figures 4 to 6, or generally drive devices formed from four actuator units, each of which is realized according to at least one of the definitions (M1), (M2), (M3), (M4), (M5), can be arranged in a row in the Z direction one behind the other or on top of each other, so that a stack of drive devices is produced. With appropriate control of the same, a multiplication of the effects mentioned in (E1) and (E2) is possible if a plurality of actuator units are controlled in the same direction to carry out a predetermined change in the shape of the drive device as a whole.

[0158] By way of example, Figure 20 shows a drive device A formed from two drive devices 200, each according to an embodiment described with reference to Figures 4 to 6, wherein the two drive devices 200 are arranged one behind the other in the Z direction, i.e., lie one on top of the other. This results in a drive device A having a stack of eight actuator units 1.

[0159] Figure 21 shows a drive device A which is formed from four drive devices 200, each according to an embodiment described with reference to Figures 4 to 6, wherein the four drive devices 200 are arranged one behind the other or on top of each other in the Z direction, resulting in a stack of 16 actuator units 1.

[0160] Figure 22 shows a drive device A which is formed from 10 drive devices 200, each according to an embodiment described with reference to Figures 4 to 6, wherein the 10 drive devices 200 are arranged one behind the other or on top of each other in the Z direction, resulting in a stack of 40 actuator units 1.

[0161] Figure 23 shows a drive device A in the form of a stack of

[0162] 16 drive devices 1 according to Figures 1 to 3 in a setting state which is defined by a curvature around the Y-axis.

[0163] Figure 24 shows an embodiment of a drive device arrangement according to the invention. In general, the drive device arrangement according to the invention comprises a plurality of drive devices A mounted on a bearing device L. In particular, the respective base actuators of the drive devices A can be fixed on the bearing device L. The respective height directions RH of the drive devices A extend along and, in particular, substantially parallel to one another, and, in particular, parallel to one another when the drive devices A are each in their neutral position, i.e., are not actuated or controlled.

[0164] Figures 7 to 10 show a further embodiment of the drive device A according to the invention, designated by reference numeral "300." The drive device 300 is formed from an actuator unit, which is assigned reference numeral 301.

[0165] This embodiment of the actuator unit 301 differs from the embodiment of the actuator unit 1 of Figures 1 to 3 in that the actuators each have a central through-bore. Since this embodiment is based on the embodiment of the actuator unit 1 of Figures 1 to 3, the corresponding features are assigned the same reference numerals.

[0166] In the actuator unit 301, the first deformation body 30 has a first through-opening 40 and the second deformation body 60 has a second through-opening 70, wherein the first through-opening 40 and the second through-opening 70 are concentric to one another.

[0167] The embodiment of the actuator unit 301 according to the invention shown in Figures 7 to 10 shows actuators A1, A2 with rectangular deformation bodies 30, 60. Since this embodiment has the features of the embodiment of the actuator unit 1 shown in Figures 1 to 3, the corresponding features are assigned the same reference numerals. Their axes of symmetry A11, A12 run centrally through opposite surface sections 37, 38 and 67, 68, respectively, i.e., viewed in the height direction RH, centrally through opposite side edges.

[0168] Figure 11 shows a further embodiment of the drive device A according to the invention, which is provided with the reference symbol “400”. The drive device 400 is composed of four drive devices 100, each of which is implemented according to Figures 1 to 3. The individual actuator units are also specifically provided with the reference symbols 401, 402, 403, 404 in Figure 11. Since this embodiment of the actuator units 401, 402, 403, 404 is based on the embodiment of the actuator unit 1 in Figures 1 to 3, the corresponding features are assigned the same reference symbols. This embodiment of the actuator units 401, 402, 403, 404 differs from the embodiment of the actuator unit 1 in Figures 1 to 3 in that the actuators each have a central through-bore.Furthermore, this embodiment of the actuator units 401, 402, 403, 404 differs from the embodiment of the actuator unit 301 of Figures 7 to 10 in that the spacing regions 32, 62, which in Figures 7 to 10 are assigned the reference numerals 432 and 462, respectively, run diagonally on the rectangularly shaped first main surfaces 31 and 61, respectively. Figure 12 shows, by way of example, the actuator unit 402 of Figure 11, and Figure 13 shows, by way of example, the actuator unit 404 of Figure 11. As a result, the excitation electrodes E111, E112 and the excitation electrodes E211, E212, respectively, are essentially triangular in shape. The aforementioned features can be provided by any embodiment of the actuator unit 1 or drive device according to the invention with any other feature provided according to the invention of a combination of features described herein.

[0169] The embodiment of the actuator unit 401, 402, 403, 404 according to the invention shown in Figures 11 to 14 is designed such that the first excitation electrodes E111 and E211, respectively, and the second electrodes E112 and E212, respectively, each have an identical geometric shape to one another, and the first axis A11 and the second axis A21 are each axes of symmetry, so that the excitation electrodes E111, E112, respectively, E211, E212, respectively, are symmetrically positioned relative to one another with respect to the respective axis of symmetry A11 and A21, respectively. In Figures 12 and 13, the excitation electrodes E111, E112, E211, E212 are each represented by hatching.

[0170] Due to the diagonal course of the axes A11, A12, the orientation of the X-axis and the orientation of the Y-axis of the coordinate system are each oriented in the diagonal direction.

[0171] The actuator units 401, 402, 403, 404 of the drive device 400 are arranged according to the definition (M4) and according to the definition (M5). In Figure 11, the designation "X1" means that the respective excitation electrode of the respective actuator unit for the deformation of the drive device 400 can contribute to a rotation of the drive device 400 in a first direction of rotation about the X coordinate. The designation "X2" means that the respective excitation electrode of the respective actuator unit for the deformation of the drive device 400 can contribute to a rotation of the drive device 400 in a second direction of rotation about the X coordinate, which is opposite to the first direction of rotation about the X coordinate. The designation "Y1" meansthat the relevant excitation electrode of the respective actuator unit for the deformation of the drive device 400 can contribute to a rotation of the drive device 400 in a first direction of rotation about the Y coordinate, the designation "Y2" that the relevant excitation electrode of the respective actuator unit for the deformation of the drive device 400 can contribute to a rotation of the drive device 400 in a second direction of rotation about the Y coordinate, which is opposite to the first direction of rotation about the Y coordinate.

[0172] In general, the drive device 400 can be implemented in particular such that one or more of the following definitions (M1), (M2), (M3), (M4), (M5), (M6) is or are fulfilled.

[0173] Figure 15 shows a further embodiment of the drive device A according to the invention, which is provided with the reference numeral "500." The drive device 500 is composed of four drive devices. The individual actuator units are provided with the reference numerals 501, 502, 503, 504 in Figure 15. The embodiments of the actuator units 501, 502, 503, 504 are based on the embodiments of the actuator units 401, 402, 403, 404 in Figures 11 to 14, wherein the arrangement and position of the connecting parts are different from the arrangement and position of the connecting parts of the drive device 500.

[0174] Figures 16 and 17 show a further embodiment of the drive device A according to the invention, which is provided with the reference numeral "600." The drive device 600 is composed of two drive devices. The individual actuator units are provided with the reference numerals 601, 602 in Figure 15. The embodiment of the actuator units 601, 602 is based on the embodiments of the actuator units 401, 402, 403, 404 in Figures 11 to 14, wherein the arrangement and position of the connecting parts are different from the arrangement and position of the connecting parts of the drive device 500.

[0175] Figures 18 and 19 show a further embodiment of the drive device A according to the invention, which is provided with the reference numeral "700" and which has a further embodiment of the actuator unit according to the invention, which is assigned the reference numeral 701. In the illustration of Figures 18 to 19, features of the actuator unit 701 that have a similar or identical function with respect to features of the actuator unit 1 according to Figures 1 to 3 are assigned the same reference numerals.

[0176] A first excitation electrode arrangement E71 with a first excitation electrode E711 and a second excitation electrode E712, a third excitation electrode E713, and a fourth excitation electrode E714 is arranged on the first actuator main side S11 of the first actuator A1 and on the first main surface 31 of the first deformation body 30. Firstly, the first excitation electrode E711 and the second electrode E712 are each arranged laterally and opposite one another with respect to a first axis A11, and secondly, the third excitation electrode E713 and the fourth excitation electrode E714 are each arranged laterally and opposite one another with respect to the first axis A11.Furthermore, on the one hand, the first excitation electrode E711 and the third excitation electrode E713 are each located laterally and opposite each other with respect to a second axis A12 and, on the other hand, the second excitation electrode E712 and the fourth electrode E714 are each located laterally and opposite each other with respect to the second axis A12.

[0177] A first excitation electrode arrangement E81 with a first excitation electrode E811 and a second excitation electrode E812, a third excitation electrode E813, and a fourth excitation electrode E814 is arranged on the first actuator main side S21 of the second actuator A2 and on the first main surface 61 of the second deformation body 60. Firstly, the first excitation electrode E811 and the second electrode E812 are each arranged laterally and opposite one another with respect to a first axis A21, and secondly, the third excitation electrode E813 and the fourth excitation electrode E814 are each arranged laterally and opposite one another with respect to the first axis A21.Furthermore, on the one hand, the first excitation electrode E811 and the third excitation electrode E813 are each located laterally and opposite each other with respect to a second axis A22 and, on the other hand, the second excitation electrode E812 and the fourth electrode E814 are each located laterally and opposite each other with respect to the second axis A22.

[0178] Preferably, the first axis A11 and the second axis A12 on the first main surface 31 of the first deformation body 30 are each axes of symmetry, and the first axis A21 and the second axis A22 on the first main surface 61 of the second deformation body 60 are each axes of symmetry. The excitation electrodes on the first main surface 31 of the first deformation body 30 and the excitation electrodes on the first main surface 61 of the second deformation body 60 have an identical geometric shape. In general, ieFor each embodiment of the actuator unit 1 or drive device according to the invention with otherwise any other feature provided according to the invention of a combination of features described herein, the excitation electrodes on the first main surface 31 of the first deformation body 30 and the excitation electrodes on the first main surface 61 of the second deformation body 60 can have different shapes and / or surface sizes from one another.

[0179] The reference electrode or common electrode E12 of the first actuator A1 and the reference electrode or common electrode E22 of the second actuator A2 are realized, as in the embodiments of Figures 1 to 17, on the second main surface 51 of the first deformation body 30 and on the second main surface 81 of the second deformation body 60.

[0180] The actuators 1 and 2 of each embodiment of the actuator unit 1 or drive device according to the invention can generally also have a plurality of reference electrodes or common electrodes on the respective side S11, S22, wherein in this case the reference electrodes can have the same shape as the excitation electrodes of the same actuator 1, 2, wherein these implementations can additionally be provided with any other feature provided according to the invention of a feature combination described herein.

[0181] According to the invention, a drive system AS is also provided which has the drive device 1 according to the invention and a control device G for controlling the drive device 1.

[0182] Figures 25 to 29 illustrate embodiments of such a drive system according to the invention using the example of the drive device 1 according to Figure 4. The control device G has a specification device G10 and an amplifier device G20. Based on target specifications relating to a predetermined target movement or target shape change of the drive device 1, the specification device G10 calculates control signals for each excitation electrode of all actuators of the respective drive device 1 and optionally also for at least one reference electrode of all actuators or at least one of the actuators of the respective drive device 1. The control signals are fed to an amplifier device G20 via at least one control signal line G10a. The at least one control signal line G10a electrically connects the specification device G10 and the amplifier device G20.

[0183] The amplifier device G20 is functionally connected to the excitation electrodes and optionally to at least one reference electrode of the respective drive device 1 and converts the control signals into electrical excitation signals, which are supplied to the individual excitation electrodes via at least one excitation signal line G20a. The amplifier device G20, which has at least one amplifier G21, is electrically connected to the respective excitation electrodes via an excitation signal line G20a. The electrical excitation signals are suitable for exciting the excitation electrode to which the respective excitation signal line G20a is connected, and for making a corresponding contribution to the realization of the respective desired movement of the drive device 1.

[0184] To generate the target specifications, a higher-level actuating function can be provided, which generates or determines actuating commands for a device higher than the actuating device G10, such as an actuating device, and which can be functionally connected to the actuating device G10 so that it can transmit the actuating commands to the actuating device G10. The actuating device G10 determines the control signals for the respective electrode of the drive device or the drive devices of a drive device arrangement from the actuating commands and supplies the control signals to the respective drive device or drive devices. Alternatively, the actuating device G10 can be functionally integrated into the higher-level actuating function.

[0185] The control device G10 shown as an example in Figure 25 has an amplifier G21 for each excitation electrode. Each amplifier G21 is electrically and functionally connected to the presetting device G10 on the one hand, and electrically and functionally connected to an excitation electrode on the other. Furthermore, as shown in Figure 25, it can also be provided that each reference electrode of each actuator unit is connected in the same way to the presetting device G10 via an amplifier G21.

[0186] The control device G shown as an example in Figure 26 differs from the control device G10 of Figure 25 in that the reference electrode of each actuator unit is not controlled by the control device G, but rather has a constant reference voltage of 0V (GND). Any other positive or negative reference voltage is also possible.

[0187] The control device G shown as an example in Figure 27 differs from the control device G of Figure 26 in that the connection parts of the excitation electrodes on deformation bodies 30, 60 according to the definition (P2) mentioned herein, which are thus referred to as “semi-active”, are controlled via a single amplifier G21, behind which distribution circuits are arranged.

[0188] The control device G shown as an example in Figure 28 differs from the control device G of Figure 27 in that the connection parts of the reference electrodes are controlled via an amplifier G21, behind which a switch for selectively connecting the presetting device G10 is arranged. The control device G shown as an example in Figure 29 differs from the control device G of Figure 28 in that a resistor R is arranged on each of the excitation signal lines G20a for faster discharging of the deformation bodies 30, 60 according to the definition (P2) mentioned herein.

[0189] In contrast to the control devices G shown in Fig. 27, Fig. 28 and Fig. 29, it may be advantageous in each case to control the deformation bodies 30, 60 according to the definition (P1) mentioned herein, which are thus referred to as “active”, via fewer than four amplifiers, by also providing switches or distribution circuits connected to the amplifier(s). This is particularly possible when not all active axes have to be controlled simultaneously with different voltages. For example, a configuration deviating from that shown in Fig. 27 is conceivable in which one amplifier and four distribution circuits or switches arranged downstream of it are responsible for controlling the semi-active deformation bodies, and one amplifier and four distribution circuits or switches arranged downstream of it are responsible for controlling the active deformation bodies.It is also conceivable to use more than one and fewer than four amplifiers and a corresponding number of switches to control the semi-active deformation bodies, while the active deformation bodies are controlled with four amplifiers without the use of switches. Furthermore, it is conceivable to control both the active and semi-active deformation bodies with more than one and fewer than four amplifiers and a corresponding number of switches, whereby the number of amplifiers used can differ for the semi-active and active areas.

[0190] The various configurations regarding the control device G described above result in numerous control options. If, for example, no switches are present, then all electrodes of the active deformation bodies or the semi-active deformation bodies are controlled simultaneously or sequentially. If, however, switches and, for example, only one amplifier are present, then if different voltages are provided at the electrodes, the electrodes of the active or semi-active deformation bodies are controlled sequentially, whereas if the same voltages are provided at the electrodes, the electrodes of the active or semi-active deformation bodies are controlled simultaneously, i.e., the switches connected to the amplifier are closed simultaneously.If multiple amplifiers and switches are present (where the amplifiers are connected to unequal switches), the electrodes of the semi-active or active deformation bodies are controlled sequentially or simultaneously. If switches are present but no resistors, it can be advantageous to control the electrodes of the semi-active or active deformation bodies sequentially or simultaneously and to open, i.e., break the contact, of selected switches when electrical voltage is applied. In this case, it is conceivable to set the voltage of the amplifiers to 0V before the switches are opened. Using the control method described above, the corresponding deformation bodies remain charged for a short time and hold their position.

[0191] When using switches or distribution circuits, it is conceivable to provide resistors also in the active deformation bodies (i.e. deformation bodies according to the definition (P1) mentioned here) for rapid discharging of the deformation bodies.

[0192] The amplifier(s) G21 can be unipolar or bipolar. A potential difference, i.e. an electrical voltage, between the reference electrode and a semi-active or an active electrode can be achieved by a so-called single-ended or by a differential control. Single-ended control refers to a control in which the potential at the reference electrode is always at GND level and the potential of the semi-active or active electrodes is greater than or less than 0V. In addition, differential control refers to a control in which the potential at the reference electrode can be less than or equal to 0V or greater than or equal to 0V, while the potential at the semi-active or active electrodes can be less than or equal to 0V or greater than or equal to 0V. For example, a potential difference of 100V can be achieved with a voltage of -50V at the reference electrode and +50V at an active electrode (i.e.at an electrode of a deformation body as defined (P1) herein), resulting in a reduction of the required voltage swing of the amplifier.

[0193] When using a unipolar amplifier, a potential difference of -50V can also be achieved by setting the potential at the reference electrode to 50V and at the electrode to be controlled of the semi-active or active deformation body to GND level, i.e. to 0V.

[0194] Figures 30 to 32 show various examples of an actuation concept, each with an indication of control signals as a function of specifications from the specification device G10, i.e. specifications of a desired movement or a desired change in shape of the actuators of the respective drive device A. In detail: Figure 30 shows an example of an actuation concept for the case where bipolar piezo amplifiers G21 are used in the control device G, Figure 31 shows an example of an actuation concept for the case where unipolar piezo amplifiers G21 are used in the control device G, Figure 32 shows an example of an actuation concept for the case where bipolar piezo amplifiers G21 are used in the control device G and the reference electrodes on deformation bodies 30, 60 can also be controlled by the specification device G10 in accordance with the definition (P2) mentioned herein.

[0195] List of reference symbols

[0196] 1 actuator unit

[0197] 30 first deformation body of the first actuator A1

[0198] 31 first main surface of the first deformation body 30

[0199] 31a, 31b Support surface of the first main surface 31

[0200] 31 i Inner surface of the first main surface 31 of the first

[0201] Deformation body 30

[0202] 32 Distance range between the excitation electrodes E111 , E112

[0203] 33 essentially the peripheral edge area of ​​the first main surface 31

[0204] 34 Circumferential surface of the first deformation body 30

[0205] 35, 36, 37, 38 Surface section of the first deformation body 30

[0206] 39 essentially circumferential edge line of the first

[0207] Deformation body 30

[0208] 40 Through hole of the first deformation body 30

[0209] 41 Deformation area of ​​the first excitation electrode E111

[0210] 42 Deformation area of ​​the second excitation electrode E112

[0211] 43 Connection area of ​​the first excitation electrode E111 of the first actuator A1

[0212] 44 Connection area of ​​the second excitation electrode E112 of the first actuator A1

[0213] 51 second main surface of the first deformation body 30 52 deformation area of ​​the reference electrode E12 of the first

[0214] Actuator A1

[0215] 53 essentially circumferential edge region of the first deformation body 30

[0216] 55, 56, 57, 58 connection area

[0217] 59 essentially the peripheral edge line of the first

[0218] Deformation body 30

[0219] 60 second deformation body of the second actuator A2

[0220] 61 first main surface of the second deformation body 60

[0221] 61a, 61b Support surface of the inner surface 61 i

[0222] 61i Inner surface of the second main surface 61 of the second deformation body 60

[0223] 62 Distance range between the excitation electrodes E211 , E212 of the second actuator A2

[0224] 63 essentially peripheral edge area of ​​the first main surface 61

[0225] 64 Circumferential surface of the second deformation body 60 5, 66, 67, 68 Surface section of the second deformation body 60

[0226] 69 essentially circumferential edge line of the second deformation body 60

[0227] 71 Deformation range of the first excitation electrode E211 of the second actuator A2

[0228] 72 Deformation range of the second excitation electrode E212 of the second actuator A2

[0229] 73 Connection area of ​​the first excitation electrode E211 of the second actuator A2

[0230] 74 Connection area of ​​the second excitation electrode E212 of the second actuator A2

[0231] 81 second main surface of the second deformation body 60

[0232] 82 Deformation range of the reference electrode E22 of the second actuator A2

[0233] 83 essentially the peripheral edge area of ​​the second

[0234] Deformation body 60

[0235] 85, 86, 87, 88 connection area

[0236] 89 essentially circumferential edge line of the first deformation body 30, 200, 300, 400 drive device, 202, 203, 204 actuator unit

[0237] 301 actuator unit, 402, 403, 404 actuator unit

[0238] 500, 600, 700 drive device, 601, 602, 701 actuator unit

[0239] A Drive device AS Drive system A1 First actuator of actuator unit 1 A2 Second actuator of actuator unit 1

[0240] A11 , A12 first axis

[0241] A21, A22 second axis

[0242] C Electrode (excitation electrode or reference electrode) CE Lead connector on an excitation electrode OR Lead connector on a reference electrode D11 Continuous distance between the two excitation electrodes E111, E112

[0243] D21 continuous spacing

[0244] E11 first excitation electrode arrangement of the first actuator A1

[0245] E111 first excitation electrode

[0246] E112 second excitation electrode

[0247] E12 Reference electrode or common electrode of the first

[0248] Actuator A1

[0249] E21 second excitation electrode arrangement of the second actuator A2

[0250] E211 first excitation electrode of the second actuator A2

[0251] E212 second excitation electrode of the second actuator A2

[0252] E22 Reference electrode or common electrode of the second

[0253] Actuator A2

[0254] E711, E811 first excitation electrode on the first deformation body 30

[0255] E712, E812 second excitation electrode on the first deformation body 30

[0256] E713, E813 third excitation electrode on the first deformation body 30

[0257] E714, E814 fourth excitation electrode on the first deformation body 30

[0258] G Control device

[0259] G10 presetting device

[0260] G10a control signal line

[0261] G20 amplifier device

[0262] G20a Excitation signal line G21 Amplifier

[0263] L Storage device

[0264] R resistance

[0265] RH Height direction of the drive device

[0266] RT 1 Thickness direction or reference direction

[0267] RT2 Thickness direction or reference direction

[0268] 511 first actuator main page of the first actuator A1

[0269] 512 second actuator main page of the first actuator A1

[0270] 521 first actuator main page of the second actuator A2

[0271] 522 second actuator main page of the second actuator A2

[0272] T 1 Thickness

[0273] T2 thickness

Claims

Claims 1. Actuator unit (1), comprising: a first actuator (A1), which comprises: a first deformation body (30) deformable by an electrical voltage, which comprises an electromechanical material and which has a thickness (T1) extending in its thickness direction (RT1) and is delimited by: a first main surface (31) and a second main surface (51) oriented opposite to one another with respect to a first thickness direction (RT1), a first excitation electrode arrangement (E11) with at least one excitation electrode (E111, E112) located on the first main surface (31) of the first deformation body (30), a common electrode (E12) located on the second main surface (51) of the first deformation body (30), a second actuator (A2), which comprises: a second deformation body (60) deformable by an electrical voltage,which comprises an electromechanical material and which has a thickness (T2) extending in its thickness direction (RT2) and is delimited by: a first main surface (61) and a second main surface (81) which are oriented opposite to one another with respect to a second thickness direction (RT2), a second excitation electrode arrangement (E21) with at least one excitation electrode (E211, E212) which is located on the first main surface (61) of the second deformation body (60), a common electrode (E22) which is located on the second main surface (81) of the second deformation body (60), wherein the first actuator (A1) and the second actuator (A2) are arranged on one another in such a way that their thickness directions (RT1, RT2) run parallel to one another, and wherein the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) are located facing each other., 2. Actuator unit (1) according to claim 1, wherein the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) are arranged at a distance from each other which runs in their thickness directions (RT1, RT2).

3. Actuator unit (1) according to claim 1 or 2, wherein the first excitation electrode arrangement (E11) has at least two excitation electrodes (E111, E112) arranged next to one another and the second excitation electrode arrangement (E21) has at least two excitation electrodes (E211, E212) arranged next to one another.

4. Actuator unit (1), comprising: a first actuator (A1), which comprises: a first deformation body (30) deformable by an electrical voltage, which comprises an electromechanical material and which has a thickness (T1) extending in its thickness direction (RT1) and is delimited by: a first main surface (31) and a second main surface (51) oriented opposite to one another with respect to a first thickness direction (RT1), a first excitation electrode arrangement (E11) with at least one excitation electrode (E111, E112) located on the first main surface (31) of the first deformation body (30), a common electrode (E12) located on the second main surface (51) of the first deformation body (30), a second actuator (A2), which comprises: a second deformation body (60) deformable by an electrical voltage,which comprises an electromechanical material and which has a thickness (T2) extending in its thickness direction (RT2) and is delimited by: a first main surface (61) and a second main surface (81) which are oriented opposite to one another with respect to a second thickness direction (RT2), a second excitation electrode arrangement (E21) with at least one excitation electrode (E211, E212) which is located on the first main surface (61) of the second deformation body (60), a common electrode (E22) which is located on the second main surface (81) of the second deformation body (60), wherein the first actuator (A1) and the second actuator (A2) are arranged on one another in such a way that their thickness directions (RT1, RT2) run along one another, and wherein the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) facing each other, with at least two excitation electrodes (E111, E112,E211, E212) of the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) touch., 5. Actuator unit (1) according to claim 4, wherein the first excitation electrode arrangement (E11) has at least two excitation electrodes (E111, E112) arranged next to one another and the second excitation electrode arrangement (E21) has at least two excitation electrodes (E211, E212) arranged next to one another.

6. Actuator unit (1), comprising: a first actuator (A1), which comprises: a first deformation body (30) deformable by an electrical voltage, which comprises an electromechanical material and which has a thickness (T1) extending in its thickness direction (RT1) and is delimited by: a first main surface (31) and a second main surface (51) oriented opposite to one another with respect to a first thickness direction (RT1), a first excitation electrode arrangement (E11) with at least one excitation electrode (E111, E112) located on the first main surface (31) of the first deformation body (30), a common electrode (E12) located on the second main surface (51) of the first deformation body (30), a second actuator (A2), which comprises: a second deformation body (60) deformable by an electrical voltage,which comprises an electromechanical material and which has a thickness (T2) extending in its thickness direction (RT2) and is delimited by: a first main surface (61) and a second main surface (81) which are oriented opposite to one another with respect to a second thickness direction (RT2), a second excitation electrode arrangement (E21) with at least one excitation electrode (E211, E212) which is located on the first main surface (61) of the second deformation body (60), a common electrode (E22) which is located on the second main surface (81) of the second deformation body (60), wherein the first actuator (A1) and the second actuator (A2) are arranged on one another in such a way that their thickness directions (RT1, RT2) run along one another and the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) facing each other, wherein (a) the material of the first deformation body (30),(b) the material of the second deformation body (60) is defined such that one of the materials (a), (b), are realized according to one of the following definitions (P1), (P2) or both materials (a), (b) are realized according to one of the following definitions (P1), (P2) or the material (a) is realized according to one of the following definitions (P1), (P2) and the material (b) is realized according to a different one of the following definitions (P1), (P2): (P1) an electromechanical material which is capable of carrying out a zero-energy return length change after the removal of a voltage pulse applied to its actuation electrodes, (P2) an electromechanical material which is suitable for carrying out a non-energy-dependent permanent change in length of the actuator segment to which the same actuation electrodes are applied, due to a voltage pulse applied to its actuation electrodes, which change is caused by a polarisation process or a depolarisation process and which persists without the application of a voltage to the same actuation electrodes.

7. Actuator unit (1) according to claim 6, wherein the material according to the definition (P2) is further defined in that a proportion of greater than 0% and less than 100% of the domains of the deformation body (60) for commissioning the actuator unit are polarized from an original polarization state in a polarization direction which runs along the respective thickness direction (RT 1 , RT2) due to a polarization process.

8. Actuator unit (1) according to claim 6, wherein the material according to the definition (P2) is further defined in that a proportion of between 10% and 90% of the domains of the deformation body (60) for commissioning the actuator unit are polarized due to a polarization process from an original polarization state in a polarization direction which runs along the respective thickness direction (RT 1 , RT2).

9. Actuator unit (1) according to one of claims 6 to 8, wherein the first excitation electrode arrangement (E11) comprises at least two excitation electrodes (E11, E12) arranged next to one another and the second excitation electrode arrangement (E21) comprises at least two excitation electrodes (E21, E22) arranged next to each other.

10. Actuator unit (1) according to one of claims 6 to 9, wherein at least two respectively opposite excitation electrodes (E111, E112, E211, E212) of the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) touch each other.

11. Actuator unit (1) according to one of claims 6 to 10, wherein the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) are arranged at a distance from each other which runs in their thickness directions (RT1, RT2).

12. Actuator unit (1) according to one of the preceding claims, wherein the first deformation body (30) and the second deformation body (60) are each shaped substantially as a rectangle, wherein the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) each have at least two excitation electrodes (E111, E112, E211, E212), wherein in each case two excitation electrodes (E111, E112, E211, E212) are symmetrical to one another with respect to an axis of symmetry (A11, A21) and wherein the axis of symmetry (A11, A21) of the respective first main surface (31, 51, 61, 81) is a center line thereof.

13. Actuator unit (1) according to one of claims 1 to 11, wherein the first deformation body (30) and the second deformation body (60) are each shaped substantially as a rectangle, wherein the first excitation electrode arrangement (E11) and the second excitation electrode arrangement (E21) each have at least two excitation electrodes (E111, E112, E211, E212), wherein in each case two excitation electrodes (E111, E112, E211, E212) are symmetrical to one another with respect to an axis of symmetry (A11, A21) and wherein the axis of symmetry (A11, A21) of the respective first main surface (31, 51, 61, 81) is a diagonal line thereof.

14. Actuator unit (1) according to one of the preceding claims, wherein the first deformation body (30) has a first through-opening (40) and the second deformation body (60) has a second through-opening (70), wherein the first through-opening (40) and the second through-opening (70) are concentric to one another.

15. Drive device (A), comprising: an actuator unit (1) according to one of the preceding claims, Excitation electrode connection parts (CE), through which the excitation electrodes can be electrically connected to a respective excitation electrode control line, and Reference electrode connectors (CR) through which the reference electrodes can be electrically connected to at least one reference electrode bus bar.

16. Drive device (A), the drive device (A) comprising: at least one group of four actuator units (1, 201, 202, 203, 204), each of which is realized according to one of claims 1 to 14 and which are arranged one above the other along a height direction (RH), wherein the thickness directions of the actuator units (1, 201, 202, 203, 204) run along one another, wherein of the group of four actuator units (1), two of the actuator units have deformation bodies (30, 60) with an electromechanical material according to a definition (P1), which is suitable for carrying out a zero-energy return change in length after the removal of a voltage pulse applied to its actuation electrodes, wherein of the group of four actuator units (1), two further actuator units have deformation bodies (30, 60) with an electromechanical material according to a Definition (P2) that is suitable fordue to a voltage pulse applied to its actuation electrodes, a polarization process or, to carry out a non-energy-dependent permanent change in length of the actuator segment to which the same actuation electrodes are applied, caused by a depolarization process, which continues without the application of a voltage to the same actuation electrodes.

17. Drive device (A), the drive device (A) comprising: at least one group of four actuator units (1, 201, 202, 203, 204), each of which is realized according to one of claims 1 to 14 and which are arranged one above the other along a height direction (RH), wherein the thickness directions of the actuator units (1, 201, 202, 203, 204) run along one another, wherein of the group of four actuator units (1, 201, 202, 203, 204), the actuator units (1, 201, 202, 203, 204) are arranged along the height direction (RH) one after the other rotated by 90 degrees relative to one another about an axis which runs along the height direction (RH).

18. Drive system, comprising: the drive device (A) according to one of claims 15 to 17, a control device (G) with a specification device (G10) which determines control signals for at least one excitation electrode of at least one actuator of the drive device (A) on the basis of target specifications in relation to a predetermined target movement or target shape change of the drive device (1), and with an amplifier device (G20) which converts the control signals into excitation signals, wherein the amplifier device (G20) has an excitation signal Line (G20a) is connected to an excitation electrode of the respective actuator for transmitting the excitation signals to the same.

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