Biaxially oriented polyester film

A biaxially oriented polyester film with controlled germanium, sulfur, and phosphorus content addresses the issues of metallic foreign matter and gelled objects, enhancing electrostatic applicability and resolution for fine pattern formation in electronic circuits.

WO2025070473A1 Publication Date: 2025-04-03TORAY INDUSTRIES INC
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Patent Information

Application Number
PCT/JP2024/034138
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-08-30
Filing Date
2024-09-25
Publication Date
2025-04-03

AI Technical Summary

Technical Problem

Existing biaxially oriented polyester films used as dry film resist supports face challenges in achieving high resolution with fine patterns due to the presence of metallic foreign matter and gelled objects, leading to defects such as distortion and poor pattern quality, while also struggling with electrostatic applicability and film uniformity.

Method used

A biaxially oriented polyester film with a laminated structure containing specific amounts of germanium, sulfur, and phosphorus elements, along with controlled metal content, to minimize foreign matter and improve electrostatic applicability and film uniformity, ensuring high resolution and reduced defects.

Benefits of technology

The film achieves high resolution with fewer resist defects, improved electrostatic applicability, and enhanced film uniformity, making it suitable for fine pattern formation in electronic circuits.

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Abstract

A biaxially oriented polyester film used for a dry film resist support, the biaxially oriented polyester film having a laminated structure having at least two layers, wherein at least one layer contains an inorganic compound having a germanium element, an organic salt having a sulfur element, and an organic salt having a phosphorus element, and the content of the germanium element (atom) is 10-30 ppm by weight, the content of the sulfur element (atom) is 1-25 ppm by weight, the content of the phosphorus element (atom) is 25-37 ppm by weight, and the total content of metal elements (atoms) is 1-25 ppm by weight on the basis of the weight of the polyester film. A polyester film having a small number of types of foreign matter and good film-forming properties is provided.
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