Optical modulator

The optical modulator addresses the issue of unintentional phase modulation at the intersection of optical waveguides and signal wiring paths by using a semiconductor material for the signal wiring path below the optical waveguide, thereby enhancing optical modulation characteristics and reducing noise.

WO2025115203A1PCT designated stage expired Publication Date: 2025-06-05MITSUBISHI ELECTRIC CORP
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Patent Information

Application Number
PCT/JP2023/043047
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-12-01
Publication Date
2025-06-05

AI Technical Summary

Technical Problem

In high-speed and large-capacity optical communication systems, the intersection of optical waveguides and signal wiring paths in Mach-Zehnder type optical modulators leads to unintentional phase modulation due to electric fields and stress, causing noise and disturbing the optical modulation operation.

Method used

The optical modulator design includes a substrate with an optical input and output portion, phase modulators, phase adjusters, and a signal wiring path with an intersection portion where the signal wiring path is formed of a semiconductor material and located below the optical waveguide, reducing electric field and stress applied to the optical waveguide.

Benefits of technology

This design effectively relaxes the electric field and stress at the intersection, resulting in improved optical modulation characteristics and reduced noise, enabling high-performance optical communication systems.

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Abstract

An optical modulator (500) according to the present disclosure is characterized by comprising: a substrate (1); an optical input part (2) provided at an end of the substrate (1); a plurality of phase modulators (20) connected to the optical input part (2) via an optical waveguide (10); a plurality of phase adjusters (30, 40) respectively connected to the plurality of phase modulators (20) via the optical waveguide (10); an optical output unit (3) provided at an end of the substrate (1) and emitting, to the outside, light outputted by the plurality of phase adjusters (30, 40); a plurality of signal electrode pads (50) disposed along an end of the substrate (1); and a signal wiring path (60) which electrically connects the plurality of signal electrode pads (50) and the phase adjusters (30, 40) and has an intersection part (70) that intersects the optical waveguide (10), wherein a conductor layer (110) and a signal wiring path conductor layer (200) intersect via an embedded layer (210) in the intersection part (70).
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Citation Information

Patent Citations

  • Method for manufacturing semiconductor device, semiconductor device and semiconductor integrated circuit

    CN111562688A

  • Mach-zehnder modulator

    JP2019056881A

  • Method for manufacturing optical modulator, test method, and test program, and optical transmitter

    JP2022115726A

  • Optical transmitter and optical communication system

    JP2023070255A

  • Optical modulator and optical module including the same

    US20140341496A1