X-ray fluorescence spectrometer

Abstract

A scanning-type wavelength-dispersive X-ray fluorescence spectrometer comprising two dispersive elements, said wavelength-dispersive X-ray fluorescence spectrometer comprising a control means (11) that, among a second rotation mechanism (8B) which rotates a second dispersive element (6B) and a third rotation mechanism (8C) which rotates a detector (7), controls at least the second rotation mechanism (8B) such that, during measurement, while changing the wavelength of fluorescent X-rays (4D) dispersed by the second dispersive element (6B), the dispersed fluorescent X-rays (4D) are incident on the detector (7).

Description

X-ray fluorescence analyzer

[0001] The present invention relates to a scanning wavelength dispersive X-ray fluorescence analyzer.

[0002] Conventionally, there has been a scanning wavelength dispersive X-ray fluorescence analyzer equipped with two spectroscopic elements for use in, for example, X-ray emission spectroscopy, which is a state analysis method. In such an X-ray fluorescence analyzer, fluorescent X-rays dispersed by the first spectroscopic element are further dispersed by the second spectroscopic element, thereby performing measurements with high energy resolution (see Patent Documents 1 and 2, and Non-Patent Documents 1 to 3).

[0003] Japanese Patent Application Laid-Open No. 10-232209 Japanese Patent Application Laid-Open No. 2005-140719

[0004] Y. Gohshi et al., “Applied Spectroscopy”, 1982, 36, p. 171-174T. Konishi et al., “Review of Scientific Instruments”, 1991, 62, p. 2588-2592R. D. Deslattes, “Review of Scientific Instruments”, 1967, 38, p. 616-620

[0005] However, with these X-ray fluorescence analyzers, during measurement to acquire a spectrum, three of the four operations, namely, movement and rotation of the first dispersing element and movement and rotation of the second dispersing element, must be performed, or the X-ray source and the sample must be rotated. These operations make it difficult to obtain highly accurate angular reproducibility for the spectral angle of the fluorescent X-rays.

[0006] The present invention has been made in view of the above-mentioned problems in the conventional technology, and an object of the present invention is to provide a scanning wavelength-dispersive X-ray fluorescence analyzer equipped with two spectroscopic elements that is capable of measuring spectra with sufficiently high accuracy and high energy resolution.

[0007] In order to achieve the above object, the X-ray fluorescence analyzer of the present invention first includes an X-ray source that irradiates a sample with primary X-rays, a first spectroscopic element that disperses fluorescent X-rays generated from the sample, a second spectroscopic element that further disperses the fluorescent X-rays dispersed by the first spectroscopic element, and a detector that measures the intensity of the fluorescent X-rays dispersed by the second spectroscopic element.

[0008] The apparatus of the present invention includes a first rotation mechanism that rotates the first dispersing element around a first axis that passes through the dispersing surface of the first dispersing element and is perpendicular to the optical path of the fluorescent X-rays from the sample; a movement mechanism that linearly moves the second dispersing element and the detector parallel to the optical path of the fluorescent X-rays from the sample; a second rotation mechanism that rotates the second dispersing element around a second axis that passes through the dispersing surface of the second dispersing element and is parallel to the first axis; and a third rotation mechanism that rotates the detector around the second axis.

[0009] Furthermore, the apparatus of the present invention includes a control means for controlling the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector, and for controlling at least the second rotation mechanism of the second rotation mechanism and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the second dispersing element so that the dispersed fluorescent X-rays are incident on the detector.

[0010] According to the device of the present invention, during spectrum measurement (scanning), only the second spectroscopic element is rotated, or only the second spectroscopic element and the detector are rotated, and since the number of parts that are driven during spectrum measurement is small, spectrum measurement can be performed with sufficiently high accuracy and high energy resolution.

[0011] In the apparatus of the present invention, fluorescent X-rays generated from a sample pass through a Soller slit having foils stacked in a direction in which the first axis extends, and are incident as a diverging beam on the first spectroscopic element, and the control means controls the first spectroscopic element and the second spectroscopic element to have a (+, +) arrangement before measurement, and controls the angle of incidence of the fluorescent X-rays on the first spectroscopic element to be θ０ The first spectroscopic element is rotated so as to include ±Δθ, and during measurement, the incident angle of the fluorescent X-rays on the second spectroscopic element is θ ０ It is desirable to rotate the second spectroscopic element within a range of 4Δθ so as to be ±Δθ, while simultaneously rotating the detector within a range of 6Δθ.

[0012] This first additional configuration enables spectrum measurement with sufficiently high accuracy and high energy resolution for fluorescent X-rays in the wavelength range contained in the diverging beam incident on the first spectroscopic element. This measurement is called high-resolution mode narrow-area measurement to distinguish it from other measurements described later.

[0013] In the device of the first additional configuration, when the control means places the first and second dispersing elements in a (+, +) arrangement before measurement, the control means first places the first and second dispersing elements in a (+, -) arrangement and sets the incident angle of the fluorescent X-rays on the first dispersing element to θ ０ In a state where the first dispersive element is rotated so that the intensity measured by the detector is maximized, the second dispersive element is rotated to set the rotation angle of the second dispersive element at which the intensity measured by the detector is maximized as a reference angle, and the second dispersive element is rotated 180 degrees from the reference angle and then rotated by 2θ ０ By rotating the arrows by only one, a (+, +) arrangement may be obtained.

[0014] According to this second additional configuration, for the device having the first additional configuration, absolute angle calibration can be performed with high accuracy on the rotation angles of the first dispersing element and the second dispersing element without using a standard sample or the like.

[0015] In the apparatus of the present invention, when high-resolution mode wide-area measurement is specified, the control means may use a Soller slit having foils stacked in the direction in which the first axis extends and which allows fluorescent X-rays generated from the sample to pass through, and may control the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from the sample are incident on the detector, and during measurement, may control the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism while changing the wavelength of the fluorescent X-rays dispersed by the first dispersing element so that the dispersed fluorescent X-rays are incident on the detector.

[0016] According to this third additional configuration, during spectrum measurement, not only the second and third rotation mechanisms but also the first rotation mechanism and movement mechanism are controlled so that the dispersed fluorescent X-rays are incident on the detector while changing the wavelength of the fluorescent X-rays dispersed by the first dispersing element, thereby making it possible to perform spectrum measurement with higher energy resolution for fluorescent X-rays in a wider wavelength range than with the high-resolution mode narrow-area measurement performed by the device with the first additional configuration. This measurement is called high-resolution mode wide-area measurement.

[0017] The apparatus of the present invention may further include a retraction mechanism that retracts the second dispersive element from the optical path of the fluorescent X-rays, and when a low-resolution mode is designated, the control means may control the first rotation mechanism, the retraction mechanism, the movement mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector without passing through the second dispersive element, and may control at least the first rotation mechanism and the movement mechanism among the first rotation mechanism, the movement mechanism, and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the first dispersive element so that the dispersed fluorescent X-rays are incident on the detector.

[0018] According to this fourth additional configuration, the second dispersive element can be retracted and only the first dispersive element can be used to obtain a fluorescent X-ray spectrum using a general wavelength dispersive method. This operation mode is called a low-resolution mode.

[0019] Any combination of at least two features disclosed in the claims and / or the specification and / or the drawings is included in the present invention. In particular, any combination of two or more of the claims is included in the present invention.

[0020] The present invention will be more clearly understood from the following description of preferred embodiments with reference to the accompanying drawings. However, the embodiments and drawings are merely for illustration and explanation, and should not be used to define the scope of the present invention. The scope of the present invention is defined by the accompanying claims. In the accompanying drawings, the same part numbers in multiple drawings indicate the same parts.

[0023] Figure 1 is a schematic plan view showing an X-ray fluorescence analysis apparatus according to one embodiment of the present invention. Figure 2 is a diagram showing details of the measurement operation in the apparatus. Figure 3 is a diagram showing an intermediate stage of the calibration operation in the apparatus. Figure 4 is a diagram showing the completion of the calibration operation in the apparatus.

[0021] 1, the fluorescent X-ray analyzer according to one embodiment of the present invention includes an X-ray source 3, such as an X-ray tube, for irradiating a sample 1 with primary X-rays 2, a first spectroscopic element 6A for dispersing fluorescent X-rays 4A emitted from the sample 1, a second spectroscopic element 6B for further dispersing fluorescent X-rays 4C dispersed by the first spectroscopic element 6A, and a detector 7 for measuring the intensity of fluorescent X-rays 4D dispersed by the second spectroscopic element 6B.

[0022] This device includes a first rotation mechanism 8A that rotates (spins) the first dispersing element 6A around a first axis O1 that passes through the dispersing surface of the first dispersing element 6A and is perpendicular to the optical path of the fluorescent X-rays 4A from the sample 1, a movement mechanism 9 that linearly moves the second dispersing element 6B and the detector 7 parallel to the optical path of the fluorescent X-rays 4A from the sample 1, a second rotation mechanism 8B that rotates (spins) the second dispersing element 6B around a second axis O2 that passes through the dispersing surface of the second dispersing element 6B and is parallel to the first axis O1, and a third rotation mechanism 8C that rotates (revolves) the detector 7 around the second axis O2. The movement mechanism 9 includes a track section 9a and a movement section 9b that moves linearly on the track section 9a. The movement section 9b carries the second dispersing element 6B, the second rotation mechanism 8B, the detector 7, and the third rotation mechanism 8C.

[0023] Furthermore, this apparatus includes a control unit 11 that controls the first rotation mechanism 8A, the movement mechanism 9, the second rotation mechanism 8B, and the third rotation mechanism 8C before measurement so that fluorescent X-rays 4A within a predetermined wavelength range generated from the sample 1 pass through the first spectroscopic element 6A and the second spectroscopic element 6B and enter the detector 7, and that controls at least the second rotation mechanism 8B of the second rotation mechanism 8B and the third rotation mechanism 8C during measurement while changing the wavelength of fluorescent X-rays 4D dispersed by the second spectroscopic element 6B so that the dispersed fluorescent X-rays 4D enter the detector 7. In other words, basically, the second spectroscopic element 6B and the detector 7 are rotated during spectrum measurement, but depending on the wavelength range of the fluorescent X-rays 4A to be measured and the size of the detection surface of the detector 7, it may be possible to measure the wavelength range by rotating only the second spectroscopic element 6B without rotating the detector 7.

[0024] As described above, according to the device of the present invention, during spectrum measurement (during scanning), only the second spectroscopic element 6B is rotated, or only the second spectroscopic element 6B and the detector 7 are rotated. Since the number of parts that are driven during spectrum measurement is small, spectrum measurement can be performed with sufficiently high accuracy and high energy resolution.

[0025] Furthermore, in this device, fluorescent X-rays 4A generated from the sample 1 pass through a solar slit 5 having foils stacked in the direction in which the first axis O1 extends, and are incident on the first dispersing element 6A as a diverging beam 4B (shown as a single straight line in FIG. 1 for simplicity), and the control means 11 controls the first dispersing element 6A and the second dispersing element 6B to be in a (+, +) arrangement before measurement, and controls the incident angle of the fluorescent X-rays on the first dispersing element 6A to be θ ０ The first spectroscopic element 6A is rotated by the first rotation mechanism 8A so as to include ±Δθ, and during measurement, the incident angle of the fluorescent X-rays on the second spectroscopic element 6B is θ ０ The second light separating element 6B is rotated within a range of 4Δθ by the second rotation mechanism 8B so as to be ±Δθ, while the detector 7 is rotated in conjunction with the second light separating element 6B within a range of 6Δθ by the third rotation mechanism 8C.

[0026] To distinguish this measurement from other measurements described later, it is called the high-resolution mode narrow-area measurement. Note that the (+, +) configuration refers to an arrangement in which the bending direction of the first reflection by the first dispersing element 6A (here, leftward when viewed from above) is taken as +, and the bending direction of the second reflection by the second dispersing crystal 6B is in the same direction. An arrangement in which the bending direction of the second reflection is opposite to the bending direction of the first reflection is called a (+, -) configuration.

[0027] The operation of this device in high-resolution mode narrow-area measurement will now be described in detail. In high-resolution mode narrow-area measurement, a Soller slit 5 having foils stacked in the direction in which the first axis O1 extends (the direction perpendicular to the paper surface of FIGS. 1 and 2 , also referred to as the height direction) is used. This Soller slit 5 can limit the divergence of the fluorescent X-rays 4A generated from the sample 1 in the height direction to be narrower than the divergence in the horizontal direction perpendicular to the height direction. In other words, the purpose of using this Soller slit 5 for the fluorescent X-rays 4A generated from the sample 1 is not to form a parallel beam, but to limit the divergence in the height direction, that is, to limit the incidence of the fluorescent X-rays 4A obliquely deviating from the horizontal direction on the first spectroscopic element 6A.

[0028] As a result of this restriction, as shown in FIG. 2, the angle range in the horizontal plane between arrows R1 and R2 is θ 2 , which is determined by the opening height h of the field-limiting slit (indicated by the horizontal arrow in FIG. 2) and the dimensions and shape of the solar slit 5. ０ The beam 4B is diverged by ±α and enters the entire spectroscopic surface of the first spectroscopic element 6A. ０ ±α (α is approximately 1 degree) is the angular range that can be scanned in one high-resolution mode narrow-area measurement, i.e., the range in which a spectrum can be obtained. Note that in expressing angles, the optical paths of fluorescent X-rays 4A and 4B from sample 1 (shown by the solid line in the center of the two dashed lines in Figure 2) are used as the reference, and the counterclockwise direction is considered positive.

[0029] As shown in FIG. 2, the predetermined wavelength range to be measured is set to θ ０ If the wavelength is within the range of ±Δθ (Δθ≦α), the control means 11 in FIG. 1 controls the first rotation mechanism 8A, the moving mechanism 9, the second rotation mechanism 8B, and the third rotation mechanism 8C before measurement so that fluorescent X-rays 4A within that wavelength range pass through the first spectroscopic element 6A and the second spectroscopic element 6B and enter the detector 7.

[0030] As shown in FIG. 2, the first spectroscopic element 6A and the second spectroscopic element 6B are arranged in a (+, +) configuration, and the incident angle of the fluorescent X-rays on the first spectroscopic element 6A is θ ０ The first dispersing element 6A is rotated so as to include ±Δθ. The distance between the optical path of the fluorescent X-rays 4A and 4B from the sample 1 (shown in FIG. 2 by a solid line at the center of two dashed lines) and the trajectory of the linear movement of the second axis O2 by the moving mechanism 9 (shown in FIG. 2 by a dashed line parallel to the optical path) is defined as D. The position of the first axis O1 is defined as a reference position in the left-right direction, and the right direction is defined as positive. The second axis O2 is rotated by 2θ ０ <π / 2, D × tan(π / 2−2θ ０ ) position, ０ If ≥ π / 2, then -D × tan(π / 2 - 2θ ０ ) position.

[0031] 1 controls the second rotation mechanism 8B and the third rotation mechanism 8C during measurement while changing the wavelength of the fluorescent X-rays 4D dispersed by the second dispersing element 6B so that the dispersed fluorescent X-rays 4D are incident on the detector 7. More specifically, in FIG. 2, during measurement, the incident angle of the fluorescent X-rays on the second dispersing element 6B is θ ０ ±Δθ, the second light-splitting element 6B is adjusted to 3θ ０ While rotating the detector 7 at ±2Δθ, ０ The first and second dispersing elements 6A and 6B are rotated in conjunction within a range of ±3Δθ, i.e., 6Δθ. Here, the initial positions in the rotation direction of the first dispersing element 6A and the second dispersing element 6B are positions where the dispersing surfaces are parallel to the optical paths of the fluorescent X-rays 4A and 4B from the reference sample 1 and face downward in Figures 1 and 2, and the initial position in the rotation direction of the detector 7 is a position where the normal to the center of the detection surface is parallel to the optical paths of the fluorescent X-rays 4A and 4B from the reference sample 1 and the detector 7 is on the left side of the second dispersing element 6B in Figures 1 and 2.

[0032] According to the high-resolution mode narrow-area measurement by the device of this embodiment, the wavelength range (in terms of incident angle, θ ０ It is possible to measure the spectrum of fluorescent X-rays with sufficiently high accuracy and high energy resolution.

[0033] In the high-resolution mode narrow-area measurement in the device of this embodiment, the control means, before measurement, arranges the first and second dispersing elements in a (+, +) configuration, as shown in FIG. 3, first arranges the first and second dispersing elements 6A and 6B in a (+, -) configuration, and sets the incident angle of the fluorescent X-rays on the first dispersing element 6A to θ ０ That is, the pointing angle θ of the first light separating element 6A is １ｓｔ is θ ０ While rotating the second dispersing element 6B while rotating the first dispersing element 6A so that the intensity measured by the detector 7, which is arranged so that the detection direction is substantially parallel to the linear movement direction of the moving mechanism 9 (FIG. 1) (i.e., substantially parallel to the optical paths of the fluorescent X-rays 4A and 4B (FIG. 1)), is maximized, the rotation angle (pointing angle) θ of the second dispersing element 6B is set to θ ... ２ｎｄ = π + θ ０ +ΔθＲ (Δθ Ｒ is the correction angle) is used as the reference angle. At this time, the first light separating element 6A and the second light separating element 6B are arranged in parallel, and the correction angle Δθ Ｒ is obtained.

[0034] Next, as shown in FIG. 4, the second light separating element 6B is rotated 180 degrees from the reference angle and then rotated by 2θ ０ By rotating the second light separating element 6B by ２ｎｄ 3θ ０ +Δθ Ｒ The first and second dispersive elements are arranged in a (+, +) arrangement. At this time, the angle formed by the first dispersive element 6A and the second dispersive element 6B is exactly π-2θ. ０ The incident angle to the second light-splitting element 6B is the pointing angle θ １ｓｔ and the pointing angle θ of the second light separating element 6B. ２ｎｄ Regardless of the absolute angle, θ ０ This becomes:

[0035] According to this operation, when performing high-resolution mode narrow-area measurement with the device of this embodiment, absolute angle calibration can be performed with high accuracy on the rotation angles of the first dispersive element 6A and the second dispersive element 6B without using a standard sample or the like.

[0036] In the apparatus of this embodiment, when the control means 11 of FIG. 1 specifies the high-resolution mode wide-area measurement, the control means 11 uses a Soller slit 5 that has foils stacked in the direction of extension of the first axis O1, similar to that used in the high-resolution mode narrow-area measurement, and that allows fluorescent X-rays 4A generated from the sample 1 to pass through, and controls the first rotation mechanism 8A, the movement mechanism 9, the second rotation mechanism 8B, and the third rotation mechanism 8C before measurement so that fluorescent X-rays 4A within a predetermined wavelength range generated from the sample 1 pass through the first spectroscopic element 6A and the second spectroscopic element 6B and enter the detector 7; and during measurement, while changing the wavelength of the fluorescent X-rays 4C dispersed by the first spectroscopic element 6A, the control means 11 controls the first rotation mechanism 8A, the movement mechanism 9, the second rotation mechanism 8B, and the third rotation mechanism 8C so that the dispersed fluorescent X-rays 4C pass through the second spectroscopic element 6B and enter the detector 7.

[0037] According to this additional configuration, during spectrum measurement, the wavelength of the fluorescent X-rays 4C dispersed by the first dispersing element 6A is changed, and not only the second rotation mechanism 8B and the third rotation mechanism 8C but also the first rotation mechanism 8A and the movement mechanism 9 are controlled so that the dispersed fluorescent X-rays 4C are incident on the detector 7. This makes it possible to perform spectrum measurement with higher energy resolution for fluorescent X-rays 4A over a wider wavelength range than the above-mentioned high-resolution mode narrow-area measurement. This measurement is called high-resolution mode wide-area measurement.

[0038] As shown in FIG. 1 , the apparatus of this embodiment includes a retraction mechanism 10 that retracts the second dispersive element 6B from the optical path of the fluorescent X-rays 4C. When the low-resolution mode is designated, the control means 11 controls the first rotation mechanism 8A, the retraction mechanism 10, the movement mechanism 9, and the third rotation mechanism 8C before measurement so that, for fluorescent X-rays 4A within a predetermined wavelength range generated from the sample 1, the fluorescent X-rays 4A pass through the first dispersive element 6A and enter the detector 7 without passing through the second dispersive element 6B. During measurement, the control means 11 controls at least the first rotation mechanism 8A and the movement mechanism 9 out of the first rotation mechanism 8A, the movement mechanism 9, and the third rotation mechanism 8C, while changing the wavelength of the fluorescent X-rays 4C dispersed by the first dispersive element 6A, so that the dispersed fluorescent X-rays 4C directly enter the detector 7.

[0039] Basically, during measurement, the first spectroscopic element 6A rotates, the movable part 9b moves linearly, and the detector 7 rotates. However, depending on the wavelength range of the fluorescent X-rays 4A to be measured and the size of the detection surface of the detector 7, it may be possible to measure the wavelength range by simply rotating the first spectroscopic element 6A and moving the movable part 9b linearly, without rotating the detector 7.

[0040] With this additional configuration, it is possible to obtain a typical wavelength-dispersive X-ray fluorescence spectrum by retracting the second dispersive element 6B and using only the first dispersive element 6A. This operating mode is called the low-resolution mode. In the low-resolution mode, as in a typical wavelength-dispersive X-ray fluorescence analyzer, a solar slit 5 is used, which has foils stacked in a direction perpendicular to the direction in which the first axis O1 extends and which passes the fluorescent X-rays 4A generated from the sample 1 to convert them into a parallel beam.

[0041] Although the preferred embodiment has been described above with reference to the drawings, those skilled in the art will readily understand various changes and modifications within the scope of the present invention, which are within the scope of the present invention as defined by the appended claims.

[0042] REFERENCE SIGNS LIST 1 Sample 2 Primary X-rays 3 X-ray source 4A Fluorescent X-rays generated from the sample 4B Fluorescent X-rays generated from the sample as a diverging beam 4C Fluorescent X-rays dispersed by the first dispersing element 4D Fluorescent X-rays dispersed by the second dispersing element 5 Soller slit 6A First dispersing element 6B Second dispersing element 7 Detector 8A First rotation mechanism 8B Second rotation mechanism 8C Third rotation mechanism 9 Moving mechanism 10 Retraction mechanism 11 Control means O1 First axis O2 Second axis

Claims

1. An X-ray source that irradiates a sample with primary X-rays; a first dispersing element that disperses fluorescent X-rays generated from the sample; a second dispersing element that further disperses the fluorescent X-rays dispersed by the first dispersing element; a detector that measures the intensity of the fluorescent X-rays dispersed by the second dispersing element; a first rotation mechanism that rotates the first dispersing element around a first axis that passes through the dispersing surface of the first dispersing element and is perpendicular to the optical path of the fluorescent X-rays from the sample; a movement mechanism that linearly moves the second dispersing element and the detector parallel to the optical path of the fluorescent X-rays from the sample; a second rotation mechanism that rotates the second dispersing element around a second axis that passes through the dispersing surface of the second dispersing element and is parallel to the first axis; and a third rotation mechanism that rotates the detector around the second axis. and a control means for controlling the first rotation mechanism, the moving mechanism, the second rotation mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector, and for controlling at least the second rotation mechanism of the second rotation mechanism and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the second dispersing element so that the dispersed fluorescent X-rays are incident on the detector.

2. In the X-ray fluorescence analyzer according to claim 1, the fluorescent X-rays generated from the sample pass through a Soller slit having foils stacked in the direction in which the first axis extends, and are incident as a diverging beam on the first spectroscopic element, and the control means controls the first spectroscopic element and the second spectroscopic element to be in a (+, +) arrangement before measurement, and controls the angle of incidence of the fluorescent X-rays on the first spectroscopic element to be θ ０ The first spectroscopic element is rotated so as to include ±Δθ, and during measurement, the incident angle of the fluorescent X-rays on the second spectroscopic element is θ ０ The fluorescent X-ray analysis apparatus rotates the second spectroscopic element within a range of 4Δθ so as to be ±Δθ, while simultaneously rotating the detector within a range of 6Δθ.

3. In the fluorescent X-ray analyzer according to claim 2, when the control means places the first and second dispersing elements in a (+, +) arrangement before measurement, the control means first places the first and second dispersing elements in a (+, -) arrangement and adjusts the angle of incidence of the fluorescent X-rays on the first dispersing element to θ ０ In a state where the first dispersive element is rotated so that the intensity measured by the detector is maximized, the second dispersive element is rotated to set the rotation angle of the second dispersive element at which the intensity measured by the detector is maximized as a reference angle, and the second dispersive element is rotated 180 degrees from the reference angle and further rotated by 2θ ０ An X-ray fluorescence analyzer that is configured as (+, +) by rotating the detector by only one rotation.

4. An X-ray fluorescence analyzer according to claim 1, wherein, when high-resolution mode wide-area measurement is designated, the control means uses a Soller slit having foils stacked in the direction in which the first axis extends and which allows fluorescent X-rays generated from the sample to pass through, controls the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from the sample are incident on the detector, and controls the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the first dispersing element so that the dispersed fluorescent X-rays are incident on the detector.

5. An X-ray fluorescence analyzer according to claim 1, further comprising a retraction mechanism for retracting the second dispersing element from the optical path of the X-ray fluorescence, wherein when a low-resolution mode is designated, the control means controls the first rotation mechanism, the retraction mechanism, the movement mechanism and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector without passing through the second dispersing element, and controls at least the first rotation mechanism and the movement mechanism among the first rotation mechanism, the movement mechanism and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the first dispersing element so that the dispersed fluorescent X-rays are incident on the detector.

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