Surface potential distribution measurement device
WO2025243664A1PCT designated stage Publication Date: 2025-11-27NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE & TECHNOLOGY
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Patent Information
- Application Number
- PCT/JP2025/010253
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-05-21
- Filing Date
- 2025-03-17
- Publication Date
- 2025-11-27
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Figure JP2025010253_27112025_PF_FP_ABST
Abstract
A surface potential distribution measurement device comprising: a sensor substrate that is provided with a plurality of sensors; a vibration unit that vibrates the sensor substrate; an electrical characteristic measurement unit that measures the potential of a measurement target by using the plurality of sensors; a heating unit that heats the measurement target; a temperature measurement unit that measures the temperature of the measurement target; a surface shape measurement unit that measures a change in the surface shape of the measurement target due to heating; a sample stage on which the measurement target can be placed; and a movement unit that moves the sample stage, wherein the movement unit adjusts the distance between the measurement target and the sensor within a prescribed range.
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Citation Information
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