Elastic wave device

WO2025243694A1PCT designated stage Publication Date: 2025-11-27MURATA MFG CO LTD
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Patent Information

Application Number
PCT/JP2025/012965
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-05-23
Filing Date
2025-03-28
Publication Date
2025-11-27

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    Figure JP2025012965_27112025_PF_FP_ABST
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Abstract

This elastic wave device comprises a mounting substrate, an elastic wave element that is mounted on the mounting substrate, and a resin member that is provided to at least a portion of a surface of the elastic wave element that faces the mounting substrate. The elastic wave element is provided with a piezoelectric layer that has a first main surface and a second main surface on opposite sides from each other, an electrode that is provided to at least one of the first main surface and the second main surface of the piezoelectric layer, and a support member that is provided to the second-main-surface side of the piezoelectric layer and is provided with a cavity on the second-main-surface-side of the piezoelectric layer. The piezoelectric layer has an opening that is provided in a region overlapping an outer edge of the cavity. The support member has a side portion and a bottom portion that form the cavity, and has a plurality of protrusions that are provided to at least one of the side portion and the bottom portion in a region overlapping the opening of the piezoelectric layer.
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Citation Information

Patent Citations

  • Bulk acoustic wave resonator and manufacturing method thereof

    CN114124024A

  • Elastic wave device

    WO2022190743A1

  • Elastic wave device

    WO2022210694A1

  • Elastic wave device

    WO2022211055A1

  • Elastic wave device

    WO2022211087A1