Film thickness measurement method
The method uses color distance in the CIE 1976 (L*a*b*) color space to determine metal film thickness, addressing the challenge of spectral interference from metal surfaces and enhancing measurement accuracy by utilizing calibration curves for each metal type.
WO2025243738A1PCT designated stage Publication Date: 2025-11-27SCREEN HOLDINGS CO LTD
Patent Information
- Application Number
- PCT/JP2025/014947
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-05-23
- Filing Date
- 2025-04-16
- Publication Date
- 2025-11-27
Smart Images
Figure JP2025014947_27112025_PF_FP_ABST
Abstract
This film thickness measurement method, which is a method for measuring the thickness of a metal film, comprises a first step, a second step, and a third step. In the first step, a surface color, which is a color exhibited by the surface of the metal film, is measured. In the second step, the color distance is determined using the surface color. In the third step, the film thickness is determined by applying the color distance obtained in the second step to a metal film thickness-color distance relationship set on a per-metal type basis, the metal type being the type of metal.
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Citation Information
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