Inspection device with metasurface polarization beam splitter
WO2025244887A1PCT designated stage Publication Date: 2025-11-27CORNING INC
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Patent Information
- Application Number
- PCT/US2025/029234
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-05-22
- Filing Date
- 2025-05-14
- Publication Date
- 2025-11-27
Smart Images
Figure US2025029234_27112025_PF_FP_ABST
Abstract
An inspection device comprising: a quarter wave plate; and a metasurface based polarizing beam splitter situated adjacent to the quarter wave plate. In some embodiments the inspection device includes an optical objective lens a zoom lens situated between the object plane and the quarter wave plate. A photo mask may be situated at the object plane of the inspection device.
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