Physics augmented regression algorithm for critical dimensions in large pitch targets

WO2025245546A1PCT designated stage Publication Date: 2025-11-27KLA CORP
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Patent Information

Application Number
PCT/US2025/033715
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-06-17
Filing Date
2025-06-16
Publication Date
2025-11-27

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Abstract

Methods and systems for determining information for a specimen are provided. One system includes a metrology subsystem that detects signals responsive to illumination of a target structure on a specimen. The system also includes a physics augmented regression algorithm and an objective function. The objective function is configured for separation of relationships between the detected signals and different physical characteristics of the target structure. The physics augmented regression algorithm determines one or more of the different physical characteristics of the target structure from the detected signals.
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Citation Information

Patent Citations

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