Method of determining degradation on a fiducial
WO2026021719A1PCT designated stage Publication Date: 2026-01-29ASML NETHERLANDS BV
Patent Information
- Application Number
- PCT/EP2025/064564
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-07-26
- Filing Date
- 2025-05-27
- Publication Date
- 2026-01-29
Smart Images
Figure EP2025064564_29012026_PF_FP_ABST
Abstract
Disclosed is a method of determining a degradation level of a coating on a fiducial, the method comprising: determining a first mathematical model from a first set of measurements of the fiducial, said first set of measurements comprising measurements of a first measurement area of the fiducial; determining a second mathematical model from a second set of measurements of the fiducial, said second set of measurements comprising measurements of a second measurement area of the fiducial, said second measurement area being different to said first measurement area; and determining a degradation level of the coating based on the first mathematical model and the second mathematical model.
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Citation Information
Patent Citations
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