Charged particle beam device
WO2026062788A1PCT designated stage Publication Date: 2026-03-26HITACHI HIGH TECH CORP
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Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-09-18
- Publication Date
- 2026-03-26
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Figure JP2024033311_26032026_PF_FP_ABST
Abstract
The purpose of the present disclosure is to provide a charged particle beam device that can suppress focus blurring while suppressing the impact on observation throughput even if the focus is shifted due to the movement of a stage. A charged particle beam device according to the present disclosure generates maps describing the position of a sample in the height direction before and after rotating a stage, and calculates a difference map describing the difference between the generated maps (see fig. 4).
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