Active gas generation device

Abstract

An objective of the present disclosure is to provide an active gas generation device having an electrode unit structure capable of suppressing dielectric breakdown phenomena in regions other than the discharge space. In an electrode unit (E11) of the active gas generation device of the present disclosure, a high-voltage potential conductive film (11) is provided on an upper surface of a dielectric body (12), and a floating conductor (13) is provided on a lower surface of the dielectric body (12). Furthermore, a discharge surface dielectric body (14) is provided on the entire lower surface of the floating conductor (13) and has a planar shape wider than the floating conductor (13). The floating conductor (13) includes the high-voltage potential conductive film (11) in plan view, has a planar shape wider than the high-voltage potential conductive film (11) in plan view, and has a planar shape narrower than the dielectric body (12) in plan view.

Description

Active gas generator

[0001] The present disclosure relates to an active gas generator having a parallel plate type electrode structure and generating active gas by using dielectric barrier discharge.

[0002] In a conventional active gas generator having a parallel plate type electrode structure and employing dielectric barrier discharge, the gap between the metal electrodes (electrode conductive films) facing each other and the dielectric, or the gap between the dielectrics facing each other serves as the discharge space.

[0003] A conventional active gas generator employs parallel plate type dielectric barrier discharge, in which dielectric barrier discharge is generated in the discharge space and the raw material gas introduced into this discharge space is activated to generate active gas.

[0004] As an active gas generator employing parallel plate type dielectric barrier discharge, for example, there is an ozone generator disclosed in Patent Document 1.

[0005] Japanese Patent No. 3607890

[0006] In order to generate dielectric barrier discharge, there is a high-potential conductor to which a high-potential applied voltage is applied due to the structure. Therefore, dielectric breakdown may occur in regions other than the intended discharge region, for example, at the pointed ends of the high-potential conductor or in a region called a triple junction. Note that the triple junction means a region where a portion with a high dielectric constant, a portion with a low dielectric constant, and a proximity portion of the high-potential conductor are close to each other.

[0007] Dielectric breakdown due to a discharge phenomenon in an unintended region outside the discharge space is not desirable because it causes extra power consumption and destruction of the material accompanying the dielectric breakdown. This is because, since it is an unintended discharge region, the material may be ionized or the chemical composition of the material may change due to the dielectric breakdown.

[0008] To reduce the possibility of dielectric breakdown in areas where discharge is not intended, it is necessary to process the sharp ends of high-potential conductors by rounding them with a radius (R-shape) and cover (coat) the triple junction area with a dielectric material. Depending on the environment, such as the pressure used, and the potential applied to the high-potential conductor, the triple junction area may need to be covered with a thick protective film, which can be difficult to address depending on the structure.

[0009] This disclosure aims to provide an active gas generator having an electrode unit structure that can solve the above-mentioned problems, implement dielectric breakdown prevention measures in the triple junction region as described above, and effectively suppress dielectric breakdown phenomena in regions other than the discharge space.

[0010] A first aspect of the activated gas generator of the present disclosure is an activated gas generator having an electrode unit that activates a raw material gas supplied to a discharge space to generate an activated gas, wherein the electrode unit comprises a first electrode component and a second electrode component provided below the first electrode component, the first electrode component comprising a first dielectric, a high-voltage potential conductive film provided on the upper surface of the first dielectric, a floating conductor provided on the lower surface of the first dielectric, and a discharge surface dielectric provided over the entire lower surface of the floating conductor and having a wider planar shape than the floating conductor, and the second electrode component comprising a reference potential conductive film The electrode comprises an electrode film, the discharge space includes a region in the space between the discharge surface dielectric of the first electrode component and the second electrode component in which the floating conductor and the reference potential conductive film overlap in a plan view, the active gas generator further comprises a power supply that applies a voltage higher than the reference potential to the high-voltage potential conductive film of the first electrode component and applies the reference potential to the reference potential conductive film of the second electrode component, the floating conductor includes the high-voltage potential conductive film in a plan view, has a planar shape wider than the high-voltage potential conductive film in a plan view, and has a planar shape narrower than the first dielectric in a plan view.

[0011] A second aspect of the activated gas generator of the present disclosure is an activated gas generator having an electrode unit that activates a raw material gas supplied to a discharge space to generate an activated gas, wherein the electrode unit comprises a first electrode component, a second electrode component provided below the first electrode component, and a cooling plate provided on the first electrode component, the first electrode component comprising a first dielectric, a high-voltage potential power supply provided above the first dielectric, and a conductive film on the power supply provided on the high-voltage potential power supply, the conductive film on the power supply including the high-voltage potential power supply in plan view and having a planar shape wider than the high-voltage potential power supply in plan view The device has a shape, and the first electrode component further comprises an insulating plate provided on the conductive film on the power supply body, and a cover dielectric that covers the end of the conductive film on the power supply body and is provided on the lower surface of the insulating plate, the cooling plate is arranged on the insulating plate, the second electrode component comprises a reference potential conductive film, the discharge space is provided in the space sandwiched between the first dielectric of the first electrode component and the second electrode component, and the active gas generating device further comprises a power supply that applies a voltage higher than the reference potential to the high-voltage potential power supply body of the first electrode component and applies the reference potential to the reference potential conductive film of the second electrode component.

[0012] A third aspect of the activated gas generator of the present disclosure is an activated gas generator having an electrode unit that activates a raw material gas supplied to a discharge space to generate an activated gas, wherein the electrode unit comprises a first electrode component, a second electrode component provided below the first electrode component, and a cooling plate provided on the first electrode component, and the first electrode component comprises a first dielectric, a high-voltage potential supply body provided above the first dielectric, an insulating plate provided above the high-voltage potential supply body, and an insulating plate floating conductor provided in such a manner that it is embedded within the insulating plate. The cooling plate is arranged on the insulating plate, the second electrode component is provided with a reference potential conductive film, the discharge space is provided in the space sandwiched between the first dielectric of the first electrode component and the second electrode component, the active gas generating device further comprises a power supply that applies a voltage higher than the reference potential to the high-voltage potential power supply element of the first electrode component and applies the reference potential to the reference potential conductive film of the second electrode component, and the floating conductor in the insulating plate includes the high-voltage potential power supply element in plan view and has a planar shape wider than the high-voltage potential power supply element in plan view.

[0013] In a first embodiment of the active gas generator of the present disclosure, the first electrode component of the electrode unit has a floating conductor. Therefore, the potential near the edge of the high-voltage conductive film is equalized by the potential of the floating conductor, and the electric field strength near the edge of the high-voltage conductive film can be relaxed. On the other hand, the area near the edge of the floating conductor can be relaxed by the first dielectric.

[0014] As a result, the first embodiment of the active gas generating apparatus of the present disclosure can effectively suppress dielectric breakdown phenomena near the edges of the high-voltage conductive film on the upper surface of the first dielectric.

[0015] In a second embodiment of the active gas generator of the present disclosure, the first electrode component comprises a conductive film on a power supply and a cover dielectric. The conductive film on the power supply includes a high-voltage potential power supply in plan view and has a planar shape wider than the high-voltage potential power supply in plan view, and the cover dielectric covers the edges of the conductive film on the power supply and is provided on the lower surface of an insulating plate.

[0016] On the lower surface of the insulating plate of the first electrode component, the electric field strength is highest near the edge of the conductive film on the power supply. Since the first electrode component covers the edge of the conductive film on the power supply with a cover dielectric, the electric field strength near the edge of the conductive film on the power supply on the lower surface of the insulating plate can be mitigated.

[0017] As a result, a second embodiment of the active gas generating apparatus of the present disclosure can prevent dielectric breakdown on the lower surface of the insulating plate.

[0018] In a third aspect of the active gas generator of the present disclosure, the first electrode component includes an insulated floating conductor provided within an insulating plate, the insulated floating conductor having a planar shape that extends beyond a high-voltage potential supply body in a planar view and is wider than the high-voltage potential supply body in a planar view.

[0019] At least the potential near the ends of the high-voltage potential supply is leveled by the potential of the floating conductors within the insulating plate, thus mitigating the electric field strength near the ends of the high-voltage potential supply on the underside of the insulating plate.

[0020] Therefore, the third embodiment of the active gas generating apparatus of this disclosure can prevent dielectric breakdown on the lower surface of the insulating plate.

[0021] The purpose, features, aspects, and advantages of this disclosure will become clearer from the following detailed description and accompanying drawings.

[0022] Figure 1 is a schematic diagram illustrating the structure of the electrode unit (first configuration) in the active gas generator of Embodiment 1. Figure 2 is a schematic diagram illustrating the structure of the electrode unit (second configuration) in the active gas generator of Embodiment 1. Figure 3 is a schematic diagram illustrating the electric field conditions near the edge of the high-voltage potential conductive film when no floating conductors are present. Figure 4 is a schematic diagram illustrating the electric field conditions near the edge of the high-voltage potential conductive film in the electrode unit of Embodiment 1. Figure 5 is a schematic diagram illustrating the structure of the electrode unit (first configuration) in the active gas generator of Embodiment 2. Figure 6 is a schematic diagram illustrating the structure of the electrode unit (second configuration) in the active gas generator of Embodiment 2. Figure 7 is a schematic diagram illustrating the electric field conditions near the edge of the high-voltage potential conductive film when a cover dielectric is present but no floating conductors are present. Figure 8 is a schematic diagram illustrating the electric field conditions near the edge of the high-voltage potential conductive film in the electrode unit of Embodiment 2. Figure 9 is a schematic explanatory diagram showing the structure of the electrode unit (first configuration) in the activated gas generator of Embodiment 3. Figure 10 is a schematic explanatory diagram showing the structure of the electrode unit (second configuration) in the activated gas generator of Embodiment 3. Figure 11 is a schematic explanatory diagram showing the structure of the electrode unit (first configuration) in the activated gas generator of Embodiment 4. Figure 12 is a schematic explanatory diagram showing the structure of the electrode unit (second configuration) in the activated gas generator of Embodiment 4. Figure 13 is a schematic explanatory diagram showing the structure of the electrode unit (first configuration) in the activated gas generator of Embodiment 5. Figure 14 is a schematic explanatory diagram showing the structure of the electrode unit 55 (second configuration) in the activated gas generator of Embodiment 5. Figure 15 is a schematic explanatory diagram showing the structure of the electrode unit (first configuration) in the activated gas generator of Embodiment 6. Figure 16 is a schematic explanatory diagram showing the structure of the electrode unit (second configuration) in the activated gas generator of Embodiment 6. Figure 17 is a schematic diagram illustrating the structure of a conventional electrode unit having a cooling plate.

[0023] <Embodiment 1> (First Configuration) Figure 1 is a schematic explanatory diagram showing the structure of the electrode unit 51A in the active gas generator according to Embodiment 1. The electrode unit 51A has the first configuration of Embodiment 1.

[0024] The first configuration of the activated gas generator according to Embodiment 1 of this disclosure is an activated gas generator having an electrode unit 51A that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2. For example, oxygen gas can be used as the raw material gas G1, and ozone gas can be used as the activated gas G2.

[0025] The electrode unit 51A comprises, as its main components, an electrode component E11 which is a first electrode component and an electrode component E21 which is a second electrode component. The electrode component E21 is provided below the electrode component E11.

[0026] The electrode component E11, which is the first electrode component, mainly comprises a dielectric 12 that serves as the first dielectric, a high-voltage potential conductive film 11, a floating conductor 13, and a discharge surface dielectric 14.

[0027] The high-voltage conductive film 11 is provided on the upper surface of the dielectric 12, which serves as the first dielectric, and the floating conductor 13 is provided on the lower surface of the dielectric 12.

[0028] The discharge surface dielectric 14 is provided over the entire surface of the lower surface of the floating conductor 13 and has a planar shape wider than that of the floating conductor 13. Because the floating conductor 13 is thin, the discharge surface dielectric 14 is present on the lower surface of the dielectric 12 where the floating conductor 13 is not provided.

[0029] The electrode component E21, which is the second electrode component, mainly comprises a ground potential conductive film 21 that serves as a reference potential conductive film and a dielectric 22 that serves as a second dielectric. The dielectric 22 that serves as the second dielectric is provided on the ground potential conductive film 21. That is, the electrode component E21 includes at least a ground potential conductive film 21 that serves as a reference potential conductive film.

[0030] For the electrode component E11, the planar shapes of the high-voltage conductive film 11, dielectric 12, floating conductor 13, and discharge surface dielectric 14 can be considered to be, for example, circular. For the electrode component E21, the planar shapes of the ground-voltage conductive film 21 and dielectric 22 can be considered to be, for example, circular. Furthermore, the thickness of the floating conductor 13 is assumed to be less than 1 μm. Therefore, the gap between the dielectric 12 and the discharge surface dielectric 14 will be minimal.

[0031] The discharge space 4 includes a region in the space between the discharge surface dielectric 14 of electrode component E11 and the dielectric 22 of electrode component E21 where the discharge surface dielectric 14 and the ground potential conductive film 21 overlap in a plan view. Therefore, the discharge surface dielectric 14 of electrode component E11 and the dielectric 22 of electrode component E21 become the discharge surface of the discharge space 4.

[0032] The first configuration of the first embodiment of the active gas generator further includes an AC power supply 9 that applies an AC voltage that is higher than the ground potential, which is the reference potential.

[0033] The AC power supply 9 applies a voltage to the high-voltage conductive film 11 of the electrode component E11 and applies a ground potential, which is the reference potential, to the ground potential conductive film 21 of the electrode component E21.

[0034] In the electrode unit 51A of the active gas generator of Embodiment 1, the floating conductor 13 includes a high-voltage potential conductive film 11 when viewed from above, has a planar shape wider than the high-voltage potential conductive film 11 when viewed from above, and has a planar shape narrower than the dielectric 12 which becomes the first dielectric when viewed from above.

[0035] On the other hand, the ground potential conductive film 21, which is a reference potential conductive film, includes the floating conductor 13 when viewed from above and has a planar shape that is wider than the floating conductor 13 when viewed from above.

[0036] (Second Configuration) Figure 2 is a schematic diagram illustrating the structure of the electrode unit 51B in the active gas generator of Embodiment 1. The electrode unit 51B is the second configuration of Embodiment 1. Hereinafter, components similar to those in the electrode unit 51A shown in Figure 1 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The characteristic parts of the electrode unit 51B will be described.

[0037] The second configuration of the activated gas generator according to Embodiment 1 of this disclosure is an activated gas generator having an electrode unit 51B that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2.

[0038] The electrode unit 51B mainly comprises an electrode component E11 which is a first electrode component and an electrode component E22 which is a second electrode component. The electrode component E22 is provided below the electrode component E11.

[0039] The second electrode component, electrode component E22, is primarily composed of a ground potential conductive film 23, which serves as a reference potential conductive film. In other words, electrode component E22 consists only of a ground potential conductive film 23, which serves as a reference potential conductive film. For example, a circular shape can be considered for the planar shape of the ground potential conductive film 23 of electrode component E22.

[0040] The discharge space 4 is the space between the discharge surface dielectric 14 of the electrode component E11 and the ground potential conductive film 23 of the electrode component E22, and includes a region where the discharge surface dielectric 14 and the ground potential conductive film 23 overlap in a plan view. Therefore, the discharge surface dielectric 14 and the ground potential conductive film 23 become the discharge surface of the discharge space 4.

[0041] The AC power supply 9 applies a voltage to the high-voltage conductive film 11 of the electrode component E11 and applies a ground potential, which is the reference potential, to the ground potential conductive film 23 of the electrode component E22.

[0042] In the electrode unit 51B of the active gas generator of Embodiment 1, the floating conductor 13 includes a high-voltage potential conductive film 11 when viewed from above, has a planar shape wider than the high-voltage potential conductive film 11 when viewed from above, and has a planar shape narrower than the dielectric 12 when viewed from above.

[0043] On the other hand, the ground potential conductive film 23, which is the reference potential conductive film, includes the floating conductor 13 when viewed from above and has a planar shape that is wider than the floating conductor 13 when viewed from above.

[0044] (Effect) In the electrode units 51A and 51B of the active gas generation device according to Embodiment 1 of the present disclosure, the electrode component E11 that serves as the first electrode component of each of them has a floating conductor 13. The floating conductor 13 includes the high-voltage potential conductive film 11 in a plan view, and has a planar shape wider than the high-voltage potential conductive film 11 in a plan view. Therefore, when a voltage is applied from the AC power supply 9 to the high-voltage potential conductive film 11, the floating conductor 13 has a potential reflecting the potential of the high-voltage potential conductive film 11.

[0045] For this reason, the potential near the end of the high-voltage potential conductive film 11 is evened out by the potential of the floating conductor 13, and the electric field strength near the end of the high-voltage potential conductive film 11 can be relaxed. On the other hand, the vicinity of the end of the floating conductor 13 can be relaxed by the dielectric 12 which is the first dielectric. Therefore, dielectric breakdown does not occur in the space above the surface of the dielectric 12.

[0046] Hereinafter, the above effects will be described in detail. FIG. 3 is an explanatory diagram schematically showing the electric field situation near the end of the high-voltage potential conductive film 11 when the floating conductor 13 does not exist. FIG. 4 is an explanatory diagram schematically showing the electric field situation near the end of the high-voltage potential conductive film 11 in each of the electrode units 51A and 51B. In each of FIGS. 3 and 4, the arrow represents the electric field, and the length of the arrow indicates the strength of the electric field.

[0047] As shown in FIG. 3, the space region near the end of the high-voltage potential conductive film 11 on the upper surface of the dielectric 12 becomes a triple junction region close to the high-voltage potential conductive film 11 and the dielectric 12, so a relatively large electric field 43 is generated. On the other hand, as shown in FIG. 4, when the floating conductor 13 exists, the potential near the end of the high-voltage potential conductive film 11 is evened out by the potential of the floating conductor 13, and the electric field 41 in the triple junction region can be kept low.

[0048] As a result, the active gas generation device according to Embodiment 1 of the present disclosure having the electrode unit 51A or the electrode unit 51B can effectively suppress the dielectric breakdown phenomenon near the end of the high-voltage potential conductive film 11 on the upper surface of the dielectric 12. That is, the active gas generation device of Embodiment 1 can effectively suppress the dielectric breakdown phenomenon in regions other than the discharge space 4.

[0049] Since the active gas generation device of Embodiment 1 can exhibit the above effects, it is possible to increase the applied voltage from the AC power supply 9 that can be applied to the high-voltage potential conductive film 11 and to reduce the pressure required for preventing dielectric breakdown. This is because the active gas generation device of Embodiment 1 exhibits an effect of suppressing the dielectric breakdown phenomenon, so that it is possible to set a relatively low pressure at which dielectric breakdown tends to occur as the pressure decreases.

[0050] Therefore, it is possible to improve the processing ability of dielectric barrier discharge as the applied voltage increases and to simplify the casing that houses the electrode units 51A and 51B. This is because the withstand voltage required for the casing can be lowered, so that the wall thickness of the casing can be reduced.

[0051] Further, in the first configuration of the active gas generation device of Embodiment 1 having the electrode unit 51A, the electrode configuration part E21 serving as the second electrode configuration part includes a dielectric 22 that is a second dielectric, and the dielectric 22 serves as the discharge surface of the discharge space 4. Therefore, dielectric barrier discharge can also be generated on the electrode configuration part E21 side of the discharge space 4.

[0052] On the other hand, in the second configuration of the active gas generation device of Embodiment 1 having the electrode unit 51B, the electrode configuration part E22 serving as the second electrode configuration part is composed only of the ground potential conductive film 23 that is a reference potential conductive film, so that the device configuration can be simplified.

[0053] <Embodiment 2> (First Configuration) FIG. 5 is an explanatory diagram schematically showing the structure of the electrode unit 52A in the active gas generation device of Embodiment 2. The electrode unit 52A has the first configuration of Embodiment 2.

[0054] The first configuration of the active gas generation device according to Embodiment 2 of the present disclosure is an active gas generation device having an electrode unit 52A that activates the raw material gas G1 supplied to the discharge space 4 to generate the active gas G2. Hereinafter, the same components as those of the electrode unit 51A of Embodiment 1 shown in FIG. 1 are denoted by the same reference numerals and the description thereof is appropriately omitted, and the description will be centered on the characteristic portions of the electrode unit 52A.

[0055] The electrode unit 52A comprises, as its main components, an electrode component E12 which is a first electrode component and an electrode component E21 which is a second electrode component. The electrode component E21 is provided below the electrode component E12.

[0056] The first electrode component, electrode component E12, similar to electrode component E11, mainly comprises a dielectric 12 which serves as the first dielectric, a high-voltage conductive film 11, a floating conductor 13, and a discharge surface dielectric 14.

[0057] The electrode component E12 further includes a cover dielectric 15 as a main component. The cover dielectric 15 covers the edge of the high-voltage potential conductive film 11 and is provided on the upper surface of the dielectric 12 which becomes the first dielectric. If the planar shape of the high-voltage potential conductive film 11 is circular, the planar shape of the cover dielectric 15 will be, for example, arc-shaped.

[0058] (Second Configuration) Figure 6 is a schematic diagram illustrating the structure of electrode unit 52B in the active gas generator of Embodiment 2. Electrode unit 52B constitutes the second configuration of Embodiment 2. Hereinafter, components similar to those shown in electrode unit 51B in Figure 2 and electrode unit 52A in Figure 5 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The characteristic parts of electrode unit 52B will be described.

[0059] The second configuration of the activated gas generator according to Embodiment 2 of the present disclosure is an activated gas generator having an electrode unit 52B that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2.

[0060] The electrode unit 52B comprises an electrode component E12 which is a first electrode component and an electrode component E22 which is a second electrode component as its main components. The electrode component E22, which is the second electrode component, comprises only a ground potential conductive film 23 which is a reference potential conductive film as its main component.

[0061] (Effect) The electrode components E12, which are the first electrode components of the electrode units 52A and 51B of the active gas generator in Embodiment 2 of the present disclosure, have a floating conductor 13, similar to the electrode component E11 of Embodiment 1.

[0062] Therefore, the active gas generator in Embodiment 2, which has electrode unit 52A or electrode unit 52B, can effectively suppress dielectric breakdown phenomena near the edges of the high-voltage conductive film 11 on the upper surface of the dielectric 12, similar to Embodiment 1.

[0063] In addition, in the electrode component E12, which is the first electrode component of the active gas generator according to the second embodiment, the edges of the high-voltage conductive film 11 are covered with a cover dielectric 15, so that the electric field strength near the edges of the high-voltage conductive film 11 can be further reduced.

[0064] The above effects will be described in detail below. Figure 7 is a schematic diagram illustrating the electric field conditions near the edge of the high-voltage potential conductive film 11 when the cover dielectric 15 is present but the floating conductor 13 is absent. Figure 8 is a schematic diagram illustrating the electric field conditions near the edge of the high-voltage potential conductive film 11 in electrode units 52A and 51B, respectively. In Figures 7 and 8, the arrows represent electric fields, and the length of the arrows indicates the strength of the electric field.

[0065] As shown in Figure 7, even if a cover dielectric 15 is provided, if the thickness of the cover dielectric 15 is insufficient, an electric field 44 of a non-negligible magnitude will be generated in the space region near the edge of the high-voltage conductive film 11 and above the cover dielectric 15. For example, if the constituent material of the cover dielectric 15 is paste glass or the like and it is difficult to make a thick film, it may not be possible to form the cover dielectric 15 with a sufficient thickness during manufacturing. In this case, dielectric breakdown may occur in the space region near the edge of the high-voltage conductive film 11 and above the cover dielectric 15.

[0066] On the other hand, as shown in Figure 8, when both the floating conductor 13 and the cover dielectric 15 are present, even if it is difficult to make the cover dielectric 15 thicker, the potential in the spatial region near the edge of the high-voltage conductive film 11 and above the cover dielectric 15 is equalized by the potential of the floating conductor 13, and the electric field 42 can be kept sufficiently small.

[0067] As a result, the active gas generating apparatus according to Embodiment 2 of the present disclosure, which has electrode unit 52A or electrode unit 52B, can more effectively suppress dielectric breakdown phenomena near the edges of the high-voltage conductive film 11.

[0068] Furthermore, in the first configuration of the active gas generator of Embodiment 2 having the electrode unit 52A, since the electrode component E21 includes a dielectric 22 which becomes the discharge surface of the discharge space 4, a dielectric barrier discharge can also be generated on the electrode component E21 side of the discharge space 4.

[0069] On the other hand, in the second configuration of the active gas generator having electrode unit 52B, the electrode component E22 is composed only of a ground potential conductive film 23, thus simplifying the device configuration.

[0070] <Basic Technology> Figure 17 is a schematic explanatory diagram showing the structure of a conventional electrode unit 59 having a cooling plate 3, which is the basic technology of Embodiments 3 to 6.

[0071] The basic technology of the activated gas generation device is an activated gas generation device having an electrode unit 59 that activates the raw material gas G1 supplied to the discharge space 40 to generate activated gas G2.

[0072] The electrode unit 59 mainly includes an electrode component E19 which is a first electrode component, an electrode component E21 which is a second electrode component, and a cooling plate 3. The electrode component E21 is provided below the electrode component E19.

[0073] The electrode component E19, which is the first electrode component, mainly comprises a dielectric 12 that serves as the first dielectric, a high-voltage potential supply body 16a, and an insulating plate 66. The high-voltage potential supply body 16a is provided on the upper surface of the dielectric 12 that serves as the first dielectric.

[0074] The electrode component E21, which is the second electrode component, mainly comprises a ground potential conductive film 21 that serves as a reference potential conductive film and a dielectric 22 that serves as the second dielectric.

[0075] The discharge space 40 includes a region in the space between the dielectric 12 of electrode component E19 and the dielectric 22 of electrode component E21 where the high-voltage potential power supply 16a and the ground potential conductive film 21 overlap in a plan view.

[0076] In the electrode component E19, a highly thermally conductive insulating plate 66 is provided on the high-voltage potential power supply body 16a. A cooling plate 3 is provided on this insulating plate 66. The conductive cooling plate 3 has a cooling channel 31 inside, and cooling water C3, which serves as a refrigerant, is circulated within the cooling channel 31.

[0077] The basic technology of the activated gas generator is further equipped with an AC power supply 9 that applies an AC voltage that is higher than the ground potential, which is the reference potential.

[0078] The AC power supply 9 applies a voltage to the high-voltage potential supply element 16a of the electrode component E19, and applies a ground potential, which is the reference potential, to the ground potential conductive film 21 of the electrode component E21. The ground potential is also applied to the cooling plate 3. The cooling plate 3 functions as an electrode cooling plate. The cooling plate 3 is conductive.

[0079] An electrode unit 59 with this configuration has a water-cooled cooling plate 3. A similar cooling technology is disclosed in Patent Document 1 (Figure 2).

[0080] The electrode unit 59 can cool the dielectric 12 with a water-cooled cooling plate 3. However, in the electrode unit 59, if a gap occurs in the contact area between the high-voltage potential supply body 16a and the insulating plate 66 due to the effects of processing accuracy, the electric field strength in that gap may increase, potentially causing dielectric breakdown.

[0081] Specifically, a strong electric field region R16 is generated on the lower surface side of the insulating plate 66 near the end of the high-voltage potential power supply 16a, making dielectric breakdown more likely to occur in the strong electric field region R16. The active gas generators of Embodiments 3 to 6 described below aim to prevent dielectric breakdown and other problems in the strong electric field region R16.

[0082] <Embodiment 3> (First Configuration) Figure 9 is a schematic explanatory diagram showing the structure of the electrode unit 53A in the active gas generator of Embodiment 3. The electrode unit 53A has the first configuration of Embodiment 3.

[0083] The first configuration of the third embodiment of the activated gas generator of this disclosure is an activated gas generator having an electrode unit 53A that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2.

[0084] The electrode unit 53A mainly comprises an electrode component E13 which is a first electrode component, an electrode component E21 which is a second electrode component, and a cooling plate 3.

[0085] The electrode component E21 is located below the electrode component E13. The cooling plate 3 is located on top of the electrode component E13. The cooling plate 3 has a cooling channel 31 inside, and coolant water C3 is circulated within the cooling channel 31.

[0086] The electrode component E13, which is the first electrode component, mainly comprises a dielectric 12 that serves as the first dielectric, a high-voltage potential power supply unit 16, a conductive film 17 on the power supply unit, a cover dielectric 18, and an insulating plate 6.

[0087] The high-voltage potential supply unit 16 is provided on the upper surface of the dielectric 12, which serves as the first dielectric. The high-voltage potential supply unit 16 has a laminated structure consisting of a relatively thick high-voltage potential supply body 16a and a relatively thin expanded conductive film 16b. The thickness of the expanded conductive film 16b is approximately 1 μm. The expanded conductive film 16b is provided on the upper surface of the dielectric 12, and the high-voltage potential supply body 16a is provided on the expanded conductive film 16b.

[0088] Thus, in the electrode unit 53A, the high-voltage potential supply element 16a is provided above the dielectric 12. Specifically, the high-voltage potential supply element 16a is provided above the dielectric 12 via an expanded conductive film 16b.

[0089] The expanded conductive film 16b includes the high-voltage potential power supply 16a when viewed from above, and has a planar shape wider than the high-voltage potential power supply 16a.

[0090] A conductive film 17 is provided on a high-voltage potential power supply body 16a, and an insulating plate 6 is provided on this conductive film 17. The insulating plate 6, which has high thermal conductivity, includes the conductive film 17 when viewed from above and has a wider planar shape than the conductive film 17. Therefore, the entire upper surface of the conductive film 17 is in close contact with the lower surface of the insulating plate 6.

[0091] The conductive film 17 on the power supply body includes the high-voltage potential power supply body 16a when viewed from above, and has a planar shape wider than the high-voltage potential power supply body 16a. The planar shape of the conductive film 17 on the power supply body substantially matches the planar shape of the extended conductive film 16b.

[0092] The cover dielectric 18 covers the edge of the conductive film 17 on the power supply and is provided on the lower surface of the insulating plate 6.

[0093] The electrode component E21, which is the second electrode component, mainly comprises a ground potential conductive film 21 that serves as a reference potential conductive film and a dielectric 22 that serves as the second dielectric. That is, the electrode component E21 includes at least a ground potential conductive film 21 that serves as a reference potential conductive film.

[0094] For the electrode component E13, the dielectric 12, expanded conductive film 16b, high-voltage potential power supply body 16a, conductive film 17 on the power supply body, and high-voltage potential power supply unit 16 can be considered to have a circular planar shape, for example, and the cover dielectric 18 can be considered to have an arc shape, for example. For the electrode component E21, the ground potential conductive film 21 and dielectric 22 can be considered to have a circular planar shape, for example.

[0095] The discharge space 4 includes a region in the space between the dielectric 12 of electrode component E13 and the dielectric 22 of electrode component E21 where the expanded conductive film 16b and the ground potential conductive film 21 overlap in a plan view.

[0096] The active gas generator in the first configuration of Embodiment 3 further includes an AC power supply 9 that applies an AC voltage that is higher than the ground potential, which serves as the reference potential.

[0097] The AC power supply 9 applies a voltage to the high-voltage potential supply element 16a of the electrode component E13, and applies a ground potential, which serves as the reference potential, to the ground potential conductive film 21 of the electrode component E21. The ground potential is also applied to the cooling plate 3. The cooling plate 3 functions as an electrode cooling plate.

[0098] In the electrode unit 53A of the active gas generator of Embodiment 3, the conductive film 17 on the power supply body includes the high-voltage potential power supply body 16a when viewed from above, and has a planar shape that is wider than the high-voltage potential power supply body 16a when viewed from above.

[0099] On the other hand, the ground potential conductive film 21, which is the reference potential conductive film, includes the expanded conductive film 16b when viewed from above, and has a planar shape that is wider than the expanded conductive film 16b when viewed from above.

[0100] (Second Configuration) Figure 10 is a schematic diagram illustrating the structure of the electrode unit 53B in the active gas generator of Embodiment 3. The electrode unit 53B is the second configuration of Embodiment 3. Hereinafter, components similar to those of the electrode unit 53A shown in Figure 9 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The characteristic parts of the electrode unit 53B will be described.

[0101] The third embodiment of the activated gas generator of this disclosure has a second configuration, which includes an electrode unit 53B that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2.

[0102] The electrode unit 53B mainly includes an electrode component E13 which is a first electrode component, an electrode component E22 which is a second electrode component, and a cooling plate 3. The electrode component E22 is provided below the electrode component E13.

[0103] The second electrode component, electrode component E22, is primarily composed of a ground potential conductive film 23, which serves as a reference potential conductive film. In other words, electrode component E22 consists only of the ground potential conductive film 23, which serves as a reference potential conductive film.

[0104] The discharge space 4 includes a region in the space between the dielectric 12 of the electrode component E13 and the ground potential conductive film 23 of the electrode component E22 where the expanded conductive film 16b and the ground potential conductive film 23 overlap in a plan view.

[0105] The AC power supply 9 applies a voltage to the high-voltage potential power supply element 16a of the electrode component E13 and applies a ground potential, which is the reference potential, to the ground potential conductive film 23 of the electrode component E22.

[0106] In the electrode unit 53B of the active gas generator of Embodiment 3, the conductive film 17 on the power supply body includes the high-voltage potential power supply body 16a when viewed from above, and has a planar shape that is wider than the high-voltage potential power supply body 16a when viewed from above.

[0107] On the other hand, the ground potential conductive film 23, which is the reference potential conductive film, includes the expanded conductive film 16b when viewed from above, and has a planar shape that is wider than the expanded conductive film 16b when viewed from above.

[0108] (Effect) The electrode component E13 in the active gas generator of Embodiment 3 having electrode unit 53A or electrode unit 53B comprises a conductive film 17 on the power supply body 16a and a cover dielectric 18. The conductive film 17 on the power supply body includes the high-voltage power supply body 16a when viewed from above and has a planar shape wider than the high-voltage power supply body 16a when viewed from above, and the cover dielectric 18 covers the end of the conductive film 17 on the power supply body and is provided on the lower surface of the insulating plate 6.

[0109] On the lower surface of the insulating plate 6 of the electrode component E13, which is the first electrode component, the electric field strength is highest near the edge of the conductive film 17 on the power supply body. Since the electrode component E13 covers the edge of the conductive film 17 on the power supply body with a cover dielectric 18, the electric field strength near the edge of the conductive film 17 on the lower surface of the insulating plate 6 can be mitigated.

[0110] As a result, the active gas generator of Embodiment 3 can prevent dielectric breakdown on the lower surface of the insulating plate 6. In other words, the active gas generator of Embodiment 2 can effectively suppress dielectric breakdown in areas other than the discharge space 4.

[0111] Furthermore, the high-voltage potential supply unit 16 of the electrode component E13 of the active gas generator of Embodiment 3 has an expanded conductive film 16b below the high-voltage potential supply unit 16a, which has a planar shape wider than that of the high-voltage potential supply unit 16a, thus expanding the volume of the discharge space 4. This is because the discharge space 4 includes a region in the space between the dielectric 12 and the dielectric 22 (ground potential conductive film 23) where the expanded conductive film 16b and the ground potential conductive film 21 (23) overlap in a planar view.

[0112] Furthermore, by forming an expanded conductive film 16b on the upper surface of the dielectric 12 by printing, firing, sputtering, or other methods, a highly adhesive expanded conductive film 16b can be formed on the upper surface of the dielectric 12 without any irregularities. This makes it possible to improve the uniformity of the electric field within the discharge space 4.

[0113] Furthermore, in the active gas generator of Embodiment 3, the cooling plate 3 has a cooling channel 31 through which cooling water C3, which serves as a refrigerant, flows, so that the electrode components E13 of the electrode unit 53 (53A, 53B) can be effectively cooled via the insulating plate 6.

[0114] Furthermore, in the first configuration of the active gas generator of Embodiment 3 having the electrode unit 53A, since the electrode component E21 includes a dielectric 22 which becomes the discharge surface of the discharge space 4, a dielectric barrier discharge can also be generated on the electrode component E21 side of the discharge space 4.

[0115] On the other hand, in the second configuration of the active gas generator of embodiment 3 having an electrode unit 53B, the electrode component E22 is composed only of a ground potential conductive film 23, thus simplifying the device configuration.

[0116] Furthermore, electrode units 53A and 53B each have a cooling plate 3 provided via an insulating plate 6 of the electrode component E13. Therefore, the heat generated in the dielectric 12 can be removed through the path of the high-voltage potential power supply unit 16, the conductive film 17 on the power supply body, the insulating plate 6, and the cooling plate 3.

[0117] A cooling channel 31 is formed inside the cooling plate 3 through which a cooling fluid C3 can flow, allowing for efficient heat removal by flowing a coolant such as the cooling fluid C3. To improve thermal conductivity, adhesive materials such as sheets or pastes with excellent electrical and thermal conductivity may be added between the high-voltage potential power supply 16a and the expanded conductive film 16b, and between the high-voltage potential power supply 16a and the conductive film 17 on the power supply. Specific examples of adhesive materials include silicone gel and liquid metal.

[0118] It is desirable that the adhesive material for sheets and pastes be provided such that, when viewed from above, it is narrower than the diameter (planar region when the planar shape is circular) of the combination of the high-voltage potential power supply 16a or the conductive film 17 on the power supply and the cover dielectric 18.

[0119] <Embodiment 4> (First Configuration) Figure 11 is a schematic diagram illustrating the structure of the electrode unit 54A in the active gas generator of Embodiment 4. The electrode unit 54A is the first configuration of Embodiment 4.

[0120] The first configuration of the activated gas generator according to Embodiment 4 of this disclosure is an activated gas generator having an electrode unit 54A that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2. Hereinafter, components similar to those of the electrode unit 53A of Embodiment 3 shown in Figure 9 will be denoted by the same reference numerals and their descriptions will be omitted as appropriate, and the characteristic features of the electrode unit 54A will be described in detail.

[0121] The electrode unit 54A mainly includes an electrode component E14 which is a first electrode component, an electrode component E21 which is a second electrode component, and a cooling plate 3.

[0122] The electrode component E21 is located below the electrode component E14. The cooling plate 3 is located on top of the electrode component E14. The cooling plate 3 has a cooling channel 31 inside, and coolant water C3 is circulated within the cooling channel 31.

[0123] The electrode component E14, which is the first electrode component, mainly comprises a dielectric 12 that serves as the first dielectric, a high-voltage potential supply unit 16, an insulating plate 6, and a floating conductor 61 within the insulating plate.

[0124] The high-voltage potential supply section 16 has a laminated structure of a high-voltage potential supply element 16a and an expanded conductive film 16b. Therefore, the high-voltage potential supply element 16a is provided above the dielectric 12 via the high-voltage potential supply element 16a.

[0125] In the electrode unit 54A, an insulating plate 6 is provided on the high-voltage potential power supply body 16a, and an insulating plate floating conductor 61 is provided embedded within the insulating plate 6. That is, the insulating plate 6 is provided directly on the upper surface of the high-voltage potential power supply body 16a, and nothing is interposed between the insulating plate 6 and the high-voltage potential power supply body 16a.

[0126] The floating conductor 61 within the insulating plate includes the high-voltage potential supply element 16a when viewed from above, and has a planar shape wider than the high-voltage potential supply element 16a. The planar shape of the floating conductor 61 within the insulating plate is, for example, circular. The thickness of the floating conductor 61 within the insulating plate is assumed to be less than 1 μm.

[0127] The electrode component E21, which is the second electrode component, mainly comprises a ground potential conductive film 21 that serves as a reference potential conductive film and a dielectric 22 that serves as the second dielectric.

[0128] The discharge space 4 includes a region in the space between the dielectric 12 of electrode component E14 and the dielectric 22 of electrode component E21 where the expanded conductive film 16b and the ground potential conductive film 21 overlap in a plan view.

[0129] The AC power supply 9 applies a voltage to the high-voltage potential power supply element 16a of the electrode component E14, and applies a ground potential, which serves as the reference potential, to the ground potential conductive film 21 of the electrode component E21. The ground potential is also applied to the cooling plate 3. The cooling plate 3 functions as an electrode cooling plate.

[0130] In the electrode unit 54A of the active gas generator of Embodiment 4, the floating conductor 61 inside the insulating plate includes the high-voltage potential power supply 16a when viewed from above, and has a planar shape wider than the high-voltage potential power supply 16a when viewed from above.

[0131] On the other hand, the ground potential conductive film 21, which is the reference potential conductive film, includes the expanded conductive film 16b when viewed from above, and has a planar shape that is wider than the expanded conductive film 16b when viewed from above.

[0132] (Second Configuration) Figure 12 is a schematic diagram illustrating the structure of the electrode unit 54B in the active gas generator of Embodiment 4. The electrode unit 54B is the second configuration of Embodiment 4. Hereinafter, components similar to those of the electrode unit 54A shown in Figure 11 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The characteristic parts of the electrode unit 54B will be described.

[0133] The second configuration of the activated gas generator according to Embodiment 4 of this disclosure is an activated gas generator having an electrode unit 54B that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2.

[0134] The electrode unit 54B mainly includes an electrode component E14 which is a first electrode component, an electrode component E22 which is a second electrode component, and a cooling plate 3. The electrode component E22 is provided below the electrode component E14.

[0135] The second electrode component, electrode component E22, is primarily composed of a ground potential conductive film 23, which serves as a reference potential conductive film. In other words, electrode component E22 consists only of the ground potential conductive film 23, which serves as a reference potential conductive film.

[0136] The discharge space 4 includes a region in the space between the dielectric 12 of the electrode component E14 and the ground potential conductive film 23 of the electrode component E22 where the expanded conductive film 16b and the ground potential conductive film 23 overlap in a plan view.

[0137] The AC power supply 9 applies a voltage to the high-voltage potential power supply element 16a of the electrode component E14 and applies a ground potential, which is the reference potential, to the ground potential conductive film 23 of the electrode component E22.

[0138] In the electrode unit 54B of the active gas generator of Embodiment 4, the floating conductor 61 inside the insulating plate includes the high-voltage potential power supply 16a when viewed from above, and has a planar shape wider than the high-voltage potential power supply 16a when viewed from above.

[0139] On the other hand, the ground potential conductive film 23, which is the reference potential conductive film, includes the expanded conductive film 16b when viewed from above, and has a planar shape that is wider than the expanded conductive film 16b when viewed from above.

[0140] (Effect) The active gas generator of Embodiment 4, which has electrode unit 54A or electrode unit 54B, has an electrode component E14 with the structure described above. When a voltage is applied from the AC power supply 9 to the high-voltage potential supply body 16a, the floating conductor 61 inside the insulating plate has a potential that reflects the potential of the high-voltage potential supply body 16a.

[0141] On the lower surface of the insulating plate 6 of the electrode component E14, the electric field strength is highest near the end of the high-voltage potential supply element 16a. Since the potential near the end of the high-voltage potential supply element 16a is equalized by the potential of the floating conductor 61 inside the insulating plate, the electric field strength near the end of the high-voltage potential supply element 16a on the lower surface of the insulating plate 6 can be mitigated. In other words, the electric field strength of the strong electric field region R16 in the basic technology shown in Figure 17 can be mitigated.

[0142] Furthermore, since the insulating plate 6 exists around the ends of the floating conductor 61 within the insulating plate, the electric field strength near the ends of the floating conductor 61 within the insulating plate can be mitigated.

[0143] As a result, the activated gas generator of Embodiment 4 can prevent dielectric breakdown on the lower surface of the insulating plate 6. In other words, the activated gas generator of Embodiment 4 can effectively suppress dielectric breakdown in areas other than the discharge space 4.

[0144] Furthermore, the high-voltage potential supply section 16 of the electrode component E14 of the active gas generator in Embodiment 4 has an expanded conductive film 16b whose planar shape is wider than that of the high-voltage potential supply body 16a, thereby expanding the volume of the discharge space 4.

[0145] Furthermore, in the activated gas generator of Embodiment 4, the cooling plate 3 has a cooling channel 31 through which cooling water C3 flows, so that the electrode components E14 of the electrode unit 54 (54A, 54B) can be effectively cooled via the insulating plate 6.

[0146] Furthermore, in the first configuration of the active gas generator of Embodiment 4 having the electrode unit 54A, since the electrode component E21 includes a dielectric 22 which becomes the discharge surface of the discharge space 4, a dielectric barrier discharge can also be generated on the electrode component E21 side of the discharge space 4.

[0147] On the other hand, in the second configuration of the active gas generator of embodiment 4 having an electrode unit 54B, the electrode component E22 is composed only of a ground potential conductive film 23, thus simplifying the device configuration.

[0148] Furthermore, electrode units 54A and 54B each have a cooling plate 3 provided via an insulating plate 6 of the electrode component E14. Therefore, the heat generated in the dielectric 12 can be removed through the path of the high-voltage potential supply unit 16, the insulating plate 6, and the cooling plate 3 (including the floating conductor 61 within the insulating plate).

[0149] A cooling channel 31 is formed inside the cooling plate 3 through which a cooling fluid C3 can flow, allowing for efficient heat removal by flowing a coolant such as the cooling fluid C3. To improve thermal conductivity, adhesive materials such as sheets or pastes with excellent electrical and thermal conductivity may be added between the high-voltage potential supply body 16a and the expanded conductive film 16b, and between the high-voltage potential supply body 16a and the insulating plate 6. However, it is desirable that these adhesive materials such as sheets or pastes be provided such that, when viewed from above, they are narrower than the diameter of the high-voltage potential supply body 16a or the floating conductor 61 inside the insulating plate (the planar region when the planar shape is circular).

[0150] <Embodiment 5> (First Configuration) Figure 13 is a schematic explanatory diagram showing the structure of the electrode unit 55A in the active gas generator of Embodiment 5. The electrode unit 55A is the first configuration of Embodiment 5.

[0151] The first configuration of the activated gas generator according to Embodiment 5 of this disclosure is an activated gas generator having an electrode unit 55A that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2. Hereinafter, components similar to the electrode unit 53A of Embodiment 3 shown in Figure 9 or the electrode unit 54A of Embodiment 4 shown in Figure 11 will be denoted by the same reference numerals and their descriptions will be omitted as appropriate, and the characteristic parts of the electrode unit 55A will be described in detail.

[0152] The electrode unit 55A mainly includes an electrode component E15 which is a first electrode component, an electrode component E21 which is a second electrode component, and a cooling plate 3.

[0153] The electrode component E21 is located below the electrode component E15. The cooling plate 3 is located on top of the electrode component E15. The cooling plate 3 has a cooling channel 31 inside, and coolant water C3 is circulated within the cooling channel 31.

[0154] The electrode component E15, which is the first electrode component, mainly comprises a dielectric 12 that serves as the first dielectric, a high-voltage potential power supply unit 16, a conductive film 17 on the power supply unit, an insulating plate 6, and a floating conductor 62 within the insulating plate.

[0155] In the electrode unit 55A, a conductive film 17 is provided on the high-voltage potential power supply body 16a, and an insulating plate 6 is provided on this conductive film 17. That is, the insulating plate 6 is provided above the high-voltage potential power supply body 16a via the conductive film 17, and the conductive film 17 is interposed between the insulating plate 6 and the high-voltage potential power supply body 16a.

[0156] When viewed from above, the insulating plate 6 includes the conductive film 17 on the power supply and has a planar shape wider than the conductive film 17 on the power supply. Therefore, the entire upper surface of the conductive film 17 on the power supply is in close contact with the lower surface of the insulating plate 6.

[0157] The conductive film 17 on the power supply body includes the high-voltage potential power supply body 16a when viewed from above, and has a planar shape wider than the high-voltage potential power supply body 16a. The planar shape of the conductive film 17 on the power supply body is, for example, circular, and the planar shape of the conductive film 17 on the power supply body substantially matches the planar shape of the extended conductive film 16b.

[0158] Furthermore, a floating conductor 62 is provided within the insulating plate 6 in a manner that it is embedded within the insulating plate 6. The floating conductor 62, when viewed from above, includes the conductive film 17 on the power supply and has a planar shape wider than the conductive film 17 on the power supply. That is, the floating conductor 62, when viewed from above, includes the high-voltage potential power supply 16a and the conductive film 17 on the power supply and has a planar shape wider than the conductive film 17 on the power supply and the high-voltage potential power supply 16a. The planar shapes of the conductive film 17 on the power supply and the floating conductor 62 in the insulating plate are, for example, circular. The thickness of the floating conductor 62 in the insulating plate is assumed to be less than 1 μm.

[0159] The electrode component E21, which is the second electrode component, mainly comprises a ground potential conductive film 21 that serves as a reference potential conductive film and a dielectric 22 that serves as the second dielectric.

[0160] The discharge space 4 includes a region in the space between the dielectric 12 of electrode component E15 and the dielectric 22 of electrode component E21 where the expanded conductive film 16b and the ground potential conductive film 21 overlap in a plan view.

[0161] The AC power supply 9 applies a voltage to the high-voltage potential power supply element 16a of the electrode component E15 and applies a ground potential, which is the reference potential, to the ground potential conductive film 21 of the electrode component E21.

[0162] In the electrode unit 55A of the active gas generator of Embodiment 5, the conductive film 17 on the power supply body has a planar shape that is wider than the high-voltage potential power supply body 16a when viewed from above, and narrower than the dielectric 12 which becomes the first dielectric when viewed from above.

[0163] In addition, the floating conductor 62 within the insulating plate is wider than the conductive film 17 on the power supply when viewed from above, and has a planar shape that includes the conductive film 17 on the power supply when viewed from above.

[0164] On the other hand, the ground potential conductive film 21, which is the reference potential conductive film, includes the expanded conductive film 16b when viewed from above, and has a planar shape that is wider than the expanded conductive film 16b when viewed from above.

[0165] (Second Configuration) Figure 14 is a schematic diagram illustrating the structure of the electrode unit 55B in the active gas generator of Embodiment 5. The electrode unit 55B is the second configuration of Embodiment 5. Hereinafter, components similar to those of the electrode unit 55A shown in Figure 13 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The characteristic parts of the electrode unit 55B will be described.

[0166] The second configuration of the activated gas generator in Embodiment 5 of the present disclosure is an activated gas generator having an electrode unit 55B that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2.

[0167] The electrode unit 55B mainly comprises an electrode component E15 which is a first electrode component, an electrode component E22 which is a second electrode component, and a cooling plate 3. The electrode component E22 is provided below the electrode component E15.

[0168] The second electrode component, electrode component E22, is primarily composed of a ground potential conductive film 23, which serves as a reference potential conductive film. In other words, electrode component E22 consists only of the ground potential conductive film 23, which serves as a reference potential conductive film.

[0169] The discharge space 4 includes a region in the space between the dielectric 12 of the electrode component E15 and the ground potential conductive film 23 of the electrode component E22 where the expanded conductive film 16b and the ground potential conductive film 23 overlap in a plan view.

[0170] The AC power supply 9 applies a voltage to the high-voltage potential power supply element 16a of the electrode component E15 and applies a ground potential, which is the reference potential, to the ground potential conductive film 23 of the electrode component E22.

[0171] In the electrode unit 55B of the active gas generator of Embodiment 5, the conductive film 17 on the power supply body includes the high-voltage potential power supply body 16a when viewed from above, and has a planar shape that is wider than the high-voltage potential power supply body 16a when viewed from above.

[0172] In addition, the floating conductor 62 within the insulating plate includes the conductive film 17 on the power supply when viewed from above, and has a planar shape that is wider than the conductive film 17 on the power supply when viewed from above.

[0173] (Effect) The active gas generator of Embodiment 5, which has an electrode unit 55A or an electrode unit 55B, has an electrode component E15 with the structure described above. When a voltage is applied from the AC power supply 9 to the high-voltage potential supply body 16a, the floating conductor 61 inside the insulating plate has a potential that reflects the potential of the high-voltage potential supply body 16a and the conductive film 17 on the supply body.

[0174] On the lower surface of the insulating plate 6 of the electrode component E15, the electric field strength is highest near the edge of the conductive film 17 on the power supply. In addition to the potential near the edge of the high-voltage power supply 16a, the potential near the edge of the conductive film 17 on the power supply is equalized by the potential of the floating conductor 62 inside the insulating plate, thus mitigating the electric field strength near the edge of the conductive film 17 on the lower surface of the insulating plate 6.

[0175] In addition, since the insulating plate 6 is located around the end of the floating conductor 62 within the insulating plate, the electric field strength near the end of the floating conductor 62 within the insulating plate can be mitigated.

[0176] As a result, the activated gas generator of Embodiment 5 can prevent dielectric breakdown on the lower surface of the insulating plate 6.

[0177] Furthermore, the high-voltage potential supply section 16 of the electrode component E15 of the active gas generator in Embodiment 5 has an expanded conductive film 16b whose planar shape is wider than that of the high-voltage potential supply body 16a, thereby expanding the volume of the discharge space 4.

[0178] Furthermore, in the activated gas generator of Embodiment 5, the cooling plate 3 has a cooling channel 31 through which cooling water C3 flows, so that the electrode components E15 of the electrode unit 55 (55A, 55B) can be effectively cooled via the insulating plate 6.

[0179] Furthermore, in the first configuration of the active gas generator of Embodiment 5 having the electrode unit 55A, since the electrode component E21 includes a dielectric 22 which becomes the discharge surface of the discharge space 4, a dielectric barrier discharge can also be generated on the electrode component E21 side of the discharge space 4.

[0180] On the other hand, in the second configuration of the active gas generator of embodiment 5 having an electrode unit 55B, the electrode component E22 is composed only of a ground potential conductive film 23, thus simplifying the device configuration.

[0181] Furthermore, electrode units 55A and 55B each have a cooling plate 3 provided via an insulating plate 6 of the electrode component E15. Therefore, the heat generated in the dielectric 12 can be removed through the path of the high-voltage potential power supply unit 16, the conductive film 17 on the power supply body, the insulating plate 6 (including the floating conductor 62 inside the insulating plate), and the cooling plate 3.

[0182] A cooling channel 31 is formed inside the cooling plate 3 through which a fluid cooling water C3 can flow, allowing for efficient heat removal by flowing a coolant such as cooling water C3. To improve thermal conductivity, adhesive materials such as sheets or pastes with excellent electrical and thermal conductivity may be added between the high-voltage potential power supply 16a and the expanded conductive film 16b, and between the high-voltage potential power supply 16a and the conductive film 17 on the power supply. However, it is desirable that these adhesive materials such as sheets or pastes be provided such that, when viewed from above, they are narrower than the diameter of the high-voltage potential power supply 16a or the conductive film 17 on the power supply (the planar region when the planar shape is circular).

[0183] <Embodiment 6> (First Configuration) Figure 15 is a schematic explanatory diagram showing the structure of the electrode unit 56A in the active gas generator of Embodiment 6. The electrode unit 56A is the first configuration of Embodiment 6.

[0184] The first configuration of the activated gas generator according to Embodiment 6 of this disclosure is an activated gas generator having an electrode unit 56A that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2. Hereinafter, components similar to the electrode unit 53A of Embodiment 3 shown in Figure 9 or the electrode unit 55A of Embodiment 5 shown in Figure 13 will be denoted by the same reference numerals and their descriptions will be omitted as appropriate, and the characteristic parts of the electrode unit 56A will be described in detail.

[0185] The electrode unit 56A mainly includes an electrode component E16 which is a first electrode component, an electrode component E21 which is a second electrode component, and a cooling plate 3.

[0186] The electrode component E21 is located below the electrode component E16. The cooling plate 3 is located on top of the electrode component E16.

[0187] The first electrode component, electrode component E16, similar to electrode component E15, mainly comprises a dielectric 12 which serves as the first dielectric, a high-voltage potential power supply unit 16, a conductive film 17 on the power supply unit, an insulating plate 6, and a floating conductor 61 within the insulating plate.

[0188] The electrode component E16 further includes a cover dielectric 18 as a main component. The cover dielectric 18 covers the edge of the conductive film 17 on the power supply and is provided on the lower surface of the insulating plate 6.

[0189] The electrode component E21, which is the second electrode component, mainly comprises a ground potential conductive film 21 that serves as a reference potential conductive film and a dielectric 22 that serves as the second dielectric.

[0190] The discharge space 4 includes a region in the space between the dielectric 12 of electrode component E16 and the dielectric 22 of electrode component E21 where the expanded conductive film 16b and the ground potential conductive film 21 overlap in a plan view.

[0191] The AC power supply 9 applies a voltage to the high-voltage potential power supply element 16a of the electrode component E16 and applies a ground potential, which is the reference potential, to the ground potential conductive film 21 of the electrode component E21.

[0192] In the electrode unit 56A of the active gas generator of Embodiment 6, the conductive film 17 on the power supply body has a planar shape that is wider than the high-voltage potential power supply body 16a when viewed from above, and narrower than the dielectric 12 which becomes the first dielectric when viewed from above.

[0193] In addition, the floating conductor 62 within the insulating plate is wider than the conductive film 17 on the power supply when viewed from above, and has a planar shape that includes the conductive film 17 when viewed from above. Furthermore, the edges of the conductive film 17 on the power supply are covered with the cover dielectric 18.

[0194] On the other hand, the ground potential conductive film 21, which is the reference potential conductive film, includes the expanded conductive film 16b when viewed from above, and has a planar shape that is wider than the expanded conductive film 16b when viewed from above.

[0195] (Second Configuration) Figure 16 is a schematic diagram illustrating the structure of the electrode unit 56B in the active gas generator of Embodiment 6. The electrode unit 56B is the second configuration of Embodiment 6. Hereinafter, components similar to those of the electrode unit 56A shown in Figure 15 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The characteristic parts of the electrode unit 56B will be described.

[0196] The second configuration of the activated gas generator according to Embodiment 6 of this disclosure is an activated gas generator having an electrode unit 56B that activates a raw material gas G1 supplied to a discharge space 4 to generate an activated gas G2.

[0197] The electrode unit 56B mainly includes an electrode component E16 which is a first electrode component, an electrode component E22 which is a second electrode component, and a cooling plate 3. The electrode component E22 is provided below the electrode component E16.

[0198] The second electrode component, electrode component E22, is primarily composed of a ground potential conductive film 23, which serves as a reference potential conductive film. In other words, electrode component E22 consists only of the ground potential conductive film 23, which serves as a reference potential conductive film.

[0199] The discharge space 4 includes a region in the space between the dielectric 12 of the electrode component E16 and the ground potential conductive film 23 of the electrode component E22 where the expanded conductive film 16b and the ground potential conductive film 23 overlap in a plan view.

[0200] The AC power supply 9 applies a voltage to the high-voltage potential power supply element 16a of the electrode component E16 and applies a ground potential, which is the reference potential, to the ground potential conductive film 23 of the electrode component E22.

[0201] In the electrode unit 56B of the active gas generator of Embodiment 6, the conductive film 17 on the power supply body includes the high-voltage potential power supply body 16a when viewed from above, and has a planar shape that is wider than the high-voltage potential power supply body 16a when viewed from above.

[0202] In addition, the floating conductor 62 within the insulating plate includes the conductive film 17 on the power supply when viewed from above, and has a planar shape wider than the conductive film 17 on the power supply when viewed from above. Furthermore, the cover dielectric 18 covers the edges of the conductive film 17 on the power supply.

[0203] (Effect) The active gas generator of Embodiment 6, which has electrode unit 56A or electrode unit 56B, has an electrode component E16 with the structure described above. When a voltage is applied from the AC power supply 9 to the high-voltage potential supply body 16a, the floating conductor 61 inside the insulating plate has a potential that reflects the potential of the high-voltage potential supply body 16a and the conductive film 17 on the supply body.

[0204] On the lower surface of the insulating plate 6 of the electrode component E16, the electric field strength is highest near the edge of the conductive film 17 on the power supply. In addition to the potential near the edge of the high-voltage power supply 16a, the potential near the edge of the conductive film 17 on the power supply is equalized by the potential of the floating conductor 62 inside the insulating plate, thus mitigating the electric field strength near the edge of the conductive film 17 on the lower surface of the insulating plate 6.

[0205] Furthermore, since the electric field near the edge of the conductive film 17 on the power supply is mitigated by the cover dielectric 18, the electric field strength near the edge of the conductive film 17 on the power supply can be effectively mitigated on the lower surface of the insulating plate 6. In addition, since the insulating plate 6 is located around the edge of the floating conductor 62 inside the insulating plate, the electric field strength near the edge of the floating conductor 62 inside the insulating plate can be mitigated.

[0206] As a result, the active gas generating device of Embodiment 6 can prevent dielectric breakdown on the lower surface of the insulating plate 6.

[0207] Furthermore, the high-voltage potential supply section 16 of the electrode component E16 of the active gas generator in Embodiment 6 has an expanded conductive film 16b whose planar shape is wider than that of the high-voltage potential supply body 16a, thereby expanding the volume of the discharge space 4.

[0208] Furthermore, in the activated gas generator of Embodiment 5, the cooling plate 3 has a cooling channel 31 through which cooling water C3 flows, so that the electrode components E16 of the electrode unit 56 (56A, 56B) can be effectively cooled via the insulating plate 6.

[0209] Furthermore, in the first configuration of the active gas generator of Embodiment 6 having the electrode unit 56A, since the electrode component E21 includes a dielectric 22 which becomes the discharge surface of the discharge space 4, a dielectric barrier discharge can also be generated on the electrode component E21 side of the discharge space 4.

[0210] On the other hand, in the second configuration of the active gas generator of embodiment 6 having an electrode unit 56B, the electrode component E22 is composed only of a ground potential conductive film 23, thus simplifying the device configuration.

[0211] Furthermore, electrode units 56A and 56B each have a cooling plate 3 provided via an insulating plate 6 of the electrode component E16. Therefore, the heat generated in the dielectric 12 can be removed through the path of the high-voltage potential power supply unit 16, the conductive film 17 on the power supply body, the insulating plate 6 (including the floating conductor 62 inside the insulating plate), and the cooling plate 3.

[0212] A cooling channel 31 is formed inside the cooling plate 3 through which a fluid cooling water C3 can flow, and efficient heat removal can be performed by flowing a coolant such as cooling water C3. To improve thermal conductivity, adhesive materials such as sheets or pastes with excellent electrical and thermal conductivity may be added between the high-voltage potential power supply 16a and the expanded conductive film 16b, and between the high-voltage potential power supply 16a and the conductive film 17 on the power supply. However, it is desirable that these adhesive materials such as sheets or pastes be provided such that, when viewed from above, the diameter of the high-voltage potential power supply 16a or the conductive film 17 on the power supply plus the cover dielectric 18 (the planar region when the planar shape is circular).

[0213] <Other> Although this disclosure has been described in detail, the above description is illustrative in all respects and the disclosure is not limited thereto. It is understood that countless variations not illustrated may be conceivable without falling outside the scope of this disclosure.

[0214] Therefore, within the scope of this disclosure, it is possible to freely combine each embodiment, or to modify or omit each embodiment as appropriate.

[0215] For example, in embodiments 3 to 6 shown in Figures 9 to 16, a cover dielectric for the high-voltage potential conductive film 11 may be added, which covers the edges of the high-voltage potential conductive film 11 and is provided on the upper surface of the dielectric 12. In addition, a cooling mechanism corresponding to the cooling plate 3 may be provided on the ground potential conductive film 21 and ground potential conductive film 23 sides of the electrode components E21 and E22.

[0216] Furthermore, an active gas generator may be constructed by stacking the electrode units 51 (51A, 51B) to 56 (56A, 56B) of Embodiments 1 to 6 described above.

[0217] Furthermore, although the thickness of each component of the electrode units 51 to 56 is not specifically mentioned, for example, in Embodiments 1 and 2, the thickness of the floating conductor 13 is assumed to be less than 1 μm, and the gap between the dielectric 12 and the discharge surface dielectric 14 is minimal.

[0218] On the other hand, in Embodiments 3 to 6, the thickness of the expanded conductive film 16b and the conductive film 17 on the power supply is assumed to be about 1 μm, and the thickness of the floating conductors 61 and 62 within the insulating plate is assumed to be less than 1 μm.

[0219] 3 Cooling plate 6 Insulating plate 4 Discharge space 9 AC power supply 11 High voltage potential conductive film 12, 22 Dielectric 13 Floating conductor 14 Discharge surface dielectric 16 High voltage potential power supply section 16a High voltage potential power supply body 16b Expanded conductive film 17 Conductive film on power supply body 15, 18 Cover dielectric 21, 23 Ground potential conductive film 31 Cooling channel 51A-56A, 51B-56B Electrode unit 61, 62 Floating conductor inside insulating plate E11-E16, E21, E22 Electrode component

Claims

1. An active gas generating apparatus having an electrode unit that generates an active gas by activating a raw material gas supplied to a discharge space, wherein the electrode unit comprises a first electrode component and a second electrode component provided below the first electrode component, the first electrode component comprises a first dielectric, a high-voltage potential conductive film provided on the upper surface of the first dielectric, a floating conductor provided on the lower surface of the first dielectric, and a discharge surface dielectric provided over the entire lower surface of the floating conductor and having a wider planar shape than the floating conductor, the second electrode component comprises a reference potential conductive film, the discharge space includes a region in the space between the discharge surface dielectric of the first electrode component and the second electrode component where the floating conductor and the reference potential conductive film overlap in a planar view, and the active gas generating apparatus further comprises a power supply that applies a voltage higher than the reference potential to the high-voltage potential conductive film of the first electrode component and applies the reference potential to the reference potential conductive film of the second electrode component. An active gas generator wherein the floating conductor, when viewed from above, includes the high-voltage potential conductive film, has a planar shape wider than the high-voltage potential conductive film when viewed from above, and has a planar shape narrower than the first dielectric when viewed from above.

2. An active gas generating apparatus according to claim 1, wherein the first electrode component further comprises a cover dielectric that covers the end of the high-voltage potential conductive film and is provided on the upper surface of the first dielectric.

3. An active gas generating apparatus having an electrode unit that generates an active gas by activating a raw material gas supplied to a discharge space, wherein the electrode unit comprises a first electrode component, a second electrode component provided below the first electrode component, and a cooling plate provided on the first electrode component, the first electrode component comprises a first dielectric, a high-voltage potential power supply provided above the first dielectric, and a power supply conductive film provided on the high-voltage potential power supply, the power supply conductive film includes the high-voltage potential power supply in plan view and has a planar shape wider than the high-voltage potential power supply in plan view, the first electrode component further comprises an insulating plate provided on the power supply conductive film and a cover dielectric that covers the end of the power supply conductive film and is provided on the lower surface of the insulating plate, the cooling plate is arranged on the insulating plate, and the second electrode component comprises a reference potential conductive film. The discharge space is provided in the space sandwiched between the first dielectric of the first electrode component and the second electrode component, and the active gas generating device further comprises a power supply that applies a voltage higher than the reference potential to the high-voltage potential power supply element of the first electrode component and applies the reference potential to the reference potential conductive film of the second electrode component.

4. An active gas generating apparatus having an electrode unit that generates an active gas by activating a raw material gas supplied to a discharge space, wherein the electrode unit comprises a first electrode component, a second electrode component provided below the first electrode component, and a cooling plate provided on the first electrode component, the first electrode component comprises a first dielectric, a high-voltage potential supply provided above the first dielectric, an insulating plate provided above the high-voltage potential supply, and a floating conductor within the insulating plate provided in a manner embedded within the insulating plate, the cooling plate is arranged on the insulating plate, the second electrode component comprises a reference potential conductive film, the discharge space is provided in a space sandwiched between the first dielectric and the second electrode component of the first electrode component, and the active gas generating apparatus further comprises a power supply that applies a voltage higher than the reference potential to the high-voltage potential supply of the first electrode component and applies the reference potential to the reference potential conductive film of the second electrode component. An active gas generator wherein the floating conductor within the insulating plate includes the high-voltage potential supply body when viewed from above, and has a planar shape wider than the high-voltage potential supply body when viewed from above.

5. An activated gas generating apparatus according to claim 4, wherein the insulating plate is provided directly on the upper surface of the high-voltage potential power supply body.

6. An active gas generating apparatus according to claim 4, wherein the first electrode component further comprises a conductive film on the power supply provided on the high-voltage potential power supply, the conductive film on the power supply includes the high-voltage potential power supply in a plan view and has a planar shape wider than the high-voltage potential power supply, and the floating conductor in the insulating plate includes the conductive film on the power supply in a plan view and has a planar shape wider than the conductive film on the power supply.

7. An active gas generating apparatus according to claim 6, wherein the first electrode component further comprises a cover dielectric that covers the end of the conductive film on the power supply and is provided on the lower surface of the insulating plate.

8. An active gas generating apparatus according to any one of claims 3 to 7, wherein the first component further comprises an expanded conductive film provided on the upper surface of the first dielectric, the high-voltage potential supply body provided on the expanded conductive film, the expanded conductive film includes the high-voltage potential supply body in plan view and has a planar shape wider than the high-voltage potential supply body, and the discharge space includes a region in the space sandwiched between the first dielectric of the first electrode component and the second electrode component in plan view in which the expanded conductive film and the reference potential conductive film overlap.

9. An activated gas generator according to any one of claims 3 to 8, wherein the cooling plate has a cooling channel through which a refrigerant flows, the cooling plate is conductive, and the reference potential is applied to it.

10. An active gas generating apparatus according to any one of claims 1 to 9, wherein the second electrode component comprises the reference potential conductive film and a second dielectric provided on the reference potential conductive film, the second dielectric being the discharge surface of the discharge space.

11. An active gas generating apparatus according to any one of claims 1 to 9, wherein the second electrode component is composed solely of the reference potential conductive film.

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