Multi-compartment gas panel assembly

The gas panel assembly with multiple compartments and flow control devices addresses the inefficiencies of current designs by enabling independent operation and selective exhaust control, enhancing productivity and eco-efficiency in semiconductor processing.

WO2026106721A1PCT designated stage Publication Date: 2026-05-21APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2025-09-26
Publication Date
2026-05-21

AI Technical Summary

Technical Problem

Current gas panel designs for semiconductor processing suffer from elevated exhaust flow rates, bulkiness, high weight, high cost, lack of individual compartments for each process chamber's specific requirements, and result in decreased productivity and increased system downtime due to the need to shut down the entire gas panel during maintenance.

Method used

A gas panel assembly with multiple compartments separated by a divider wall and controlled by flow control devices, allowing independent operation of compartments for separate substrate processing chambers, enabling selective exhaust control and maintaining continuous operation during maintenance.

Benefits of technology

The solution reduces system downtime, increases productivity, and enhances eco-efficiency by allowing selective compartment operation and compact design, while maintaining gas delivery to multiple chambers.

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Abstract

Disclosed herein is a gas panel assembly operable with a substrate processing chamber, the gas panel assembly including an enclosure defining a first compartment and a second compartment separated by a divider wall. A first gas pallet assembly within the first compartment is operable to provide a first gas to the substrate processing chamber, and a second gas pallet assembly within the second compartment is operable to provide a second gas to the substrate processing chamber. The gas panel assembly may further include a first flow control device between the first compartment and an exhaust, the first flow control device operable to control air flow between the first compartment and the exhaust, and a duct connecting the second compartment and the exhaust, wherein a second flow control device is operable to control air flow between the second compartment and the duct.
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