Radio-frequency filter and carrier apparatus

Abstract

Provided in the embodiments of the present application are a radio-frequency filter and a carrier apparatus. The radio-frequency filter comprises an intrinsic inductor and an intrinsic capacitor, wherein a first end of the intrinsic inductor serves as a filter input end, a second end of the intrinsic inductor serves as a filter output end and is connected to a first end of the intrinsic capacitor, a second end of the intrinsic capacitor is used for grounding, and the intrinsic inductor and the intrinsic capacitor are jointly used for filtering out a signal having a first target frequency; and the intrinsic inductor comprises a plurality of turns of inductor coil, the turn spacings between the plurality of turns of inductor coil are the same, and the turn spacings are adjusted to a predetermined value, so as to filter out a signal having a second target frequency, the second target frequency being greater than the first target frequency. By means of the embodiments of the present application, dual-band filtering can be realized.

Description

A radio frequency filter and carrier device Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a radio frequency filter and a carrier device. Background Technology

[0002] The current trend in semiconductor chip etching technology is towards larger wafer sizes and narrower etching linewidths. Faced with this significant challenge, dual-frequency plasma etching has emerged as a means to achieve these goals. High-frequency and low-frequency plasma etching are used to control the plasma flux and energy bombarding the wafer surface, respectively. In the design of semiconductor etching equipment, to improve RF coupling efficiency and prevent RF signals applied to the electrostatic chuck from coupling to the AC heating power supply (or DC adsorption power supply) and causing power supply damage, an RF filter is often installed between the AC power supply (or DC power supply) and the electrostatic chuck. For dual-frequency RF bias, the required RF filter needs to filter out both frequencies simultaneously. Current RF filters typically employ single-order or double-order filtering. Single-order filtering is relatively simple in principle but difficult to implement for dual-frequency filtering. Double-order filtering, on the other hand, has a more complex structure, and under high voltage conditions, the first-order capacitor has a potential voltage withstand risk, which can easily lead to equipment damage. Summary of the Invention

[0003] In view of the above problems, embodiments of this application propose a radio frequency filter and a carrier device to overcome or at least partially solve the above problems.

[0004] To address the aforementioned problems, in a first aspect of this application, an embodiment discloses a radio frequency filter, comprising: a native inductor and a native capacitor.

[0005] The first end of the native inductor serves as the filter input end, the second end of the native inductor serves as the filter output end, and is connected to the first end of the native capacitor. The second end of the native capacitor is used to ground. The native inductor and the native capacitor are used together to filter out the signal of the first target frequency.

[0006] The native inductor includes a multi-turn inductor coil with the same turn spacing, the turn spacing being adjusted to a predetermined value to filter out signals at a second target frequency, which is greater than the first target frequency.

[0007] In some embodiments, the native inductor includes: a single toroidal magnetic core and two sets of inductor coils, and the native capacitor is multiple;

[0008] One of the two sets of inductor coils is wound around one side of the toroidal magnetic core, and the other set of the two sets of inductor coils is symmetrically wound around the other side of the toroidal magnetic core.

[0009] The first ends of the two sets of inductor coils are both used as the filter input terminals, and the second ends of the two sets of inductor coils are both used as the filter output terminals, and are respectively connected to each of the original capacitors.

[0010] In some embodiments, the inductors in the two sets of inductor coils have the same number of turns and are wound in opposite directions.

[0011] In some embodiments, each group of inductors includes M inductors, which are insulated from each other and wound together; wherein M is a positive integer not less than 1.

[0012] In some embodiments, the annular magnetic core is a rectangular annular magnetic core;

[0013] The rectangular annular magnetic core is enclosed by two opposing first magnetic rods and two opposing second magnetic rods;

[0014] One of the two sets of inductor coils is wound around one of the two first magnetic rods; the other set of the two sets of inductor coils is wound around the other of the two first magnetic rods.

[0015] In some embodiments, the length of the first magnetic rod is greater than the length of the second magnetic rod; or

[0016] The first magnetic rod has a rectangular cross-section, with a length ranging from 10-15 cm and a width ranging from 2-3.5 cm; or

[0017] The second magnetic rod has a rectangular cross-section, with a length ranging from 2-5 cm and a width ranging from 1.5-3 cm; or

[0018] The relative permeability of the first magnetic rod is 20-40; or

[0019] The relative permeability of the second magnetic rod is 20-40.

[0020] In some embodiments, the rectangular annular magnetic core further includes: a resin adhesive located between the first magnetic rod and the second magnetic rod; or

[0021] A gap is provided between the first magnetic rod and the second magnetic rod.

[0022] In some embodiments, the length of the resin adhesive is the same as the cross-sectional width of the second magnetic rod, and the thickness of the resin adhesive ranges from 0.1 to 0.5 cm.

[0023] In some embodiments, the native inductor includes a grounded housing.

[0024] The rectangular annular magnetic core is located inside the grounded outer casing;

[0025] One end of the native capacitor is connected to the grounded outer casing.

[0026] In some embodiments, the distance between the first magnetic rod and the grounded outer casing is greater than 30 mm.

[0027] In a second aspect of this application, embodiments of this application disclose a carrier device, including a chuck body, a power supply, and a radio frequency filter as described above;

[0028] The chuck body has at least one electrode, and the radio frequency filter is connected between the electrode and the power supply.

[0029] In some embodiments, the operating power source is a heating power source, and the electrode is at least one heating electrode in the heating layer of the chuck body; or,

[0030] The working power source is an adsorption power source, and the electrode is at least one adsorption electrode.

[0031] The embodiments of this application have the following advantages:

[0032] In this embodiment, the first end of the native inductor is connected to the filter input terminal, and the second end of the native inductor is connected to the first end of the native capacitor as the filter output terminal. The second end of the native capacitor is grounded. The native inductor and the native capacitor are used together to filter out the first target frequency. The native inductor includes a multi-turn coil with the same turn spacing, which is adjusted to a predetermined value to filter out the second target frequency, which is greater than the first target frequency. By utilizing the parasitic effect of the inductor coil to generate parasitic capacitance and the parallel resonance of the inductor and capacitor, the native inductor and capacitor form an inductor-capacitor filter circuit to filter out the first target frequency. Then, by adjusting the turn spacing of the inductor coil to generate parasitic capacitance, the native inductor and capacitor form another inductor-capacitor filter circuit to filter out the second target frequency, thus achieving dual-frequency filtering. Moreover, the entire RF filter only requires a native inductor and a native capacitor, resulting in a simple overall structure. Attached Figure Description

[0033] Figure 1 is a schematic diagram of an embodiment of a radio frequency filter according to this application;

[0034] Figure 2 is a schematic diagram of the resonant circuit of an embodiment of the radio frequency filter of this application;

[0035] Figure 3 is an equivalent schematic diagram of the resonant circuit of an embodiment of the radio frequency filter of this application;

[0036] Figure 4 is an impedance-frequency response curve of an embodiment of the radio frequency filter of this application;

[0037] Figure 5 is a schematic diagram of the magnetic core inductor of an embodiment of the radio frequency filter of this application;

[0038] Figure 6 is a schematic diagram of inductor winding of an embodiment of the radio frequency filter of this application;

[0039] Figure 7 is a schematic diagram of a cross-section of a magnetic rod according to this application;

[0040] Figure 8 is a schematic diagram of temperature change in an embodiment of the radio frequency filter of this application;

[0041] Figure 9 is a schematic diagram of a radio frequency filter according to an embodiment of the carrier device of this application.

[0042] Explanation of reference numerals in the attached diagram: 100-original inductor, 200-original capacitor, 300-ring core, 310-first magnetic rod, 320-second magnetic rod, 400-resin glue, 500-casing. Detailed Implementation

[0043] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0044] Referring to FIG1, a schematic diagram of an embodiment of the radio frequency filter of this application is shown. The radio frequency filter may specifically include: native inductor 100 and native capacitor 200.

[0045] The first end of the native inductor 100 serves as the filter input, and the second end of the native inductor 100 serves as the filter output and is connected to the first end of the native capacitor 200. The second end of the native capacitor 200 is grounded. The native inductor 100 and the native capacitor 200 are used together to filter out signals at the first target frequency. The native inductor 100 includes a multi-turn inductor coil with the same turn spacing, which is adjusted to a predetermined value to filter out signals at the second target frequency, which is greater than the first target frequency.

[0046] In this embodiment, the radio frequency filter may include a native inductor 100 and a native capacitor 200. The native inductor 100 and the native capacitor 200 form a resonant circuit. Referring to Figure 2, the first end of the native inductor 100 serves as the filter input, and the second end of the native inductor 100 serves as the filter output, connected to the first end of the native capacitor 200, which is grounded. The resonant circuit composed of the native inductor 100 and the native capacitor 200 filters out signals at a first target frequency. That is, the resonant effect of the native inductor 100 and the native capacitor 200 is used to filter out interference signals at the first target frequency in the radio frequency signal. The first target frequency is related to the inductance value of the native inductor 100 and the capacitance value of the native capacitor 200. The specific range of the first target frequency is not limited.

[0047] The native inductor 100 includes a multi-turn inductor coil with the same turn spacing. This turn spacing is adjusted to a predetermined value so that, at high frequencies, parasitic capacitance is generated between the multi-turn inductor coils due to parasitic current. This parasitic capacitance is related to the turn spacing. As shown in Figure 3, under high-frequency conditions, the native inductor 100 can be equivalent to an inductor and capacitor connected in parallel. The parasitic capacitance, together with the native inductor 100, forms another resonant circuit, which can filter signals at a second target frequency. In other words, by adjusting the turn spacing of the multi-turn coil, the capacitance value of the parasitic capacitance can be adjusted, and the resonant position can be further adjusted. The second target frequency is greater than the first target frequency. For example, the first target frequency is 2MHz, and the second target frequency can be 13.56MHz. Furthermore, to achieve filtering at the 13.56MHz frequency point, the inductor turn spacing can be in the range of 1mm to 1.5mm.

[0048] As shown in Figure 4, the impedance magnitude and phase angle curves obtained through experiments are as follows: the solid line represents the impedance magnitude, and the dashed line represents the phase angle. There are two resonant points at 3MHz and 7.3MHz, used to filter RF signals of 2MHz and 13.56MHz. Within 2MHz and its sweep frequency range (1.8~2.2MHz), the impedance is inductive (phase angle is greater than zero in Figure 4), and the impedance magnitude can reach 4kΩ. Within 13.56MHz and its sweep frequency range (12.882~14.238MHz), the impedance is capacitive (phase angle is less than zero in Figure 4), and the impedance magnitude can reach 1KΩ. Since process equipment such as etching machines are capacitive under 13.56MHz conditions, if the RF filter is inductive, the two will resonate in parallel, which may increase the voltage. The withstand voltage requirement will increase by 10 or even 100 orders of magnitude. However, under 2MHz conditions, the impedance of the RF filter is very large, and the resonance effect has a smaller impact on it. Under these impedance conditions, the impedance variation of the back-end chamber caused by the presence of the RF filter can be approximately ignored. Furthermore, the attenuation exceeds 60dB at 2MHz and 13.56MHz, meaning that the leakage current to ground of the RF filter is less than 10mA when the RF current is 10A.

[0049] Further, in some embodiments, the native inductor 100 includes: a single toroidal magnetic core 300 and two sets of inductor coils, and multiple native capacitors 200; one set of the two sets of inductor coils is wound around one side of the toroidal magnetic core 300, and the other set of the two sets of inductor coils is symmetrically wound around the other side of the toroidal magnetic core 300; the first end of each set of inductor coils serves as a filter input terminal, and the second end of each set of inductor coils is connected to each of the native capacitors 200 respectively. Specifically, there are multiple native capacitors 200, and the native capacitors connected to the two sets of inductor coils form two sets of native capacitors. Each set of native capacitors can contain one or more native capacitors; one set of the two sets of inductor coils is wound around one side of the toroidal magnetic core 300, and the other set of the two sets of inductor coils is symmetrically wound around the other side of the toroidal magnetic core 300; the first end of each set of inductor coils serves as a filter input terminal, and the second end of each set of inductor coils serves as a filter output terminal, and is connected to each of the native capacitors 200 in each set.

[0050] One of the two sets of inductor coils is wound on one side of the toroidal core 300, and the other set of the two sets of inductor coils is symmetrically wound on the other side of the toroidal core 300. Referring to Figure 1, one set of the two sets of inductor coils is wound on the left side of the toroidal core 300, and the other set is symmetrically wound on the right side of the toroidal core 300.

[0051] The two sets of inductor coils have identical structures. The first end of each set of inductor coils serves as the filter input, and the second end serves as the filter output, both connected to their respective native capacitors 200. In other words, one end of each set of inductor coils is connected to the filter input, and each inductor coil in each set is connected to its corresponding native capacitor 200. For example, each inductor coil in each set is connected one-to-one to its corresponding native capacitor 200. Figure 1 shows that each set of inductor coils has four inductors, and correspondingly, each set has four native capacitors 200, with each of the four inductors connected one-to-one to the four native capacitors 200 of its corresponding set.

[0052] Specifically, referring to Figure 5, the inductors in the two sets of inductor coils have the same number of turns but are wound in opposite directions. That is, the winding direction of the inductors in one set of inductor coils is opposite to that of the other set, while the winding direction of the inductors in the same set of inductor coils is the same. This avoids generating interference signals.

[0053] In one embodiment of this application, each group of inductor coils includes M inductor coils, which are insulated from each other and wound together; wherein M is a positive integer not less than 1.

[0054] M is a positive integer not less than 1; such as 1, 2, 3, 4, etc., which can be set according to requirements, and this application embodiment does not limit it. For the inductor coil, refer to Figure 5. The M inductor coils of each group are wound on one side of the same single toroidal magnetic core 300. The M inductor coils of each of the two groups are wound on opposite sides of the single toroidal magnetic core 300.

[0055] For a native inductance of 100, an inductor with a toroidal core of 300 can be used. For the same inductance value, the toroidal core inductor has a relatively smaller volume compared to an air-core inductor because the permeability of air is much lower than that of ferromagnetic materials. For a uniform, constant magnetic field, according to Ampere's circuital law and Gauss's law: It can be calculated Where B is the magnetic flux density, ψ is the magnetic flux, N is the number of turns of the inductor, S is the cross-sectional area of ​​the magnetic flux, μ is the permeability, l is the length of the inductor, L is the inductance, and I is the current. Under the same conditions of number of turns, length, and cross-section, L is directly proportional to μ, and materials with higher permeability are more likely to achieve larger inductance values. To obtain the same inductance value, the volume of a magnetic core inductor can be smaller than that of an air core inductor. That is, the three-dimensional dimensions of a filter made of a magnetic core inductor can be very small. One of the two sets of inductor coils is wound around the first side of a single toroidal magnetic core 300; the other set is wound around the second side of the single toroidal magnetic core 300. For example, as shown in Figure 6, the inductor coil contains a total of 8 lines and is divided into two sets of inductor coils. The inductor coils use common-mode inductors, and the inductor wires of four of the lines are twisted together in a spiral (similar to "twisting a rope") to form a single strand (i.e., an inductor coil set), which is wound around the first side of a single toroidal magnetic core 300. The other four strands are formed in the same way and wound around the second side of a single toroidal magnetic core 300. The aforementioned magnetic core inductor is composed of an inductor coil and a magnetic core.

[0056] In one embodiment of this application, the annular magnetic core 300 is a rectangular annular magnetic core; the rectangular annular magnetic core includes two opposing first magnetic rods 310 and two opposing second magnetic rods 320 enclosing each other to form a rectangular magnetic ring; one of the two sets of inductor coils is wound around one of the two first magnetic rods 310; the other of the two sets of inductor coils is wound around the other of the two first magnetic rods 310.

[0057] Further, referring to Figure 1, the native inductor 100 includes a grounded housing 500, and a rectangular annular magnetic core is located inside the grounded housing 500; one end of the native capacitor 200 is connected to the grounded housing 500. Thus, the grounded housing 500 can be used to protect the native inductor 100 and the native capacitor 200 while simultaneously fulfilling the corresponding grounding requirements, allowing for a more compact structure.

[0058] In this embodiment, the annular magnetic core 300 can be a rectangular annular magnetic core, which includes two opposing first magnetic rods 310 and two opposing second magnetic rods 320 enclosing each other to form a rectangular magnetic ring. As shown in Figure 5, the rectangular annular magnetic core, i.e., the rectangular magnetic ring, includes two first magnetic rods 310 (magnetic rod I) and two second magnetic rods 320 (magnetic rod II), which enclose each other to form a rectangular annular magnetic core.

[0059] One set of inductor coils is wound around one of the two first magnetic rods 310, while the other set is wound around the other of the two first magnetic rods 310. This confines the magnetic circuit inside the magnetic ring, reducing magnetic leakage. The grounded outer shell 500 (boundary) has very little impact on the filtering performance of the filter circuit, thus solving the electromagnetic compatibility problem.

[0060] In this design, the length of the first magnetic rod 310 is greater than the length of the second magnetic rod 320, as shown in Figure 5. The combined length of the first magnetic rod 310 and the second magnetic rod 320 forms a rectangular annular magnetic core. The distance between the first magnetic rod 310 and the grounded outer casing 500 is greater than 30 mm to avoid interference.

[0061] Furthermore, considering the risk of air breakdown between the high-voltage terminals of components and ground under high voltage, the insulation distance between the high-voltage terminals and ground is greater than 30mm. The RF filter under this scheme can withstand voltages exceeding 3KV. As shown in Figure 5, if the current in the inductor coil flows in the direction of arrow i, the main magnetic flux flows in the direction of arrow Φ in Figure 5, thus confining the magnetic field inside the magnetic ring and reducing leakage flux. In practical applications, an AC (alternating current) heating power supply is used, with a maximum allowable current of 20A. Based on the relationship between resistivity, power, and resistance... and P=I 2 R), where R is resistance, ρ is resistivity, L is length, S is area, P is power, and I is current.

[0062] The single-channel inductor uses copper enameled wire with a diameter of 1.6mm to 2.5mm. Based on the relationship between inductance L, number of turns N, and inductance coefficient AL, L = A L N 2 The selected magnetic core has an inductance coefficient of 100nH / turn and an inductance value of 40uH, so the number of coil turns can be calculated to be greater than 20 turns.

[0063] For a uniform and constant magnetic field, according to Faraday's law of electromagnetic induction and Ampere's circuital law: ∮B·dl=μNI, where A is the magnetic flux cross-sectional area (i.e., the cross-section of the magnetic core; in this example, the cross-section of the magnetic core is rectangular), and N is the number of turns of the inductor coil, which can be approximately estimated. If the magnetic induction intensity B = 20 Gs, V0 = 3 kV, and N = 20, then 8.8 cm can be calculated. -2 <A<12.5cm -2 This is because the cross-section of the magnetic core is less than 8.8 cm. -2 At that time, the risk of core heat is greater, and considering that the filter size cannot be too large (it can meet the wave requirements while keeping the filter size relatively small).

[0064] The rectangular toroidal magnetic core also includes:

[0065] The resin adhesive 400 is located between the first magnetic rod 310 and the second magnetic rod 320; the cross-sections of the first magnetic rod 310 and the second magnetic rod 320 are rectangular.

[0066] Due to the inherent characteristics of magnetic materials, it is difficult to achieve consistency even with the same magnetic material (affected by factors such as composition consistency, sintering density, and magnet orientation consistency). In this embodiment, the rectangular magnetic ring can be made by bonding four cylindrical magnetic rods with rectangular cross-sections together, with the bonding part using resin glue 400 (or by increasing the hollow gap, etc.). This method can reduce the influence of magnetic materials on inductance values, thereby making the magnetic materials more consistent, and further improving the consistency between multiple filters.

[0067] Alternatively, a gap may be provided between the first magnetic rod 310 and the second magnetic rod 320. Compared with adding resin glue 400, the magnetic induction intensity B after adding resin glue 400 is less affected by the magnetic material because:

[0068] According to Ampere's circuital law for n segments of different types of magnetic media connected in series, assuming each segment has a uniform cross-section, then the integral along any closed curve... Let the current in the entire circuit be denoted as I, and the permeabilities of the magnetic material and the added resin glue 400 be denoted as μ1 and μ2, respectively. Assuming that the magnetic induction intensity B is continuous in both media, the above formula can be transformed into: Where d and l are the equivalent integral paths of the magnetic material and the resin adhesive 400, respectively. The magnetic flux density can be obtained from the above equation. Where μr1 and μr2 are the relative permeabilities of the magnetic material and the resin 400, respectively, and μ0 is the vacuum permeability. If resin bonding is not used, the above equation becomes: Comparing B1 and B, it can be found that the magnetic induction intensity B after adding resin glue 400 is less affected by the magnetic material.

[0069] Furthermore, the first magnetic rod 310 has a relative permeability of 20-40; or the second magnetic rod 320 is made of a material with a relative permeability of 20-40. For example, an iron-nickel alloy with a relative permeability of 30.

[0070] The first magnetic rod 310 has a rectangular cross-section, with a length ranging from 10-15 cm and a width ranging from 2-3.5 cm; or

[0071] The second magnetic rod 320 has a rectangular cross-section, with a length ranging from 2 to 5 centimeters and a width ranging from 1.5 to 3 centimeters. Refer to Figure 7 for the cross-section; the longer end of the rectangle is the length, and the shorter end is the width.

[0072] Furthermore, the length of the resin adhesive 400 is the same as the cross-sectional width of the second magnetic rod 320, so that the resin adhesive 400 can be flush with the second magnetic rod 320 within the rectangular annular magnetic core. The thickness of the resin adhesive 400 ranges from 0.1 to 0.5 cm.

[0073] For example, the relevant parameters are shown in Table 1 in one example:

[0074] Assuming a current of 10A, using the parameters in Table 1, we can calculate Table 2, showing the effect of changing the relative permeability of the magnetic rod (i.e., changing the magnetic material) on the magnetic induction intensity. Here, Δ represents the difference in magnetic induction intensity calculated under relative permeability conditions of 50 and 30. By comparing the Δ values, we can see that the effect of adding resin 400 on the change in the relative permeability of the magnetic material on the magnetic induction intensity is greatly reduced. Of course, the magnetic induction intensity is relatively greater without resin, so the required technical parameters can be achieved by adjusting the material type and geometry of resin 400. For example, to increase the magnetic induction intensity, the width of resin 400 can be reduced from 0.25cm to 0.125cm; for Table 2, with a relative permeability of 50, B = 2.23Gs (Gauss) can be calculated. Alternatively, the resin material can be changed to one with higher permeability, which can also increase the magnetic induction intensity. In other words, by adding resin 400 or increasing the air gap, key technical parameters can be flexibly adjusted to achieve our desired results. Specifically, Table 1 shows the recommended optimal parameters for the rectangular magnetic ring. Considering air breakdown and heat dissipation, the distance between the two magnetic rods I on the left and right is recommended to be greater than or equal to 3cm. Considering the magnitude of the magnetic induction intensity, the width of the resin glue 400 is recommended to be less than or equal to 0.25cm.

[0075] As can be seen from the above analysis, the RF filter in this embodiment uses a resonant circuit, which can reduce the filter's geometric size while meeting the dual-band filtering requirements. Furthermore, the use of a rectangular magnetic ring significantly reduces the filter's three-dimensional size, and this magnetic ring structure confines the magnetic field inside the ring, reducing leakage flux and resolving electromagnetic compatibility issues. The use of differential-mode inductors avoids the generation of opposing magnetic fields in the inductor coils wound in the same phase when DC current flows through, thus preventing them from canceling each other out and suppressing differential-mode signals while enhancing common-mode signals. Considering hysteresis and eddy current losses, strict limitations are placed on the selection of magnetic materials and inductor coils, allowing the filter's withstand voltage and current to reach 3KV and 20A, respectively. In addition, by using resin glue 400 or air gaps in the magnetic ring, the influence of magnetic materials on the entire filter is relatively reduced, thereby improving the filter's stability.

[0076] In one embodiment of this application, a single annular magnetic core 300 is made of a soft magnetic material.

[0077] Considering the hysteresis loss of ferromagnetic materials in alternating magnetic fields, there is a risk of heat (i.e., the ferromagnetic material is repeatedly magnetized along the hysteresis loop, and the magnetization process consumes energy, which is released from the ferromagnetic material as heat). Furthermore, the hysteresis loss is proportional to the area enclosed by the hysteresis loop. Therefore, to avoid heat problems, the inductor core in this technical solution needs to be made of a ferromagnetic material with a narrow hysteresis loop, i.e., a soft magnetic material, and the permeability should be as low as possible. Figure 8 shows the temperature rise of the core obtained from experiments under relative permeabilities of 30 and 300. It can be found that the core with a relative permeability of 30 heats up relatively steadily at around 40℃, while the core with a relative permeability of 300 heats up significantly, indicating severe hysteresis loss. Long-term use may lead to a significant decrease in the core permeability, further affecting the performance of the filter. Therefore, it is recommended to select magnetic materials with a relative permeability of 20–40 for the inductor core.

[0078] The RF filter in this embodiment utilizes a single-stage harmonic filter circuit and employs a ring-shaped magnetic core inductor. This increases the inductor's self-resonance, ensuring the filtering of dual RF signals while reducing the filter's three-dimensional size, saving space and meeting current miniaturization requirements. The rectangular ring-shaped magnetic core inductor confines the magnetic field within the ring, reducing magnetic leakage and resolving electromagnetic compatibility issues. Furthermore, considering hysteresis and eddy current losses, strict limitations are placed on the selection of magnetic materials and inductor coils, allowing the filter's withstand voltage to be increased to 3KV and its withstand current to 20A. Additionally, resin adhesive or heated air gaps are used at the magnetic rod bonding points. By adjusting the geometry of the resin adhesive or changing the type of resin adhesive (i.e., using resin adhesive with different permeability), differences in filtering performance due to variations in magnetic materials can be reduced, thereby improving the consistency between different filters.

[0079] This application discloses a carrier device, including a chuck body, a power supply, and the radio frequency filter described above; at least one electrode is disposed within the chuck body, and the radio frequency filter is connected between the electrode and the power supply.

[0080] In one embodiment of this application, a radio frequency filter is connected to the electrode and the operating power supply. The signal emitted by the operating power supply is filtered and then sent to the electrode. That is, the operating power supply can energize the electrode in the chuck body, and the electrode generates electromagnetic force based on the energization to perform corresponding processing on the item to be carried.

[0081] Furthermore, the working power source is a heating power source, and the electrode is at least one heating electrode in the heating layer of the chuck body; or, the working power source is an adsorption power source, and the electrode is at least one adsorption electrode.

[0082] In a specific example, when the working power source is a heating power source and the electrode is at least one heating electrode in the heating layer of the chuck body, the heating electrode heats the item to be carried on the chuck body when the heating power source supplies power to the heating electrode.

[0083] When the working power source is an adsorption power source and the electrode is at least one adsorption electrode in the heating layer of the chuck body, the adsorption electrode adsorbs and fixes the item to be carried on the chuck body when the adsorption power source supplies power to the adsorption electrode.

[0084] Referring to Figure 9, the RF filter connected to the operating power supply (AC / DC heating power supply) and the chuck body is divided into 8 channels, each connected to a heating wire of the four zones of the chuck body (ESC). Channels 1 and 8 form a loop acting on zone IV of the ESC, channels 2 and 7 form a loop acting on zone III of the ESC, and so on, forming four loops acting on the four zones of the ESC respectively.

[0085] It should be noted that, for the sake of simplicity, the above embodiments are all described as a series of actions. However, those skilled in the art should understand that the embodiments of this application are not limited to the described order of actions, because according to the embodiments of this application, some steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also understand that the embodiments described in the specification are all preferred embodiments, and the actions involved are not necessarily required for the embodiments of this application.

[0086] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0087] Those skilled in the art will understand that embodiments of this application can be provided as methods, apparatus, or computer program products. Therefore, embodiments of this application can take the form of entirely hardware embodiments, entirely software embodiments, or embodiments combining software and hardware aspects. Furthermore, embodiments of this application can take the form of computer program products implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0088] This application describes embodiments with reference to flowchart illustrations and / or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of this application. It should be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal device, create means for implementing the functions specified in one or more blocks of the flowchart illustrations and / or one or more blocks of the block diagrams.

[0089] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing terminal device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means that implement the functions specified in one or more flowcharts and / or one or more block diagrams.

[0090] These computer program instructions may also be loaded onto a computer or other programmable data processing terminal equipment to cause a series of operational steps to be performed on the computer or other programmable terminal equipment to produce a computer-implemented process, such that the instructions, which execute on the computer or other programmable terminal equipment, provide steps for implementing the functions specified in one or more flowcharts and / or one or more block diagrams.

[0091] Although preferred embodiments of the present application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of the present application.

[0092] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes the element.

[0093] The above provides a detailed description of a radio frequency filter and a carrier device provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A radio frequency filter, characterized in that, include: Native inductors and native capacitors, The first end of the native inductor serves as the filter input end, the second end of the native inductor serves as the filter output end, and is connected to the first end of the native capacitor. The second end of the native capacitor is used to ground. The native inductor and the native capacitor are used together to filter out the signal of the first target frequency. The native inductor includes a multi-turn inductor coil with the same turn spacing, the turn spacing being adjusted to a predetermined value to filter out signals at a second target frequency, which is greater than the first target frequency.

2. The radio frequency filter according to claim 1, characterized in that, The native inductor includes: a single ring-shaped magnetic core and two sets of inductor coils; the native capacitor is multiple. One of the two sets of inductor coils is wound around one side of the toroidal magnetic core, and the other set of the two sets of inductor coils is symmetrically wound around the other side of the toroidal magnetic core. The first ends of the two sets of inductor coils are both used as the filter input terminals, and the second ends of the two sets of inductor coils are both used as the filter output terminals, and are respectively connected to each of the original capacitors.

3. The radio frequency filter according to claim 2, characterized in that, The two sets of inductor coils have the same number of turns and are wound in opposite directions.

4. The radio frequency filter according to claim 2, characterized in that, Each group of inductors includes M inductors, which are insulated from each other and wound together; where M is a positive integer not less than 1.

5. The radio frequency filter according to any one of claims 2-4, characterized in that, The ring-shaped magnetic core is a rectangular ring-shaped magnetic core; The rectangular annular magnetic core is enclosed by two opposing first magnetic rods and two opposing second magnetic rods; One of the two sets of inductor coils is wound around one of the two first magnetic rods; the other set of the two sets of inductor coils is wound around the other of the two first magnetic rods.

6. The radio frequency filter according to claim 5, characterized in that, The length of the first magnetic rod is greater than the length of the second magnetic rod; or The first magnetic rod has a rectangular cross-section, with a length ranging from 10-15 cm and a width ranging from 2-3.5 cm; or The second magnetic rod has a rectangular cross-section, with a length ranging from 2-5 cm and a width ranging from 1.5-3 cm; or The relative permeability of the first magnetic rod is 20-40; or The relative permeability of the second magnetic rod is 20-40.

7. The radio frequency filter according to claim 5, characterized in that, The rectangular annular magnetic core further includes: a resin adhesive located between the first magnetic rod and the second magnetic rod; or A gap is provided between the first magnetic rod and the second magnetic rod.

8. The radio frequency filter according to claim 7, characterized in that, The length of the resin adhesive is the same as the cross-sectional width of the second magnetic rod, and the thickness of the resin adhesive ranges from 0.1 to 0.5 cm.

9. The radio frequency filter according to claim 5, characterized in that, The native inductor includes a grounded casing. The rectangular annular magnetic core is located inside the grounded outer casing; One end of the native capacitor is connected to the grounded outer casing.

10. The radio frequency filter according to claim 9, characterized in that, The distance between the first magnetic rod and the grounded outer shell is greater than 30 mm.

11. A supporting device, characterized in that, Includes a chuck body, a power supply, and an RF filter as described in any one of claims 1-10; The chuck body has at least one electrode, and the radio frequency filter is connected between the electrode and the power supply.

12. The bearing device according to claim 11, characterized in that, The operating power source is a heating power source, and the electrode is at least one heating electrode in the heating layer of the chuck body; or, The working power source is an adsorption power source, and the electrode is at least one adsorption electrode.

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