Method for calibration of a microscope-based system

Abstract

A method for calibration of a microscope-based-system includes generating a path, defined by movement controls of start points, for controlling an illuminating position with scanning mirrors directing an illuminating light; opening a camera shutter; illuminating with the illuminating light after a first waiting time for each movement control; obtaining an image; repeating "opening the shutter" to "obtaining image" twice, with a third waiting time longer than a second which is longer than the first, obtaining a second and third image; identifying representative points of the first to third image; calculating offsets of each movement control by comparing the representative points of the first and second image with the third; determining stable times of each start point, that are the shortest waiting times for the corresponding image offset to meet a predetermined criterion; fitting a curve by a mathematical model; and setting the model in the system.

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