Substrate coating device
By setting up maintenance stations around the substrate transfer module, the problem of high maintenance difficulty in existing substrate coating equipment is solved, and the convenience of equipment maintenance and design simplification are achieved.
WO2026124063A1PCT designated stage Publication Date: 2026-06-18ACM RES (SHANGHAI) INC
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Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- ACM RES (SHANGHAI) INC
- Filing Date
- 2025-11-06
- Publication Date
- 2026-06-18
AI Technical Summary
Technical Problem
In existing substrate coating equipment, the substrate transfer module is located in the center, which increases the difficulty of maintenance operations and requires the removal of the surrounding module for maintenance.
Method used
A maintenance work station is reserved around the substrate transmission module to provide access to the substrate transmission module for maintenance, thereby reducing the difficulty of maintenance.
Benefits of technology
By reserving maintenance workstations, the maintenance process of the substrate coating equipment is simplified, reducing maintenance difficulty and equipment design complexity.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN2025133022_18062026_PF_FP_ABST
Abstract
A substrate coating device (30), comprising: a heat treatment module (31), used for performing heat treatment on a substrate (20); a coating module (32), used for performing coating on the substrate (20); a carrying platform (33), used for loading a substrate to be processed (20) and unloading a substrate (20) having undergone a coating process; and a substrate transfer module (34), used for transferring the substrate (20) between the heat treatment module (31), the coating module (32), and the carrying platform (33), the substrate transfer module (34) being surrounded by a substrate processing station (41), a substrate loading and unloading station (44), and a maintenance station (45), the heat treatment module (31) and the coating module (32) being arranged at the substrate processing station (41), the carrying platform (33) being arranged at the substrate loading and unloading station (44), and the maintenance station (45) being configured to provide a passage for maintenance personnel to enter the substrate transfer module (34) for maintenance, thereby reducing the difficulty of maintenance of the substrate coating device (30).
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