Detection system and detection method

Abstract

A detection system and a detection method. The detection system comprises a stage (101), a first detection module (102), a second detection module (103) and a controller (104), wherein the controller (104) is used for controlling, on the basis of the detection state of the first detection module (102), the stage (101) to move relative to the first detection module (102) or to stop moving relative thereto; the first detection module (102) photographs the surface of an object (10) to be subjected to detection, so as to acquire a first image; and when the detection state of the first detection module (102) meets a preset condition, the controller (104) controls the stage (101) to stop moving relative to the first detection module (102) and keeps the stage (101) stationary relative to the second detection module (103), and photographs the surface of said object (10) by means of the second detection module (103), so as to acquire a second image, with the preset condition being that the scanning length of the first detection module (102) within a preset time is equal to a preset length, which is less than or equal to the field-of-view width of the second detection module (103), and / or, the preset condition being that information carried in the first image includes information to be rechecked of said object (10).

Description

Detection system and detection method Cross-references

[0001] This application claims priority to Chinese patent application No. 202411808355.3, filed on December 9, 2024, entitled "Detection System and Detection Method", which is incorporated herein by reference in its entirety. Technical Field

[0002] This application relates to the field of semiconductor technology, and in particular to a detection system and detection method. Background Technology

[0003] Wafers are the core components of semiconductor technology. Even tiny impurities on the wafer surface can damage it and potentially affect the performance of subsequent wafers. Therefore, wafer inspection can not only improve the yield of wafer fabrication processes but also increase wafer production efficiency. Wafer defect inspection mainly includes three categories: visual inspection, electron beam inspection, and optical inspection. In particular, optical inspection has received widespread attention due to its advantages such as high resolution and wide applicability.

[0004] However, existing optical inspection methods used in inspection equipment struggle to balance inspection accuracy and speed, resulting in slow inspection speeds that impact production capacity. Summary of the Invention

[0005] This application provides a detection system and detection method that can balance detection accuracy and detection speed.

[0006] According to some embodiments of this application, one aspect of this application provides a detection system, including: a stage for carrying an object to be tested; a first detection module for scanning the surface of the object to be tested and acquiring a first image of the surface of the object to be tested during relative movement between the object to be tested and the first detection module; a second detection module for taking a picture of the surface of the object to be tested and acquiring a second image of the surface of the object to be tested during relative stillness between the object to be tested and the second detection module; and a controller for controlling relative movement or stopping relative movement between the stage and the first detection module based on the detection state of the first detection module. When the detection state of the first detection module meets preset conditions, the controller controls the stage to stop relative movement with the first detection module and the stage to remain relatively stationary with respect to the second detection module. The second detection module then takes an image of the surface of the object to be tested to obtain the second image. The surface area of ​​the object to be tested represented by the first image is located within the surface area of ​​the object to be tested represented by the second image. The preset conditions are that the scanning length of the first detection module is equal to a preset length within a preset time, the preset length is less than or equal to the field of view of the second detection module, and / or the preset conditions are that the information carried in the first image contains re-inspection information of the target to be tested.

[0007] In some embodiments, the processor is further configured to obtain the target position of the target to be tested based on the first image; the controller is further configured to: determine whether the target to be tested is in the field of view of the second detection module based on the target position; if yes, control the stage to be relatively stationary with respect to the second detection module, and take a picture of the surface of the object to be tested through the second detection module; if no, adjust the relative position between the stage and the second detection module so that the target to be tested is in the field of view of the second detection module, and take a picture of the surface of the object to be tested through the second detection module.

[0008] In some embodiments, the preset condition is that the information carried by the first image contains re-inspection information of the target to be tested; the first image includes: multiple sub-images acquired by the first detection module within the preset time period during the movement of the platform relative to the first detection module; the processor is configured to: for each sub-image acquired by the first detection module, the processor receives and analyzes whether the information carried by the sub-image contains re-inspection information of the target to be tested, so as to obtain whether the information carried by the first image contains re-inspection information.

[0009] In some embodiments, the scanning length of the first detection module within the preset time is less than or equal to the field of view width of the second detection module; the size of the field of view region of the first detection module along the scanning direction is less than the size of the field of view region of the second detection module along the scanning direction.

[0010] In some embodiments, the field of view of the second detection module and the field of view of the first detection module are arranged along the scanning direction, and the field of view of the second detection module and the field of view of the first detection module are in contact but do not overlap.

[0011] In some embodiments, the preset condition further includes the scanning length of the first detection module being equal to the preset length within the preset time; the processor is configured to: determine whether the scanning length of the first detection module has reached the preset length; if so, analyze whether the information carried by the first image acquired within the preset time contains re-inspection information of the target to be tested.

[0012] In some embodiments, the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time; the controller is further configured to: obtain whether the scanning length of the first detection module reaches the preset length; if yes, control the stage and the second detection module to remain relatively stationary, during which the second detection module takes a picture of the surface of the object to be tested; if no, control the stage and the first detection module to continue moving relative to each other.

[0013] In some embodiments, the first detection module includes a linear array detector, and the second detection module includes an area array detector.

[0014] In some embodiments, the first detection module and the second detection module share at least a portion of the optical path structure; the optical path structure includes: a light source assembly for providing incident light; and an optical lens group for transmitting the incident light to the surface of the object under test to form signal light, and causing the signal light to enter the first detection module and the second detection module respectively.

[0015] In some embodiments, the optical lens group includes: a collecting lens group and a first beam splitting component. The collecting lens group is used to collect signal light from the surface of the object under test and transmit the signal light to the first beam splitting component. The first beam splitting component is used to split the signal light transmitted to the first beam splitting component and transmit a portion of the light to the first detection module and a portion of the light to the second detection module.

[0016] In some embodiments, the center of one of the first detection module and the second detection module is located on the central axis of the signal light, while the center of the other is offset from the central axis of the signal light.

[0017] This application also provides a detection method that can be applied to the detection system provided in the above embodiments. The detection method includes: performing a first detection step, in which the stage and the first detection module move relative to each other to move the object to be tested relative to the first detection module; during the movement of the object to be tested relative to the first detection module, the first detection module scans the surface of the object to be tested and acquires a first image of the surface of the object to be tested; performing a second detection step, in which, based on the detection state of the first detection module, the stage and the first detection module are controlled to move relative to each other or stop moving relative to each other; when the detection state of the first detection module meets a preset condition, the stage and the first detection module stop moving relative to each other and the stage and the second detection module are relatively stationary, and the second detection module takes a picture of the surface of the object to be tested to acquire a second image of the surface of the object to be tested, wherein the area of ​​the surface of the object to be tested represented by the first image is located within the area of ​​the surface of the object to be tested represented by the second image; wherein, the preset condition is that the scanning length of the first detection module is equal to a preset length within a preset time, the preset length is less than or equal to the field of view width of the second detection module, and / or, the preset condition is that the information carried in the first image contains re-inspection information of the target to be tested.

[0018] In some embodiments, the preset conditions include the presence of re-inspection information of the target to be tested in the information carried by the first image; the step of controlling the relative movement or stopping the relative movement between the stage and the first detection module based on the detection state of the first detection module includes: analyzing whether the information carried by the first image contains re-inspection information of the target to be tested; if the information carried by the first image contains re-inspection information of the target to be tested, then after the target to be tested is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the surface of the object to be tested is photographed by the second detection module.

[0019] In some embodiments, if the information carried in the first image contains information about the target to be re-inspected, then when the target to be inspected is in the field of view of the second detection module, the stage and the second detection module are relatively stationary, and the target to be inspected on the surface of the object to be inspected is photographed by the second detection module, including: obtaining the target position of the target to be inspected based on the first image; and confirming whether the target to be inspected is in the field of view of the second detection module based on the target position; after the target to be inspected enters the field of view of the second detection module, the stage and the second detection module are relatively stationary, and the surface of the object to be inspected is photographed by the second detection module.

[0020] In some embodiments, the preset condition is that the information carried by the first image contains re-inspection information of the target to be tested; the analysis of whether the information carried by the first image contains re-inspection information of the target to be tested includes: during the movement of the stage relative to the first detection module, the first detection module scans the surface of the object to be tested to acquire multiple sub-images within the preset time; for each sub-image acquired, the analysis of whether the information carried by the sub-image contains re-inspection information of the target to be tested is used to determine whether the information carried by the first image contains re-inspection information of the target to be tested; if any of the sub-images contains re-inspection information of the target to be tested, then after the target to be tested is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the second detection module takes an image of the surface of the object to be tested.

[0021] In some embodiments, the preset condition further includes the scanning length of the first detection module being equal to the preset length within the preset time period; the step of controlling the relative movement or stopping the relative movement between the stage and the first detection module based on the detection state of the first detection module includes: obtaining whether the scanning length of the first detection module has reached the preset length; if so, analyzing whether the information carried by the first image acquired within the preset time period contains re-inspection information of the target to be tested; if the information carried by the first image contains re-inspection information of the target to be tested, then after the target to be tested is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the second detection module takes an image of the surface of the object to be tested.

[0022] In some embodiments, the step of analyzing whether the information carried by the first image acquired within the preset time contains re-inspection information of the target to be tested includes: the first detection module acquires multiple sub-images within the preset time; if the scanning length of the first detection module is equal to the preset length, then the information carried by each of the sub-images in all the sub-images is analyzed to determine whether the information carried by the first image contains re-inspection information of the target to be tested.

[0023] In some embodiments, the detection method further includes: if none of the information carried by each of the multiple sub-images acquired within the preset time period contains information about the target to be re-inspected, then controlling the stage to continue moving relative to the first detection module; or, if none of the information carried by each of the multiple sub-images acquired within the preset time period contains information about the target to be re-inspected, then stopping the relative movement between the stage and the first detection module, and taking a picture of the surface of the object to be tested through the second detection module.

[0024] In some embodiments, the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time; the step of controlling the relative movement or stopping the relative movement between the stage and the first detection module based on the detection state of the first detection module includes: obtaining whether the single scanning length of the first detection module reaches the preset length; if yes, the stage and the second detection module remain relatively stationary, and the second detection module takes a picture of the surface of the object to be tested; if no, the stage and the first detection module continue to move relative to each other.

[0025] In some embodiments, the detection method further includes: repeatedly performing the first detection step and the second detection step until the detection of the test surface of the test object is completed.

[0026] Compared with related technologies, the technical solution provided in this application has at least the following technical effects:

[0027] The detection system provided in this application includes a stage, a controller, a first detection module, and a second detection module. During the relative movement of the stage and the first detection module controlled by the controller, the first detection module scans the surface of the object to be tested on the stage and captures a first image. The controller is also used to control the relative movement or cessation of relative movement between the stage and the first detection module based on the detection state of the first detection module. Specifically, when the detection state of the first detection module meets preset conditions, the controller controls the stage and the first detection module to stop relative movement, and the stage and the second detection module remain relatively stationary. A second image is then captured by the second detection module on the surface of the object to be tested. The preset conditions are that the scanning length of the first detection module within a preset time is equal to a preset length, the preset length is less than or equal to the field of view width of the second detection module, and / or, the information carried in the first image contains re-inspection information of the target object. Compared to related technologies, which first use a full inspection module to scan the entire surface of the test object and then use a re-inspection module to move between different areas corresponding to the re-inspection information (the area on the test object's surface where the target object is located), the embodiments of this application can avoid the problem of the second detection module moving back and forth between different areas corresponding to the re-inspection information. Furthermore, the first detection module has the advantages of fast scanning speed and the second detection module has high detection accuracy. Therefore, the embodiments of this application are advantageous in simultaneously taking into account both detection speed and detection accuracy. Attached Figure Description

[0028] One or more embodiments are illustrated by way of example with the corresponding pictures in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Unless otherwise stated, the pictures in the accompanying drawings do not constitute a limitation on scale. In order to more clearly illustrate the technical solutions in the embodiments of this application or in the conventional technology, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 is a schematic diagram of the detection system provided in the first embodiment of this application;

[0030] Figure 2 shows the positional relationship between the field of view of the first detection module and the field of view of the second detection module in Figure 1.

[0031] Figure 3 is a schematic diagram of the detection system in Figure 1, which includes an optical path structure.

[0032] Figure 4 is a schematic diagram of the detection system provided in the second embodiment of this application;

[0033] Figure 5 is a schematic diagram of the detection system provided in the third embodiment of this application;

[0034] Figure 6 is a flowchart illustrating the detection method provided in the fourth embodiment of this application. Detailed Implementation

[0035] As can be seen from the background technology, the optical detection methods used in detection equipment in related technologies have difficulty in balancing detection accuracy and detection speed, resulting in slow detection speed and affecting production capacity.

[0036] Analysis revealed that in related technologies, during wafer inspection, to balance inspection speed and accuracy, a rapid and comprehensive scan of the wafer surface is often performed first by a full inspection module; then, a re-inspection module is used to re-inspect the defects detected by the full inspection module. This inspection method requires two inspections of the wafer, resulting in a decrease in throughput. The re-inspection module needs to move between different locations to be re-inspected and complete the imaging of each location, leading to a slow inspection speed.

[0037] To address the aforementioned problems, this application provides a detection system comprising a stage, a controller, a first detection module, and a second detection module. The first detection module scans the surface of the object to be tested during relative movement between the object and the first detection module, acquiring a first image of the object's surface. The controller controls the relative movement or cessation of relative movement between the stage and the first detection module based on the detection state of the first detection module. When the detection state of the first detection module meets preset conditions, the controller stops the relative movement between the stage and the first detection module, and the stage and the second detection module remain relatively stationary. The second detection module then captures an image of the object's surface to acquire a second image. The area of ​​the object's surface represented by the first image is located within the area of ​​the object's surface represented by the second image. The preset conditions are that the scanning length of the first detection module is equal to a preset length within a preset time, the preset length is less than or equal to the field of view width of the second detection module, and / or the information carried in the first image contains re-inspection information of the target object. The detection system provided by this application can simultaneously meet the requirements of both detection speed and detection accuracy for the object to be tested.

[0038] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0039] In the description of the embodiments of this application, "at least one" means one or more, and "multiple" means two or more, unless otherwise explicitly specified.

[0040] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly indicating the number, specific order, or primary and secondary relationship of the indicated technical features.

[0041] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0042] In the description of the embodiments of this application, when a component "includes" another component, other components are not excluded unless otherwise stated, and other components may be further included. The term "component" can refer to: layer, film, region, portion, structure, etc.

[0043] Figure 1 is a schematic diagram of the detection system provided in the first embodiment of this application.

[0044] Referring to Figure 1, the detection system includes: a stage 101 for carrying the object to be tested 10; a first detection module 102 for scanning the surface of the object to be tested 10 and acquiring a first image of the surface of the object to be tested 10 during relative movement between the object to be tested 10 and the first detection module 102; a second detection module 103 for taking a picture of the surface of the object to be tested 10 during relative stillness between the object to be tested 10 and the second detection module 103 to acquire a second image of the surface of the object to be tested 10; and a controller 104 for controlling the relative movement or stopping between the stage 101 and the first detection module 102 based on the detection state of the first detection module 102. When the detection state of the first detection module 102 meets the preset conditions, the controller 104 controls the stage 101 and the first detection module 102 to stop relative movement and the stage 101 and the second detection module 103 to remain relatively stationary. The second detection module 103 then takes a picture of the surface of the object to be tested 10 to obtain a second image. The surface area of ​​the object to be tested 10 represented by the first image is located within the surface area of ​​the object to be tested 10 represented by the second image. The preset conditions are that the scanning length of the first detection module 102 is equal to the preset length within a preset time, the preset length is less than or equal to the field of view width of the second detection module 103, and / or the preset condition is that the information carried in the first image contains the re-inspection information of the target to be tested.

[0045] The detection system provided in this embodiment will be described in detail below with reference to the accompanying drawings.

[0046] In this embodiment, the stage 101 is a movable stage. Specifically, during the detection process, the stage 101 moves while the first detection module 102 remains stationary, allowing the stage 101 to move the object under test 10 relative to the first detection module 102. This enables the first detection module 102 to scan the object under test 10 and capture a first image of its surface. Furthermore, the movement of the stage 101 can also bring the target object on the object under test 10 into the field of view of the second detection module 103, allowing the second detection module 103 to capture a second image of the surface of the object under test 10.

[0047] Correspondingly, both the first detection module 102 and the second detection module 103 can be fixed in place. It is understood that in other embodiments, the platform is a movable platform, and the first detection module can also be a movable detection module, and the second detection module can also be a movable detection module.

[0048] It is understood that in other embodiments, the platform is a fixed platform, and both the first and second detection modules are movable detection modules. Specifically, during the detection process, the platform is fixed while the first detection module moves, causing the object to be tested to move relative to the first detection module. This allows the first detection module to scan the object and capture a first image of its surface. Furthermore, when the second detection module needs to capture an image of the object, it moves to bring the target object into its field of view. Afterward, the second detection module comes to a standstill, allowing it to capture an image of the object's surface to obtain a second image.

[0049] In other words, in this embodiment of the application, it is not limited whether the stage 101, the first detection module 102 and the second detection module 103 are fixed or movable mechanisms, as long as it is ensured that the stage 101 and the first detection module 102 can move relative to each other or stop moving relative to each other, and the second detection module 103 can take pictures of the surface of the object to be tested 10.

[0050] The object under test 10 can be any object that requires surface inspection. In this embodiment, the object under test 10 is a wafer. In other embodiments, the object under test can also be a chip.

[0051] In this embodiment, the target to be tested is the defect on the surface of the test object 10. The defect can be a scratch, crack, pit, particle, or surface contamination, etc.

[0052] In this embodiment, the first detection module 102 is a linear array detector, also known as a line scan module. Using a linear array detector as the first detection module 102 helps to improve the scanning speed of the first detection module 102, thereby increasing the detection speed of the detection system.

[0053] In this embodiment, the second detection module 103 is an area array detector, also known as an area scanning module or a re-inspection module. Using an area array detector as the second detection module 103 helps improve the detection accuracy of the second detection module 103, thereby enhancing the detection accuracy of the detection system.

[0054] In other words, the first detection module 102 is used to quickly scan the surface of the object to be tested, and the second detection module 103 is used to re-inspect the surface of the object to be tested. The detection accuracy of the second detection module 103 is greater than that of the first detection module 102.

[0055] In this embodiment, the preset condition is that the information carried by the first image contains re-inspection information of the target to be tested. Specifically, if the information carried by the first image captured by the first detection module 102 contains re-inspection information of the target to be tested, then the second detection module 103 needs to be used for re-inspection to further confirm whether the target to be tested exists and the specific information of the target to be tested.

[0056] In this embodiment, the detection system further includes a processor 105, which is configured to receive a first image and analyze whether the information carried in the first image contains re-inspection information of the target to be tested; if the information carried in the first image contains re-inspection information of the target to be tested, the processor 105 sends a control signal to the controller 104, and the controller 104 responds to the control signal to control the target to be tested to be in the field of view of the second detection module 103, after which the stage 101 and the second detection module 103 are relatively stationary, and the second detection module 103 takes a picture of the surface of the object to be tested 10.

[0057] In this embodiment, the processor 105 and the controller 104 are independent devices. In other embodiments, the processor and controller may be integrated into the same device.

[0058] In this embodiment, the processor 105 is further configured to obtain the target position of the target to be tested based on the first image; the controller 104 is further configured to: determine whether the target to be tested is in the field of view of the second detection module 103 based on the target position; if yes, control the stage 101 to be relatively stationary with respect to the second detection module 103, and take a picture of the surface of the object to be tested 10 through the second detection module 103; if no, adjust the relative position between the stage 101 and the second detection module 103 so that the target to be tested is in the field of view of the second detection module 103, and take a picture of the surface of the object to be tested 10 through the second detection module 103.

[0059] Specifically, the first image carries location information. If the processor 105 analyzes the information carried in the first image and finds information about the target to be re-inspected, the processor 105 also analyzes the location information of the target to be inspected, thereby obtaining the target location of the target, that is, obtaining the location of the target in the scanning area where the first detection module 102 scans the surface of the object 10. The controller 104 is used to confirm whether the target to be inspected is in the field of view of the second detection module 103 based on the positional relationship between the target location and the field of view of the second detection module 103.

[0060] If the target to be tested is not in the field of view of the second detection module 103, the controller 104 adjusts the position of the stage 101, i.e., adjusts the position of the object to be tested 10, to adjust the relative position between the stage 101 and the second detection module 103, so that the target to be tested is in the field of view of the second detection module 103. If the target to be tested is in the field of view of the second detection module 103, the controller 104 controls the stage 101 to stop moving, so that the stage 101 and the second detection module 103 are relatively stationary.

[0061] It is understood that the above description uses the platform 101 as a movable platform as an example. As can be seen from the above description, in other embodiments, the controller can also control the first detection module to move or stay still, and control the second detection module to move or stay still. To avoid redundancy, it will not be described in detail here.

[0062] In this embodiment, the processor 105 is further configured to receive a second image captured by the second detection module 102 and analyze the second image to obtain information about the target to be tested.

[0063] In this embodiment, the preset condition is that the information carried by the first image contains re-inspection information of the target to be tested. The first image includes multiple sub-images acquired by the first detection module 102 within a preset time period during the movement of the platform 101 relative to the first detection module 102. Specifically, the processor 105 is used to receive and analyze whether the information carried by the sub-image contains re-inspection information of the target to be tested, in order to determine whether the information carried by the first image contains re-inspection information of the target to be tested. If the processor 105 analyzes that the information carried by the sub-image contains re-inspection information of the target to be tested, it indicates that the information carried by the first image contains re-inspection information of the target to be tested.

[0064] In other words, for each sub-image acquired by the first detection module 102, the processor 105 receives the sub-image and analyzes whether the information carried by the sub-image contains information about the target to be re-inspected. It can be considered that the processor 105 performs real-time analysis on the first image acquired by the first detection module 102. If the information carried by the sub-image contains information about the target to be re-inspected, the controller controls the stage 101 and the first detection module 102 to stop relative movement, that is, the first detection module 102 stops scanning the surface of the object to be tested 10.

[0065] Figure 2 is a schematic diagram showing the positional relationship between the field of view areas of the first detection module and the second detection module in Figure 1.

[0066] Referring to Figure 2, in this embodiment, the field of view S1 of the first detection module 102 is smaller along the scanning direction X than the field of view S2 of the second detection module 103 along the scanning direction X. Thus, along the scanning direction X, the field of view S2 of the second detection module 103 is larger than that of the first detection module 102. When the second detection module 103 needs to capture images of the target, even without moving the relative position between the stage 101 (refer to Figure 1) and the second detection module 103, or only by moving a small relative position, it can be ensured that the target is within the field of view of the second detection module 103, allowing the second detection module 103 to capture images of the target, thereby further improving detection efficiency.

[0067] Here, the scanning direction X refers to the direction in which the first detection module 102 moves relative to the stage 101.

[0068] In other embodiments, the size of the field of view of the first detection module along the scanning direction may also be greater than or equal to the size of the field of view of the second detection module along the scanning direction. When the second detection module needs to take pictures of the surface of the object to be tested, the stage or the second detection module is moved so that the target to be tested is in the field of view of the second detection module.

[0069] Furthermore, continuing to refer to Figure 2, in this embodiment, the field of view S2 of the second detection module 103 and the field of view S1 of the first detection module 102 are arranged along the scanning direction X, and the field of view S2 of the second detection module 103 and the field of view S1 of the first detection module 101 are in contact but do not overlap.

[0070] In this embodiment, the scanning length of the first detection module 102 within a preset time is less than or equal to the field of view width of the second detection module 103, where the field of view width refers to the width of the field of view region S2 of the second detection module 103 along the scanning direction X. That is, the scanning length of the first detection module 102 within the preset time is not greater than the field of view width of the second detection module 103. Thus, when the second detection module 103 needs to capture images of the target, even without moving the relative position between the stage 101 and the second detection module 103, or only by moving a small relative position, it can be ensured that the target is within the field of view of the second detection module 103, allowing the second detection module 103 to capture images of the target, thereby further improving detection efficiency.

[0071] Figure 3 is an optical path diagram of the detection system provided in the first embodiment of this application, including a first detection module, a second detection module, and a stage.

[0072] Referring to Figure 3, in this embodiment, the first detection module 102 and the second detection module 103 share at least a portion of the optical path structure 106. Since the first detection module 102 and the second detection module 103 share at least a portion of the optical path, it helps to reduce the hardware cost of the detection system.

[0073] It should be noted that in other embodiments, the first detection module and the second detection module may also have independent optical path structures, that is, the first detection module and the second detection module do not share an optical path structure.

[0074] Referring again to Figure 3, in this embodiment, the optical path structure 106 includes: a light source assembly 116, which provides incident light; and an optical lens group 126, which transmits the incident light to the surface of the object under test 10 to form signal light, and allows the signal light to enter the first detection module 102 and the second detection module 103 respectively.

[0075] The incident light provided by the light source component 116 is parallel light, and the signal light entering the first detection module 102 and the second detection module 103 is converging light.

[0076] Referring again to Figure 2, the light source assembly 116 includes: a light source 11 for providing initial light; and a first beam shaper 12 for shaping the initial light to form a parallel beam, which serves as the incident light.

[0077] In this embodiment, the initial light provided by the light source 11 is divergent light, and the first beam shaper 12 is a convex lens.

[0078] In this embodiment, the first detection module 101 and the second detection module 102 can share the same light source 11, which is beneficial to further reduce costs.

[0079] In other embodiments, the first detection module and the second detection module may also use different light sources. Specifically, the light source includes a first light source and a second light source. During the first detection module's imaging period, the first light source provides initial light, and during the second detection module's imaging period, the second light source provides initial light. Furthermore, the positions of the first and second light sources are adjustable, and the detection system includes a switching component. The switching component is used to: switch the first light source to a preset position when the first detection module needs to perform imaging, so that the initial light emitted by the first light source enters the first beam shaper; when the first detection module is not performing imaging and the second detection module needs to perform imaging, switch the first light source away from the preset position and switch the second light source to a preset position, so that the initial light emitted by the second light source enters the first beam shaper; and after the second detection module finishes imaging, switch the second light source away from the preset position.

[0080] Referring again to Figure 2, the optical lens assembly 126 includes: a collecting lens assembly 14 and a first beam splitting assembly 15. The collecting lens assembly 14 is used to collect signal light from the surface of the object under test 10 and transmit the signal light to the first beam splitting assembly 15. The first beam splitting assembly 15 is used to split the signal light transmitted to the first beam splitting assembly 15 and transmit a portion of the light to the first detection module 102 and a portion of the light to the second detection module 103.

[0081] In this embodiment, the optical lens assembly 126 further includes a second beam splitter 13, which reflects the incident light provided by the light source assembly 116 onto the surface of the object under test 10, so that signal light is formed on the surface of the object under test 10. The second beam splitter 13 is also used to collect the signal light transmitted by the lens assembly 14 to the second beam splitter 13, and then transmit the signal light from the second beam splitter 13 to the first beam splitter 15.

[0082] It should be noted that in other embodiments, the optical lens group may not be provided with a second beam splitting component. The incident light provided by the light source component is transmitted to the surface of the object under test so that the surface of the object under test forms signal light, and the signal light is collected by the collecting lens group and transmitted to the first beam splitting component.

[0083] In this embodiment, the second beam-splitting component 13 is a semi-transparent, semi-reflective mirror. In other embodiments, the second beam-splitting component can be a dichroic mirror.

[0084] The collecting lens group 14 can be an objective lens. In this embodiment, the collecting lens group 14 is also used to focus the incident light reflected by the second beam splitter 13 so that the parallel beam of the incident light is focused and transmitted to the surface of the object under test 10 to form a signal light on the surface of the object under test 10.

[0085] In this embodiment, the first beam-splitting component 15 is a semi-transparent, semi-reflective mirror. In other embodiments, the first beam-splitting component can be a dichroic mirror.

[0086] The signal light is split by the first beam splitter 15. Part of the signal light is transmitted through the first beam splitter 15, and part of the signal light is reflected through the first beam splitter 15.

[0087] In this embodiment, the signal light transmitted through the first beam splitter 15 is transmitted to the first detection module 102, and the signal light reflected by the first beam splitter 15 is transmitted to the second detection module 103.

[0088] In other embodiments, the signal light transmitted through the first beam splitter can also be transmitted to the second detection module, and correspondingly, the signal light reflected by the first beam splitter is transmitted to the first detection module. That is, the optical paths of the signal light transmitted through the first beam splitter and the optical paths of the signal light reflected by the first beam splitter can be interchanged, as long as it is ensured that the transmitted signal light enters either the first or the second detection module, and the reflected signal light enters the other of the first or the second detection module.

[0089] In this embodiment, the signal light emitted through the collecting mirror group 14 is parallel light. The optical mirror group 126 also includes a second beam shaper 16, which is used to shape the parallel light to form a converging light before transmitting it to the first beam splitting component 15. The second beam shaper 16 can be a concave or convex mirror.

[0090] It is understood that in other embodiments, the signal light emitted through the collecting mirror group can be a converging light, in which case there is no need to provide a second beamformer.

[0091] The center of one of the first detection module 102 and the second detection module 103 is located on the central axis of the signal light, while the center of the other is offset from the central axis of the signal light. The signal light refers to the signal light emitted through the collecting component 14; this signal light is a parallel beam and therefore has a central axis. The center of the first detection module 102 refers to the light-receiving area of ​​the first detection module 102 that receives a portion of the signal light split by the first beam splitter 15; the center of the second detection module 103 refers to the light-receiving area of ​​the second detection module 103 that receives a portion of the signal light split by the first beam splitter 15.

[0092] In this embodiment, the center of the first detection module 102 is located on the central axis of the signal light, while the center of the second detection module 103 is offset from the central axis of the signal light. In other embodiments, the center of the first detection module is offset from the central axis of the signal light, and correspondingly, the center of the second detection module is located on the central axis of the signal light.

[0093] The working principle of the detection system provided in this embodiment will be explained below with reference to Figures 1 and 3. The following explanation will use a movable platform 101 as an example:

[0094] The controller 104 controls the movement of the stage 101. During the movement of the stage 101, the first detection module 102 scans the object under test 10 and acquires a first image of the surface of the object under test 10. Specifically, during the scanning of the object under test 10 by the first detection module 102, the light source 11 emits initial light; the first beam shaper 12 shapes the initial light to form a parallel beam; the parallel beam is reflected by the second beam splitter 13 and transmitted to the surface of the object under test 10 after passing through the collecting mirror group 14, forming signal light on the surface of the object under test 10; the collecting component 14 collects the signal light from the surface of the object under test 10 and transmits the signal light to the second beam splitter 13, and transmits it out from the second beam splitter 13; after the signal light transmitted from the second beam splitter 13 reaches the first beam splitter 15, the first beam splitter 15 splits the signal light, and transmits part of the light to the first detection module 102 and part of the light to the second detection module 103. The first detection module 102 generates a corresponding sub-image based on the received signal light. At this time, since the second detection module 103 does not need to perform detection, it does not need to process the signal light it receives.

[0095] For each sub-image acquired by the first detection module 102, the processor 105 receives and analyzes whether the sub-image carries information to be re-inspected. If the sub-image acquired by the first detection module 102 does not carry information to be re-inspected, the first detection module 102 continues to scan and capture images.

[0096] If the sub-image acquired by the first detection module 102 carries information to be re-inspected, the stage 101 stops moving and determines whether the target to be tested is within the field of view of the second detection module 103. If the target to be tested is not within the field of view of the second detection module 103, the stage 101 is moved to make the target to be tested within the field of view of the second detection module 103.

[0097] After the target object is within the field of view of the second detection module 103, the second detection module 103 and the carrier 101 remain relatively stationary. The second detection module 103 then takes a picture of the surface of the target object 10 to obtain a second image. Specifically, the optical path transmission process related to the optical path structure can be referred to the description corresponding to the first detection module 102 taking pictures. The second detection module 103 generates the second image based on the received signal light. At this time, since the first detection module 102 does not need to perform detection, it does not need to process the signal light it receives.

[0098] After the second detection module 103 takes a picture of the surface of the object to be tested 10, the first detection module 102 scans and takes a picture of the surface of the object to be tested 10 to obtain a first image. The second detection module 103 decides whether to take a picture of the surface of the object to be tested 10 based on whether the first image carries the re-inspection information of the target object, until the detection of the surface of the object to be tested 10 is completed. The surface to be tested can be the entire surface of the object to be tested 10 or a portion of the surface of the object to be tested 10.

[0099] In the above embodiment, the first detection module 102 and the second detection module 103 sequentially scan the surface of the object to be tested 10. When the first image captured by the first detection module 102 indicates the presence of a target to be tested, the second detection module 103 performs a re-inspection. This replaces the scheme in related technologies where the first detection module scans the entire surface of the object to be tested to obtain all targets to be tested, and then the second detection module sequentially re-inspects each target to be tested. Obviously, in this embodiment, the problem of slow detection speed caused by the second detection module 103 moving back and forth between different targets to be tested can be avoided. This is beneficial to improving the detection speed of the surface of the object to be tested 10 while ensuring detection accuracy, thereby increasing production capacity.

[0100] The second embodiment of this application also provides a detection system, which is largely the same as the detection system provided in the first embodiment. The main difference is that the preset conditions in the detection system provided in the second embodiment include, in addition to the information carried in the first image containing the re-inspection information of the target to be tested, the scanning length of the first detection module being equal to a preset length within a preset time. That is to say, in the technical solution of the detection system provided in the second embodiment, whether the second detection module takes an image also depends on whether the scanning length of the first detection module reaches the preset length within the preset time. Under the condition that the scanning length of the first detection module reaches the preset length within the preset time and the information carried in the first image contains the re-inspection information of the target to be tested, the second detection module takes an image of the surface of the object to be tested to obtain a second image.

[0101] The detection system provided in the second embodiment of this application will be described in detail below with reference to the accompanying drawings. It should be noted that only the technical features that are different from those in the first embodiment will be described in detail below. The same or corresponding technical features as those in the first embodiment can be referred to the description of the foregoing embodiments, and will not be repeated below.

[0102] Figure 4 is a schematic diagram of the detection system provided in the second embodiment of this application.

[0103] Referring to Figure 4, the detection system provided in this embodiment includes a stage 201, a first detection module 202, a second detection module 203, and a controller 204. The controller 204 is used to control the relative movement or cessation of relative movement between the stage 201 and the first detection module 202 based on the detection state of the first detection module 202. When the detection state of the first detection module 202 meets preset conditions, the controller 204 controls the stage 201 and the first detection module 202 to stop relative movement, and the stage 201 and the second detection module 203 to remain relatively stationary. The second detection module 203 then captures an image of the surface of the object to be tested 20 to obtain a second image. The surface area of ​​the object to be tested 20 represented by the first image is located within the surface area of ​​the object to be tested 20 represented by the second image. The preset conditions are that the scanning length of the first detection module 202 is equal to a preset length within a preset time, the preset length is less than or equal to the field of view width of the second detection module 203, and the information carried in the first image contains re-inspection information of the target to be tested.

[0104] In this embodiment, the preset conditions include the presence of re-inspection information of the target to be tested in the information carried by the first image, and also include the scanning length of the first detection module 202 being equal to the preset length within a preset time. The detection system further includes a processor 205, which is configured to receive the first image and determine whether the scanning length of the first detection module 202 has reached the preset length; if so, analyze whether the information carried by the first image acquired within the preset time contains re-inspection information of the target to be tested; if the information carried by the first image contains re-inspection information of the target to be tested, the processor 205 sends a control signal to the controller 204, and the controller 204 responds to the control signal by controlling the target to be tested to be placed in the field of view of the second detection module 203, after which the stage 201 and the second detection module 203 remain relatively stationary, and the second detection module 203 takes an image of the surface of the object 20 to be tested.

[0105] In this embodiment, the first detection module 202 acquires multiple sub-images within a preset time. If the scanning length of the first detection module 202 is equal to the preset length, the processor 205 analyzes whether the information carried by each sub-image in all sub-images contains the re-examination information of the target to be tested. If at least one sub-image carries the re-examination information of the target to be tested, it indicates that the information carried by the first image contains the re-examination information of the target to be tested.

[0106] In other embodiments, the processor may also operate as follows: the first detection module acquires multiple sub-images within a preset time period, and the processor analyzes whether the information carried in each sub-image contains the re-inspection information of the target to be tested, and records the analysis results; the processor also acquires whether the scanning length of the first detection module has reached a preset length. If the scanning length of the first detection module has reached the preset length, the processor decides whether to send a control signal to the controller based on the analysis results. If the analysis results show that at least one sub-image carries information that needs to be re-inspected, the processor sends a control signal to the controller; if the analysis shows that no sub-image on the structure surface contains information that needs to be re-inspected, the processor does not send a control signal to the controller.

[0107] In this embodiment, the preset length is equal to the field of view width of the second detection module 203. The explanation of the field of view width can be found in the previous embodiments and will not be repeated here. The first detection module 202 has a relatively large scanning length per scan, and if the target to be measured is not within the field of view of the second detection module 203, the stage 201 needs to move a shorter distance to ensure that the target is within the field of view of the second detection module 203, thereby further improving the detection speed. In other embodiments, the preset length may also be less than the field of view width of the second detection module.

[0108] Accordingly, in this embodiment, the scanning length of the first detection module 202 within a preset time is equal to the field of view width of the second detection module 203. In other embodiments, the scanning length of the first detection module 202 within a preset time may also be less than the field of view width of the second detection module 203.

[0109] In this embodiment, the processor 205 is further configured to, if the information carried by each sub-image acquired by the first detection module 202 within a preset time does not contain the re-inspection information of the target to be tested, then the processor 205 will not send a control signal to the controller 204, and the stage 201 and the first detection module 202 will continue to move relative to each other. This is beneficial to further improve the detection speed.

[0110] In other embodiments, the processor can also be configured to, if the information carried in each sub-image acquired by the first detection module within a preset time does not contain the re-inspection information of the target to be tested, still send a control signal to the controller. The controller, in response to the control signal, keeps the stage and the second detection module relatively stationary, so that the second detection module can photograph the surface of the object to be tested. In other words, even if the first image captured by the first detection module shows no presence of the target to be tested, the second detection module can still photograph the surface of the object to be tested, helping to reduce the possibility of missed detection of the target and thus further improving detection accuracy.

[0111] In this embodiment, the scanning length of the first detection module 202 within a preset time is less than or equal to the field of view width of the second detection module 203; the size of the field of view area of ​​the first detection module 202 along the scanning direction is less than the size of the field of view area of ​​the second detection module 203 along the scanning direction.

[0112] The field of view of the second detection module 203 is arranged along the scanning direction with the field of view of the first detection module 202, and the field of view of the second detection module 203 is in contact with but does not overlap with the field of view of the first detection module 202.

[0113] In this embodiment, the first detection module 202 and the second detection module 203 may share at least a portion of the optical path structure. For a detailed description of the optical path structure, please refer to the description in the foregoing embodiment, which will not be repeated here.

[0114] It is understood that in other embodiments, the optical path structures of the first detection module 202 and the second detection module 203 can also be independent of each other.

[0115] The working principle of the detection system provided in this embodiment will be explained below with reference to Figure 4. The stage 201 will be used as an example, which is a movable stage 201:

[0116] The controller 204 controls the stage 201 to move. During the movement of the stage 201, the first detection module 202 scans the object 20 to be tested and acquires a first image of the surface of the object 20 to be tested.

[0117] The processor 205 determines whether the scanning length of the first detection module 202 has reached a preset length, or in other words, whether the scanning time of the first detection module 202 has reached a preset time. The preset time is the scanning time corresponding to the first detection module 202 reaching the preset length. If so, the processor 205 analyzes whether any sub-image among all the sub-images acquired within the preset time contains information to be re-inspected. Alternatively, as described above, the processor 205 may first analyze each sub-image in real time and record the analysis results. When the scanning length of the first detection module 202 reaches the preset length, it determines whether to send a control signal to the controller 204 based on the analysis results.

[0118] If no sub-image acquired by the first detection module 202 carries information to be re-inspected, the first detection module 202 continues to scan and take pictures.

[0119] If at least one sub-image acquired by the first detection module 202 carries information to be re-inspected, the stage 201 stops moving and determines whether the target to be tested is within the field of view of the second detection module 203. If the target to be tested is not within the field of view of the second detection module 203, the stage 201 is moved to bring the target to be tested into the field of view of the second detection module 203.

[0120] After the target to be tested is in the field of view of the second detection module 203, the second detection module 203 takes a picture of the surface of the object to be tested 20 to obtain a second image.

[0121] After the second detection module 203 takes a picture of the surface of the object to be tested 20, the first detection module 202 scans and takes a picture of the surface of the object to be tested 20 to obtain a first image. Based on whether the scanning length of the first detection module 202 reaches the preset length and whether the first image carries the re-inspection information of the target to be tested, the second detection module 203 is controlled to take a picture of the surface of the object to be tested 20 until the detection of the surface of the object to be tested 20 is completed.

[0122] The detection system provided in the above embodiments is beneficial to further improve detection speed while ensuring detection accuracy, and further enhance the throughput of the detection system. Specifically, if, among the multiple sub-images acquired by the first detection module 202 within a preset time, there are two or more sub-images that carry information containing the target to be re-inspected, then in this case, the second detection module 203 only needs to take one shot to acquire the second image to complete the re-inspection of the target corresponding to these sub-images, thus further improving the detection speed.

[0123] The third embodiment of this application also provides a detection system, which is largely the same as the detection systems provided in the first and second embodiments. The main difference is that the preset condition in the detection system provided in the third embodiment is that the scanning length of the first detection module is equal to the preset length within a preset time. That is, the preset condition in the detection system provided in the third embodiment does not include the re-inspection information of the target to be tested in the information carried by the first image.

[0124] The detection system provided in the third embodiment of this application will be described in detail below with reference to the accompanying drawings. It should be noted that only the technical features that are different from those in the first embodiment will be described in detail below. The same or corresponding technical features as those in the first embodiment can be referred to the description of the foregoing embodiments, and will not be repeated below.

[0125] Figure 5 is a schematic diagram of the detection system provided in the third embodiment of this application.

[0126] Referring to Figure 5, the detection system provided in this embodiment includes a stage 301, a first detection module 302, a second detection module 303, and a controller 304. The controller 304 is used to control the relative movement or cessation of relative movement between the stage 301 and the first detection module 302 based on the detection state of the first detection module 302. When the detection state of the first detection module 302 meets a preset condition, the controller 304 controls the stage 301 and the first detection module 302 to stop relative movement, and the stage 301 and the second detection module 303 to remain relatively stationary. The second detection module 303 then captures an image of the surface of the object under test 30 to obtain a second image. The surface area of ​​the object under test 30 represented by the first image is located within the surface area of ​​the object under test 30 represented by the second image. The preset condition is that the scanning length of the first detection module 302 is equal to a preset length within a preset time, and the preset length is less than or equal to the field of view width of the second detection module 303.

[0127] In other words, in this embodiment, the first detection module 302 scans the surface of the object to be tested 30 and captures a first image. When the scanning length of the first detection module 302 equals a preset length, the stage 301 and the first detection module 302 stop moving relative to each other, and the first detection module 302 stops scanning. Without needing to confirm whether the information carried in the first image acquired by the first detection module 302 within a preset time contains information about the target to be tested, the second detection module 303 remains relatively stationary with respect to the stage 301, and the second detection module 303 captures a second image of the surface of the object to be tested 30. The first detection module 302 and the second detection module 303 alternately capture images until the detection of the surface of the object to be tested 30 is completed. All first images and all second images are analyzed to determine whether the surface of the object to be tested 30 contains the target to be tested. If the surface of the object to be tested 30 contains the target to be tested, the position information of the target to be tested on the surface is also obtained based on the first image and / or the second image.

[0128] In this embodiment, the preset length is equal to the field of view width of the second detection module 303. In other embodiments, the preset length may be less than the field of view width of the second detection module 303.

[0129] In this embodiment, the controller 304 is further configured to: obtain whether the scanning length of the first detection module 302 has reached a preset length, or in other words, obtain whether the scanning time of the first detection module 302 has reached a preset time, wherein the preset time is the scanning time corresponding to the first detection module 302 reaching the preset length; if yes, then control the stage 301 and the second detection module 303 to remain relatively stationary, and during the period when the stage 301 and the second detection module 303 are relatively stationary, the second detection module 303 takes a picture of the surface of the object to be tested 30; if no, then control the stage 301 and the first detection module 302 to continue to move relative to each other.

[0130] It is understood that in other embodiments, the detection system may also include a processor, which is used to determine whether the scanning length of the first detection module has reached a preset length. If so, the processor sends a controller signal to the controller. The controller responds to the control signal to stop the relative movement between the first detection module and the stage, and controls the stage and the second detection module to remain relatively stationary.

[0131] The detection system also includes an optical path structure. For detailed descriptions of the first detection module 302, the second detection module 303, and the optical path structure, please refer to the corresponding descriptions in the foregoing embodiments, which will not be repeated here.

[0132] The detection system provided in the above embodiments does not need to analyze whether the first image carries the information to be detected during the scanning of the surface of the object to be tested, which helps to reduce the amount of image analysis in the detection system.

[0133] The fourth embodiment of this application also provides a detection method that can be applied to the detection system provided in the first embodiment. The corresponding description of the detection system in the first embodiment is also applicable to the following detection method embodiments.

[0134] Figure 6 is a flowchart of the detection method provided in the fourth embodiment of this application.

[0135] Referring to Figure 6, the detection methods include:

[0136] Step S11: Perform the first detection step. In the first detection step, the stage and the first detection module move relative to each other so that the object to be tested moves relative to the first detection module. During the movement of the object to be tested relative to the first detection module, the first detection module scans the surface of the object to be tested and acquires a first image of the surface of the object to be tested.

[0137] In this embodiment, during the first detection step, the stage moves while the first detection module remains stationary, and the stage moves the object to be tested relative to the first detection module.

[0138] In other embodiments, in the first detection step, the stage may be stationary while the first detection module moves, so that the object to be tested moves relative to the first detection module; or, both the stage and the first detection module may move, ensuring that the stage moves relative to the first detection module.

[0139] Step S12: Execute the second detection step. In the second detection step, based on the detection state of the first detection module, control the relative movement or cessation of relative movement between the stage and the first detection module. When the detection state of the first detection module meets the preset conditions, the relative movement between the stage and the first detection module stops and the stage and the second detection module remain relatively stationary. The second detection module then takes a picture of the surface of the object to be tested to obtain a second image of the surface of the object to be tested. The area of ​​the surface of the object to be tested represented by the first image is located within the area of ​​the surface of the object to be tested represented by the second image.

[0140] The preset condition is that the information carried by the first image contains information about the target to be tested that needs to be re-examined.

[0141] Specifically, based on the detection state of the first detection module, controlling the relative movement or stopping of relative movement between the stage and the first detection module includes: analyzing whether the information carried by the first image contains the re-inspection information of the target to be tested; if the information carried by the first image contains the re-inspection information of the target to be tested, then after the target to be tested is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the surface of the object to be tested is photographed by the second detection module.

[0142] In this embodiment, if the information carried by the first image contains information about the target to be re-examined, the platform stops moving.

[0143] In addition, in this embodiment, if the information carried by the first image contains the re-inspection information of the target to be tested, then when the target to be tested is in the field of view of the second detection module, the stage and the second detection module are relatively stationary, and the target to be tested on the surface of the object to be tested is photographed by the second detection module, including: obtaining the target position of the target to be tested according to the first image; and confirming whether the target to be tested is in the field of view of the second detection module according to the target position; after the target to be tested enters the field of view of the second detection module, the stage and the second detection module are relatively stationary, and the surface of the object to be tested is photographed by the second detection module.

[0144] In other words, before the second detection module takes a picture of the surface of the object to be tested, it first confirms whether the target to be tested can be captured by the second detection module, thereby avoiding the problem of missed detection caused by the second detection module failing to capture the target to be tested.

[0145] In this embodiment, if the target to be tested is not in the field of view of the second detection module, the stage is moved to adjust the position of the target so that it enters the field of view of the second detection module. In other embodiments, if the target to be tested is not in the field of view of the second detection module, the second detection module can also be moved to adjust the position of its field of view so that the target to be tested is within its field of view.

[0146] In this embodiment, the preset condition is that the information carried by the first image contains the re-inspection information of the target to be tested. That is, the information carried by the first image is analyzed in real time to see if there is re-inspection information. If so, the first detection module stops scanning and the second detection module is activated to take pictures.

[0147] Specifically, analyzing whether the information carried in the first image contains re-inspection information of the target to be tested includes: during the movement of the stage relative to the first detection module, the first detection module scans the surface of the object to be tested to acquire multiple sub-images within a preset time; for each sub-image acquired, the information carried in the sub-image is analyzed to determine whether the information carried in the first image contains the re-inspection information of the target to be tested; if any sub-image contains the re-inspection information of the target to be tested, then after the target to be tested is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the second detection module takes an image of the surface of the object to be tested.

[0148] In this embodiment, if the information carried by the sub-image contains information to be re-examined about the target to be tested, it indicates that the information carried by the first image contains information to be re-examined.

[0149] For the optical paths corresponding to the first detection module and the second detection module during image capture, please refer to the corresponding descriptions in the foregoing embodiments, which will not be repeated here.

[0150] In this embodiment, the scanning length of the first detection module within a preset time is less than or equal to the field of view width of the second detection module; the size of the field of view area of ​​the first detection module along the scanning direction is less than the size of the field of view area of ​​the second detection module along the scanning direction.

[0151] The detection method also includes: repeatedly performing the first detection step and the second detection step until the detection of the test surface of the test object is completed.

[0152] In this embodiment, the test surface of the object is the entire surface of the object. In other embodiments, the test surface of the object may also be a partial area of ​​the surface of the object.

[0153] In the above embodiment, the first detection module scans and captures images of the surface of the object under test. Each captured sub-image is analyzed to determine if it contains information requiring re-inspection. When a sub-image contains such information, the first detection module stops scanning and capturing images of the surface and activates the second detection module to capture images of the surface. The second detection module's image quality is superior to that of the first module; therefore, the second image captured by the second detection module can obtain more information about the target, thereby improving detection accuracy. Furthermore, compared to related technologies where the second detection module moves between multiple targets, this embodiment also improves detection speed.

[0154] The fifth embodiment of this application also provides a detection method, which corresponds to the detection system provided in the second embodiment. The corresponding description of the detection system in the second embodiment is also applicable to the detection method embodiments described below. Furthermore, the detection method provided in the fifth embodiment is largely the same as that provided in the fourth embodiment, the main difference being that the preset condition in the detection method provided in the fifth embodiment further includes the scanning length of the first detection module being equal to a preset length within a preset time. Therefore, the parts that are the same as or corresponding to the foregoing embodiments can be referred to the descriptions of the foregoing embodiments, and will not be described in detail below.

[0155] In this embodiment, the detection method includes: performing a first detection step, in which the stage and the first detection module move relative to each other to move the object to be tested relative to the first detection module; during the movement of the object to be tested relative to the first detection module, the first detection module scans the surface of the object to be tested and acquires a first image of the surface of the object to be tested; performing a second detection step, in which, based on the detection state of the first detection module, the stage and the first detection module are controlled to move relative to each other or stop moving relative to each other; when the detection state of the first detection module meets a preset condition, the stage and the first detection module stop moving relative to each other and the stage and the second detection module are relatively stationary, and the second detection module takes a picture of the surface of the object to be tested to acquire a second image of the surface of the object to be tested, wherein the surface area of ​​the object to be tested represented by the first image is located within the surface area of ​​the object to be tested represented by the second image; wherein the preset condition is that the scanning length of the first detection module is equal to a preset length within a preset time, the preset length is less than or equal to the field of view width of the second detection module, and the information carried in the first image contains re-inspection information of the target to be tested.

[0156] Specifically, based on the detection status of the first detection module, controlling the relative movement or stopping of relative movement between the stage and the first detection module includes: obtaining whether the scanning length of the first detection module has reached a preset length; if so, analyzing whether the information carried by the first image acquired within a preset time contains the re-inspection information of the target to be tested; if the information carried by the first image contains the re-inspection information of the target to be tested, then after the target to be tested is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the surface of the object to be tested is photographed by the second detection module.

[0157] In this embodiment, analyzing whether the information carried by the first image acquired within a preset time contains the re-inspection information of the target to be tested includes: the first detection module acquires multiple sub-images within a preset time; if the scanning length of the first detection module is equal to the preset length, then analyzing whether the information carried by each sub-image in all sub-images contains the re-inspection information of the target to be tested, so as to obtain whether the information carried by the first image contains the re-inspection information of the target to be tested.

[0158] In other embodiments, analyzing whether the information carried by the first image acquired within a preset time contains re-examination information of the target to be tested includes: the first detection module acquires multiple sub-images within the preset time, and analyzes whether the information carried by each sub-image contains re-examination information of the target to be tested, and records the analysis results; if the scanning length of the first detection module is equal to the preset length, then based on the analysis results, it is determined whether the information carried by the first image contains re-examination information. If the analysis results indicate that at least one sub-image carries re-examination information, it indicates that the information carried by the first image contains re-examination information.

[0159] In this embodiment, the detection method further includes: if none of the information carried by each of the multiple sub-images acquired within a preset time contains the re-inspection information of the target to be tested, then the platform and the first detection module continue to move relative to each other. That is, if the information carried by the first image does not contain the re-inspection information, then the second detection module does not need to take a picture.

[0160] In other embodiments, the detection method may also include: if none of the information carried by each of the multiple sub-images acquired within a preset time contains the re-inspection information of the target to be tested, then the relative movement between the stage and the first detection module stops, and the surface of the object to be tested is photographed by the second detection module. That is to say, even if the information carried by the first image does not contain the re-inspection information, the second detection module can still be used to take pictures to further improve the detection accuracy.

[0161] The detection method also includes: repeatedly performing the first detection step and the second detection step until the detection of the test surface of the test object is completed.

[0162] The above technical solution is beneficial for further improving detection speed. Specifically, the first image carries information on multiple targets to be re-inspected. In this way, the second detection module can capture these multiple targets in one shot, and the stage and the first detection module do not need to stop and move relative to each other multiple times, thereby improving the detection speed.

[0163] The sixth embodiment of this application also provides a detection method, which corresponds to the detection system provided in the third embodiment. The corresponding description of the detection system in the third embodiment also applies to the detection method embodiments described below. Furthermore, the detection methods provided in the sixth embodiment are largely the same as those provided in the third and fourth embodiments, with the main difference being that the preset condition in the detection method provided in the sixth embodiment is that the scanning length of the first detection module is equal to a preset length within a preset time. Therefore, the parts that are the same as or corresponding to the foregoing embodiments can be referred to the descriptions of the foregoing embodiments, and will not be described in detail below.

[0164] In this embodiment, the detection method includes: performing a first detection step, in which the stage and the first detection module move relative to each other to move the object to be tested relative to the first detection module; during the movement of the object to be tested relative to the first detection module, the first detection module scans the surface of the object to be tested and acquires a first image of the surface of the object to be tested; performing a second detection step, in which, based on the detection state of the first detection module, the stage and the first detection module are controlled to move relative to each other or stop moving relative to each other; when the detection state of the first detection module meets a preset condition, the stage and the first detection module stop moving relative to each other and the stage and the second detection module are relatively stationary, and the second detection module takes a picture of the surface of the object to be tested to acquire a second image of the surface of the object to be tested, wherein the area of ​​the surface of the object to be tested represented by the first image is located within the area of ​​the surface of the object to be tested represented by the second image; wherein, the preset condition is that the scanning length of the first detection module is equal to a preset length within a preset time, and the preset length is less than or equal to the field of view width of the second detection module.

[0165] Specifically, based on the detection status of the first detection module, controlling the relative movement or stopping of the relative movement between the stage and the first detection module includes: obtaining whether the single scan length of the first detection module has reached a preset length; if so, the stage and the second detection module remain relatively stationary, and the second detection module takes a picture of the surface of the object to be tested; if not, the stage and the first detection module continue to move relative to each other.

[0166] The detection method also includes: repeatedly performing the first detection step and the second detection step until the detection of the test surface of the test object is completed.

[0167] In other words, in this embodiment, during a single scan by the first detection module, there is no need to analyze the first image; the first detection module completes one scan, and the second detection module takes one image. Thus, after acquiring all the first images and all the second images, the first and second images are analyzed to obtain information about the target on the surface of the object under test.

[0168] Those skilled in the art will understand that the above embodiments are specific examples of implementing this application, and in practical applications, various changes in form and detail can be made without departing from the spirit and scope of this application. Any person skilled in the art can make various alterations and modifications without departing from the spirit and scope of this application; therefore, the scope of protection of this application should be determined by the scope defined in the claims.

Claims

1. A detection system, comprising: A platform, which is used to support the object to be tested; A first detection module is configured to scan the surface of the object to be tested and acquire a first image of the surface of the object to be tested during the relative movement between the object to be tested and the first detection module. The second detection module is used to take a picture of the surface of the object to be tested while the object to be tested is relatively stationary to obtain a second image of the surface of the object to be tested. The controller is configured to, based on the detection state of the first detection module, control the relative movement or cessation of relative movement between the stage and the first detection module. When the detection state of the first detection module meets a preset condition, the controller controls the relative movement between the stage and the first detection module to stop and the stage and the second detection module to remain relatively stationary. The second detection module then captures an image of the surface of the object to be tested to obtain a second image. The surface area of ​​the object to be tested represented by the first image is located within the surface area of ​​the object to be tested represented by the second image. The preset conditions are that the scanning length of the first detection module is equal to the preset length within a preset time, the preset length is less than or equal to the field of view of the second detection module, and / or the preset conditions are that the information carried by the first image contains the re-inspection information of the target to be tested.

2. The detection system according to claim 1, wherein, The preset conditions include information about the target to be tested that is included in the information carried by the first image; The detection system also includes: The processor is configured to receive the first image and analyze whether the information carried in the first image contains re-inspection information of the target to be tested. If the information carried in the first image contains information about the target to be re-inspected, the processor sends a control signal to the controller. In response to the control signal, the controller controls the target to be inspected to be in the field of view of the second detection module. Then, the stage and the second detection module remain relatively stationary, and the second detection module takes an image of the surface of the target.

3. The detection system according to claim 2, wherein, The processor is further configured to obtain the target position of the target to be tested based on the first image; the controller is further configured to: Based on the target location, confirm whether the target to be tested is within the field of view of the second detection module; If so, the stage is controlled to remain relatively stationary with respect to the second detection module, and the surface of the object to be tested is photographed by the second detection module. If not, the relative position between the stage and the second detection module is adjusted so that the target to be tested is in the field of view of the second detection module, and the surface of the target to be tested is photographed by the second detection module.

4. The detection system according to claim 2, wherein, The preset condition is that the information carried in the first image contains re-inspection information of the target to be tested; the first image includes: multiple sub-images acquired by the first detection module within the preset time period during the movement of the platform relative to the first detection module; the processor is used for: For each sub-image acquired by the first detection module, the processor receives and analyzes whether the information carried by the sub-image contains re-inspection information of the target to be tested, so as to obtain whether the information carried by the first image contains re-inspection information.

5. The detection system according to claim 1, wherein, The scanning length of the first detection module within the preset time is less than or equal to the field of view width of the second detection module; the size of the field of view area of ​​the first detection module along the scanning direction is less than the size of the field of view area of ​​the second detection module along the scanning direction.

6. The detection system according to claim 1 or 5, wherein, The field of view of the second detection module is arranged along the scanning direction with the field of view of the first detection module, and the field of view of the second detection module is in contact with but does not overlap with the field of view of the first detection module.

7. The detection system according to claim 2, wherein, The preset condition further includes that the scanning length of the first detection module is equal to the preset length within the preset time period; the processor is used to: Determine whether the scan length of the first detection module has reached the preset length; If so, analyze whether the information carried by the first image acquired within the preset time period contains information about the target to be re-examined.

8. The detection system according to claim 1, wherein, The preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time; the controller is further configured to: Determine whether the scan length of the first detection module has reached the preset length; If so, the stage is controlled to remain relatively stationary with respect to the second detection module, and during the period when the stage and the second detection module are relatively stationary, the second detection module takes a picture of the surface of the object to be tested; If not, then control the stage to continue moving relative to the first detection module.

9. The detection system according to claim 1, wherein, The first detection module includes a linear array detector, and the second detection module includes a planar array detector.

10. The detection system according to any one of claims 1 to 5, 7-9, wherein, The first detection module and the second detection module share at least a portion of the optical path structure; the optical path structure includes: A light source assembly for providing incident light; An optical lens assembly is used to transmit the incident light to the surface of the object under test to form signal light, and to allow the signal light to enter the first detection module and the second detection module respectively.

11. The detection system according to claim 10, wherein, The optical lens assembly includes: The collection mirror group and the first beam splitter are provided. The collection mirror group is used to collect signal light from the surface of the object under test and transmit the signal light to the first beam splitter. The first beam splitter is used to split the signal light transmitted to the first beam splitter, and to transmit a portion of the light to the first detection module and a portion of the light to the second detection module.

12. The detection system according to claim 10, wherein, The center of one of the first detection module and the second detection module is located on the central axis of the signal light, while the center of the other is offset from the central axis of the signal light.

13. A detection method, applied to the detection system as described in any one of claims 1-12, comprising: The first detection step is performed, in which the stage and the first detection module move relative to each other so that the object to be tested moves relative to the first detection module. During the movement of the object to be tested relative to the first detection module, the first detection module scans the surface of the object to be tested and acquires a first image of the surface of the object to be tested; The second detection step is performed. In the second detection step, based on the detection state of the first detection module, the relative movement between the stage and the first detection module is controlled to stop. When the detection state of the first detection module meets the preset conditions, the relative movement between the stage and the first detection module stops and the stage and the second detection module are relatively stationary. The second detection module takes a picture of the surface of the object to be tested to obtain a second image of the surface of the object to be tested. The area of ​​the surface of the object to be tested represented by the first image is located within the area of ​​the surface of the object to be tested represented by the second image. The preset conditions are that the scanning length of the first detection module is equal to the preset length within a preset time, the preset length is less than or equal to the field of view of the second detection module, and / or the preset conditions are that the information carried by the first image contains the re-inspection information of the target to be tested.

14. The detection method according to claim 13, wherein, The preset conditions include information in the first image that contains information about the target to be tested and requires re-inspection; the step of controlling the relative movement or stopping the relative movement between the platform and the first detection module based on the detection state of the first detection module includes: Analyze whether the information carried by the first image contains information about the target to be re-examined; If the information carried in the first image contains information about the target to be re-inspected, then after the target to be inspected is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the surface of the target to be inspected is photographed by the second detection module.

15. The detection method according to claim 14, wherein, If the information carried in the first image contains information about the target to be re-inspected, then when the target to be inspected is in the field of view of the second detection module, the stage is relatively stationary with respect to the second detection module, and the second detection module takes an image of the target on the surface of the object to be inspected, including: The target location of the target to be tested is obtained based on the first image; And based on the target position, confirm whether the target to be tested is within the field of view of the second detection module; After the target to be tested enters the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the second detection module takes pictures of the surface of the target to be tested.

16. The detection method according to claim 14, wherein, The preset condition is that the information carried by the first image contains information about the target to be tested that needs to be re-examined. The analysis of whether the information carried by the first image contains information about the target to be re-examined includes: During the movement of the stage relative to the first detection module, the first detection module scans the surface of the object to be tested to acquire multiple sub-images within the preset time. Each sub-image is acquired and analyzed to determine whether the sub-image contains information about the target to be tested that needs to be re-examined, in order to determine whether the information carried by the first image contains information about the target to be tested that needs to be re-examined. If any of the sub-images carries information about the target to be tested that needs to be re-inspected, then after the target to be tested is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the second detection module takes an image of the surface of the target to be tested.

17. The detection method according to claim 14, wherein, The preset conditions also include that the scanning length of the first detection module is equal to the preset length within the preset time; the step of controlling the relative movement or stopping the relative movement between the stage and the first detection module based on the detection state of the first detection module includes: Determine whether the scan length of the first detection module has reached the preset length; If so, analyze whether the information carried by the first image acquired within the preset time contains information about the target to be re-examined. If the information carried in the first image contains information about the target to be re-inspected, then after the target to be inspected is in the field of view of the second detection module, the stage and the second detection module remain relatively stationary, and the surface of the target to be inspected is photographed by the second detection module.

18. The detection method according to claim 17, wherein, The analysis of whether the information carried by the first image acquired within the preset time contains information about the target to be re-examined includes: The first detection module acquires multiple sub-images within the preset time period; If the scanning length of the first detection module is equal to the preset length, then the information carried by each of the sub-images in all the sub-images is analyzed to determine whether the target to be tested has re-inspection information in the information carried by the first image.

19. The detection method according to claim 18, wherein, The detection method further includes: If, among the multiple sub-images acquired within the preset time period, none of the sub-images carry information indicating the target to be re-examined, then the platform and the first detection module are controlled to continue moving relative to each other; or, If none of the sub-images acquired within the preset time contain information about the target to be re-inspected, then the platform and the first detection module stop moving relative to each other, and the second detection module takes a picture of the surface of the object to be tested.

20. The detection method according to claim 13, wherein, The preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time. The step of controlling the relative movement or stopping the relative movement between the platform and the first detection module based on the detection status of the first detection module includes: Whether the single scan length of the first detection module reaches the preset length; If so, the stage is stationary relative to the second detection module, and the surface of the object to be tested is photographed by the second detection module; If not, the platform continues to move relative to the first detection module.

21. The detection method according to claim 13, wherein, The detection method further includes: Repeat the first detection step and the second detection step until the detection of the test surface of the test object is completed.

Images