Optical pressure sensor and method for operating an optical pressure sensor

WO2026125037A1PCT designated stage Publication Date: 2026-06-18AMS OSRAM INT GMBH
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
AMS OSRAM INT GMBH
Filing Date
2025-12-01
Publication Date
2026-06-18

AI Technical Summary

⚠Technical Problem

Existing optical pressure sensors, particularly microphones, face challenges in efficiently converting mechanical displacement into optical signals with high sensitivity and precision, often leading to issues with signal-to-noise ratio and structural integrity.

⚗Method used

An optical pressure sensor is designed with a waveguide and coupling structure within an optical cavity, utilizing a semiconductor-based light source to create a standing wave, which couples electromagnetic radiation into the waveguide based on the displacement of a deflectable membrane, integrated within a MEMS device, to detect pressure changes.

🎯Benefits of technology

The sensor achieves high sensitivity and precision in converting mechanical displacement into optical signals, enhancing signal-to-noise ratio and enabling a compact, precise optical microphone suitable for various applications.

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    Figure EP2025084846_18062026_PF_FP_ABST
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Abstract

An optical pressure sensor with the following features is provided: - a waveguide (2) provided with a coupling structure (15) arranged within an optical cavity (8), - a light source (9) configured to irradiate the optical cavity (8) with electromagnetic radiation (10) such that a standing wave (21) of electromagnetic radiation (10) is created within the optical cavity (8), wherein - the coupling structure (15) is configured to couple an amount of the electromagnetic radiation (10) of the standing wave (21) in the waveguide (2), and - the amount of electromagnetic radiation (10) coupled in the waveguide (2) varies with a displacement (δ) of a deflectable membrane (3). Further, a method for operating an optical pressure sensor is provided.
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