Film-forming apparatus, moving apparatus, film-forming method, and electronic device manufacturing method

The film deposition apparatus addresses height reduction and impurity suppression by employing expandable atmospheric boxes to manage wiring and piping, ensuring accurate deposition with minimal impurity generation.

WO2026126615A1PCT designated stage Publication Date: 2026-06-18CANON TOKKI CORP
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
CANON TOKKI CORP
Filing Date
2025-09-30
Publication Date
2026-06-18

AI Technical Summary

⚠Technical Problem

Existing film deposition apparatuses face challenges in reducing height, maintaining deposition accuracy, and preventing impurity particle generation due to the configuration of multi-joint arms and atmospheric arms that are prone to vibration and twisting of wiring and piping.

⚗Method used

The apparatus incorporates a vacuum chamber with a deposition source supported by a scanning direction moving unit, first and second atmospheric boxes housing wiring, and an expandable and retractable scanning direction connecting unit, allowing for reduced height and minimized impurity particle generation.

🎯Benefits of technology

This configuration reduces the height of the film deposition apparatus, maintains deposition accuracy, and suppresses impurity particle generation by using expandable and retractable atmospheric boxes to manage wiring and piping, enhancing operational efficiency.

✦ Generated by Eureka AI based on patent content.

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  • Figure JP2025034670_18062026_PF_FP_ABST
    Figure JP2025034670_18062026_PF_FP_ABST
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Abstract

This film-forming apparatus comprises: a vacuum chamber; a vapor deposition source for vapor-depositing a vapor deposition material; a scanning direction movement part for moving the vapor deposition source in a scanning direction; a first atmospheric box that has an atmospheric pressure space for storing wiring electrically connected to the outside of the vacuum chamber and / or to the vapor deposition source and the scanning direction movement part in the vacuum chamber, and that supports the vapor deposition source; a second atmospheric box that has an atmospheric pressure space for storing the wiring in the vacuum chamber, and that is arranged side by side with the first atmospheric box in the scanning direction; and a scanning direction connection part that has an atmospheric pressure space for storing the wiring in the vacuum chamber, and that connects the atmospheric pressure space of the first atmospheric box and the atmospheric pressure space of the second atmospheric box in the scanning direction in an expandable and contractible manner.
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