Pressure sensor
The pressure sensor design addresses parasitic capacitance issues by insulating and positioning cover layer components higher than pads and wires, enhancing reliability and accuracy through reduced capacitance shifts and improved shielding.
WO2026126620A1PCT designated stage Publication Date: 2026-06-18MURATA MFG CO LTD
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- MURATA MFG CO LTD
- Filing Date
- 2025-10-02
- Publication Date
- 2026-06-18
AI Technical Summary
⚠Technical Problem
Existing pressure sensors suffer from reliability issues due to parasitic capacitance changes caused by moisture absorption in the resin package, leading to inaccurate pressure measurements.
⚗Method used
The pressure sensor design includes a conductive electrode, membrane, and cover layers insulated from each other, with a cover layer having a main portion and wall portions that do not overlap the pads or wires, positioned higher than them, and a resin package that covers these components, reducing parasitic capacitance.
🎯Benefits of technology
This configuration suppresses parasitic capacitance changes, enhances reliability, and improves measurement accuracy by shielding against electromagnetic interference and protecting the membrane from physical damage and foreign matter.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure JP2025035093_18062026_PF_FP_ABST
Abstract
This pressure sensor comprises, in the following order along a first direction, an electrode layer, a membrane layer, and a cover layer that are insulated from one another and that are each conductive. The pressure sensor comprises a conductive first pad provided on the surface of the membrane layer facing the cover layer, a conductive second pad provided on the surface of the electrode layer facing the membrane layer, and a resin package that covers at least the first pad and the second pad. The cover layer includes a main section that does not overlap the first pad or the second pad when viewed along the first direction, and at least one wall section extending from the main section to a position between the first pad and the second pad. In the first direction, at least a part of the wall section is located at a position higher than the first pad and the second pad, with the electrode layer as a reference.
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