X-ray analysis device, x-ray analysis method, information processing device, and computer program

Abstract

Provided are an X-ray analysis device for individually measuring the amounts of elements contained in a layer on the obverse-surface side and a layer on the reverse-surface side of a multilayer sample, an X-ray analysis method, an information processing device, and a computer program.　The X-ray analysis device comprises: an irradiation unit that irradiates, with X-rays, a sample that includes a first layer, a second layer, and an intermediate layer; an X-ray detector that detects X-rays generated from the sample; and an analysis unit. The X-ray detector detects a first X-ray that has a first energy and is transmitted through the intermediate layer, and a second X-ray that is a fluorescent X-ray and has a second energy lower than the first energy. The analysis unit calculates the total amount of a specific element contained in the first layer and the second layer according to the intensity of the first X-ray, calculates the amount of the specific element contained in the first layer on the basis of the relationship among the amount of the specific element contained in the first layer, the intensity of the second X-ray, and the intensity of the first X-ray or the total amount of the specific element, and calculates the amount of the specific element contained in the second layer according to the amount of the specific element contained in the first layer.

Description

X-ray Analysis Device, X-ray Analysis Method, Information Processing Device, and Computer Program 【0001】 The present invention relates to an X-ray analysis device, an X-ray analysis method, an information processing device, and a computer program. 【0002】 There are cases where it is desired to analyze the layer on the front surface side and the layer on the back surface side of a multilayer sample. For example, a fuel cell includes a multilayer film in which catalyst layers are joined to both surfaces of an electrolyte layer made of a polymer film, and there are cases where it is desired to measure the amount of a specific element contained in each catalyst layer. As a method for analyzing a multilayer sample, there is a method in which X-rays are irradiated onto the multilayer sample, fluorescent X-rays generated from each layer are detected, and analysis is performed based on the fluorescent X-rays. There is also a method in which transmitted X-rays that have passed through the multilayer sample are detected, and analysis is performed based on the transmitted X-rays. Patent Document 1 discloses a technique for analyzing a multilayer sample using fluorescent X-rays and transmitted X-rays. 【0003】 International Publication No. 2024 / 005006 【0004】 When the energy of the fluorescent X-rays is high, the fluorescent X-rays are likely to pass through the sample, and both the fluorescent X-rays generated from the layer on the front surface side and the fluorescent X-rays generated from the layer on the back surface side are detected. In addition, fluorescent X-rays may be generated in the layer on the front surface side by the fluorescent X-rays generated from the layer on the back surface side and may be detected together with the fluorescent X-rays generated by X-ray irradiation. Thus, the detected fluorescent X-rays are affected by multiple layers, and it is not easy to individually analyze the layer on the front surface side and the layer on the back surface side based on the detection results of the fluorescent X-rays. 【0005】 An object of the present invention is to provide an X-ray analysis device, an X-ray analysis method, an information processing device, and a computer program for individually measuring the amounts of elements contained in the layer on the front surface side and the layer on the back surface side of a multilayer sample. 【0006】An X-ray analyzer according to one embodiment of the present invention comprises an irradiation unit that irradiates a sample having a plurality of stacked layers, comprising a first layer, a second layer, and an intermediate layer located between the first and second layers, with X-rays that penetrate the first layer, the intermediate layer, and the second layer; an X-ray detector that detects X-rays generated from the sample in response to the X-ray irradiation; and an analysis unit, wherein the X-ray detector detects a first X-ray having a predetermined first energy that penetrates the intermediate layer and a second X-ray which is a fluorescent X-ray having a predetermined second energy lower than the first energy; the analysis unit calculates the total amount of a specific element contained in the first and second layers according to the intensity of the first X-ray, calculates the amount of the specific element contained in the first layer based on the relationship between the amount of the specific element contained in the first layer, the intensity of the second X-ray, and the intensity of the first X-ray or the total amount, and calculates the amount of the specific element contained in the second layer according to the amount of the specific element contained in the first layer. 【0007】 In one embodiment of the present invention, an X-ray analyzer irradiates a sample including a first layer, a second layer, and an intermediate layer with X-rays and detects the X-rays generated from the sample. The X-rays detected by the X-ray analyzer are first X-rays having a first energy and penetrating the intermediate layer, and second X-rays which are fluorescent X-rays having a predetermined second energy lower than the first energy. The intensity of the first X-rays is a value corresponding to the total amount of elements contained in the first and second layers, so the total amount of specific elements contained in the first and second layers is calculated according to the intensity of the first X-rays. The detected second X-rays include fluorescent X-rays generated in the first layer due to fluorescent X-rays from the second layer. Based on the relationship between the amount of specific elements contained in the first layer, the intensity of the second X-rays, and the total amount of specific elements contained in the first and second layers or the intensity of the first X-rays, the amount of specific elements contained in the first layer can be calculated from the detected intensity of the second X-rays. The total amount of a specific element contained in the first and second layers, and the amount of a specific element contained in the second layer, can be calculated based on the amount of that specific element contained in the first layer. 【0008】An X-ray analyzer according to one embodiment of the present invention is characterized in that the analysis unit calculates the amount of the specific element contained in the first layer based on a calibration curve or function that represents the relationship between the amount of the specific element contained in the first layer, the intensity of the second X-ray, and the intensity of the first X-ray or the total amount. 【0009】 In one embodiment of the present invention, the X-ray analyzer calculates the amount of a specific element based on a calibration curve or function that represents the relationship between the amount of a specific element contained in the first layer and the total amount of the specific element contained in the first and second layers or the intensity of the first X-ray. By using a calibration curve or function predetermined by experiment, the X-ray analyzer can easily calculate the amount of a specific element contained in each layer of the sample. 【0010】 An X-ray analyzer according to one embodiment of the present invention is characterized in that the first X-ray is a fluorescent X-ray, which is the L-ray of the specific element, and the second X-ray is the M-ray of the specific element. 【0011】 In one embodiment of the present invention, the first X-ray is the L-ray of a specific element contained in fluorescent X-rays, and the second X-ray is the M-ray of a specific element. The intensity of the L-ray and M-ray of the specific element are values ​​corresponding to the amount of the specific element contained in sample 3. The X-ray analyzer can calculate the amount of the specific element by utilizing the intensity of the L-ray and M-ray of the specific element. 【0012】 An X-ray analyzer according to one embodiment of the present invention is characterized in that the first X-ray is transmitted X-ray obtained when X-rays irradiated from the irradiation unit pass through the sample, the first energy corresponds to the L absorption edge of the specific element, and the second X-ray is the M line of the specific element. 【0013】In one embodiment of the present invention, the first X-ray is a transmitted X-ray that has passed through the sample, and is a transmitted X-ray at the L absorption edge of a specific element, and the second X-ray is an M-ray of a specific element. The intensity of the transmitted X-ray at the L absorption edge of a specific element and the intensity of the M-ray of a specific element are values ​​corresponding to the amount of the specific element contained in the sample 3. The X-ray analyzer can calculate the amount of the specific element by utilizing the intensity of the transmitted X-ray at the L absorption edge of a specific element and the intensity of the M-ray of a specific element. 【0014】 An X-ray analyzer according to one embodiment of the present invention is characterized in that the sample is in the form of a sheet, the apparatus further comprises a transport unit that transports the sample in a direction along the surface of the sample, and the irradiation unit irradiates the sample with X-rays while it is being transported. 【0015】 In one embodiment of the present invention, the sample is in the form of a sheet, and the X-ray analyzer irradiates the sample with X-rays while transporting it, and measures the amount of a specific element contained in the sample. This allows the X-ray analyzer to continuously analyze the amount of a specific element contained in the first layer and the second layer at multiple locations in the sample. 【0016】 An X-ray analysis method according to one embodiment of the present invention is characterized by irradiating a sample having a plurality of stacked layers, comprising a first layer, a second layer, and an intermediate layer located between the first and second layers, with X-rays transmitted through the first layer, the intermediate layer, and the second layer; detecting a first X-ray generated from the sample in response to the X-ray irradiation, having a predetermined first energy, and transmitting through the intermediate layer; detecting a second X-ray, which is a fluorescent X-ray generated from the sample in response to the X-ray irradiation, having a predetermined second energy lower than the first energy; calculating the total amount of a specific element contained in the first and second layers according to the intensity of the first X-ray; calculating the amount of the specific element contained in the first layer based on the relationship between the amount of the specific element contained in the first layer, the intensity of the second X-ray, and the intensity of the first X-ray or the total amount; and calculating the amount of the specific element contained in the second layer according to the amount of the specific element contained in the first layer. 【0017】In one embodiment of the present invention, a sample including a first layer, a second layer, and an intermediate layer is irradiated with X-rays, and a first X-ray having a first energy and passing through the intermediate layer is detected, and a second X-ray, which is a fluorescent X-ray and has a predetermined second energy lower than the first energy, is detected. The total amount of a specific element contained in the first and second layers is calculated according to the intensity of the first X-ray. The detected second X-ray includes fluorescent X-rays generated in the first layer due to fluorescent X-rays from the second layer. Based on the relationship between the amount of a specific element contained in the first layer, the intensity of the second X-ray, and the total amount of the specific element contained in the first and second layers or the intensity of the first X-ray, the amount of a specific element contained in the first layer is calculated from the intensity of the detected second X-ray. The amount of a specific element contained in the second layer is calculated according to the total amount of the specific element contained in the first and second layers and the amount of the specific element contained in the first layer. 【0018】 An information processing device according to one embodiment of the present invention comprises a calculation unit, the calculation unit obtains the result of detecting X-rays generated from a sample in which a plurality of layers are stacked, comprising a first layer, a second layer, and an intermediate layer located between the first and second layers, when X-rays are irradiated so as to penetrate the first layer, the intermediate layer, and the second layer, the total amount of a specific element contained in the first layer and the second layer according to the intensity of a first X-ray contained in the detected X-rays that has a predetermined first energy and penetrates the intermediate layer, the amount of the specific element contained in the first layer is calculated based on the relationship between the amount of the specific element contained in the first layer, the intensity of a second X-ray contained in the detected X-rays that has a predetermined second energy lower than the first energy, and the intensity of the first X-ray or the total amount, and the amount of the specific element contained in the second layer according to the amount of the specific element contained in the first layer. 【0019】A computer program according to one embodiment of the present invention is characterized in that it causes a computer to perform the following processes: irradiate a sample having a plurality of stacked layers, including a first layer, a second layer, and an intermediate layer located between the first and second layers, with X-rays transmitted through the first layer, the intermediate layer, and the second layer; obtain the result of detecting the X-rays generated from the sample; calculate the total amount of a specific element contained in the first and second layers according to the intensity of a first X-ray contained in the detected X-rays that has a predetermined first energy and transmits through the intermediate layer; calculate the amount of the specific element contained in the first layer based on the relationship between the amount of the specific element contained in the first layer, the intensity of a second X-ray contained in the detected X-rays that has a predetermined second energy lower than the first energy, and the intensity of the first X-ray or the total amount; and calculate the amount of the specific element contained in the second layer according to the amount of the specific element contained in the first layer. 【0020】 In one embodiment of the present invention, a sample including a first layer, a second layer, and an intermediate layer is irradiated with X-rays, and the detection result of the X-rays generated from the sample is obtained. More specifically, the detection results of a first X-ray having a first energy and penetrating the intermediate layer, and a second X-ray having a predetermined second energy lower than the first energy are obtained. The total amount of a specific element contained in the first and second layers is calculated according to the intensity of the first X-ray. The detected second X-ray includes fluorescent X-rays generated in the first layer due to fluorescent X-rays from the second layer. Based on the relationship between the amount of a specific element contained in the first layer, the intensity of the second X-ray, and the total amount of the specific element contained in the first and second layers or the intensity of the first X-ray, the amount of a specific element contained in the first layer is calculated from the intensity of the detected second X-ray. The amount of a specific element contained in the second layer is calculated according to the total amount of the specific element contained in the first and second layers and the amount of the specific element contained in the first layer. 【0021】 The present invention offers excellent advantages, such as the ability to individually measure the amount of elements contained in the layers on the front and back sides of a multilayer sample. 【0022】This is a block diagram showing an example of the functional configuration of an X-ray analyzer according to Embodiment 1. This is a block diagram showing an example of the internal configuration of the analysis unit according to Embodiment 1. This is a schematic cross-sectional view of a sample. This is a schematic graph showing an example of a first calibration curve. This is a schematic graph showing an example of a second calibration curve. This is a flowchart showing an example of the processing procedure performed by the X-ray analyzer. This is a block diagram showing an example of the functional configuration of an X-ray analyzer according to Embodiment 2. This is a block diagram showing an example of the internal configuration of the analysis unit according to Embodiment 2. 【0023】 The present invention will be described in detail below based on the drawings illustrating its embodiments. <Embodiment 1> Figure 1 is a block diagram showing an example of the functional configuration of an X-ray analyzer 100 according to Embodiment 1. The X-ray analyzer 100 includes an irradiation unit 22 that irradiates a sample 3 with X-rays and an X-ray detector 23 that detects fluorescent X-rays generated from the irradiated sample 3. The sample 3 is a multilayer sample comprising a plurality of stacked layers, and includes at least three layers. The X-ray analyzer 100 performs an X-ray analysis method to measure the amount of a specific element contained in the first layer on the surface side and the second layer on the back side of the sample 3. The sample 3 is also in the form of a long sheet. The sample 3 is placed between a plurality of rollers 26 and transported in a direction along the surface of the sample 3 by the rotation of the rollers 26. In Figure 1, the direction in which the sample 3 is transported is indicated by a white arrow. The rollers 26 are transport units that transport the sample 3. The transport units may include components other than the rollers 26. 【0024】The irradiation unit 22 generates X-rays and irradiates the sample 3 during transport with X-rays. The irradiation unit 22 is configured, for example, using an X-ray tube. The X-rays irradiated by the irradiation unit 22 onto the sample 3 pass through the sample 3. The X-ray detector 23 has a radiation detection element made of semiconductors. For example, the X-ray detector 23 is an SDD (Silicon Drift Detector). The X-ray detector 23 is positioned facing the surface of the sample 3. When X-rays are irradiated onto the sample 3 from the irradiation unit 22, fluorescent X-rays are generated in the sample 3. The fluorescent X-rays are emitted from the surface of the sample 3 and incident on the X-ray detector 23. In Figure 1, the X-rays and fluorescent X-rays irradiated onto the sample 3 are indicated by arrows. The X-ray detector 23 detects the incident fluorescent X-rays and outputs a signal of intensity corresponding to the energy of the fluorescent X-rays. 【0025】 A signal processing unit 24 is connected to the X-ray detector 23. The signal processing unit 24 is connected to the analysis unit 1. The analysis unit 1 is configured using a computer. A display unit 25, such as a liquid crystal display or an EL display (Electroluminescent Display), is connected to the analysis unit 1. The irradiation unit 22, the signal processing unit 24, and the analysis unit 1 are connected to the control unit 21. The control unit 21 controls the operation of the irradiation unit 22, the signal processing unit 24, and the analysis unit 1. The control unit 21 may also control the operation of the roller 26. The control unit 21 is configured using a computer that includes a calculation unit that performs calculations to control each unit. The control unit 21 may be configured to receive user input and control each unit of the X-ray analyzer 100 according to the received input. 【0026】 The X-ray detector 23 outputs a signal of intensity corresponding to the energy of the detected fluorescent X-rays, and the signal processing unit 24 receives the signal output by the X-ray detector 23. The signal processing unit 24 detects the signal value corresponding to the energy of the fluorescent X-rays detected by the X-ray detector 23 by detecting the intensity of the received signal. The signal processing unit 24 counts the signals for each signal value and outputs data showing the relationship between the signal value and the count to the analysis unit 1. 【0027】The analysis unit 1 receives data showing the relationship between the signal value output by the signal processing unit 24 and the count. Based on the data from the signal processing unit 24, the analysis unit 1 generates a spectrum of fluorescent X-rays detected by the X-ray detector 23. The signal value corresponds to the energy of the fluorescent X-rays, and the count corresponds to the number of times the fluorescent X-rays were detected, i.e., the intensity of the fluorescent X-rays. Therefore, from the relationship between the signal value and the count, a spectrum of fluorescent X-rays showing the relationship between the energy and intensity of the fluorescent X-rays can be obtained. 【0028】 The process of counting the signals output by the X-ray detector 23 by signal value may be performed by the analysis unit 1 instead of the signal processing unit 24. The generation of the fluorescent X-ray spectrum may be performed by the signal processing unit 24. The analysis unit 1 stores data representing the fluorescent X-ray spectrum. The display unit 25 displays the fluorescent X-ray spectrum. The user can confirm the fluorescent X-ray spectrum from the sample 3. The analysis unit 1 also performs information processing based on the fluorescent X-ray spectrum. More specifically, the analysis unit 1 performs information processing to measure the amount of specific elements contained in the first and second layers of the sample 3. The analysis unit 1 corresponds to an information processing device that performs information processing for measuring the amount of specific elements. 【0029】 Figure 2 is a block diagram showing an example of the internal configuration of the analysis unit 1 according to Embodiment 1. The analysis unit 1 is configured using a computer such as a personal computer. The analysis unit 1 comprises a calculation unit 11, a memory 12, a reading unit 13, a storage unit 14, and an operation unit 15. The calculation unit 11 is a processor and is configured using, for example, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or a multi-core CPU. The calculation unit 11 may also be configured using a quantum computer. The memory 12 stores temporary data generated in connection with calculations. The memory 12 is, for example, RAM (Random Access Memory). 【0030】The reading unit 13 reads information from the recording medium 10, such as an optical disc or portable memory. The storage unit 14 is non-volatile, for example, a hard disk or non-volatile semiconductor memory. The operation unit 15 receives input of information such as text by receiving operations from the user. The operation unit 15 is for example a touch panel, keyboard, or pointing device. The user inputs various instructions to the analysis unit 1 by operating the operation unit 15. The analysis unit 1 receives the instructions input using the operation unit 15. 【0031】 The arithmetic unit 11 causes the reading unit 13 to read the computer program (program product) 141 recorded on the recording medium 10, and stores the read computer program 141 in the storage unit 14. The arithmetic unit 11 executes the necessary processing in the analysis unit 1 according to the computer program 141. Alternatively, the computer program 141 may be stored in the storage unit 14 in advance, or downloaded from outside the analysis unit 1. In this case, the analysis unit 1 does not need to have a reading unit 13. 【0032】 The computer program 141 can be deployed on a single computer, at a single site, or distributed across multiple sites and run on multiple computers interconnected by a communication network. That is, the computer program 141 may run on multiple computers connected via a communication network, and the analysis unit 1 may consist of multiple computers connected to each other via a communication network. The analysis unit 1 may also be configured using a cloud server. 【0033】The processing steps described below for executing the information processing method can be performed on multiple computers. The processing steps can also be performed on different computers. The data used during processing may be stored on multiple computers. The processing steps can also be performed using a virtual machine. The processing steps may be performed by multiple arithmetic units. The processing steps may also be performed by different arithmetic units. For example, part of the processing may be performed on one computer, and other parts on other computers. 【0034】 The analysis unit 1 is connected to a display unit 25, a signal processing unit 24, and a control unit 21. The display unit 25 displays an image. The analysis unit 1 outputs information necessary for information processing by displaying an image containing information on the display unit 25. The analysis unit 1 receives signals from the signal processing unit 24 and receives control signals from the control unit 21. Note that the analysis unit 1 and the control unit 21 may be configured as the same computer. 【0035】 Figure 3 is a schematic cross-sectional view of sample 3. Sample 3 is in the form of a sheet. Sample 3 is arranged so that X-rays from the irradiation unit 22 are irradiated onto one surface. In Figure 3, the X-rays irradiated from the irradiation unit 22 are indicated by solid arrows. The surface irradiated by X-rays from the irradiation unit 22 is considered the front surface of sample 3, and the surface located behind the front surface is considered the back surface of sample 3. Sample 3 includes a first layer 31 including the front surface, a second layer 32 including the back surface, and an intermediate layer 33 located between the first layer 31 and the second layer 32. The first layer 31, the second layer 32, and the intermediate layer 33 are laminated. The intermediate layer 33 may be composed of multiple laminated layers. Note that the first layer 31 does not necessarily include the front surface, but is sufficient to be on the front side of the intermediate layer 33. Similarly, the second layer 32 does not necessarily include the back surface, but is sufficient to be on the back side of the intermediate layer 33. For example, the first layer 31 or the second layer 32 may be coated, and a film may be attached to the front or back surface of the sample 3. 【0036】In this embodiment, the intermediate layer 33 is a polymer film, and the first layer 31 and the second layer 32 are catalyst layers containing platinum. Sample 3 is incorporated into a fuel cell, where the intermediate layer 33 functions as an electrolyte membrane, and the platinum contained in the first layer 31 and the second layer 32 can function as a catalyst. For example, the thickness of each of the first layer 31, the second layer 32, and the intermediate layer 33 is several tens to several hundred micrometers. The platinum contained in the first layer 31 and the second layer 32 corresponds to a specific element. The X-ray analyzer 100 performs a process to individually measure the amount of platinum contained in the first layer 31 and the second layer 32. 【0037】 As shown in Figure 3, X-rays are irradiated from the irradiation unit 22 onto the sample 3 in the order of the first layer 31, the intermediate layer 33, and the second layer 32. Fluorescent X-rays are generated from the irradiated first layer 31 and second layer 32. Here, we focus on two types of fluorescent X-rays with different energies. One of the fluorescent X-rays is a first X-ray having a predetermined first energy. This first energy is sufficiently high for the first X-ray to penetrate the intermediate layer 33, and the first X-ray penetrates the intermediate layer 33. The first X-ray also penetrates the sample 3. Specifically, the first X-ray is a platinum L-ray, and its first energy is approximately 10 keV. 【0038】 The other fluorescent X-ray is a second X-ray having a predetermined second energy lower than the first energy. The second energy is not high enough for the second X-ray to penetrate the intermediate layer 33. The second X-ray does not penetrate the intermediate layer 33. Specifically, the second X-ray is the platinum M-ray, and its second energy is approximately 2 keV. 【0039】 In Figure 3, platinum L-lines are shown by dashed arrows, and platinum M-lines are shown by dashed lines. Platinum L-lines and M-lines are generated from the first layer 31 when irradiated with X-rays, and both are detected by the X-ray detector 23. Platinum L-lines and M-lines are also generated in the second layer 32 when irradiated with X-rays. The platinum L-lines generated from the second layer 32 pass through the intermediate layer 33 and the first layer 31 and are detected by the X-ray detector 23. The intensity of the platinum L-lines detected by the X-ray detector 23 is expressed by the following equation (1): (Intensity of detected L-lines) = (Intensity of L-lines generated in the first layer 31) + (Intensity of L-lines generated in the second layer 32) × transmittance …(1) 【0040】 (1) The transmittance included in equation (1) is the ratio of platinum L-rays from the second layer 32 that pass through the intermediate layer 33 and the first layer 31, and is approximately 1. The intensity of the platinum L-rays generated in the first layer 31 is a value corresponding to the amount of platinum contained in the first layer 31. The intensity of the platinum L-rays generated in the second layer 32 is a value corresponding to the amount of platinum contained in the second layer 32. Therefore, the intensity of the detected platinum L-rays is a value corresponding to the total amount of platinum contained in the first layer 31 and the second layer 32. 【0041】 As shown in Figure 3, the platinum M-rays generated from the second layer 32 do not pass through the intermediate layer 33 and are not detected by the X-ray detector 23. Furthermore, some of the platinum L-rays generated from the second layer 32 generate fluorescent X-rays with lower energy than the first energy in the first layer 31. Specifically, the platinum L-rays generated from the second layer 32 generate platinum M-rays from the first layer 31, and these generated platinum M-rays are detected by the X-ray detector 23. Therefore, the intensity of the platinum M-rays detected by the X-ray detector 23 is expressed by the following equation (2): (Intensity of detected M-rays) = (Intensity of M-rays generated in the first layer 31) + (Intensity of M-rays generated in the second layer 32) × transmittance + (Intensity of M-rays generated in the first layer 31 due to L-rays from the second layer 32) ... (2) 【0042】 (2) The transmittance included in equation (2) is the proportion of platinum M-lines from the second layer 32 that pass through the intermediate layer 33 and the first layer 31, and is approximately zero. The intensity of platinum M-lines generated in the first layer 31 is a value corresponding to the amount of platinum contained in the first layer 31. The intensity of platinum M-lines generated in the first layer 31 due to platinum L-lines from the second layer 32 is a value corresponding to the amount of platinum contained in the second layer 32 and the amount of platinum contained in the first layer 31. Therefore, the intensity of the detected platinum M-lines is a value corresponding to the amount of platinum contained in the second layer 32 and the amount of platinum contained in the first layer 31. 【0043】In this embodiment, the amounts of platinum contained in the first layer 31 and the second layer 32 are individually calculated using a calibration curve. FIG. 4 is a schematic graph showing an example of a first calibration curve. The horizontal axis in FIG. 4 indicates the total amount of platinum contained in the first layer 31 and the second layer 32, and the vertical axis indicates the intensity of the L line of platinum detected. For example, the unit of the amount of platinum is the mass of platinum contained per unit area of the sample 3. The amount of platinum may be represented by the mass per unit volume, the density, or the film thickness of the first layer 31 or the second layer 32. For example, the unit of the intensity of the L line of platinum is the number of counts per unit time. The unit of the intensity of the L line of platinum may be other units. The intensity of the L line of platinum can be obtained from the spectrum of the fluorescent X-ray. The first calibration curve represents the relationship between the total amount of platinum contained in the first layer 31 and the second layer 32 and the intensity of the L line of platinum detected. 【0044】 The first calibration curve is created using a standard sample in which the amounts of platinum contained in the first layer 31 and the second layer 32 are known. The standard sample is irradiated with X-rays from the irradiation unit 22, the fluorescent X-rays generated from the standard sample are detected by the X-ray detector 23, a spectrum of the fluorescent X-rays is generated, and the intensity of the L line of platinum is obtained. An experiment is conducted to obtain the intensity of the L line of platinum for each of a plurality of standard samples having different total amounts of platinum contained in the first layer 31 and the second layer 32. The intensity of the L line of platinum obtained in the experiment is taken as the experimental value of the L line. In FIG. 4, the experimental values corresponding to the total amount of platinum are shown as white circles. Based on the plurality of experimental values, a first calibration curve is created by creating an approximate formula that approximates the relationship between the total amount of platinum and the experimental values. The approximate formula is a straight line. In FIG. 4, the first calibration curve is shown as a solid line. 【0045】 FIG. 5 is a schematic graph showing an example of a second calibration curve. The horizontal axis in FIG. 5 indicates the total amount of platinum contained in the first layer 31 and the second layer 32, and the vertical axis indicates the intensity of the M line of platinum detected. For example, the unit of the intensity of the M line of platinum is the number of counts per unit time. The intensity of the M line of platinum can be obtained from the spectrum of the fluorescent X-ray. 【0046】As shown in FIG. 5, there are a plurality of second calibration curves. The second calibration curve represents the relationship between the total amount of platinum contained in the first layer 31 and the second layer 32 with the amount of platinum in the first layer 31 being constant and the intensity of the M line of the detected platinum. Experiments are conducted using a plurality of standard samples in which the amount of platinum contained in the first layer 31 is different from the amount of platinum contained in the second layer 32, and the intensity of the M line of platinum is obtained for each of them. The intensity of the M line of platinum obtained in the experiment is taken as the experimental value of the M line. FIG. 5 shows the experimental values corresponding to the total amount of platinum. 【0047】 In FIG. 5, a plurality of experimental values with the same amount of platinum contained in the first layer 31 are indicated by the same mark. That is, the plurality of experimental values indicated by white circles are obtained from a plurality of standard samples with the same amount of platinum contained in the first layer 31. The same applies to the plurality of experimental values indicated by black circles, triangular marks, and diamond marks. The experimental values with different marks have different amounts of platinum contained in the first layer 31. That is, the experimental values indicated by white circles, black circles, triangular marks, and diamond marks have different amounts of platinum contained in the first layer 31. 【0048】 Based on a plurality of experimental values with the same amount of platinum contained in the first layer 31, one second calibration curve is created by creating an approximate formula that approximates the relationship between the total amount of platinum and the experimental value. By similarly creating an approximate formula for each amount of platinum contained in the first layer 31, a plurality of second calibration curves are created. Each approximate formula is a straight line. In FIG. 5, each second calibration curve is indicated by a solid line. The calibration curve data representing the first calibration curve and the plurality of second calibration curves is stored in the storage unit 14. In the calibration curve data, the amount of platinum contained in the first layer 31 is associated with each second calibration curve. 【0049】 Note that a plurality of second calibration curves may be created that represent the relationship between the total amount of platinum contained in the first layer 31 and the second layer 32 with the amount of platinum contained in the second layer 32 being constant and the intensity of the M line of the detected platinum, and calibration curve data representing such a plurality of second calibration curves may be stored. Alternatively, a plurality of second calibration curves may be created that represent the relationship between the intensity of the L line and the intensity of the M line of platinum detected with the amount of platinum contained in the first layer 31 or the second layer 32 being constant, and calibration curve data representing such a plurality of second calibration curves may be stored. 【0050】 Figure 6 is a flowchart showing an example of the procedure performed by the X-ray analyzer 100. Hereinafter, steps will be abbreviated as S. The analysis unit 1 performs processing by having the calculation unit 11 perform information processing according to the computer program 141. The roller 26 transports the sample 3, and the irradiation unit 22 generates X-rays and irradiates the sample 3 with X-rays (S1). In S1, the control unit 21 generates X-rays in the irradiation unit 22. The sample 3 is arranged so that X-rays can pass through in the order of the first layer 31, the intermediate layer 33, and the second layer 32, and is transported by the roller 26. Fluorescent X-rays are generated from the sample 3 by the X-ray irradiation. The X-ray detector 23 detects the X-rays (S2). In S2, the X-ray detector 23 detects the fluorescent X-rays generated from the sample 3. At this time, the X-ray detector 23 detects the L-rays and M-rays contained in the fluorescent X-rays. 【0051】 The X-ray detector 23 outputs a signal with an intensity corresponding to the energy of the fluorescent X-rays to the signal processing unit 24. The signal processing unit 24 counts the signals according to their respective signal values ​​and outputs data showing the relationship between the signal value and the count to the analysis unit 1. The analysis unit 1 receives the data from the signal processing unit 24 and obtains the X-ray detection result (S3). In S3, the analysis unit 1 obtains the detection result of the fluorescent X-rays generated from the sample 3. The calculation unit 11 generates the fluorescence X-ray spectrum and stores the spectrum data in the storage unit 14. 【0052】The analysis unit 1 calculates the total amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3 based on the fluorescence X-ray spectrum (S4). In S4, the calculation unit 11 obtains the intensity of the platinum L-line peak contained in the fluorescence X-ray spectrum and uses the obtained peak intensity as the platinum L-line intensity. The calculation unit 11 may also obtain the platinum L-line intensity by integrating a predetermined range in the fluorescence X-ray spectrum that includes the platinum L-line peak. Based on the first calibration curve, the calculation unit 11 calculates the total amount of platinum contained in the first layer 31 and the second layer 32 according to the platinum L-line intensity. More specifically, the calculation unit 11 refers to the first calibration curve represented by the calibration curve data stored in the storage unit 14 and identifies the total amount of platinum corresponding to the platinum L-line intensity on the first calibration curve. In this way, the calculation unit 11 calculates the total amount of platinum contained in the first layer 31 and the second layer 32. 【0053】 Next, the analysis unit 1 calculates the amount of platinum contained in the first layer 31 of the sample 3 (S5). In S5, the calculation unit 11 obtains the intensity of the platinum M-line peak contained in the fluorescence X-ray spectrum and uses the obtained peak intensity as the platinum M-line intensity. From among a plurality of second calibration curves represented by the calibration curve data, the calculation unit 11 selects a second calibration curve in which the total amount of platinum contained in the first layer 31 and the second layer 32 calculated in S4 corresponds to the platinum M-line intensity. For example, the calculation unit 11 identifies the platinum M-line intensity corresponding to the total amount of platinum on each second calibration curve and selects the second calibration curve in which the identified platinum M-line intensity is closest to the platinum M-line intensity obtained from the spectrum. The calculation unit 11 uses the amount of platinum associated with the selected second calibration curve as the amount of platinum contained in the first layer 31. 【0054】 The analysis unit 1 calculates the amount of platinum contained in the second layer 32 (S6). In S6, the calculation unit 11 calculates the amount of platinum contained in the second layer 32 by subtracting the amount of platinum contained in the first layer 31 from the sum of the amounts of platinum contained in the first layer 31 and the second layer 32. The calculation unit 11 stores the calculated amounts of platinum contained in the first layer 31 and the second layer 32 in the storage unit 14. The calculation unit 11 may also display the calculated amounts of platinum on the display unit 25. After S6 is completed, the analysis unit 1 terminates processing, and the X-ray analyzer 100 terminates processing. 【0055】 Through the processes S1 to S6 described above, the X-ray analyzer 100 measures the amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3. The X-ray analyzer 100 continues to transport the sample 3 by the roller 26 and repeats the processes S1 to S6. As a result, the amount of platinum contained in the first layer 31 and the second layer 32 at multiple locations in the sample 3 is continuously analyzed, and the distribution of the platinum catalyst within the sample 3 is analyzed. 【0056】 As described in detail above, the X-ray analyzer 100 irradiates the sample 3, which includes the first layer 31, the second layer 32, and the intermediate layer 33, with X-rays and detects the fluorescent X-rays generated from the sample 3. The fluorescent X-rays detected by the X-ray analyzer 100 are platinum L-rays that pass through the intermediate layer 33 and platinum M-rays that do not pass through the intermediate layer 33. The intensity of the platinum L-rays that pass through the intermediate layer 33 is a value corresponding to the total amount of platinum contained in the first layer 31 and the second layer 32, so the total amount of platinum is calculated according to the intensity of the platinum L-rays. 【0057】 The detected platinum M-wires do not include M-wires from the second layer 32, but they do include M-wires generated in the first layer 31 due to platinum L-wires from the second layer 32. Therefore, the intensity of the detected platinum M-wires is a value corresponding to the amount of platinum contained in the first layer 31 and the total amount of platinum contained in the first layer 31 and the second layer 32, or the intensity of the platinum L-wires. By pre-determining the relationship between the amount of platinum contained in the first layer 31, the intensity of the platinum M-wires, and the total amount of platinum contained in the first layer 31 and the second layer 32, or the intensity of the platinum L-wires, the amount of platinum contained in the first layer 31 can be calculated from the intensity of the detected platinum M-wires based on this relationship. The amount of platinum contained in the second layer 32 can be calculated according to the total amount of platinum contained in the first layer 31 and the second layer 32, and the amount of platinum contained in the first layer 31. 【0058】As described above, the X-ray analyzer 100 can individually measure the amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3. That is, the X-ray analyzer 100 can use the fluorescent X emitted from the multilayer sample (sample 3) to individually measure the amount of specific elements contained in the layer on the surface side (first layer 31) and the layer on the back side (second layer 32) of the multilayer sample. For example, sample 3 can be incorporated into a fuel cell, with the intermediate layer 33 functioning as an electrolyte membrane and the first layer 31 and second layer 32 functioning as catalyst layers. The X-ray analyzer 100 can individually measure the amount of platinum contained in each catalyst layer. Based on the measured amount of platinum, the performance of the fuel cell can be estimated. 【0059】 Embodiment 1 shows an example of calculating the amount of platinum contained in sample 3 using a calibration curve, but the X-ray analyzer 100 may also calculate the amount of platinum using a method other than the calibration curve method. For example, the analysis unit 1 may calculate the amount of platinum contained in the first layer 31 of sample 3 based on a function that represents the relationship between the amount of platinum contained in the first layer 31 of sample 3, the intensity of the platinum M line, and the intensity of the platinum L line. For example, the function is expressed by the following equation (3): (Amount of platinum contained in the first layer 31) = a (Intensity of the platinum L line) + b (Intensity of the platinum M line) + c ... (3) 【0060】 (3) Equation a, b, and c are coefficients. Experiments are conducted using multiple standard samples with different amounts of platinum in the first layer 31 and the second layer 32 to obtain the intensities of the platinum L-line and M-line for each. Based on the experimental results, an approximate formula of (3) is calculated and the coefficients are determined to create a function. The function may be a function other than a linear function. The data representing the function is stored in the storage unit 14. In addition, a function representing the relationship between the total amount of platinum in the first layer 31 and the second layer 32 and the intensity of the platinum L-line may be created through experiments. The total amount of platinum can be expressed as a linear function of the intensity of the platinum L-line. 【0061】In S4, the analysis unit 1 calculates the total amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3 based on the first calibration curve, or calculates the total amount of platinum based on a function that represents the relationship between the total amount of platinum and the intensity of the platinum L line. In S5, the analysis unit 1 calculates the amount of platinum contained in the first layer 31 based on the function represented by equation (3). Equation (3) is just one example of a function, and other functions may be used. For example, a function with other terms added to equation (3) may be used, or a function that includes (total amount of platinum contained in the first layer 31 and the second layer 32) instead of (intensity of the platinum L line) in equation (3) may be used. 【0062】 The analysis unit 1 may calculate the amount of platinum contained in the sample 3 based on a table. For example, the storage unit 14 stores a table that associates the intensity of the platinum L-lines with the total amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3. In S4, the analysis unit 1 calculates the total amount of platinum by reading the total amount of platinum associated with the intensity of the platinum L-lines from the table. The analysis unit 1 may also calculate the total amount of platinum corresponding to the intensity of the platinum L-lines by interpolating the total amount of platinum recorded in the table. 【0063】 For example, the memory unit 14 stores a table that associates the amount of platinum contained in the first layer 31, the strength of the platinum M-wires, and the total amount of platinum contained in the first layer 31 and the second layer 32 or the strength of the platinum L-wires. In S5, the analysis unit 1 calculates the amount of platinum contained in the first layer 31 by reading the amount of platinum contained in the first layer 31 associated with the strength of the platinum M-wires and the total amount of platinum or the strength of the platinum L-wires from the table. The analysis unit 1 may also calculate the amount of platinum contained in the first layer 31 according to the strength of the platinum M-wires by supplementing the amount of platinum contained in the first layer 31 recorded in the table. 【0064】In Embodiment 1, the X-rays were irradiated from the irradiation unit 22 to the sample 3 in the order of the first layer 31, the intermediate layer 33, and the second layer 32. Alternatively, the X-ray analyzer 100 may irradiate the sample 3 from the irradiation unit 22 in the order of the second layer 32, the intermediate layer 33, and the first layer 31. In this configuration as well, the X-ray analyzer 100 can detect the platinum L-rays and the platinum M-rays generated from the first layer 31, and by similar processing, the amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3 can be measured. 【0065】 In Embodiment 1, an example was shown in which the first X-ray was a platinum L-ray and the second X-ray was a platinum M-ray, but the first and second X-rays may be other fluorescent X-rays. The first X-ray may be any fluorescent X-ray that can penetrate the intermediate layer 33. A fluorescent X-ray that can penetrate the intermediate layer 33 is a fluorescent X-ray whose transmittance of the intermediate layer 33 exceeds a predetermined threshold. The second X-ray may be any fluorescent X-ray that does not penetrate the intermediate layer 33. A fluorescent X-ray that does not penetrate the intermediate layer 33 is a fluorescent X-ray whose transmittance of the intermediate layer 33 is below a predetermined threshold. 【0066】 <Embodiment 2> Figure 7 is a block diagram showing an example of the functional configuration of an X-ray analyzer 100 according to Embodiment 2. The X-ray analyzer 100 includes a fluorescent X-ray detector 231 that detects fluorescent X-rays generated from a sample 3 irradiated with X-rays, a first signal processing unit 241, a transmitted X-ray detector 232 that detects transmitted X-rays that have passed through the sample 3 after being irradiated with X-rays, and a second signal processing unit 242. The fluorescent X-ray detector 231 is the same as the X-ray detector 23 in Embodiment 1, and the first signal processing unit 241 is the same as the signal processing unit 24 in Embodiment 1. The fluorescent X-ray detector 231 and the transmitted X-ray detector 232 correspond to X-ray detectors. The configuration of the other parts of the X-ray analyzer 100 is the same as in Embodiment 1. 【0067】The transmission X-ray detector 232 is positioned where the transmitted X-rays that have passed through the sample 3 after being irradiated from the irradiation unit 22 are incident. The transmission X-ray detector 232 detects the incident transmitted X-rays. A second signal processing unit 242 is connected to the transmission X-ray detector 232. The second signal processing unit 242 is connected to the analysis unit 1. The second signal processing unit 242 is connected to the control unit 21. The control unit 21 controls the operation of the second signal processing unit 242. 【0068】 The transmission X-ray detector 232 has a radiation detection element made of semiconductor material. The transmission X-ray detector 232 outputs a signal of intensity corresponding to the energy of the detected transmission X-rays, and the second signal processing unit 242 receives the signal output by the transmission X-ray detector 232. The second signal processing unit 242 detects the signal value corresponding to the energy of the transmission X-rays detected by the transmission X-ray detector 232 by detecting the intensity of the received signal. The second signal processing unit 242 counts the signals for each signal value and outputs data showing the relationship between the signal value and the count to the analysis unit 1. 【0069】 The analysis unit 1 receives data showing the relationship between the signal value output by the second signal processing unit 242 and the count number. Based on the data from the second signal processing unit 242, the analysis unit 1 generates a spectrum of transmitted X-rays detected by the transmitted X-ray detector 232. The signal value corresponds to the energy of the transmitted X-rays, and the count number corresponds to the number of times the transmitted X-rays were detected, i.e., the intensity of the transmitted X-rays. Therefore, from the relationship between the signal value and the count number, a spectrum of transmitted X-rays showing the relationship between the energy and intensity of the transmitted X-rays can be obtained. 【0070】 The process of counting the signals output by the transmission X-ray detector 232 by signal value may be performed by the analysis unit 1 instead of the second signal processing unit 242. The generation of the transmission X-ray spectrum may be performed by the second signal processing unit 242. The analysis unit 1 stores data representing the fluorescence X-ray and transmission X-ray spectra. The display unit 25 displays the fluorescence X-ray and transmission X-ray spectra. The user can confirm the fluorescence X-ray and transmission X-ray spectra from the sample 3. The analysis unit 1 also performs information processing based on the fluorescence X-ray and transmission X-ray spectra. The analysis unit 1 corresponds to an information processing device. 【0071】 Figure 8 is a block diagram showing an example of the internal configuration of the analysis unit 1 according to Embodiment 2. The analysis unit 1 is connected to a first signal processing unit 241 and a second signal processing unit 242. The analysis unit 1 receives signals from the first signal processing unit 241 and the second signal processing unit 242. The configuration of the other parts of the analysis unit 1 is the same as in Embodiment 1. 【0072】 In this embodiment, we focus on transmitted X-rays and fluorescent X-rays, which have different energies. Transmitted X-rays having a predetermined energy are defined as the first X-rays having the first energy. The transmitted X-rays pass through the intermediate layer 33. Specifically, the first energy is the energy corresponding to the L absorption edge of platinum. Transmitted X-rays having the energy corresponding to the L absorption edge of platinum are called L-absorption edge transmitted X-rays of platinum. The first X-rays are L-absorption edge transmitted X-rays of platinum. Fluorescent X-rays having a lower energy than the first energy are defined as the second X-rays having the second energy. Similar to Embodiment 1, the second X-rays are the M-rays of platinum. 【0073】 The intensity of the transmitted X-rays at the L-absorption edge of platinum detected by the transmitted X-ray detector 232 is a value corresponding to the total amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3. Therefore, the total amount of platinum contained in the first layer 31 and the second layer 32 can be calculated according to the intensity of the transmitted X-rays at the L-absorption edge of platinum. Also, similar to Embodiment 1, the intensity of the M-rays of platinum detected by the fluorescent X-ray detector 231 is a value corresponding to the amount of platinum contained in the second layer 32 and the amount of platinum contained in the first layer 31. 【0074】In this embodiment as well, a calibration curve is used to individually calculate the amount of platinum contained in the first layer 31 and the second layer 32 of sample 3. The first calibration curve represents the relationship between the intensity of transmitted X-rays at the L absorption edge of platinum and the total amount of platinum contained in the first layer 31 and the second layer 32. The first calibration curve is created using a standard sample in which the amount of platinum contained in the first layer 31 and the second layer 32 is known. X-rays are irradiated onto the standard sample from the irradiation unit 22, and the transmitted X-ray detector 232 detects the transmitted X-rays that have passed through the standard sample, generating a spectrum of transmitted X-rays and obtaining the intensity of transmitted X-rays at the L absorption edge of platinum. Experiments are conducted using multiple standard samples in which the total amount of platinum contained in the first layer 31 and the second layer 32 differs, and the intensity of transmitted X-rays at the L absorption edge of platinum is obtained for each. The intensity of transmitted X-rays at the L absorption edge of platinum obtained in the experiment is taken as the experimental value of the L absorption edge. Based on multiple experimental values, a first calibration curve is created by creating an approximation formula that approximates the relationship between the total amount of platinum and the experimental values. Similar to Embodiment 1, multiple second calibration curves are created. Calibration curve data representing the first calibration curve and the multiple second calibration curves are stored in the storage unit 14. 【0075】 The X-ray analyzer 100 performs the processes S1 to S6. The roller 26 transports the sample 3, and the irradiation unit 22 irradiates the sample 3 with X-rays (S1). The fluorescent X-ray detector 231 detects fluorescent X-rays, and the transmitted X-ray detector 232 detects transmitted X-rays (S2). 【0076】 The fluorescent X-ray detector 231 outputs a signal of intensity corresponding to the energy of the fluorescent X-rays to the first signal processing unit 241. The first signal processing unit 241 counts the signals according to their respective signal values ​​and outputs data showing the relationship between the signal values ​​and the count to the analysis unit 1. The transmission X-ray detector 232 outputs a signal of intensity corresponding to the energy of the transmission X-rays to the second signal processing unit 242. The second signal processing unit 242 counts the signals according to their respective signal values ​​and outputs data showing the relationship between the signal values ​​and the count to the analysis unit 1. The analysis unit 1 receives data from the first signal processing unit 241 and the second signal processing unit 242 to obtain the X-ray detection result (S3). The calculation unit 11 generates the fluorescent X-ray spectrum and the transmission X-ray spectrum and stores the spectrum data in the storage unit 14. 【0077】The analysis unit 1 calculates the total amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3 based on the transmitted X-ray spectrum (S4). In S4, the calculation unit 11 obtains the intensity of the transmitted X-rays at the L absorption edge of platinum included in the spectrum. Based on the first calibration curve, the calculation unit 11 calculates the total amount of platinum contained in the first layer 31 and the second layer 32 according to the intensity of the transmitted X-rays at the L absorption edge of platinum. 【0078】 Next, the analysis unit 1 calculates the amount of platinum contained in the first layer 31 of the sample 3 (S5), and then calculates the amount of platinum contained in the second layer 32 (S6), similar to the first embodiment. After S6 is completed, the analysis unit 1 terminates processing, and the X-ray analyzer 100 terminates processing. Through the processes S1 to S6 described above, in the second embodiment as well, the X-ray analyzer 100 measures the amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3. The X-ray analyzer 100 continues to transport the sample 3 by the roller 26 and repeats the processes S1 to S6. 【0079】 As described above, in Embodiment 2 as well, the X-ray analyzer 100 can individually measure the amount of platinum contained in the first layer 31 and the second layer 32, respectively, contained in the sample 3. The X-ray analyzer 100 detects the transmitted X-rays that pass through the sample 3 and the fluorescent X-rays from the sample 3, and uses the intensity of the transmitted X-rays at the L absorption edge of platinum and the intensity of the M line of platinum contained in the fluorescent X-rays. The intensity of the transmitted X-rays at the L absorption edge of platinum is a value corresponding to the total amount of platinum contained in the first layer 31 and the second layer 32, so the total amount of platinum is calculated according to the intensity of the transmitted X-rays at the L absorption edge of platinum. From the detected intensity of the M line of platinum, the amount of platinum contained in the first layer 31 is calculated, and the amount of platinum contained in the second layer 32 is calculated. 【0080】In Embodiment 2, an example was shown in which the amount of platinum contained in sample 3 is calculated using a calibration curve. However, the X-ray analyzer 100 may also be configured to calculate the amount of platinum using a method other than the calibration curve. For example, the analysis unit 1 may calculate the total amount of platinum based on a function or table that represents the relationship between the total amount of platinum contained in the first layer 31 and the second layer 32 of sample 3 and the intensity of transmitted X-rays at the L absorption edge of platinum. For example, the analysis unit 1 may calculate the amount of platinum contained in the first layer 31 of sample 3 based on a function or table that represents the relationship between the amount of platinum contained in the first layer 31, the intensity of the M-rays of platinum, and the intensity of transmitted X-rays at the L absorption edge of platinum. 【0081】 The X-ray analyzer 100 may be configured to irradiate the sample 3 from the irradiation unit 22 with X-rays so that the X-rays pass through in the order of the second layer 32, the intermediate layer 33, and the first layer 31. In this configuration as well, the X-ray analyzer 100 can detect the transmitted X-rays and the platinum M-rays generated from the first layer 31, and by the same process, the amount of platinum contained in the first layer 31 and the second layer 32 of the sample 3 can be measured. 【0082】 In Embodiment 2, an example was shown where the first X-ray is a transmitted X-ray from the L absorption edge of platinum and the second X-ray is the M line of platinum. However, the first X-ray may be any other transmitted X-ray, and the second X-ray may be any other fluorescent X-ray. The first X-ray may be any transmitted X-ray. The second X-ray may be any fluorescent X-ray that does not penetrate the intermediate layer 33. 【0083】In embodiments 1 and 2, examples were shown where the specific element is platinum, but the specific element may be an element other than platinum, and the X-ray analyzer 100 may be configured to measure the amount of elements other than platinum. For example, the specific element may be iridium. The X-ray analyzer 100 detects iridium's L-line or L-absorption edge transmitted X-ray as the first X-ray, and detects iridium's M-line as the second X-ray. The specific element may be ruthenium, rhodium, or palladium. It is desirable that the X-ray analyzer 100 uses ruthenium, rhodium, or palladium's K-line or K-absorption edge transmitted X-ray as the first X-ray, and uses ruthenium, rhodium, or palladium's L-line as the second X-ray. The X-ray analyzer 100 can measure the amount of iridium, ruthenium, rhodium, or palladium contained in the first layer 31 and the second layer 32 by the same process as in embodiments 1 or 2. 【0084】 In embodiments 1 and 2, the sample 3 is shown to be transported by rollers 26, but the X-ray analyzer 100 may also be configured to measure the amount of specific elements contained in the first layer 31 and the second layer 32 of a fixed sample 3. For example, the X-ray analyzer 100 may be equipped with a sample stage, irradiate a plate-shaped sample 3 placed on the sample stage with X-rays, and detect the X-rays generated from the sample 3. 【0085】 In Embodiments 1 and 2, the X-ray detector 23, the X-ray fluorescence detector 231, and the transmission X-ray detector 232 were shown as radiation detectors having radiation detection elements made of semiconductors. The X-ray detector 23, the X-ray fluorescence detector 231, and the transmission X-ray detector 232 may also be radiation detectors having radiation detection elements other than those made of semiconductors. The X-ray detector 23, the X-ray fluorescence detector 231, and the transmission X-ray detector 232 are not limited to energy-dispersive detectors, but may be any detector capable of detecting the intensity of X-rays of a specific energy. In Embodiments 1 and 2, the horizontal axis of the X-ray spectrum was shown as energy, but the X-ray analyzer 100 may also be configured to handle spectra with values ​​other than energy, such as wavelength or wavenumber, on the horizontal axis. 【0086】The present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the claims. That is, embodiments obtained by combining technical means that have been appropriately modified within the scope of the claims are also included in the technical scope of the present invention. 【0087】 The matters described in each embodiment can be combined with each other. Furthermore, the independent and dependent claims described in the claims can be combined with each other in any combination, regardless of the form of reference. Moreover, although the claims use a form in which claims referencing two or more other claims (multi-claim form), they are not limited to this. A form in which multi-claims referencing at least one multi-claim (multi-multi-claim) may also be used. 【0088】 100 X-ray analyzer 1 Analysis unit (information processing device) 10 Recording medium 11 Calculation unit 14 Storage unit 141 Computer program 22 Irradiation unit 23 X-ray detector 231 Fluorescent X-ray detector 232 Transmission X-ray detector 26 Roller (transport unit) 3 Sample 31 First layer 32 Second layer 33 Intermediate layer

Claims

An irradiation unit irradiates a sample, which has multiple layers stacked together, including a first layer, a second layer, and an intermediate layer located between the first and second layers, with X-rays that penetrate the first layer, the intermediate layer, and the second layer. An X-ray detector that detects X-rays generated from the sample in response to X-ray irradiation, Equipped with an analysis department, The X-ray detector detects a first X-ray having a predetermined first energy that penetrates the intermediate layer, and a second X-ray which is a fluorescent X-ray and has a predetermined second energy lower than the first energy. The aforementioned analysis unit is Depending on the intensity of the first X-ray, the total amount of specific elements contained in the first and second layers is calculated. Based on the relationship between the amount of the specific element contained in the first layer, the intensity of the second X-ray, and the intensity of the first X-ray or the total amount, the amount of the specific element contained in the first layer is calculated. The amount of the specific element contained in the second layer is calculated according to the amount of the specific element contained in the first layer. An X-ray analyzer characterized by the following features. 　 The analysis unit calculates the amount of the specific element contained in the first layer based on a calibration curve or function that represents the relationship between the amount of the specific element contained in the first layer, the intensity of the second X-ray, and the intensity of the first X-ray or the total amount. The X-ray analyzer according to feature 1. 　 The first X-ray is a fluorescent X-ray, and is the L-ray of the specific element. The second X-ray is the M-ray of the specific element. The X-ray analyzer according to claim 1 or 2. 　 The first X-ray is the transmitted X-ray obtained when the X-ray irradiated from the irradiation unit passes through the sample. The first energy corresponds to the L absorption edge of the specific element, The second X-ray is the M-ray of the specific element. The X-ray analyzer according to claim 1 or 2. 　 The sample is in sheet form, and the transport unit further comprises a transport unit that transports the sample in a direction along the surface of the sample. The irradiation unit irradiates the sample with X-rays while it is being transported. An X-ray analyzer according to any one of features 1 to 4. 　 A sample comprising multiple layers, a first layer, a second layer, and an intermediate layer located between the first and second layers, is irradiated with X-rays so as to penetrate the first layer, the intermediate layer, and the second layer. A first X-ray is detected that is generated from the sample in response to X-ray irradiation, has a predetermined first energy, and penetrates the intermediate layer. A second X-ray is detected, which is a fluorescent X-ray generated from the sample in response to X-ray irradiation and has a predetermined second energy lower than the first energy. Depending on the intensity of the first X-ray, the total amount of specific elements contained in the first and second layers is calculated. Based on the relationship between the amount of the specific element contained in the first layer, the intensity of the second X-ray, and the intensity of the first X-ray or the total amount, the amount of the specific element contained in the first layer is calculated. The amount of the specific element contained in the second layer is calculated according to the amount of the specific element contained in the first layer. An X-ray analysis method characterized by the following features. 　 Equipped with a calculation unit, The aforementioned arithmetic unit, A sample comprising multiple layers, including a first layer, a second layer, and an intermediate layer located between the first and second layers, is irradiated with X-rays so as to penetrate the first layer, the intermediate layer, and the second layer, and the results of detecting the X-rays generated from the sample are obtained. The total amount of specific elements contained in the first and second layers is calculated according to the intensity of the first X-rays contained in the detected X-rays, which have a predetermined first energy and penetrate the intermediate layer. Based on the relationship between the amount of the specific element contained in the first layer, the intensity of the second X-ray contained in the detected X-ray having a predetermined second energy lower than the first energy, and the intensity of the first X-ray or the total amount, the amount of the specific element contained in the first layer is calculated. The amount of the specific element contained in the second layer is calculated according to the amount of the specific element contained in the first layer. An information processing device characterized by the following: 　 A sample comprising multiple layers, including a first layer, a second layer, and an intermediate layer located between the first and second layers, is irradiated with X-rays so as to penetrate the first layer, the intermediate layer, and the second layer, and the results of detecting the X-rays generated from the sample are obtained. The total amount of specific elements contained in the first and second layers is calculated according to the intensity of the first X-rays contained in the detected X-rays, which have a predetermined first energy and penetrate the intermediate layer. Based on the relationship between the amount of the specific element contained in the first layer, the intensity of the second X-ray contained in the detected X-ray having a predetermined second energy lower than the first energy, and the intensity of the first X-ray or the total amount, the amount of the specific element contained in the first layer is calculated. The amount of the specific element contained in the second layer is calculated according to the amount of the specific element contained in the first layer. A computer program characterized by causing a computer to perform a process.

Images