Substrate processing apparatus and door module used therein

Abstract

Disclosed are a substrate processing apparatus and a door module used therein. The door module may include a blocking door, a rotating door, and an actuator. The blocking door may be formed to block a reaction chamber defined by a housing module of the substrate processing apparatus. The rotating door may be rotatably connected to the blocking door and formed to become locked to the housing module as a result of rotating from a first relationship to a second relationship with the housing module. The actuator may be connected to the blocking door and formed to align the blocking door with the rotating door.

Description

Substrate processing device and door module used therein

[0001] The present invention relates to a substrate processing device and a door module used therein.

[0002]

[0003] Generally, various processing steps are performed on semiconductor wafers during the semiconductor device manufacturing process. Examples of such processing include oxidation, nitridation, deposition, and ion implantation. There is also a hydrogen or deuterium heat treatment process to improve the interface characteristics of the semiconductor device.

[0004] The gas used for processing is supplied to the reaction chamber of the chamber and acts on the semiconductor wafer. To maintain the gas pressure in the reaction chamber, the connection between the chamber's housing module and door module must be robust. To this end, a structure is adopted in which the components of the housing module and the door module interlock and lock together. Specifically, a part of the door module can be supported by a part of the housing module as it rotates.

[0005]

[0006] As determined by the inventors, when one of the door modules is rotatably connected to another door for locking between the door module and the housing module, a boat mounted on the other door may be unintentionally rotated relative to the one door. Due to this rotation, the alignment between the one door and the other door is compromised, and the alignment of the boat relative to the one door may also be misaligned. As a result, the operation of a transfer robot loading / unloading a substrate onto the boat may be impaired.

[0007] One objective of the present invention, devised in consideration of these problems, is to provide a substrate processing device and a door module used therein, which prevent the alignment of the boat with respect to the transfer robot from being misaligned by a configuration for locking between a housing module and a door module.

[0008] The problems that the present invention aims to solve are not limited to those mentioned above, and other unmentioned technical problems will be clearly understood by those skilled in the art from the description below.

[0009]

[0010] A substrate processing apparatus according to one aspect of the present invention for realizing the above-mentioned problem comprises: a housing module having a reaction chamber for receiving a substrate; and a door module formed to open and close the reaction chamber, wherein the door module may include: a blocking door formed to block the reaction chamber; a rotating door rotatably connected to the blocking door and formed to lock the door module to the housing module by rotating from a first relationship to a second relationship with respect to the housing module; and an actuator connected to the blocking door and formed to align the blocking door with respect to the rotating door.

[0011] Here, the housing module further includes a support projection, and the rotating door may include a locking projection that is offset from the support projection in the first relationship and supported by the support projection in the second relationship.

[0012] Here, the actuator may be formed to rotate in correspondence with the rotation of the rotary door or to be in an idling state while the rotary door rotates from the first relationship to the second relationship.

[0013] Here, the actuator may include a motor arranged along the central axis of the blocking door.

[0014] Here, the door module may further include a door base disposed between the blocking door and the rotating door and rotatably connected to the rotating door; and a support member formed to elastically support the blocking door with respect to the door base.

[0015] Here, the actuator may include a motor that connects the rotary door and the blocking door via the door base.

[0016] Here, the door module may further include a sensing unit formed to detect whether the blocking door is aligned with the rotating door.

[0017] Here, the sensing unit may include a sensing element installed in one of the blocking door and the rotating door; and a dog installed in the other of the blocking door and the rotating door and interacting with the sensing element.

[0018] Here, the door module further comprises a first bracket installed on the blocking door; and a second bracket installed on the rotating door and formed to correspond to the first bracket, and the sensing unit may be mounted on the first bracket and the second bracket.

[0019] Here, the door module may further include a stopper mounted on one of the blocking door and the rotating door, positioned to stop one of the first bracket and the second bracket when the blocking door is aligned with the rotating door.

[0020] Here, the stopper may be of the shock-absorbing type.

[0021] Here, the housing module comprises an inner housing that defines the reaction chamber; an outer housing that surrounds the inner housing; and a manifold that supports the inner housing and the outer housing, and the blocking door may contact the manifold to block the reaction chamber.

[0022] A door module for a substrate processing device according to another aspect of the present invention may include: a blocking door formed to block a reaction chamber defined by a housing module of the substrate processing device; a rotating door rotatably connected to the blocking door and formed to lock with respect to the housing module as it rotates from a first relationship to a second relationship with respect to the housing module; and an actuator connected to the blocking door and formed to align the blocking door with respect to the rotating door.

[0023] Here, the actuator may include a motor arranged along the central axis of the blocking door.

[0024] Here, the door module may further include a door base disposed between the blocking door and the rotating door and rotatably connected to the rotating door; and a support member formed to elastically support the blocking door with respect to the door base.

[0025] Here, the actuator may include a motor connecting the door base and the blocking door.

[0026] Here, the door module may further include a sensing unit formed to detect whether the blocking door is aligned with the rotating door.

[0027]

[0028] According to the substrate processing device and the door module used therein configured as described above, the door module for opening and closing a reaction chamber defined by a housing module comprises a blocking door that blocks the reaction chamber, a rotating door rotatably connected to the blocking door and locked to the housing module, and an actuator formed to align the blocking door with respect to the rotating door. Therefore, even if the blocking door is unintentionally rotated relative to the rotating door, the blocking door and the rotating door can be realigned with respect to each other by the operation of the actuator. As the blocking door and the boat mounted thereon are aligned relative to the rotating door, the alignment of the boat with respect to the transfer robot may not be compromised.

[0029] Furthermore, by using an actuator to rotate the blocking door relative to the rotating door to align the blocking door and the rotating door or maintain their alignment, particle generation during the alignment and maintenance process can be minimized.

[0030] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention.

[0031]

[0032] FIG. 1 is a conceptual diagram of a substrate processing apparatus according to one embodiment of the present invention.

[0033] FIG. 2 is a perspective view showing the door module separated from the housing module in the substrate processing device of FIG. 1.

[0034] Figure 3 is a cutaway perspective view of the door module of Figure 2.

[0035] FIG. 4 is a perspective view showing only a part of the door module of FIG. 2.

[0036] FIG. 5 is a conceptual diagram showing a substrate processing apparatus according to another embodiment of the present invention.

[0037] FIG. 6 is a cutaway perspective view showing a door module according to another embodiment of the present invention.

[0038]

[0039] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0040] The present invention is not limited to the embodiments disclosed below, but can be modified and implemented in various different forms. The embodiments provided are merely intended to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention. Accordingly, the present invention should be understood not to be limited to the embodiments disclosed below, but to include all modifications, equivalents, and substitutions that fall within the technical spirit and scope of the present invention, as well as substituting or adding the configuration of any one embodiment with the configuration of another embodiment.

[0041] The attached drawings are intended only to facilitate understanding of the embodiments disclosed in this specification, and the technical concept disclosed in this specification is not limited by the attached drawings; rather, it should be understood that they include all modifications, equivalents, and substitutions that fall within the spirit and technical scope of the invention. In the drawings, components may be depicted as being exaggeratedly large or small in size or thickness for the sake of convenience of understanding, but the scope of protection of the invention should not be interpreted restrictively as a result thereof.

[0042] The terms used in this specification are used merely to describe specific embodiments or examples and are not intended to limit the invention. Furthermore, singular expressions include plural expressions unless the context clearly indicates otherwise. Terms such as "includes" or "consists of" in this specification are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in this specification. That is, terms such as "includes" or "consists of" in this specification should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0043] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but said components are not limited by said terms. These terms are used solely for the purpose of distinguishing one component from another.

[0044] When it is stated that one component is "connected / communicated" or "connected" to another component, it should be understood that while it may be directly connected / communicated or connected to that other component, there may also be other components in between. On the other hand, when it is stated that one component is "directly connected / communicated" or "directly connected" to another component, it should be understood that there are no other components in between.

[0045] When it is stated that one component is "above" or "below" another component, it should be understood that it is not only placed directly above the other component, but that another component may also exist in between.

[0046] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0047] FIG. 1 is a conceptual diagram of a substrate processing apparatus according to one embodiment of the present invention.

[0048] Referring to the drawing, the substrate processing device (100) may include an inner chamber (110), an outer chamber (120), an air supply module (130), and an exhaust module (140).

[0049] The inner chamber (110) may form a reaction space for accommodating a substrate. The inner chamber (110) may be made of a non-metallic material, for example, quartz, to reduce concerns about contamination of the substrate. Depending on the operation of a heater (not shown) placed on the outside of the inner chamber (110), the temperature of the inner chamber (110) may reach hundreds to one thousand degrees Celsius or higher. The substrate may be, for example, a semiconductor wafer (W, see FIG. 2) mounted on a boat (113, see FIG. 2). The substrate is not limited to the wafer and may be any other base structure for making circuits. For example, the substrate may also include glass for making displays. The boat (113) may carry one or more substrates.

[0050] The outer chamber (120) can form a protective space to accommodate the inner chamber (110). Unlike the inner chamber (110), the outer chamber (120) can be made of metal because it is free from concerns about causing contamination to the substrate. The inner chamber (110) can be mounted in the outer chamber (120).

[0051] The supply module (130) is configured to supply gas to the inner chamber (110) and the outer chamber (120). The supply module (130) may have a gas supply unit (131) connected to a utility (gas supply facility) of a semiconductor factory. The gas supply unit (131) may selectively provide a reaction gas to the inner chamber (110), such as hydrogen gas (H2), deuterium gas (D2), fluorine gas (F2), ammonia gas (NH3), chlorine gas (Cl2), nitrogen gas (N2), etc. The gas supply unit (131) may provide a protective gas to the outer chamber (120), such as nitrogen gas or argon gas (Ar), which are inert gases. The reaction gas and the protective gas are each injected into the inner chamber (110) or the outer chamber (120) through a reaction gas line (133) or a protective gas line (135). The protective gas injected into the outer chamber (120) is specifically injected into the space (protective region) between the outer chamber (120) and the inner chamber (110). The reaction gas and the protective gas may simply be referred to as process gas.

[0052] The process gas may be at a pressure higher than atmospheric pressure (high pressure) in the chambers (110, 120), for example, from several atmospheres to tens of atmospheres or higher. When the pressure of the reaction gas in the inner chamber (110) is the first pressure and the pressure of the protection gas in the outer chamber (120) is the second pressure, they may be maintained within a set relationship (range). For example, the second pressure may be set to be substantially equal to or slightly higher than the first pressure. Such a pressure relationship provides the advantage of preventing the reaction gas from leaking from the inner chamber (110) and preventing the inner chamber (110) from breaking. The second pressure may also be set to be slightly lower than the first pressure, in which case a similar effect to the above can be achieved.

[0053] The exhaust module (140) is configured to exhaust the process gas. To exhaust the reaction gas from the inner chamber (110), an exhaust pipe (141) may be connected to the upper part of the inner chamber (110). To exhaust the protection gas from the outer chamber (120), an exhaust pipe (145) may also be connected to the outer chamber (120). If the exhaust pipes (141 and 145) are connected to each other, the reaction gas is diluted by the protection gas during exhaust, and its concentration is lowered.

[0054] The structure related to the locking of the outer chamber (120) will be explained with reference to FIGS. 2 to 4.

[0055] FIG. 2 is a perspective view showing the door module separated from the housing module in the substrate processing device of FIG. 1.

[0056] Referring to the drawing, the inner chamber (110) includes an inner housing (not shown) and an inner door (115). The inner housing defines the reaction chamber, and the reaction chamber may have a shape with an open bottom. The inner housing may be mounted on an outer housing (121) to be described later. The inner door (115) may have a shape that contacts the open bottom of the inner housing to close the reaction chamber. Accordingly, the inner door (115) may be referred to as a blocking door. A sealing member (not shown), for example, an O-ring, may be placed at the contact area between the inner door (115) and the inner housing. The inner door (115) may have a trough shape that is open downwards overall.

[0057] As the inner door (115) moves along the opening / closing direction (E), specifically as it descends, the reaction chamber is opened (open state, see FIG. 2). The opening / closing direction (E) is the direction in which the inner door (115) approaches or moves away from the inner housing. In a vertical chamber structure, the opening / closing direction (E) may be a direction perpendicular to the ground. The boat (113) {and wafer (W)} may descend from the reaction chamber to a load lock chamber (not shown) and be positioned corresponding to the open state. In the load lock chamber, the wafer (W) may be unloaded from the boat (113) or loaded onto the boat (113). In order for the transfer robot to approach the wafer (W) or the boat (113) at an accurate angle, the boat (113) must remain aligned with the transfer robot.

[0058] After the wafer (W) is loaded into the boat (113), the inner door (115) can be raised along the opening / closing direction (E). The inner door (115) can be raised a certain distance to come into contact with the inner housing. In that case, the reaction chamber is closed (closed state).

[0059] The outer chamber (120) may also include an outer housing (121) and an outer door. The outer housing (121) may accommodate the entire inner chamber (110). The outer housing (121) may enclose not only the inner housing but also the inner door (115). The outer door may also open and close the outer housing (121) as it moves up and down along the opening and closing direction (E). The outer door may be equipped with a door base (125) and a rotating door (127). The door base (125) is connected to allow the rotating door (127) to rotate about an axis along the opening and closing direction (E). The door base (125) may be connected to the inner door (115) by an elastically deformable support member (126). In that case, the inner door (115) may open and close the inner housing while moving up and down together with the outer door. The support member (126) can absorb the impact when the inner door (115) comes into contact with the inner housing. The expressions of the open state and the closed state can also be applied to the relationship between the outer housing (121) and the outer door.

[0060] The inner housing and the outer housing (125) may be collectively referred to as a housing module. The inner door (115) and the outer door may be collectively referred to as a door module. The door module may be spaced apart from or in contact with the housing module to open and close the reaction chamber.

[0061] The substrate processing device (100) may further include a locking module (150) for locking the outer door to the outer housing (121) in the closed state. The locking module (150) may allow the protective gas in the outer chamber (120) to be stably maintained at the second pressure. If the inner door (115) is supported on the door base (125) by a support member (126), the locking module (150) may allow the reaction gas in the inner chamber (110) to be stably maintained at the first pressure.

[0062] The locking module (150) may specifically include a rotating door (127), a support projection (153), and a locking projection (155). The rotating door (127) is described as part of the locking module (150) in that it participates in the locking operation, but it may also be understood as part of the outer door as previously described.

[0063] The rotating door (127) may be positioned generally parallel to the door base (125). The rotating door (127) may have a circular shape, for example. The rotating door (127) may be mounted on a turntable of a vertical lift (not shown) that raises the door module and rotated by said turntable. A bearing (not shown) may be positioned between the rotating door (127) and the door base (125). According to an alternative embodiment, the rotating door may have a ring shape to accommodate a portion of the door base that protrudes downward.

[0064] The support projection (153) may be a projection installed on the outer housing (121). The support projection (153) may, for example, protrude from the inner circumference of the lower region (122) of the outer housing (121). The support projection (153) may also be understood as part of the outer housing (121). The support projection (153) may be arranged in multiple numbers along the circumferential direction of the outer housing (121).

[0065] The locking projection (155) may be a projection installed on the revolving door (127). For example, the locking projection (155) may protrude from the outer surface of the revolving door (127). The locking projection (155) may also be understood as part of the revolving door (127). The locking projection (155) has a size that passes between an adjacent pair of support projections (153) when the revolving door (127) rises along the opening / closing direction (E). The locking projection (155) may be located at a higher level than the support projections (153) in the closed state. As the support projections (153) rotate in the rotation direction (R), the locking projection (155) is positioned on the support projections (153) and supported by the support projections (153) (locked state). The rotation direction (R) may be the direction in which the rotating door (127) rotates around an axis that follows the opening and closing direction (E). The level of the rotating door (127) in the locked state may be generally the same as in the closed state. Accordingly, the locked state may be understood as one of the states among the closed states.

[0066] As the rotating door (127) rises along the opening / closing direction (E) in a state where the locking projection (155) is positioned offset from the support projection (153) (first relationship), the closed state can be achieved. In the closed state, as the rotating door (127) rotates in the rotation direction (R), the locking projection (155) rotates relative to the support projection (153). Due to this rotation, the support projection (153) can support the locking projection (155) in a state corresponding to the locking projection (155) (second relationship).

[0067] In the closed state and the locked state, the inner door (115) is in contact (compressed) with the inner housing, so only the rotating door (127) can rotate when transitioning between the locked state and the closed state. Conversely, when the inner door (115) is separated from the inner housing {when the door module is raised or lowered in the load lock chamber or stopped within the load lock chamber}, the inner door (115) and the door base (125) can rotate relative to the rotating door (127) even if the rotating door (127) is constrained to the turntable. Due to the unintended rotation of the inner door (115) and the door base (125), the boat (113) mounted on the inner door (115) may also rotate. The rotated boat (113) deviates from the set position (angle) relative to the transfer robot, which may cause an obstruction during the loading / unloading of the wafer (W).

[0068] Accordingly, the substrate processing device (100) may further have a configuration for aligning the inner door (115) and the door base (125) with respect to the rotating door (127). This is explained with further reference to FIG. 3. FIG. 3 is a cutaway perspective view of the door module of FIG. 2.

[0069] Referring to the drawing (and FIG. 2), the door module may further have an actuator (129) connected to an inner door (115). Specifically, a part of the actuator (129) may be connected to the inner door (115) via a door base (125) {and a support member (126)}. Another part of the actuator (129) may be mounted on a rotating door (127) or mounted on the vertical lift.

[0070] The actuator (129) may be, for example, an electric motor. The body (129a) of the motor is a part in which a stator is built. The motor is exemplified as being mounted inside the rotating door (127), but is not limited thereto and may be mounted at the bottom or side end of the rotating door (127). When the motor is mounted inside the rotating door (127), a hollow part (127') is formed in the rotating door (127), and the body (129a) may be accommodated in the hollow part (127'). The output shaft (129b) of the motor may be mounted on the door base (125) as a part connected to the rotor. Alternatively, the output shaft may pass through the door base (125) and be connected to the inner door (115).

[0071] If the body of the motor is larger, the body may be accommodated not only in the hollow portion (127') but also in the hollow portion (not shown) of the door base (125). Even in that case, the body will be fixed to the rotating door (127). The motor may be arranged to follow the central axis of the inner door (115).

[0072] The motor may rotate in correspondence with the rotation of the revolving door (127) or be in an idling state by means of a clutch system. When the motor is operated, the inner door (115) may rotate relative to the revolving door (127). If the inner door (115) is in contact (pressed) with the inner housing, the revolving door (127) may also rotate. When the power supply to the motor is cut off, the relationship between the inner door (115) and the revolving door (127) may be maintained by the motor. Accordingly, neither the inner door (115) nor the revolving door (127) will be able to rotate relative to the other.

[0073] Consequently, the motor can rotate either the inner door (115) or the rotating door (127) relative to the other, or prevent relative rotation between them. As a result, the inner door (115) {and the boat (113)} can be aligned with or remain aligned with the rotating door (127).

[0074] As the alignment state is created or maintained by the motor, particle generation can be significantly reduced compared to a method of suppressing the rotation of the inner door (115) by mechanical contact. Since particles generated from the door module are close to the reaction chamber and are highly likely to affect the wafer (W), minimizing the generation of such particles is of great significance.

[0075] Whether the inner door (115) is aligned with the rotating door (127) can be determined through a sensing unit (161). Specifically, the sensing unit (161) may have a sensing element (162) and a dog (163). The sensing element (162) may be, for example, an optical detection means having a light-emitting part and a light-receiving part. The dog (163) may be located between the light-emitting part and the light-receiving part when the rotating door (127) and the inner door (115) are aligned.

[0076] The sensing element (162) and the dog (163) may be installed on the interior door (115) and the revolving door (127). A bracket unit (165) may be used for the installation of the sensing element (162) and the dog (163). The bracket unit (165) may have a first bracket (166) mounted on the interior door (115) and a second bracket (167) mounted on the revolving door (127). If the sensing element (162) is mounted on the first bracket (166), the dog (163) may be mounted on the second bracket (167). Alternatively, the sensing element (162) and the dog (163) may be mounted on the bracket unit (165) in the opposite manner to the above. If necessary, the first bracket (166) may be installed on the door base (125) rather than the interior door (115). In addition, depending on the shape of the inner door (115), the door base (125), and the rotating door (127), the detection unit (161) may be installed directly on the inner door (115), the door base (125), and the rotating door (127) without a bracket unit (165).

[0077] In order to create or maintain the alignment state of the inner door (115) and the rotating door (127), the control module (not shown) may stop the operation of the motor or maintain the already stopped state when the sensing element (162) receives a signal that it has detected the dog (163).

[0078] In an alternative embodiment, the actuator (129) may have a form other than the motor mentioned above, specifically an electric motor. For example, the actuator (129) may be a motor operated by pneumatic or hydraulic pressure. Additionally, a linear driving means, rather than a rotary driving means such as the motor, may also be combined with the link to rotate the inner door (115). The linear driving means may be, for example, a hydraulic / pneumatic cylinder, an electric cylinder, a linear motor (and linear guide), a ball spline, or a combination thereof.

[0079] In an alternative other embodiment, the sensing unit (161) and the bracket unit (165) may not be adopted. In that case, the actuator (129) may serve to maintain the alignment of the inner door (115) with respect to the rotating door (127). Alternatively, based on a signal indicating that the transfer robot failed to properly grasp the wafer (W), the actuator (129) may rotate the inner door (115) to align it with the boat (113).

[0080] In addition to the alignment by the motor mentioned above, a stopper may be additionally employed for the above alignment. This will be explained with further reference to FIG. 4. FIG. 4 is a perspective view showing only a part of the door module of FIG. 2.

[0081] Referring to the present drawing (and FIG. 3), the stopper (168) may be installed to correspond to the bracket unit (165) in order to maintain the alignment state. Specifically, when a mounting block (168') is installed on the rotating door (127), the stopper (168) may be mounted on the mounting block (168'). The stopper (168) may be positioned to stop the rotation of the first bracket (166) in the alignment state. Alternatively, the stopper (168) may be installed on the inner door (115) or the door base (125) to stop the rotation of the second bracket (167).

[0082] The stopper (168) may be shock-absorbing. Specifically, the body (168a) of the stopper (168) may generally have a cylindrical shape. An elastic body that supports the head (168b) may be placed in the receiving space of the body (168a). The head (168b) may be inserted into the body (168a) while pressing the elastic body. The impact resulting from the first bracket (166) colliding with the head (168b) is absorbed by the elastic body, thereby minimizing the generation of particles caused by the collision.

[0083] When the stopper (168) comes into contact with the first bracket (166), the other stopper (169) may be spaced apart from the other first bracket (166'). The other stopper (169) can stop the rotation of the other first bracket (166') when the rotating door (127) rotates from the closed state to the locked state.

[0084] In the above, the sensing unit (161), bracket unit (165, see FIG. 3 above), and stopper (168, 169) may also be understood as part of the door module in relation to the inner door (115), door base (125), and rotating door (127).

[0085] FIG. 5 is a conceptual diagram showing a substrate processing apparatus according to another embodiment of the present invention.

[0086] Referring to the drawing (and FIG. 2), the substrate processing device (200) is generally the same as the substrate processing device (100) according to the preceding embodiment, but differs in the configuration of the housing module.

[0087] The housing module (210) may further include a manifold (219) in addition to the inner housing (211) and the outer housing (215).

[0088] The inner housing (211) defines the reaction chamber, and the outer housing (215) surrounds the inner housing (211), which is the same as in the previous embodiment. A wafer (W, see FIG. 2) and the reaction gas are supplied to the reaction chamber, and the heater may be placed inside the outer housing (215).

[0089] The manifold (219) can support the inner housing (211) and the outer housing (215). The closed space defined by the inner housing (211), the outer housing (215), and the manifold (219) corresponds to the protection zone, and the protection gas can be filled into the closed space. The manifold (219) may have a hollow space communicating with the reaction chamber, and the hollow space may be understood as part of the reaction chamber. Through the manifold (219), the reaction gas can be injected into the reaction chamber and the protection gas can be injected into the closed space.

[0090] In the process of transitioning from the open state to the closed state and further to the locked state, the blocking door (231) of the door module (230) may come into contact with the bottom surface of the manifold (219). The blocking door (231) may be supported against the door base (233) by a support member (235). The blocking door (231) is exemplified as a disc shape, but may also have the same shape as the blocking door (115, see FIG. 3) described above.

[0091] The rotating door (237) of the locking module (250) can be rotatably connected to the door base (233). The rotating door (237) and the door base (233) can be connected to each other by an actuator (239). The actuator (239) can rotate the door base (233) relative to the rotating door (237) to align the door base (233) and the rotating door (237) relative to each other or maintain the alignment.

[0092] In this embodiment as well, the sensing unit (261), the bracket unit (265), and the stopper may be adopted.

[0093] FIG. 6 is a cutaway perspective view showing a door module according to another embodiment of the present invention.

[0094] Referring to the drawing, unlike the door module (230, see FIG. 5) according to the previous embodiment, the door module (330) may be directly connected to the blocking door (331) so that the rotating door (337) can rotate. The door base (233) and support member (235, see FIG. 5) of the previous embodiment are excluded.

[0095] The actuator (339) can connect the rotating door (337) and the blocking door (331). The first bracket (366) of the bracket unit (365) can be installed on the blocking door (331), and the second bracket (367) can be installed on the rotating door (337). The detection unit (361) can be installed on the bracket unit (365) in the same way as before.

[0096]

[0097] The present invention has industrial applicability in the field of manufacturing substrate processing devices and door modules used therein.

Claims

1. A housing module having a reaction chamber for accommodating a substrate; and It includes a door module formed to open and close the above reaction chamber, and The above door module is, A blocking door formed to block the above reaction chamber; A rotating door rotatably connected to the above-mentioned blocking door and formed to lock the door module to the housing module by rotating from a first relationship to a second relationship with respect to the housing module; and A substrate processing device comprising an actuator connected to the above-mentioned blocking door and formed to align the blocking door with respect to the above-mentioned rotating door.

2. In Paragraph 1, The above housing module is, It further includes a support projection, The above-mentioned rotating door is, A substrate processing device comprising a locking projection that is offset from the support projection in the first relationship and supported by the support projection in the second relationship.

3. In Paragraph 1, The above actuator is, A substrate processing device formed such that the above-mentioned rotary door rotates in a rotational operation corresponding to the rotation of the above-mentioned rotary door or is in an idling state while rotating from the above-mentioned first relationship to the above-mentioned second relationship.

4. In Paragraph 1, The above actuator is, A substrate processing device comprising a motor arranged along the central axis of the above-mentioned blocking door.

5. In Paragraph 1, The above door module is, A door base disposed between the blocking door and the rotary door and rotatably connected to the rotary door; and A substrate processing device further comprising a support member formed to elastically support the blocking door with respect to the door base.

6. In Paragraph 5, The above actuator is, A substrate processing device comprising a motor that connects the rotary door and the blocking door via the door base.

7. In Paragraph 1, The above door module is, A substrate processing device further comprising a sensing unit formed to detect whether the blocking door is aligned with the rotating door.

8. In Paragraph 7, The above-mentioned sensing unit is, A sensing element installed in one of the above-mentioned blocking door and the above-mentioned rotating door; and A substrate processing device comprising a dog installed on the other of the blocking door and the rotating door, and interacting with the sensing element.

9. In Paragraph 7, The above door module is, A first bracket installed on the above-mentioned blocking door; and It further includes a second bracket installed on the rotating door and formed to correspond to the first bracket, and The above-mentioned sensing unit is, A substrate processing device mounted on the first bracket and the second bracket.

10. In Paragraph 7, The above door module is, A first bracket installed on the above-mentioned blocking door; and It further includes a second bracket installed on the rotating door and formed to correspond to the first bracket, and The above door module is, A substrate processing device further comprising a stopper mounted on one of the blocking door and the rotating door, positioned to stop one of the first bracket and the second bracket when the blocking door is aligned with the rotating door.

11. In Paragraph 10, The above stopper is, Shock-absorbing substrate processing device.

12. In Paragraph 1, The above housing module is, An inner housing that defines the above reaction chamber; An outer housing surrounding the inner housing; and It includes a manifold that supports the inner housing and the outer housing, and The above-mentioned blocking door is, A substrate processing device that contacts the manifold to block the above reaction chamber.

13. A blocking door formed to block the reaction chamber defined by the housing module of the substrate processing device; A rotating door rotatably connected to the above-mentioned blocking door and formed to be locked to the housing module as it rotates from a first relationship to a second relationship with respect to the housing module; and A door module for a substrate processing device comprising an actuator connected to the blocking door and formed to align the blocking door with respect to the rotating door.

14. In Paragraph 13, The above actuator is, A door module for a substrate processing device comprising a motor arranged along the central axis of the above-mentioned blocking door.

15. In Paragraph 13, The above door module is, A door base disposed between the blocking door and the rotary door and rotatably connected to the rotary door; and A door module for a substrate processing device, further comprising a support member formed to elastically support the blocking door with respect to the door base.

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