Vacuum pump
The vacuum pump system addresses noise interference by employing a simple synchronous detection technique with a specific carrier frequency ratio, improving levitation control stability and reducing motor-induced noise.
WO2026133004A1PCT designated stage Publication Date: 2026-06-25EDWARDS JAPAN
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- EDWARDS JAPAN
- Filing Date
- 2025-12-11
- Publication Date
- 2026-06-25
AI Technical Summary
Technical Problem
Existing vacuum pump systems face noise interference from motor switching, which complicates synchronous detection and increases vibration and noise in levitation control due to frequency restraints.
Method used
A vacuum pump configuration utilizing a simple synchronous detection technique with a rotating body, motor, electromagnets, displacement sensors, power converter, motor driver, and demodulation circuit, where the carrier frequency of PWM control is four times the modulation frequency of the displacement sensor.
Benefits of technology
Reduces noise from motor switching in displacement sensors, enhancing the stability and efficiency of levitation control.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure IB2025062709_25062026_PF_FP_ABST
Abstract
To reduce noise due to switching of a motor. A vacuum pump includes: a rotating body; a motor that rotatably drives the rotating body; a radial electromagnet that generates an electromagnetic force in a radial direction on the rotating body; displacement sensors, each of which has a plurality of sensor magnetic poles made of coils and measures a displacement of the rotating body based on a change in inductances of the coils; a power converter that converts an input DC voltage into an AC voltage which is applied to the motor; a motor driver that performs PWM control in cooperation with the power converter; an oscillator that outputs an AC voltage as a modulated input signal to the displacement sensor; and a demodulation circuit that demodulates an output signal from the displacement sensor by a synchronous detection technique. A carrier frequency in the PWM control is four times a modulation frequency of the displacement sensor.
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